ATE253537T1 - Siliziumkarbid-verbundwerkstoff, verfahren zu seiner herstellung und wärmeableitungsanordnung, die diesen verwendet - Google Patents
Siliziumkarbid-verbundwerkstoff, verfahren zu seiner herstellung und wärmeableitungsanordnung, die diesen verwendetInfo
- Publication number
- ATE253537T1 ATE253537T1 AT99122404T AT99122404T ATE253537T1 AT E253537 T1 ATE253537 T1 AT E253537T1 AT 99122404 T AT99122404 T AT 99122404T AT 99122404 T AT99122404 T AT 99122404T AT E253537 T1 ATE253537 T1 AT E253537T1
- Authority
- AT
- Austria
- Prior art keywords
- silicon carbide
- production
- heat dissipation
- composite material
- same
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/515—Other specific metals
- C04B41/5155—Aluminium
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
- C22C32/0052—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only carbides
- C22C32/0063—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only carbides based on SiC
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/20—Arrangements for cooling
- H10W40/25—Arrangements for cooling characterised by their materials
- H10W40/257—Arrangements for cooling characterised by their materials having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh or porous structures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12007—Component of composite having metal continuous phase interengaged with nonmetal continuous phase
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249955—Void-containing component partially impregnated with adjacent component
- Y10T428/249956—Void-containing component is inorganic
- Y10T428/249957—Inorganic impregnant
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249971—Preformed hollow element-containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249971—Preformed hollow element-containing
- Y10T428/249974—Metal- or silicon-containing element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249978—Voids specified as micro
- Y10T428/24998—Composite has more than two layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249986—Void-containing component contains also a solid fiber or solid particle
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249987—With nonvoid component of specified composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249987—With nonvoid component of specified composition
- Y10T428/24999—Inorganic
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32205498 | 1998-11-12 | ||
| JP36048298 | 1998-12-18 | ||
| JP28542999A JP3468358B2 (ja) | 1998-11-12 | 1999-10-06 | 炭化珪素質複合体及びその製造方法とそれを用いた放熱部品 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE253537T1 true ATE253537T1 (de) | 2003-11-15 |
Family
ID=27337174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99122404T ATE253537T1 (de) | 1998-11-12 | 1999-11-10 | Siliziumkarbid-verbundwerkstoff, verfahren zu seiner herstellung und wärmeableitungsanordnung, die diesen verwendet |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6447894B1 (de) |
| EP (1) | EP1000915B1 (de) |
| JP (1) | JP3468358B2 (de) |
| KR (1) | KR100637635B1 (de) |
| AT (1) | ATE253537T1 (de) |
| DE (1) | DE69912564T2 (de) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3980262B2 (ja) * | 2000-10-31 | 2007-09-26 | 日本碍子株式会社 | SiC質熱処理用治具 |
| EP1363325B1 (de) * | 2001-02-22 | 2013-02-20 | NGK Insulators, Ltd. | Glied für elektronische schaltung, verfahren zu seiner herstellung |
| JP2003034587A (ja) * | 2001-07-25 | 2003-02-07 | Ryoka Macs Corp | 炭素基複合材料及び塑性加工性改良方法 |
| GB2395360B (en) * | 2001-10-26 | 2005-03-16 | Ngk Insulators Ltd | Heat sink material |
| JP2003201528A (ja) | 2001-10-26 | 2003-07-18 | Ngk Insulators Ltd | ヒートシンク材 |
| KR100541729B1 (ko) * | 2003-06-23 | 2006-01-10 | 삼성전자주식회사 | 반도체소자 검사장치 |
| US20050049350A1 (en) * | 2003-08-25 | 2005-03-03 | Sandeep Tonapi | Thin bond-line silicone adhesive composition and method for preparing the same |
| JP4543279B2 (ja) * | 2004-03-31 | 2010-09-15 | Dowaメタルテック株式会社 | アルミニウム接合部材の製造方法 |
| KR100562280B1 (ko) * | 2004-06-15 | 2006-03-23 | 주식회사모나미 | 필기구 |
| JP4761157B2 (ja) * | 2004-09-14 | 2011-08-31 | 電気化学工業株式会社 | アルミニウム−炭化珪素質複合体 |
| US7622803B2 (en) | 2005-08-30 | 2009-11-24 | Cree, Inc. | Heat sink assembly and related methods for semiconductor vacuum processing systems |
| WO2007080701A1 (ja) * | 2006-01-13 | 2007-07-19 | Denki Kagaku Kogyo Kabushiki Kaisha | アルミニウム-炭化珪素質複合体及びそれを用いた放熱部品 |
| WO2007125878A1 (ja) * | 2006-04-26 | 2007-11-08 | Denki Kagaku Kogyo Kabushiki Kaisha | アルミニウム-炭化珪素質複合体及びそれを用いた放熱部品 |
| CN101438401B (zh) * | 2006-05-09 | 2013-08-28 | 电气化学工业株式会社 | 铝-碳化硅质复合体及其加工方法 |
| JP4732430B2 (ja) * | 2007-12-19 | 2011-07-27 | 電気化学工業株式会社 | アルミニウム−セラミックス複合体及びその製造方法 |
| WO2010007974A1 (ja) * | 2008-07-17 | 2010-01-21 | 電気化学工業株式会社 | アルミニウム-ダイヤモンド系複合体の製造方法 |
| CN102170986B (zh) * | 2008-10-03 | 2015-03-11 | 住友电气工业株式会社 | 复合构件 |
| US8883564B2 (en) | 2009-02-12 | 2014-11-11 | Denki Kagaku Kogyo Kabushiki Kaisha | Substrate comprising aluminum/graphite composite, heat dissipation part comprising same, and LED luminescent member |
| US9387532B2 (en) * | 2009-02-13 | 2016-07-12 | Denka Company Limited | Composite substrate for LED light emitting element, method of production of same, and LED light emitting element |
| US8546842B2 (en) | 2009-07-17 | 2013-10-01 | Denki Kagaku Kogyo Kabushiki Kaisha | LED chip assembly, LED package, and manufacturing method of LED package |
| CN102484188B (zh) * | 2009-07-31 | 2015-02-18 | 电气化学工业株式会社 | Led搭载用晶片及其制造方法、以及使用该晶片的led搭载结构体 |
| EP2554689B1 (de) * | 2010-04-02 | 2020-05-27 | Sumitomo Electric Industries, Ltd. | Verbundelement auf magnesiumbasis, wärmeableitungselement und halbleitervorrichtung damit |
| JP2012119671A (ja) * | 2010-11-11 | 2012-06-21 | Kitagawa Ind Co Ltd | 電子回路及びヒートシンク |
| JP5662834B2 (ja) * | 2011-02-22 | 2015-02-04 | 電気化学工業株式会社 | アルミニウム−炭化珪素質複合体の製造方法 |
| CN102306694A (zh) * | 2011-05-24 | 2012-01-04 | 常州碳元科技发展有限公司 | 用于led封装的嵌套散热支架、led灯及制造方法 |
| JP2013237597A (ja) * | 2012-05-17 | 2013-11-28 | Hitachi Metals Ltd | プリフォーム、それを用いた金属−セラミックス複合材及びその製造方法 |
| CN103433491B (zh) * | 2013-09-18 | 2015-05-13 | 湖南航天工业总公司 | 一种碳化硅igbt基板骨架真空压力渗铝装置及双面覆铝方法 |
| WO2015115649A1 (ja) | 2014-02-03 | 2015-08-06 | 電気化学工業株式会社 | 炭化珪素質複合体及びその製造方法並びにそれを用いた放熱部品 |
| US10233125B2 (en) | 2014-03-18 | 2019-03-19 | Denka Company Limited | Aluminium-silicon carbide composite, and power-module base plate |
| KR101512765B1 (ko) * | 2014-04-07 | 2015-04-16 | 주식회사 티앤머티리얼스 | 알루미늄 탄화규소질 복합체 성형장치 및 이를 이용한 제조방법 |
| JPWO2016002943A1 (ja) | 2014-07-04 | 2017-06-08 | デンカ株式会社 | 放熱部品及びその製造方法 |
| WO2016013648A1 (ja) | 2014-07-24 | 2016-01-28 | 電気化学工業株式会社 | 複合体及びその製造方法 |
| KR101579912B1 (ko) * | 2015-05-28 | 2015-12-28 | 주식회사 가남 | 그라파이트-알루미늄 복합체의 제조방법 및 이의 용도 |
| KR101688880B1 (ko) | 2016-03-08 | 2016-12-23 | 주식회사 가남 | 태양광 인버터용 고효율 방열소재 및 이의 제조방법 |
| CN110366777B (zh) | 2017-03-29 | 2024-04-26 | 三菱综合材料株式会社 | 带散热片的绝缘电路基板的制造方法 |
| JP6911805B2 (ja) | 2018-03-27 | 2021-07-28 | 三菱マテリアル株式会社 | ヒートシンク付き絶縁回路基板の製造方法 |
| EP3823017B1 (de) * | 2018-07-13 | 2022-12-07 | Denka Company Limited | Verbundwerkstoff auf der basis von metall-siliciumcarbid und verfahren zur herstellung eines verbundwerkstoffes auf der basis von metall-siliciumcarbid |
| EP3890007B1 (de) | 2018-11-29 | 2022-12-28 | Denka Company Limited | Wärmeableitungsteil |
| JP7116689B2 (ja) | 2019-01-30 | 2022-08-10 | デンカ株式会社 | 放熱部材およびその製造方法 |
| JP7116690B2 (ja) | 2019-01-30 | 2022-08-10 | デンカ株式会社 | 放熱部材およびその製造方法 |
| KR102124766B1 (ko) | 2019-12-31 | 2020-06-19 | (주)삼양컴텍 | 플라즈마 처리 장치 및 그 제조방법 |
| KR102234171B1 (ko) | 2019-12-31 | 2021-03-31 | (주)삼양컴텍 | 저저항 실리콘카바이드계 복합체의 제조방법 |
| US12219739B2 (en) | 2020-03-31 | 2025-02-04 | Denka Company Limited | Element-mounted board and method for manufacturing element-mounted board |
| WO2022153891A1 (ja) * | 2021-01-12 | 2022-07-21 | デンカ株式会社 | 積層体、及びその製造方法、並びに、パワーモジュール |
| CN112919923B (zh) * | 2021-01-21 | 2022-07-12 | 周煜 | 金属基复合材料及其制备方法和应用 |
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| JPH08204071A (ja) | 1995-01-27 | 1996-08-09 | Toshiba Corp | 半導体装置 |
| JP3180677B2 (ja) | 1996-08-22 | 2001-06-25 | 三菱マテリアル株式会社 | ヒートシンク付セラミック回路基板 |
| JPH11130568A (ja) | 1997-10-24 | 1999-05-18 | Denki Kagaku Kogyo Kk | 複合体とそれを用いたヒートシンク |
| JPH11157964A (ja) * | 1997-11-26 | 1999-06-15 | Denki Kagaku Kogyo Kk | 板状複合体とそれを用いた放熱部品 |
| DE19840583A1 (de) * | 1998-09-05 | 2000-03-09 | Bayer Ag | Mikrokapsel-Formulierungen |
| KR100368789B1 (ko) * | 2000-02-07 | 2003-01-24 | 한국과학기술연구원 | 전계흡수형 소자의 단면 반사율 측정 방법 |
-
1999
- 1999-10-06 JP JP28542999A patent/JP3468358B2/ja not_active Expired - Lifetime
- 1999-11-08 KR KR1019990049209A patent/KR100637635B1/ko not_active Expired - Fee Related
- 1999-11-10 AT AT99122404T patent/ATE253537T1/de active
- 1999-11-10 EP EP99122404A patent/EP1000915B1/de not_active Expired - Lifetime
- 1999-11-10 DE DE1999612564 patent/DE69912564T2/de not_active Expired - Lifetime
- 1999-11-12 US US09/432,568 patent/US6447894B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US6447894B1 (en) | 2002-09-10 |
| EP1000915A3 (de) | 2000-09-06 |
| EP1000915B1 (de) | 2003-11-05 |
| KR100637635B1 (ko) | 2006-10-23 |
| JP3468358B2 (ja) | 2003-11-17 |
| EP1000915A2 (de) | 2000-05-17 |
| DE69912564T2 (de) | 2004-05-13 |
| KR20000035298A (ko) | 2000-06-26 |
| JP2000281468A (ja) | 2000-10-10 |
| DE69912564D1 (de) | 2003-12-11 |
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