ATE257911T1 - Verbundvakuumpumpen - Google Patents

Verbundvakuumpumpen

Info

Publication number
ATE257911T1
ATE257911T1 AT01301475T AT01301475T ATE257911T1 AT E257911 T1 ATE257911 T1 AT E257911T1 AT 01301475 T AT01301475 T AT 01301475T AT 01301475 T AT01301475 T AT 01301475T AT E257911 T1 ATE257911 T1 AT E257911T1
Authority
AT
Austria
Prior art keywords
vacuum pumps
composite vacuum
roots
occupies
partition
Prior art date
Application number
AT01301475T
Other languages
English (en)
Inventor
Nigel Paul Schofield
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE257911T1 publication Critical patent/ATE257911T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Stored Programmes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Rotary Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT01301475T 2000-02-24 2001-02-20 Verbundvakuumpumpen ATE257911T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0004404.0A GB0004404D0 (en) 2000-02-24 2000-02-24 Improvements in vacuum pumps

Publications (1)

Publication Number Publication Date
ATE257911T1 true ATE257911T1 (de) 2004-01-15

Family

ID=9886339

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01301475T ATE257911T1 (de) 2000-02-24 2001-02-20 Verbundvakuumpumpen

Country Status (6)

Country Link
US (1) US6379135B2 (de)
EP (1) EP1130264B1 (de)
JP (1) JP2001304161A (de)
AT (1) ATE257911T1 (de)
DE (1) DE60101752T2 (de)
GB (1) GB0004404D0 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
KR100591079B1 (ko) 2004-10-01 2006-06-19 (주)엘오티베큠 루츠로터와 스크류로터 복합건식 진공펌프
WO2006099104A2 (en) * 2005-03-10 2006-09-21 Alan Notis Pressure sealed tapered screw pump/motor
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
TWI438342B (zh) 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
DE102010014884A1 (de) * 2010-04-14 2011-10-20 Baratti Engineering Gmbh Vakuumpumpe
DE202014005279U1 (de) 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
US9760435B2 (en) * 2015-10-14 2017-09-12 Intel Corporation Apparatus and method for generating common locator bits to locate a device or column error during error correction operations
CN105422454B (zh) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 真空抽气系统和真空抽气方法
CN114264344B (zh) * 2021-11-24 2023-08-25 无锡欧百仪表科技有限公司 一种罗茨流量计外部防护装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB384355A (en) * 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of
US3180559A (en) * 1962-04-11 1965-04-27 John R Boyd Mechanical vacuum pump
SU1437575A1 (ru) * 1987-03-17 1988-11-15 И.М.Чесноков и А.И.Чеснаков Двухвинтовой растворонасос
US5215501A (en) * 1988-03-24 1993-06-01 Ngk Insulators, Ltd. Hysteresis magnet coupling for roots type pumps
KR900003511A (ko) * 1988-08-29 1990-03-26 양기와 로터리 피스톤 엔진
SE465527B (sv) * 1990-02-09 1991-09-23 Svenska Rotor Maskiner Ab Skruvrotormaskin med organ foer axialbalansering
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
US6050797A (en) * 1998-05-18 2000-04-18 Carrier Corporation Screw compressor with balanced thrust
DE69929749T2 (de) 1998-06-17 2006-08-24 The Boc Group Plc, Windlesham Schraubenpumpe
US6129534A (en) * 1999-06-16 2000-10-10 The Boc Group Plc Vacuum pumps

Also Published As

Publication number Publication date
EP1130264B1 (de) 2004-01-14
GB0004404D0 (en) 2000-04-12
EP1130264A3 (de) 2002-08-14
JP2001304161A (ja) 2001-10-31
DE60101752D1 (de) 2004-02-19
US6379135B2 (en) 2002-04-30
US20010051101A1 (en) 2001-12-13
DE60101752T2 (de) 2004-09-23
EP1130264A2 (de) 2001-09-05

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties