ATE256915T1 - Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter - Google Patents
Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalterInfo
- Publication number
- ATE256915T1 ATE256915T1 AT94922053T AT94922053T ATE256915T1 AT E256915 T1 ATE256915 T1 AT E256915T1 AT 94922053 T AT94922053 T AT 94922053T AT 94922053 T AT94922053 T AT 94922053T AT E256915 T1 ATE256915 T1 AT E256915T1
- Authority
- AT
- Austria
- Prior art keywords
- housing
- holder
- disk holder
- semiconductor wafer
- semiconductor disk
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
- H10P72/0618—Apparatus for monitoring, sorting, marking, testing or measuring using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1916—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by sealing arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
- H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
- Y10S414/138—Wafers positioned vertically within cassette
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Measuring Fluid Pressure (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/209,227 US5472086A (en) | 1994-03-11 | 1994-03-11 | Enclosed sealable purgible semiconductor wafer holder |
| PCT/US1994/007357 WO1995024348A1 (en) | 1994-03-11 | 1994-06-29 | Enclosed sealable purgible semiconductor wafer holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE256915T1 true ATE256915T1 (de) | 2004-01-15 |
Family
ID=22777887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT94922053T ATE256915T1 (de) | 1994-03-11 | 1994-06-29 | Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US5472086A (de) |
| EP (1) | EP0749393B1 (de) |
| JP (1) | JP3202991B2 (de) |
| AT (1) | ATE256915T1 (de) |
| DE (1) | DE69433428T2 (de) |
| WO (1) | WO1995024348A1 (de) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
| US6833035B1 (en) * | 1994-04-28 | 2004-12-21 | Semitool, Inc. | Semiconductor processing system with wafer container docking and loading station |
| JP3257328B2 (ja) * | 1995-03-16 | 2002-02-18 | 株式会社日立製作所 | プラズマ処理装置及びプラズマ処理方法 |
| KR960043084A (ko) * | 1995-05-22 | 1996-12-23 | 웨인 피이 베일리 | 단일 구조의 퍼드 및 카세트 조립체 |
| US5833726A (en) * | 1995-05-26 | 1998-11-10 | Extraction System, Inc. | Storing substrates between process steps within a processing facility |
| USD383898S (en) * | 1995-10-13 | 1997-09-23 | Empak, Inc. | Combination shipping and transport cassette |
| US5944194A (en) * | 1995-10-13 | 1999-08-31 | Empak, Inc. | 300 mm microenvironment pod with door on side |
| USD387903S (en) * | 1995-10-13 | 1997-12-23 | Empak, Inc. | Shipping container |
| USD378873S (en) * | 1995-10-13 | 1997-04-22 | Empak, Inc. | 300 mm microenvironment pod with door on side |
| US5873468A (en) * | 1995-11-16 | 1999-02-23 | Sumitomo Sitix Corporation | Thin-plate supporting container with filter means |
| US6723174B2 (en) | 1996-03-26 | 2004-04-20 | Semitool, Inc. | Automated semiconductor processing system |
| US6942738B1 (en) | 1996-07-15 | 2005-09-13 | Semitool, Inc. | Automated semiconductor processing system |
| US6003674A (en) * | 1996-05-13 | 1999-12-21 | Brooks; Ray Gene | Method and apparatus for packing contaminant-sensitive articles and resulting package |
| US5724748A (en) * | 1996-07-24 | 1998-03-10 | Brooks; Ray G. | Apparatus for packaging contaminant-sensitive articles and resulting package |
| US5921397A (en) * | 1996-12-10 | 1999-07-13 | Empak, Inc. | Disk cassette |
| US5833067A (en) * | 1997-03-10 | 1998-11-10 | Seagate Technologies, Inc. | Disk caddy and lid with barrier means |
| US6010008A (en) * | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
| US6736268B2 (en) | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
| US6076585A (en) * | 1998-03-02 | 2000-06-20 | Motorola, Inc. | Method of manufacturing a semiconductor device and apparatus therefor |
| JP3656701B2 (ja) * | 1998-03-23 | 2005-06-08 | 東京エレクトロン株式会社 | 処理装置 |
| JP3370279B2 (ja) * | 1998-07-07 | 2003-01-27 | 信越ポリマー株式会社 | 精密基板収納容器 |
| US6216874B1 (en) * | 1998-07-10 | 2001-04-17 | Fluoroware, Inc. | Wafer carrier having a low tolerance build-up |
| US6095335A (en) * | 1998-07-10 | 2000-08-01 | H-Square Corporation | Wafer support device having a retrofit to provide size convertibility |
| US6267245B1 (en) | 1998-07-10 | 2001-07-31 | Fluoroware, Inc. | Cushioned wafer container |
| US6464081B2 (en) * | 1999-01-06 | 2002-10-15 | Entegris, Inc. | Door guide for a wafer container |
| AUPP914099A0 (en) | 1999-03-12 | 1999-04-01 | Kyrwood, William Stephen | Golf club support |
| US6168364B1 (en) * | 1999-04-19 | 2001-01-02 | Tdk Corporation | Vacuum clean box, clean transfer method and apparatus therefor |
| US6561894B1 (en) | 1999-04-19 | 2003-05-13 | Tdk Corporation | Clean box, clean transfer method and apparatus therefor |
| JP3556519B2 (ja) * | 1999-04-30 | 2004-08-18 | 信越ポリマー株式会社 | 基板収納容器の識別構造及び基板収納容器の識別方法 |
| JP3226511B2 (ja) * | 1999-06-23 | 2001-11-05 | ティーディーケイ株式会社 | 容器および容器の封止方法 |
| AU140278S (en) | 1999-08-09 | 2000-04-03 | Golf club support | |
| JP3998386B2 (ja) * | 2000-01-26 | 2007-10-24 | 三菱電機株式会社 | 液晶表示装置の製造装置および液晶表示装置の製造方法 |
| AU2001268656A1 (en) * | 2000-07-07 | 2002-01-21 | Semitool, Inc. | Automated processing system |
| EP1184724A1 (de) | 2000-08-29 | 2002-03-06 | Motorola, Inc. | Elektronische Vorrichtung für einen lithographischen Maskenbehälter und Verfahren unter Verwendung derselben |
| CN1128470C (zh) | 2000-09-01 | 2003-11-19 | 陈正明 | 晶片减薄后与载体分离的工艺方法及其装置 |
| USD442415S1 (en) | 2000-11-03 | 2001-05-22 | Wan-Sheng Hsu | Disk storage box |
| JP4128811B2 (ja) * | 2001-08-10 | 2008-07-30 | 株式会社トプコン | 表面検査装置 |
| US6866150B2 (en) * | 2001-11-15 | 2005-03-15 | The Mason Box Company, Inc. | Containment unit for protecting medical slides during transit |
| EP1458634A1 (de) * | 2001-11-27 | 2004-09-22 | Entegris, Inc. | Wafer-träger mit frontöffnung und erdleitung |
| USD479399S1 (en) | 2001-12-03 | 2003-09-09 | Ebara Corporation | Container for transporting substrates |
| US7175026B2 (en) | 2002-05-03 | 2007-02-13 | Maxtor Corporation | Memory disk shipping container with improved contaminant control |
| US6719142B1 (en) * | 2002-07-16 | 2004-04-13 | Ion Systems, Inc. | Apparatus and method for measuring static charge on wafers, disks, substrates, masks, and flat panel displays |
| US6781205B1 (en) * | 2002-10-11 | 2004-08-24 | Ion Systems, Inc. | Electrostatic charge measurement on semiconductor wafers |
| EP1601013B1 (de) * | 2003-03-04 | 2010-12-15 | Shin-Etsu Polymer Co., Ltd. | Präzisionssubstratlagerbehälter |
| US7201276B2 (en) * | 2003-11-07 | 2007-04-10 | Entegris, Inc. | Front opening substrate container with bottom plate |
| US7252199B2 (en) * | 2004-03-26 | 2007-08-07 | Entegris, Inc. | Disk cassette system |
| US7584851B2 (en) * | 2004-10-08 | 2009-09-08 | Seagate Technology Llc | Container for disk drives |
| US7596456B2 (en) * | 2005-11-18 | 2009-09-29 | Texas Instruments Incorporated | Method and apparatus for cassette integrity testing using a wafer sorter |
| US7810639B2 (en) * | 2006-02-10 | 2010-10-12 | Seagate Technology Llc | Container for consumer electronics |
| KR100788005B1 (ko) * | 2006-04-27 | 2007-12-21 | 에스에스알 엠에프지 코포레이션 | 박막 디스크용 카세트 뚜껑 개폐장치 |
| US20080019811A1 (en) * | 2006-07-11 | 2008-01-24 | Michael Krolak | Method and apparatus for vertical wafer transport, buffer and storage |
| EP2166566A4 (de) * | 2007-07-09 | 2010-12-29 | Kondoh Ind Ltd | Einrichtung zum eindringen von trockenluft oder stickstoffgas in einen halbleiterwafer-lagerbehälter und die einrichtung verwendende vorrichtung zur entfernung von statischer wafer-ladung |
| US20100020440A1 (en) * | 2008-07-25 | 2010-01-28 | Seagate Technology Llc | Low profile substrate shipper |
| TWI346638B (en) * | 2008-12-26 | 2011-08-11 | Gudeng Prec Industral Co Ltd | A purging valve and a wafer container having the purging valve |
| TW201302573A (zh) | 2011-05-03 | 2013-01-16 | 安堤格里斯公司 | 具有微粒屏蔽之晶圓容器 |
| US20120288355A1 (en) * | 2011-05-11 | 2012-11-15 | Ming-Teng Hsieh | Method for storing wafers |
| JP5888288B2 (ja) * | 2013-06-26 | 2016-03-16 | 株式会社ダイフク | 物品保管設備の検査装置 |
| US10566226B2 (en) * | 2014-11-11 | 2020-02-18 | Applied Materials, Inc. | Multi-cassette carrying case |
| JP6451453B2 (ja) * | 2015-03-31 | 2019-01-16 | Tdk株式会社 | ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法 |
| JP2025518008A (ja) | 2022-05-27 | 2025-06-12 | インテグリス・インコーポレーテッド | フィルタモジュール |
| WO2025031577A1 (de) * | 2023-08-08 | 2025-02-13 | Hermos Ag | Anzeige- und identifikationseinheit für transportbehältnisse für wafer oder fotomasken in halbleiterfabriken |
Family Cites Families (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3926305A (en) * | 1973-07-12 | 1975-12-16 | Fluoroware Inc | Wafer basket |
| US3918756A (en) * | 1973-12-26 | 1975-11-11 | Fluoroware Inc | Wafer holder |
| US3939973A (en) * | 1974-01-14 | 1976-02-24 | Fluoroware, Inc. | Wafer basket and easily attached and detached carrier for same |
| US3923156A (en) * | 1974-04-29 | 1975-12-02 | Fluoroware Inc | Wafer basket |
| US3913749A (en) * | 1974-08-12 | 1975-10-21 | Fluoroware Systems Corp | Wafer basket transfer apparatus |
| US3961877A (en) * | 1974-09-11 | 1976-06-08 | Fluoroware, Inc. | Reinforced wafer basket |
| US3923191A (en) * | 1974-09-11 | 1975-12-02 | Fluoroware Inc | Wafer basket and handle |
| US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
| US4061228A (en) * | 1976-12-20 | 1977-12-06 | Fluoroware, Inc. | Shipping container for substrates |
| US4248346A (en) * | 1979-01-29 | 1981-02-03 | Fluoroware, Inc. | Shipping container for semiconductor substrate wafers |
| US4471716A (en) * | 1981-01-15 | 1984-09-18 | Fluoroware, Inc. | Wafer carrier |
| US4450960A (en) * | 1982-08-30 | 1984-05-29 | Empak Inc. | Package |
| US4520925A (en) * | 1983-08-09 | 1985-06-04 | Empak Inc. | Package |
| US4557382A (en) * | 1983-08-17 | 1985-12-10 | Empak Inc. | Disk package |
| US4532970A (en) * | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
| US4543389A (en) * | 1984-04-10 | 1985-09-24 | Shell Oil Company | Copolymerization catalyst and process for polymerizing impact resistant ethylene-propylene polymers |
| DE3413837A1 (de) * | 1984-04-12 | 1985-10-17 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verpackung fuer halbleiterscheiben |
| US4588086A (en) * | 1984-06-07 | 1986-05-13 | Coe Thomas U | Substrate and media carrier |
| USRE33361E (en) * | 1984-06-07 | 1990-10-02 | Substrate and media carrier | |
| US4815912A (en) * | 1984-12-24 | 1989-03-28 | Asyst Technologies, Inc. | Box door actuated retainer |
| IT1181778B (it) * | 1985-05-07 | 1987-09-30 | Dynamit Nobel Silicon Spa | Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio |
| US4966519A (en) * | 1985-10-24 | 1990-10-30 | Texas Instruments Incorporated | Integrated circuit processing system |
| US4739882A (en) * | 1986-02-13 | 1988-04-26 | Asyst Technologies | Container having disposable liners |
| US4721207A (en) * | 1986-04-28 | 1988-01-26 | Tensho Electric Industrial Co., Ltd. | Hard disk container |
| US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
| US4817799A (en) * | 1986-10-06 | 1989-04-04 | Empak, Inc. | Disk package |
| US4747488A (en) * | 1986-12-01 | 1988-05-31 | Shoji Kikuchi | Hard disk container |
| US4752007A (en) * | 1986-12-11 | 1988-06-21 | Fluoroware, Inc. | Disk shipper |
| US4718552A (en) * | 1986-12-11 | 1988-01-12 | Fluoroware, Inc. | Disk shipper and transfer tray |
| US4827110A (en) * | 1987-06-11 | 1989-05-02 | Fluoroware, Inc. | Method and apparatus for monitoring the location of wafer disks |
| US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
| US4966284A (en) * | 1987-07-07 | 1990-10-30 | Empak, Inc. | Substrate package |
| US4793488A (en) * | 1987-07-07 | 1988-12-27 | Empak, Inc. | Package for semiconductor wafers |
| US5025926A (en) * | 1987-07-07 | 1991-06-25 | Empak, Inc. | Package |
| US4930634A (en) * | 1987-09-29 | 1990-06-05 | Fluoroware, Inc. | Carrier for flat panel displays |
| US4817795A (en) * | 1988-03-04 | 1989-04-04 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
| US4880116A (en) * | 1988-03-04 | 1989-11-14 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
| US5024329A (en) * | 1988-04-22 | 1991-06-18 | Siemens Aktiengesellschaft | Lockable container for transporting and for storing semiconductor wafers |
| US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
| US4833306A (en) * | 1988-05-18 | 1989-05-23 | Fluoroware, Inc. | Bar code remote recognition system for process carriers of wafer disks |
| US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
| US4995430A (en) * | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
| US5217053A (en) * | 1990-02-05 | 1993-06-08 | Texas Instruments Incorporated | Vented vacuum semiconductor wafer cassette |
| US5137063A (en) * | 1990-02-05 | 1992-08-11 | Texas Instruments Incorporated | Vented vacuum semiconductor wafer cassette |
| US5111936A (en) * | 1990-11-30 | 1992-05-12 | Fluoroware | Wafer carrier |
| US5207324A (en) * | 1991-03-08 | 1993-05-04 | Fluoroware, Inc. | Wafer cushion for shippers |
| US5253755A (en) * | 1991-03-20 | 1993-10-19 | Fluoroware, Inc. | Cushioned cover for disk container |
| US5184723A (en) * | 1991-05-14 | 1993-02-09 | Fluoroware, Inc. | Single wafer robotic package |
| US5228568A (en) * | 1991-08-30 | 1993-07-20 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer basket |
| US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
| US5255783A (en) * | 1991-12-20 | 1993-10-26 | Fluoroware, Inc. | Evacuated wafer container |
| US5255797A (en) * | 1992-02-26 | 1993-10-26 | Fluoroware, Inc. | Wafer carrier with wafer retaining cushions |
| US5295522A (en) * | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Gas purge system for isolation enclosure for contamination sensitive items |
| US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
-
1994
- 1994-03-11 US US08/209,227 patent/US5472086A/en not_active Expired - Lifetime
- 1994-06-29 WO PCT/US1994/007357 patent/WO1995024348A1/en not_active Ceased
- 1994-06-29 DE DE69433428T patent/DE69433428T2/de not_active Expired - Lifetime
- 1994-06-29 JP JP52342795A patent/JP3202991B2/ja not_active Expired - Lifetime
- 1994-06-29 EP EP94922053A patent/EP0749393B1/de not_active Expired - Lifetime
- 1994-06-29 AT AT94922053T patent/ATE256915T1/de not_active IP Right Cessation
-
1996
- 1996-09-11 US US08/712,140 patent/US5755332A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69433428T2 (de) | 2004-10-07 |
| EP0749393A4 (de) | 1997-07-02 |
| WO1995024348A1 (en) | 1995-09-14 |
| US5755332A (en) | 1998-05-26 |
| EP0749393A1 (de) | 1996-12-27 |
| US5472086A (en) | 1995-12-05 |
| JP3202991B2 (ja) | 2001-08-27 |
| JPH09507726A (ja) | 1997-08-05 |
| EP0749393B1 (de) | 2003-12-17 |
| DE69433428D1 (de) | 2004-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |