ATE476638T1 - Elektrisch entkoppelter mikrogefertigter kreisel - Google Patents

Elektrisch entkoppelter mikrogefertigter kreisel

Info

Publication number
ATE476638T1
ATE476638T1 AT00960094T AT00960094T ATE476638T1 AT E476638 T1 ATE476638 T1 AT E476638T1 AT 00960094 T AT00960094 T AT 00960094T AT 00960094 T AT00960094 T AT 00960094T AT E476638 T1 ATE476638 T1 AT E476638T1
Authority
AT
Austria
Prior art keywords
gyroscope
gyro
manufactured
electrically disconnected
drive
Prior art date
Application number
AT00960094T
Other languages
English (en)
Inventor
Scott Adams
James Groves
Donato Cardarelli
Raymond Carroll
Charles Dauwalter
Original Assignee
Kionix Inc
Millisensor Systems And Actuat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kionix Inc, Millisensor Systems And Actuat filed Critical Kionix Inc
Application granted granted Critical
Publication of ATE476638T1 publication Critical patent/ATE476638T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Paints Or Removers (AREA)
AT00960094T 1999-09-17 2000-09-13 Elektrisch entkoppelter mikrogefertigter kreisel ATE476638T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15463199P 1999-09-17 1999-09-17
PCT/US2000/025029 WO2001020259A1 (en) 1999-09-17 2000-09-13 Electrically decoupled micromachined gyroscope

Publications (1)

Publication Number Publication Date
ATE476638T1 true ATE476638T1 (de) 2010-08-15

Family

ID=22552111

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00960094T ATE476638T1 (de) 1999-09-17 2000-09-13 Elektrisch entkoppelter mikrogefertigter kreisel

Country Status (8)

Country Link
US (1) US6626039B1 (de)
EP (1) EP1212585B1 (de)
JP (1) JP2003509670A (de)
KR (1) KR20020085877A (de)
AT (1) ATE476638T1 (de)
AU (1) AU7130800A (de)
DE (1) DE60044782D1 (de)
WO (1) WO2001020259A1 (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6513380B2 (en) 2001-06-19 2003-02-04 Microsensors, Inc. MEMS sensor with single central anchor and motion-limiting connection geometry
US6715352B2 (en) * 2001-06-26 2004-04-06 Microsensors, Inc. Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
KR100431004B1 (ko) 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
KR100476562B1 (ko) * 2002-12-24 2005-03-17 삼성전기주식회사 수평형 및 튜닝 포크형 진동식 마이크로 자이로스코프
KR100503472B1 (ko) * 2003-03-06 2005-07-25 삼성전자주식회사 회전형 자이로스코프
JP2004279384A (ja) * 2003-03-19 2004-10-07 Sumitomo Precision Prod Co Ltd 振動子の製造方法、振動子及びフォトマスク
KR100693347B1 (ko) * 2003-10-13 2007-03-09 삼성전자주식회사 디지털 회전형 각속도 검출장치
JP2005195574A (ja) 2003-10-20 2005-07-21 Sony Corp 角速度検出装置、角速度検出装置による角速度検出方法および角速度検出装置の製造方法
EP1617178B1 (de) 2004-07-12 2017-04-12 STMicroelectronics Srl Mikroelektromechanische Struktur mit elektrisch isolierten Gebieten und Verfahren zu ihrer Herstellung
RU2272994C1 (ru) * 2004-10-01 2006-03-27 Федеральное государственное унитарное предприятие Центральный научно-исследовательский институт "Электроприбор" Микромеханический гироскоп
RU2274833C1 (ru) * 2004-10-01 2006-04-20 Федеральное государственное унитарное предприятие Центральный научно-исследовательский институт "Электроприбор" Устройство преобразования сигналов микромеханического гироскопа вибрационного типа
FI116543B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
RU2282151C1 (ru) * 2005-03-10 2006-08-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Микромеханический гироскоп
RU2282150C1 (ru) * 2005-03-10 2006-08-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Устройство управления гребенчатым двигателем микромеханического датчика
US20060266118A1 (en) * 2005-03-29 2006-11-30 Denison Timothy J Capacitive sensor with damping
RU2282152C1 (ru) * 2005-03-30 2006-08-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Устройство преобразования сигналов микромеханического гироскопа вибрационного типа
RU2293338C1 (ru) * 2005-09-14 2007-02-10 Государственное образовательное учреждение высшего профессионального образования "Таганрогский государственный радиотехнический университет" (ТРТУ) Интегральный микромеханический гироскоп-акселерометр
RU2296301C1 (ru) * 2005-09-23 2007-03-27 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Способ измерения перемещения подвижной массы микромеханического гироскопа по оси вторичных колебаний и устройство для реализации данного способа
RU2289789C1 (ru) * 2005-09-23 2006-12-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Устройство измерения перемещения подвижной массы микромеханического гироскопа по оси первичных колебаний
RU2296302C1 (ru) * 2005-11-15 2007-03-27 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Микромеханический вибрационный гироскоп
EP1832841B1 (de) * 2006-03-10 2015-12-30 STMicroelectronics Srl Mikroelektromechanische integrierte Sensorstruktur mit Rotationsantriebsbewegung
KR101012248B1 (ko) 2006-04-28 2011-02-08 파나소닉 전공 주식회사 정전용량식 센서
JP4600344B2 (ja) * 2006-04-28 2010-12-15 パナソニック電工株式会社 静電容量式センサ
CN100458366C (zh) * 2006-06-08 2009-02-04 上海交通大学 主动悬浮永磁环形转子异步感应微机械陀螺陀螺仪
KR100790883B1 (ko) * 2006-07-11 2008-01-03 삼성전자주식회사 액츄에이터의 구동 장치
RU2315265C1 (ru) * 2006-09-08 2008-01-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Микромеханический гироскоп
DE102006046772A1 (de) * 2006-09-29 2008-04-03 Siemens Ag Anordnung zur Messung einer Drehrate mit einem Vibrationssensor
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
EP1959234A1 (de) 2007-02-13 2008-08-20 STMicroelectronics S.r.l. Mikroelektromechanischer Gyroskop mit Ausgleich der nichtharmonischer Nebenwellen der kapazitiven Kopplung und der Steuermethode eines mikroelektromechanisches Gyroskops
JP5105949B2 (ja) * 2007-04-27 2012-12-26 キヤノン株式会社 センサ
RU2347190C1 (ru) * 2007-07-17 2009-02-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Микромеханический гироскоп
US8042394B2 (en) * 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with rotary driving motion
US20110185829A1 (en) * 2008-08-06 2011-08-04 Pioneer Corporation Rotational vibration gyro
WO2010067793A1 (ja) * 2008-12-09 2010-06-17 株式会社村田製作所 振動ジャイロ素子及びその製造方法
IT1392553B1 (it) * 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
DE102009002701B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
DE102009002702B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
CN102278981B (zh) * 2010-06-11 2014-01-08 张家港丽恒光微电子科技有限公司 陀螺仪及其制造方法
US8513746B2 (en) 2010-10-15 2013-08-20 Rohm Co., Ltd. MEMS sensor and method for producing MEMS sensor, and MEMS package
RU2447403C1 (ru) * 2010-12-07 2012-04-10 Яков Анатольевич Некрасов Микромеханический гироскоп
US8319254B2 (en) 2011-02-14 2012-11-27 Kionix, Inc. Micro-electromechanical system devices
KR101044453B1 (ko) * 2011-02-23 2011-06-27 주식회사 한서 용이한 체결 및 우수한 방열구조를 갖는 엘이디 천정 매입등
DE102011007168B4 (de) * 2011-04-11 2019-09-19 Hanking Electronics, Ltd. Mikro-elektro-mechanischer Sensor sowie Verfahren zur Justierung und zum Betrieb des Sensors
WO2013051060A1 (ja) * 2011-10-05 2013-04-11 パイオニア株式会社 回転振動ジャイロ
JP5894703B2 (ja) * 2012-03-28 2016-03-30 コリア ベーシック サイエンス インスティテュート 復調装置、これを用いた復調集積素子及び変復調集積素子
KR101303671B1 (ko) * 2012-03-28 2013-09-04 한국기초과학지원연구원 스핀 소자를 이용한 복조 장치
KR101331917B1 (ko) * 2012-11-22 2013-11-25 한국기초과학지원연구원 복조장치, 이를 이용한 복조 집적소자 및 변복조 집적소자
WO2015106270A1 (en) * 2014-01-13 2015-07-16 Qualtre, Inc. Method and apparatus for decoupling environmental and modal dependencies in inertial measurement devices
CN104296738B (zh) * 2014-10-31 2017-02-08 中国人民解放军国防科学技术大学 用于微机械陀螺的驱动稳定性提升方法及装置
EP3034997B1 (de) * 2014-12-18 2020-12-16 RISE Research Institutes of Sweden AB MEMS-Kreisel
WO2016097127A1 (en) * 2014-12-18 2016-06-23 Acreo Swedish Ict Ab A quadrature compensation method for mems gyroscopes and a gyroscope sensor
RU2582483C1 (ru) * 2015-02-09 2016-04-27 Федеральное государственное унитарное предприятие "Ростовский-на-Дону научно-исследовательский институт радиосвязи" (ФГУП "РНИИРС") Модифицированный микроакустомеханический гироскоп
US10030976B2 (en) 2015-05-13 2018-07-24 Kionix, Inc. Phase-based measurement and control of a gyroscope
US11656077B2 (en) 2019-01-31 2023-05-23 Analog Devices, Inc. Pseudo-extensional mode MEMS ring gyroscope
CN109900262B (zh) * 2019-04-08 2021-08-10 瑞声科技(新加坡)有限公司 陀螺仪
US11279614B2 (en) 2019-06-28 2022-03-22 Analog Devices, Inc. Low-parasitic capacitance MEMS inertial sensors and related methods
US11527376B2 (en) 2019-07-25 2022-12-13 Kionix, Inc. Micro-electromechanical system devices and methods
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
EP3879229B1 (de) * 2020-03-09 2023-06-14 Murata Manufacturing Co., Ltd. Empfindlichkeitsausgleich für mems-gyroskop
CN117782046A (zh) * 2022-09-21 2024-03-29 南京理工大学 一种外置电极的大电容、高q值mems环形陀螺仪

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5195371A (en) * 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
EP0601120B1 (de) 1991-08-29 1998-12-16 Bei Electronics, Inc. Drehmessfühler
US5349855A (en) 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
JP3421340B2 (ja) 1992-10-05 2003-06-30 ベイ エレクトロニクス インコーポレイテッド 強誘電薄膜進行波回転センサ
US5555765A (en) 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5691470A (en) * 1993-08-03 1997-11-25 Milli Sensor Systems And Actuators, Inc. Pendulous oscillating gyroscopic accelerometer
US5712426A (en) * 1993-08-03 1998-01-27 Milli Sensory Systems And Actuators, Inc. Pendulous oscillating gyroscopic and accelerometer multisensor and amplitude oscillating gyroscope
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5659195A (en) 1995-06-08 1997-08-19 The Regents Of The University Of California CMOS integrated microsensor with a precision measurement circuit
JPH09196682A (ja) 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JP3409565B2 (ja) 1996-03-01 2003-05-26 日産自動車株式会社 角速度センサの自己診断方法
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US5915275A (en) * 1996-06-27 1999-06-22 Milli Sensor And Actuator Systems, Inc. Oscillating gyroscope
US5955668A (en) 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5998906A (en) 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof
JP3796991B2 (ja) * 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
US6305222B1 (en) * 1999-05-27 2001-10-23 Delphi Technologies, Inc. Road vibration compensated angular rate sensor

Also Published As

Publication number Publication date
AU7130800A (en) 2001-04-17
EP1212585A1 (de) 2002-06-12
US6626039B1 (en) 2003-09-30
JP2003509670A (ja) 2003-03-11
WO2001020259A1 (en) 2001-03-22
EP1212585B1 (de) 2010-08-04
DE60044782D1 (de) 2010-09-16
KR20020085877A (ko) 2002-11-16

Similar Documents

Publication Publication Date Title
ATE476638T1 (de) Elektrisch entkoppelter mikrogefertigter kreisel
CA2034663C (en) Method and apparatus for semiconductor chip transducer
Geiger et al. A new silicon rate gyroscope
US5894090A (en) Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
Greiff et al. Silicon monolithic micromechanical gyroscope
US6189381B1 (en) Angular rate sensor made from a structural wafer of single crystal silicon
Cho et al. Fused-Silica Micro Birdbath Resonator Gyroscope ($\mu $-BRG)
Maenaka MEMS inertial sensors and their applications
Endean et al. Near-navigation grade tuning fork MEMS gyroscope
Su et al. Silicon MEMS disk resonator gyroscope with an integrated CMOS analog front-end
RU2155964C1 (ru) Компенсационный маятниковый акселерометр
Giner et al. MEMS gyroscope with concentrated springs suspensions demonstrating single digit frequency split and temperature robustness
US6487907B1 (en) Microgyroscope with integrated vibratory element
CA2636682A1 (en) Disc resonator integral inertial measurement unit
ATE248350T1 (de) Mikrogefertigter beschleunigungs-und koriolissensor
TW200515605A (en) Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
GB0001775D0 (en) Improvements relating to angular rate sensor devices
ATE329271T1 (de) Kombinierte struktur mit verbesserter fähigkeit zur schockaufnahme und stress isolation für einen verbesserten mikromechanischen silizium beschleunigungsaufnehmer
GB0122256D0 (en) Vibratory gyroscopic rate sensor
US5465620A (en) Micromechanical vibratory gyroscope sensor array
Zaman et al. The resonating star gyroscope: A novel multiple-shell silicon gyroscope with sub-5 deg/hr allan deviation bias instability
Parajuli et al. A silicon MEMS quatrefoil suspension gyroscope
HU223540B1 (hu) Eljárás rezgő szerkezetű giroszkóp előállítására
JP2007514947A (ja) 微細加工振動構造及び関連するマイクロ・ジャイロスコープ
JP4871065B2 (ja) 折り曲げられた円筒サスペンションを有するリング共振器ジャイロスコープ

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1212585

Country of ref document: EP