ATE27467T1 - Reaktive kathodenzerstaeubung von metallischen verbindungen bei hoher geschwindigkeit. - Google Patents

Reaktive kathodenzerstaeubung von metallischen verbindungen bei hoher geschwindigkeit.

Info

Publication number
ATE27467T1
ATE27467T1 AT83306544T AT83306544T ATE27467T1 AT E27467 T1 ATE27467 T1 AT E27467T1 AT 83306544 T AT83306544 T AT 83306544T AT 83306544 T AT83306544 T AT 83306544T AT E27467 T1 ATE27467 T1 AT E27467T1
Authority
AT
Austria
Prior art keywords
reactive
cathodation
high speed
metallic compounds
target
Prior art date
Application number
AT83306544T
Other languages
English (en)
Inventor
William Dallas Sproul
Original Assignee
Borg Warner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23914052&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE27467(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Borg Warner filed Critical Borg Warner
Application granted granted Critical
Publication of ATE27467T1 publication Critical patent/ATE27467T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
AT83306544T 1983-04-04 1983-10-27 Reaktive kathodenzerstaeubung von metallischen verbindungen bei hoher geschwindigkeit. ATE27467T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/481,954 US4428812A (en) 1983-04-04 1983-04-04 Rapid rate reactive sputtering of metallic compounds
EP83306544A EP0121625B1 (de) 1983-04-04 1983-10-27 Reaktive Kathodenzerstäubung von metallischen Verbindungen bei hoher Geschwindigkeit

Publications (1)

Publication Number Publication Date
ATE27467T1 true ATE27467T1 (de) 1987-06-15

Family

ID=23914052

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83306544T ATE27467T1 (de) 1983-04-04 1983-10-27 Reaktive kathodenzerstaeubung von metallischen verbindungen bei hoher geschwindigkeit.

Country Status (7)

Country Link
US (1) US4428812A (de)
EP (1) EP0121625B1 (de)
JP (1) JPS59185775A (de)
AT (1) ATE27467T1 (de)
AU (1) AU562107B2 (de)
CA (1) CA1198085A (de)
DE (1) DE3371797D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588667A (en) * 1984-05-15 1986-05-13 Xerox Corporation Electrophotographic imaging member and process comprising sputtering titanium on substrate
JP2619351B2 (ja) * 1984-08-10 1997-06-11 株式会社日立製作所 ガス流量制御方法
GB8504458D0 (en) * 1985-02-21 1985-03-27 Gen Eng Radcliffe Ltd Producing multi-layered coatings
US4670172A (en) * 1985-03-29 1987-06-02 Borg-Warner Corporation Process and kit for working metals
DE3521053A1 (de) * 1985-06-12 1986-12-18 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zum aufbringen duenner schichten auf ein substrat
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
DE3620901A1 (de) * 1986-06-21 1988-01-14 Krupp Gmbh Schneidwerkzeug
FR2607830B1 (fr) * 1986-12-08 1993-04-09 Univ Limoges Procede et dispositif pour le depot par vaporisation a l'interieur d'un tube
DE3726731A1 (de) * 1987-08-11 1989-02-23 Hartec Ges Fuer Hartstoffe Und Verfahren zum aufbringen von ueberzuegen auf gegenstaende mittels magnetfeldunterstuetzter kathodenzerstaeubung im vakuum
JPH01312851A (ja) * 1988-06-10 1989-12-18 Fujitsu Ltd 半導体装置の製造方法
JPH0735564B2 (ja) * 1989-08-24 1995-04-19 ワイケイケイ株式会社 耐食性と密着性とに優れた金属表面薄膜の形成方法
US5029686A (en) * 1990-07-20 1991-07-09 Borg-Warner Automotive, Inc. Clutch separator plates
DE4035073C1 (de) * 1990-11-05 1992-03-05 Battelle-Institut Ev, 6000 Frankfurt, De
JPH0565642A (ja) * 1991-09-10 1993-03-19 Matsushita Electric Ind Co Ltd 反応性スパツタリング装置
EP0608409B1 (de) * 1992-08-14 1997-05-07 Hughes Aircraft Company Oberflächepräparation und beschichtungs-methode für titannitrid auf gusseisen
JP2689931B2 (ja) * 1994-12-29 1997-12-10 日本電気株式会社 スパッタ方法
JP3390579B2 (ja) * 1995-07-03 2003-03-24 アネルバ株式会社 液晶ディスプレイ用薄膜の作成方法及び作成装置
JP3429957B2 (ja) * 1996-08-28 2003-07-28 松下電器産業株式会社 スパッタリング方法及び装置
US6071572A (en) * 1996-10-15 2000-06-06 Applied Materials, Inc. Forming tin thin films using remote activated specie generation
US5985104A (en) * 1997-10-09 1999-11-16 International Business Machines Corporation Sputtered mask defined with highly selective side wall chemical etching
US7749564B2 (en) * 2005-03-31 2010-07-06 Caterpillar Inc. Method and apparatus for the production of thin film coatings
CN102453857A (zh) * 2010-10-28 2012-05-16 鸿富锦精密工业（深圳）有限公司 非晶合金壳体及其制造方法
EP2484796A1 (de) 2011-02-04 2012-08-08 Pivot a.s. Magnetron-Sputterverfahren
US8802578B2 (en) * 2012-07-13 2014-08-12 Institute of Microelectronics, Chinese Academy of Sciences Method for forming tin by PVD
EP2770083B1 (de) * 2013-02-20 2015-11-18 University of West Bohemia in Pilsen Hochleistung reaktives sputtern von dielektrischen stöchiometrischen filmen

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1595037A (de) 1968-02-12 1970-06-08
US3607697A (en) 1968-04-18 1971-09-21 Sprague Electric Co Sputtering process for making a film of silica and silicon nitride
US3664931A (en) 1970-07-27 1972-05-23 Dieter Gerstenberg Method for fabrication of thin film capacitor
US3798145A (en) 1972-05-30 1974-03-19 Bell Telephone Labor Inc Technique for reducing interdiffusion rates and inhibiting metallic compound formation between titanium and platinum
DE2353942A1 (de) 1973-10-27 1975-05-07 Bosch Gmbh Robert Verfahren zur herstellung einer loetfesten kupferschicht
FR2261601A1 (en) * 1974-02-15 1975-09-12 Thomson Csf Method of forming conductive layers - uses varying pressures of oxygen during ion bombardment of target
US4046659A (en) 1974-05-10 1977-09-06 Airco, Inc. Method for coating a substrate
LU71343A1 (de) * 1974-11-22 1976-03-17
US4006073A (en) 1975-04-03 1977-02-01 The United States Of America As Represented By The United States Energy Research And Development Administration Thin film deposition by electric and magnetic crossed-field diode sputtering
JPS5217902A (en) 1975-08-01 1977-02-10 Fuji Photo Film Co Ltd Lithographic press plate
US4125446A (en) 1977-08-15 1978-11-14 Airco, Inc. Controlled reflectance of sputtered aluminum layers
DD142568A1 (de) * 1979-03-22 1980-07-02 Harald Bilz EINRICHTUNG ZUM REAKTIVEN BESCHICHTEN MIT DEM PLASM&TRON
US4281030A (en) 1980-05-12 1981-07-28 Bell Telephone Laboratories, Incorporated Implantation of vaporized material on melted substrates
US4336119A (en) 1981-01-29 1982-06-22 Ppg Industries, Inc. Method of and apparatus for control of reactive sputtering deposition
US4379040A (en) 1981-01-29 1983-04-05 Ppg Industries, Inc. Method of and apparatus for control of reactive sputtering deposition

Also Published As

Publication number Publication date
JPS59185775A (ja) 1984-10-22
EP0121625A3 (en) 1984-11-21
EP0121625B1 (de) 1987-05-27
AU562107B2 (en) 1987-05-28
CA1198085A (en) 1985-12-17
DE3371797D1 (en) 1987-07-02
US4428812A (en) 1984-01-31
EP0121625A2 (de) 1984-10-17
AU2026083A (en) 1984-10-11

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
RZN Patent revoked