ATE276532T1 - Mikrospiegel mit elektrostatisch gesteuertem mikroverschluss, anordnung von mikrospiegeln und infrarot-spektrophotometer mit dieser anordnung - Google Patents

Mikrospiegel mit elektrostatisch gesteuertem mikroverschluss, anordnung von mikrospiegeln und infrarot-spektrophotometer mit dieser anordnung

Info

Publication number
ATE276532T1
ATE276532T1 AT02026513T AT02026513T ATE276532T1 AT E276532 T1 ATE276532 T1 AT E276532T1 AT 02026513 T AT02026513 T AT 02026513T AT 02026513 T AT02026513 T AT 02026513T AT E276532 T1 ATE276532 T1 AT E276532T1
Authority
AT
Austria
Prior art keywords
micro
arrangement
mirror
infrared spectrophotometer
shutter
Prior art date
Application number
AT02026513T
Other languages
English (en)
Inventor
Marco Pizzi
Valerian Koniachkine
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Application granted granted Critical
Publication of ATE276532T1 publication Critical patent/ATE276532T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Micromachines (AREA)
AT02026513T 2001-12-07 2002-11-27 Mikrospiegel mit elektrostatisch gesteuertem mikroverschluss, anordnung von mikrospiegeln und infrarot-spektrophotometer mit dieser anordnung ATE276532T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2001TO001142A ITTO20011142A1 (it) 2001-12-07 2001-12-07 ,,micro-specchio con micro-otturatore a controllo elettrostatico, matrice di micro-specchi e spettrofotometro infrarosso comprendente tale m

Publications (1)

Publication Number Publication Date
ATE276532T1 true ATE276532T1 (de) 2004-10-15

Family

ID=11459325

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02026513T ATE276532T1 (de) 2001-12-07 2002-11-27 Mikrospiegel mit elektrostatisch gesteuertem mikroverschluss, anordnung von mikrospiegeln und infrarot-spektrophotometer mit dieser anordnung

Country Status (6)

Country Link
US (1) US6888142B2 (de)
EP (1) EP1318426B1 (de)
AT (1) ATE276532T1 (de)
DE (1) DE60201247T2 (de)
ES (1) ES2225716T3 (de)
IT (1) ITTO20011142A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20011142A1 (it) * 2001-12-07 2003-06-09 C R F Societa Con Sortile Per ,,micro-specchio con micro-otturatore a controllo elettrostatico, matrice di micro-specchi e spettrofotometro infrarosso comprendente tale m
US7245374B2 (en) 2002-12-19 2007-07-17 Koninklijke Philips Electronics N.V. Optical analysis system
US7078675B2 (en) * 2004-06-23 2006-07-18 Northrop Grumman Corporation Variable high speed shutter for spectroradiometry
US7484857B2 (en) * 2004-11-30 2009-02-03 Massachusetts Institute Of Technology Light modulating mirror device and array
EP1943186A4 (de) * 2005-09-23 2012-06-06 Northrop Grumman Systems Corp Mikroskopische elektro-mechanische systeme, nanospulen verwendende hochfrequenzvorrichtungen und spiralensteigungssteuertechniken zur herstellung derselben
KR100768193B1 (ko) 2005-11-30 2007-10-18 삼성에스디아이 주식회사 광 스위치와, 이를 적용한 디스플레이 장치
KR101230314B1 (ko) * 2006-05-30 2013-02-06 삼성디스플레이 주식회사 표시 장치
CN101516764A (zh) * 2006-09-20 2009-08-26 皇家飞利浦电子股份有限公司 在生物芯片或生物系统中使用的微致动器器件
KR100773018B1 (ko) * 2007-02-16 2007-11-02 한국과학기술원 폴리머 패턴을 몰드로 사용하여 제작한 마이크로 셔터디바이스, 폴리머 패턴을 몰드로 사용하여 마이크로 셔터디바이스를 제작하는 방법
US20090141334A1 (en) * 2007-11-30 2009-06-04 Motorola, Inc. Electronic device housing having tunable metallic appearance
KR101458904B1 (ko) * 2008-01-18 2014-11-07 삼성디스플레이 주식회사 표시 장치
DE102008009215A1 (de) 2008-02-13 2009-08-20 Universität Kassel Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung
US10876349B2 (en) * 2018-07-06 2020-12-29 Guardian Glass, LLC Electro-polymeric shade for use at elevated temperature and/or methods of making the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3989357A (en) * 1974-02-01 1976-11-02 Kalt Charles G Electro-static device with rolling electrode
US5305083A (en) * 1990-10-16 1994-04-19 Ml Technology Ventures, L.P. Random access monochromator
US5233459A (en) * 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
DE4437261C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches elektrostatisches Relais
IT1303597B1 (it) * 1998-12-09 2000-11-14 Fiat Ricerche Dispositivo ottico e stato di funzionamento variabile, in particolareotturatore o specchio, a controllo elettrostatico.
US6236491B1 (en) * 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6396620B1 (en) * 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
ITTO20010251A1 (it) * 2001-03-16 2002-09-16 Fiat Ricerche Micro-otturatore ottico a controllo elettrostatico, e matrice di micro-otturatori a controllo semplificato.
US7026602B2 (en) * 2001-04-13 2006-04-11 Research Triangle Institute Electromagnetic radiation detectors having a microelectromechanical shutter device
US6731492B2 (en) * 2001-09-07 2004-05-04 Mcnc Research And Development Institute Overdrive structures for flexible electrostatic switch
ITTO20011142A1 (it) * 2001-12-07 2003-06-09 C R F Societa Con Sortile Per ,,micro-specchio con micro-otturatore a controllo elettrostatico, matrice di micro-specchi e spettrofotometro infrarosso comprendente tale m

Also Published As

Publication number Publication date
DE60201247T2 (de) 2005-09-29
US6888142B2 (en) 2005-05-03
EP1318426A1 (de) 2003-06-11
ES2225716T3 (es) 2005-03-16
ITTO20011142A0 (it) 2001-12-07
ITTO20011142A1 (it) 2003-06-09
DE60201247D1 (de) 2004-10-21
EP1318426B1 (de) 2004-09-15
US20030117733A1 (en) 2003-06-26

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