ATE272846T1 - Testkopf-manipulator - Google Patents

Testkopf-manipulator

Info

Publication number
ATE272846T1
ATE272846T1 AT00908262T AT00908262T ATE272846T1 AT E272846 T1 ATE272846 T1 AT E272846T1 AT 00908262 T AT00908262 T AT 00908262T AT 00908262 T AT00908262 T AT 00908262T AT E272846 T1 ATE272846 T1 AT E272846T1
Authority
AT
Austria
Prior art keywords
test head
vertical axis
head manipulator
load
manipulator
Prior art date
Application number
AT00908262T
Other languages
English (en)
Inventor
Alyn R Holt
Christopher L West
Brian R Moore
Richard C Powell Jr
Marvin I Weilerstein
Original Assignee
Intest Ip Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Ip Corp filed Critical Intest Ip Corp
Application granted granted Critical
Publication of ATE272846T1 publication Critical patent/ATE272846T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Magnetic Heads (AREA)
  • Die Bonding (AREA)
  • Telephone Function (AREA)
  • Manipulator (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
AT00908262T 1999-01-13 2000-01-12 Testkopf-manipulator ATE272846T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11566099P 1999-01-13 1999-01-13
PCT/US2000/000704 WO2000041536A2 (en) 1999-01-13 2000-01-12 Test head manipulator

Publications (1)

Publication Number Publication Date
ATE272846T1 true ATE272846T1 (de) 2004-08-15

Family

ID=22362709

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00908262T ATE272846T1 (de) 1999-01-13 2000-01-12 Testkopf-manipulator

Country Status (10)

Country Link
EP (1) EP1145018B1 (de)
JP (1) JP2002534283A (de)
KR (1) KR100709827B1 (de)
CN (1) CN1312483C (de)
AT (1) ATE272846T1 (de)
AU (1) AU2964400A (de)
DE (1) DE60012692T2 (de)
MY (2) MY125342A (de)
TW (1) TW536626B (de)
WO (1) WO2000041536A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1712923B1 (de) 2000-09-22 2013-05-15 inTEST Corporation Vorrichtung und Verfahren zum Ausbalancieren und Bereitstellung eines konformen Bereichs für einen Prüfkopf
WO2003005045A1 (de) * 2001-07-05 2003-01-16 Heigl, Cornelia Handhabungsvorrichtung, insbesondere zum positionieren eines testkopfs an einer prüfeinrichtung
AU2003226352A1 (en) 2002-04-15 2003-11-03 Intest Ip Corporation Test head positioner system
AU2002368253A1 (en) * 2002-10-02 2004-04-23 Intest Ip Corp. Test head positioning apparatus
JP2007533956A (ja) * 2003-08-06 2007-11-22 インテスト コーポレイション テストヘッド位置決めシステム
CN105992955B (zh) 2013-12-03 2019-06-18 株式会社幸福日本 Ic处理装置
KR102653657B1 (ko) 2016-02-12 2024-04-03 (주)테크윙 반도체소자 테스트용 핸들러
JP2020023032A (ja) * 2018-08-08 2020-02-13 ファナック株式会社 協働ロボット
CN111896779B (zh) * 2020-07-21 2022-10-18 贵州电网有限责任公司 一种计量检测仪器的电压卡钳
CN112858847A (zh) * 2021-01-04 2021-05-28 苏州华兴源创科技股份有限公司 一种测试装置
CN114966483B (zh) * 2022-04-20 2024-07-26 航天科工防御技术研究试验中心 一种smp连接器自动测试装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973015A (en) * 1987-09-17 1990-11-27 Schlumberger Technologies, Inc. Manipulator apparatus for test head support and orientation
KR960019641A (ko) * 1994-11-24 1996-06-17 오우라 히로시 테스트·헤드 접속 장치를 장비한 반도체 시험 장치
JP3869465B2 (ja) * 1995-02-23 2007-01-17 テラダイン・インコーポレーテッド 自動テスト装置のテストヘッド用マニピュレータ

Also Published As

Publication number Publication date
WO2000041536A3 (en) 2002-01-24
CN1312483C (zh) 2007-04-25
KR20010108092A (ko) 2001-12-07
AU2964400A (en) 2000-08-01
MY135317A (en) 2008-03-31
CN1564946A (zh) 2005-01-12
DE60012692T2 (de) 2005-09-15
TW536626B (en) 2003-06-11
JP2002534283A (ja) 2002-10-15
DE60012692D1 (de) 2004-09-09
KR100709827B1 (ko) 2007-04-23
WO2000041536A2 (en) 2000-07-20
EP1145018A2 (de) 2001-10-17
MY125342A (en) 2006-07-31
EP1145018A3 (de) 2002-09-11
EP1145018B1 (de) 2004-08-04

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