ATE248437T1 - Verfahren zur leistungsverbesserung von hochtemperatur-supraleitenden dünnschichten - Google Patents

Verfahren zur leistungsverbesserung von hochtemperatur-supraleitenden dünnschichten

Info

Publication number
ATE248437T1
ATE248437T1 AT97102065T AT97102065T ATE248437T1 AT E248437 T1 ATE248437 T1 AT E248437T1 AT 97102065 T AT97102065 T AT 97102065T AT 97102065 T AT97102065 T AT 97102065T AT E248437 T1 ATE248437 T1 AT E248437T1
Authority
AT
Austria
Prior art keywords
thin film
temperature superconducting
superconducting thin
improving
performance
Prior art date
Application number
AT97102065T
Other languages
English (en)
Inventor
Philip Shek Wah Pang
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Application granted granted Critical
Publication of ATE248437T1 publication Critical patent/ATE248437T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H10N60/0688—Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/728—Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/775—High tc, above 30 k, superconducting material
    • Y10S505/776—Containing transition metal oxide with rare earth or alkaline earth
    • Y10S505/783—Thallium-, e.g. Tl2CaBaCu308

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
AT97102065T 1996-02-22 1997-02-10 Verfahren zur leistungsverbesserung von hochtemperatur-supraleitenden dünnschichten ATE248437T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/603,838 US5688383A (en) 1996-02-22 1996-02-22 Method for improving the performance of high temperature superconducting thin film wafers

Publications (1)

Publication Number Publication Date
ATE248437T1 true ATE248437T1 (de) 2003-09-15

Family

ID=24417126

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97102065T ATE248437T1 (de) 1996-02-22 1997-02-10 Verfahren zur leistungsverbesserung von hochtemperatur-supraleitenden dünnschichten

Country Status (6)

Country Link
US (1) US5688383A (de)
EP (1) EP0791968B1 (de)
JP (1) JPH1022536A (de)
CN (1) CN1169234C (de)
AT (1) ATE248437T1 (de)
DE (1) DE69724308T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2625280B2 (ja) * 1991-05-30 1997-07-02 住友電気工業株式会社 酸化物超電導材料の製造方法
US8114245B2 (en) * 1999-11-26 2012-02-14 Tadahiro Ohmi Plasma etching device
EP1182685A1 (de) * 2000-08-09 2002-02-27 Toyo Technologies, Inc. Plasmapoliergerät mit streifendem Ionenbeschusswinkel
CN1512602A (zh) * 2002-12-30 2004-07-14 �廪��ѧ 制作高温超导器件的表面改性方法
CN1317777C (zh) * 2003-08-29 2007-05-23 南开大学 铊系高温超导薄膜材料及其制备方法
CN100338693C (zh) * 2004-08-25 2007-09-19 北京有色金属研究总院 单畴钇钡铜氧超导环的制备方法
US8735326B2 (en) * 2010-05-19 2014-05-27 Northrop Grumman Systems Corporation Methods of forming superconductor circuits
CN120187269B (zh) * 2025-02-13 2025-11-21 中国科学院上海微系统与信息技术研究所 一种基于离子辐照的超导薄膜及其器件热学性能调控方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230275A (ja) * 1988-03-10 1989-09-13 Mitsubishi Metal Corp 超電導薄膜の形成法
US4966885A (en) * 1989-08-25 1990-10-30 At&T Bell Laboratories Method of producing a device comprising a metal oxide superconductor layer
JPH0494179A (ja) * 1990-08-10 1992-03-26 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導薄膜デバイスの作製方法
DE69123415T2 (de) * 1990-09-06 1997-05-22 Sumitomo Electric Industries Supraleitendes Bauelement mit verringerter Dicke der supraleitenden Oxydschicht und dessen Herstellungsverfahren
US5091048A (en) * 1990-09-17 1992-02-25 National Semiconductor Corp. Ion milling to obtain planarization
JP2932650B2 (ja) * 1990-09-17 1999-08-09 松下電器産業株式会社 微細構造物の製造方法
US5260251A (en) * 1991-06-06 1993-11-09 E. I. Du Pont De Nemours And Company Process for making superconducting Tl-Pb-Sr-Ca-Cu oxide films
JPH05175562A (ja) * 1991-12-25 1993-07-13 Fujitsu Ltd ジョセフソン集積回路装置の製造方法
US5270294A (en) * 1991-12-27 1993-12-14 The United States Of America As Represented By The United States Department Of Energy Free-standing oxide superconducting articles

Also Published As

Publication number Publication date
DE69724308T2 (de) 2004-06-24
US5688383A (en) 1997-11-18
CN1169234C (zh) 2004-09-29
JPH1022536A (ja) 1998-01-23
CN1171635A (zh) 1998-01-28
EP0791968A1 (de) 1997-08-27
DE69724308D1 (de) 2003-10-02
EP0791968B1 (de) 2003-08-27

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Legal Events

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