ATE278636T1 - Verfahren zur herstellung eines thermisch biegbaren betätigungselements - Google Patents

Verfahren zur herstellung eines thermisch biegbaren betätigungselements

Info

Publication number
ATE278636T1
ATE278636T1 AT00907360T AT00907360T ATE278636T1 AT E278636 T1 ATE278636 T1 AT E278636T1 AT 00907360 T AT00907360 T AT 00907360T AT 00907360 T AT00907360 T AT 00907360T AT E278636 T1 ATE278636 T1 AT E278636T1
Authority
AT
Austria
Prior art keywords
layer
etching
substrate
bend actuator
depositing
Prior art date
Application number
AT00907360T
Other languages
English (en)
Inventor
Kia Silverbrook
Original Assignee
Silverbrook Res Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Res Pty Ltd filed Critical Silverbrook Res Pty Ltd
Application granted granted Critical
Publication of ATE278636T1 publication Critical patent/ATE278636T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Toys (AREA)
  • Control Of Vending Devices And Auxiliary Devices For Vending Devices (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Prostheses (AREA)
AT00907360T 1999-03-16 2000-03-10 Verfahren zur herstellung eines thermisch biegbaren betätigungselements ATE278636T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP9223A AUPP922399A0 (en) 1999-03-16 1999-03-16 A method and apparatus (ij46p2)
PCT/AU2000/000172 WO2000055089A1 (en) 1999-03-16 2000-03-10 A method of manufacturing a thermal bend actuator

Publications (1)

Publication Number Publication Date
ATE278636T1 true ATE278636T1 (de) 2004-10-15

Family

ID=3813419

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00907360T ATE278636T1 (de) 1999-03-16 2000-03-10 Verfahren zur herstellung eines thermisch biegbaren betätigungselements

Country Status (7)

Country Link
US (1) US6426014B1 (de)
EP (1) EP1171378B1 (de)
JP (1) JP4711514B2 (de)
AT (1) ATE278636T1 (de)
AU (1) AUPP922399A0 (de)
DE (1) DE60014615D1 (de)
WO (1) WO2000055089A1 (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US7303254B2 (en) 1997-07-15 2007-12-04 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US7131715B2 (en) 1997-07-15 2006-11-07 Silverbrook Research Pty Ltd Printhead chip that incorporates micro-mechanical lever mechanisms
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US6679584B2 (en) 1997-07-15 2004-01-20 Silverbrook Research Pty Ltd. High volume pagewidth printing
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US6540332B2 (en) * 1997-07-15 2003-04-01 Silverbrook Research Pty Ltd Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
US6857724B2 (en) 1997-07-15 2005-02-22 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US6855264B1 (en) 1997-07-15 2005-02-15 Kia Silverbrook Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7008046B2 (en) 1997-07-15 2006-03-07 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
AUPP398798A0 (en) * 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US7891767B2 (en) 1997-07-15 2011-02-22 Silverbrook Research Pty Ltd Modular self-capping wide format print assembly
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7111924B2 (en) 1998-10-16 2006-09-26 Silverbrook Research Pty Ltd Inkjet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
US6623108B2 (en) * 1998-10-16 2003-09-23 Silverbrook Research Pty Ltd Ink jet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
EP1165432B1 (de) * 1999-02-15 2006-11-02 Silverbrook Research Pty. Limited Thermisch biegender aktor und schaufelstruktur für tintenstrahldüse
AUPP993199A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechanical device and method (ij46p2a)
AUPQ130799A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V13)
JP3548536B2 (ja) * 2000-02-15 2004-07-28 キヤノン株式会社 液体吐出ヘッドの製造方法
US7095309B1 (en) 2000-10-20 2006-08-22 Silverbrook Research Pty Ltd Thermoelastic actuator design
US6352337B1 (en) * 2000-11-08 2002-03-05 Eastman Kodak Company Assisted drop-on-demand inkjet printer using deformable micro-acuator
US6561627B2 (en) * 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator
GB0106343D0 (en) 2001-03-14 2001-05-02 Avecia Ltd Compounds compositions and processes
JP2004126503A (ja) * 2002-03-28 2004-04-22 Nikon Corp マイクロアクチュエータ及びこれを用いた光スイッチ
GB0207655D0 (en) 2002-04-02 2002-05-15 Avecia Ltd Compositions and processes
US20040257417A1 (en) 2003-04-28 2004-12-23 Christian Jackson Inkjet printing method
US7682012B2 (en) * 2003-12-29 2010-03-23 E. I. Du Pont De Nemours And Company Inkjet printing method and apparatus
GB0401540D0 (en) 2004-01-23 2004-02-25 Avecia Ltd Process
US7404849B2 (en) * 2004-04-21 2008-07-29 E. I. Du Pont De Nemours And Company Inkjet ink set for improved color reproduction
US7905589B2 (en) * 2004-05-13 2011-03-15 E. I. Du Pont De Nemours And Company Inkjet printing with pigmented inks
US7399351B2 (en) * 2004-06-25 2008-07-15 Ei Du Pont De Nemours And Company Pigmented inkjet ink and ink set
US7384465B2 (en) * 2004-06-25 2008-06-10 E.I. Du Pont De Nemours & Co. Pigmented blue inkjet ink color reproduction
WO2006037151A2 (en) * 2004-10-08 2006-04-13 Silverbrook Research Pty Ltd Method of removing polymer coating from an etched trench
US20060087531A1 (en) * 2004-10-25 2006-04-27 Eiseman Michael J Inkjet printing apparatus
SG176493A1 (en) * 2007-03-12 2011-12-29 Silverbrook Res Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
GB0719083D0 (en) 2007-09-29 2007-11-07 Fujifilm Corp Magenta dyes and inks for use in ink-jet printing
US8012363B2 (en) * 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Metal film protection during printhead fabrication with minimum number of MEMS processing steps
WO2010020802A2 (en) 2008-08-22 2010-02-25 Fujifilm Imaging Colorants Limited Phthalocyanines and their use in ink-jet printing
SG172119A1 (en) * 2008-12-15 2011-07-28 Linde Ag Enhancement of dry etch of high aspect ratio features using fluorine
GB201021603D0 (en) 2010-12-21 2011-02-02 Fujifilm Imaging Colorants Ltd Inks & printing process

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GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
JPH07314673A (ja) * 1994-05-27 1995-12-05 Sharp Corp インクジェットヘッド
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
US5838351A (en) * 1995-10-26 1998-11-17 Hewlett-Packard Company Valve assembly for controlling fluid flow within an ink-jet pen
JP3160754B2 (ja) * 1996-03-04 2001-04-25 シャープ株式会社 インクジェットヘッド
KR0185329B1 (ko) * 1996-03-27 1999-05-15 이형도 기록액의 운동 관성을 이용한 기록 장치
JP3514407B2 (ja) * 1996-08-28 2004-03-31 株式会社リコー インクジェットヘッド及びインクジェット記録装置
AUPO793797A0 (en) * 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A method of manufacture of an image creation apparatus (IJM03)
EP1650030B1 (de) * 1997-07-15 2008-09-24 Silverbrook Research Pty. Ltd Düsenkammer mit Paddelschaufel und externem thermischen Betätigungselement
EP0999933B1 (de) * 1997-07-15 2005-03-02 Silverbrook Research Pty. Limited Magnetfeld-betätigte tintenstrahldüse
EP1165432B1 (de) * 1999-02-15 2006-11-02 Silverbrook Research Pty. Limited Thermisch biegender aktor und schaufelstruktur für tintenstrahldüse

Also Published As

Publication number Publication date
EP1171378B1 (de) 2004-10-06
EP1171378A4 (de) 2002-05-02
DE60014615D1 (de) 2004-11-11
JP4711514B2 (ja) 2011-06-29
EP1171378A1 (de) 2002-01-16
US6426014B1 (en) 2002-07-30
AUPP922399A0 (en) 1999-04-15
WO2000055089A1 (en) 2000-09-21
JP2002538981A (ja) 2002-11-19

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Legal Events

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