ATE267403T1 - Gerät und verfahren zur temperaturkontrolle von integrierten schaltungen während der prüfung - Google Patents
Gerät und verfahren zur temperaturkontrolle von integrierten schaltungen während der prüfungInfo
- Publication number
- ATE267403T1 ATE267403T1 AT00947340T AT00947340T ATE267403T1 AT E267403 T1 ATE267403 T1 AT E267403T1 AT 00947340 T AT00947340 T AT 00947340T AT 00947340 T AT00947340 T AT 00947340T AT E267403 T1 ATE267403 T1 AT E267403T1
- Authority
- AT
- Austria
- Prior art keywords
- temperature control
- during testing
- integrated circuits
- devices
- circuits during
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Control Of Temperature (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14393299P | 1999-07-15 | 1999-07-15 | |
| PCT/US2000/019161 WO2001006273A1 (en) | 1999-07-15 | 2000-07-14 | Apparatus and method for temperature control of ic device during test |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE267403T1 true ATE267403T1 (de) | 2004-06-15 |
Family
ID=22506325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT00947340T ATE267403T1 (de) | 1999-07-15 | 2000-07-14 | Gerät und verfahren zur temperaturkontrolle von integrierten schaltungen während der prüfung |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1196790B1 (de) |
| AT (1) | ATE267403T1 (de) |
| AU (1) | AU6096900A (de) |
| DE (1) | DE60010890T2 (de) |
| WO (1) | WO2001006273A1 (de) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6448992B1 (en) * | 2001-11-07 | 2002-09-10 | Advanced Micro Devices, Inc. | Voltage programmable power dissipater |
| JP4659328B2 (ja) * | 2002-10-21 | 2011-03-30 | 東京エレクトロン株式会社 | 被検査体を温度制御するプローブ装置 |
| DE102005001163B3 (de) | 2005-01-10 | 2006-05-18 | Erich Reitinger | Verfahren und Vorrichtung zum Testen von Halbleiterwafern mittels einer temperierbaren Aufspanneinrichtung |
| DE102005013926B4 (de) * | 2005-03-26 | 2011-06-22 | Jürgen Dipl.-Ing. 98693 Kröhnert | Vorrichtung und Verfahren zur Temperaturregelung eines Temperiergutes |
| US9335080B2 (en) * | 2011-10-17 | 2016-05-10 | Temptronic Corporation | Temperature system having an impurity filter |
| US20170261547A1 (en) * | 2016-03-08 | 2017-09-14 | Temptronic Corporation | Temperature Forcing System and Method with Conductive Thermal Probes |
| JP7266481B2 (ja) | 2019-07-19 | 2023-04-28 | 東京エレクトロン株式会社 | 温度制御装置、温度制御方法、および検査装置 |
| DE102021101240A1 (de) | 2021-01-21 | 2022-07-21 | TDK Europe GmbH | Testvorrichtung und Verfahren zum Betrieb der Testvorrichtung |
| IL311648A (en) * | 2021-09-21 | 2024-05-01 | Aem Singapore Pte Ltd | Thermal test device and apparatus for thermal test patterns of an integrated circuit |
| CN114814543A (zh) * | 2022-04-22 | 2022-07-29 | 上海晶岳电子有限公司 | 一种电源管理芯片抗温度冲击测试系统及其测试方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
| US4870355A (en) * | 1988-01-11 | 1989-09-26 | Thermonics Incorporated | Thermal fixture for testing integrated circuits |
| US5210485A (en) * | 1991-07-26 | 1993-05-11 | International Business Machines Corporation | Probe for wafer burn-in test system |
| US5420520A (en) * | 1993-06-11 | 1995-05-30 | International Business Machines Corporation | Method and apparatus for testing of integrated circuit chips |
| DE19700839C2 (de) * | 1997-01-13 | 2000-06-08 | Siemens Ag | Chuckanordnung |
| US5911897A (en) * | 1997-01-13 | 1999-06-15 | Micro Control Company | Temperature control for high power burn-in for integrated circuits |
-
2000
- 2000-07-14 EP EP00947340A patent/EP1196790B1/de not_active Expired - Lifetime
- 2000-07-14 WO PCT/US2000/019161 patent/WO2001006273A1/en not_active Ceased
- 2000-07-14 AU AU60969/00A patent/AU6096900A/en not_active Abandoned
- 2000-07-14 AT AT00947340T patent/ATE267403T1/de not_active IP Right Cessation
- 2000-07-14 DE DE60010890T patent/DE60010890T2/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE60010890T2 (de) | 2005-05-19 |
| AU6096900A (en) | 2001-02-05 |
| EP1196790B1 (de) | 2004-05-19 |
| DE60010890D1 (de) | 2004-06-24 |
| EP1196790A1 (de) | 2002-04-17 |
| WO2001006273A1 (en) | 2001-01-25 |
| WO2001006273A9 (en) | 2002-07-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |