ATE278636T1 - Verfahren zur herstellung eines thermisch biegbaren betätigungselements - Google Patents

Verfahren zur herstellung eines thermisch biegbaren betätigungselements

Info

Publication number
ATE278636T1
ATE278636T1 AT00907360T AT00907360T ATE278636T1 AT E278636 T1 ATE278636 T1 AT E278636T1 AT 00907360 T AT00907360 T AT 00907360T AT 00907360 T AT00907360 T AT 00907360T AT E278636 T1 ATE278636 T1 AT E278636T1
Authority
AT
Austria
Prior art keywords
layer
etching
substrate
bend actuator
depositing
Prior art date
Application number
AT00907360T
Other languages
English (en)
Inventor
Kia Silverbrook
Original Assignee
Silverbrook Res Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Res Pty Ltd filed Critical Silverbrook Res Pty Ltd
Application granted granted Critical
Publication of ATE278636T1 publication Critical patent/ATE278636T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Prostheses (AREA)
  • Toys (AREA)
  • Control Of Vending Devices And Auxiliary Devices For Vending Devices (AREA)
AT00907360T 1999-03-16 2000-03-10 Verfahren zur herstellung eines thermisch biegbaren betätigungselements ATE278636T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP9223A AUPP922399A0 (en) 1999-03-16 1999-03-16 A method and apparatus (ij46p2)
PCT/AU2000/000172 WO2000055089A1 (en) 1999-03-16 2000-03-10 A method of manufacturing a thermal bend actuator

Publications (1)

Publication Number Publication Date
ATE278636T1 true ATE278636T1 (de) 2004-10-15

Family

ID=3813419

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00907360T ATE278636T1 (de) 1999-03-16 2000-03-10 Verfahren zur herstellung eines thermisch biegbaren betätigungselements

Country Status (7)

Country Link
US (1) US6426014B1 (de)
EP (1) EP1171378B1 (de)
JP (1) JP4711514B2 (de)
AT (1) ATE278636T1 (de)
AU (1) AUPP922399A0 (de)
DE (1) DE60014615D1 (de)
WO (1) WO2000055089A1 (de)

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US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US6857724B2 (en) 1997-07-15 2005-02-22 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US7008046B2 (en) 1997-07-15 2006-03-07 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
US6540332B2 (en) 1997-07-15 2003-04-01 Silverbrook Research Pty Ltd Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7303254B2 (en) 1997-07-15 2007-12-04 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
AUPP398798A0 (en) * 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US6679584B2 (en) 1997-07-15 2004-01-20 Silverbrook Research Pty Ltd. High volume pagewidth printing
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US7891767B2 (en) 1997-07-15 2011-02-22 Silverbrook Research Pty Ltd Modular self-capping wide format print assembly
US7131715B2 (en) 1997-07-15 2006-11-07 Silverbrook Research Pty Ltd Printhead chip that incorporates micro-mechanical lever mechanisms
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US6623108B2 (en) * 1998-10-16 2003-09-23 Silverbrook Research Pty Ltd Ink jet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
US7111924B2 (en) 1998-10-16 2006-09-26 Silverbrook Research Pty Ltd Inkjet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
JP4732588B2 (ja) * 1999-02-15 2011-07-27 シルバーブルック リサーチ プロプライエタリイ、リミテッド 熱アクチュエータ及び機械的アクチュエータ
AUPP993199A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechanical device and method (ij46p2a)
AUPQ130799A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V13)
JP3548536B2 (ja) * 2000-02-15 2004-07-28 キヤノン株式会社 液体吐出ヘッドの製造方法
US7095309B1 (en) * 2000-10-20 2006-08-22 Silverbrook Research Pty Ltd Thermoelastic actuator design
US6352337B1 (en) * 2000-11-08 2002-03-05 Eastman Kodak Company Assisted drop-on-demand inkjet printer using deformable micro-acuator
US6561627B2 (en) * 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator
GB0106343D0 (en) 2001-03-14 2001-05-02 Avecia Ltd Compounds compositions and processes
JP2004126503A (ja) * 2002-03-28 2004-04-22 Nikon Corp マイクロアクチュエータ及びこれを用いた光スイッチ
GB0207655D0 (en) 2002-04-02 2002-05-15 Avecia Ltd Compositions and processes
US20040257417A1 (en) 2003-04-28 2004-12-23 Christian Jackson Inkjet printing method
US7682012B2 (en) 2003-12-29 2010-03-23 E. I. Du Pont De Nemours And Company Inkjet printing method and apparatus
GB0401540D0 (en) 2004-01-23 2004-02-25 Avecia Ltd Process
US7404849B2 (en) * 2004-04-21 2008-07-29 E. I. Du Pont De Nemours And Company Inkjet ink set for improved color reproduction
US7905589B2 (en) * 2004-05-13 2011-03-15 E. I. Du Pont De Nemours And Company Inkjet printing with pigmented inks
US7384465B2 (en) * 2004-06-25 2008-06-10 E.I. Du Pont De Nemours & Co. Pigmented blue inkjet ink color reproduction
US7399351B2 (en) * 2004-06-25 2008-07-15 Ei Du Pont De Nemours And Company Pigmented inkjet ink and ink set
KR100857629B1 (ko) * 2004-10-08 2008-09-08 실버브룩 리서치 피티와이 리미티드 에칭된 트렌치로부터 폴리머 코팅의 제거 방법
US20060087531A1 (en) * 2004-10-25 2006-04-27 Eiseman Michael J Inkjet printing apparatus
CN101610909B (zh) * 2007-03-12 2010-12-29 西尔弗布鲁克研究股份有限公司 制造具有疏水喷墨面的打印头的方法以及打印头
GB0719083D0 (en) 2007-09-29 2007-11-07 Fujifilm Corp Magenta dyes and inks for use in ink-jet printing
US8012363B2 (en) * 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Metal film protection during printhead fabrication with minimum number of MEMS processing steps
KR20110044872A (ko) 2008-08-22 2011-05-02 후지필름 이미징 컬러런츠 리미티드 아자프탈로시아닌 및 잉크젯 인쇄에서 이의 용도
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AUPO793797A0 (en) * 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A method of manufacture of an image creation apparatus (IJM03)
EP1510341B1 (de) * 1997-07-15 2007-01-24 Silverbrook Research Pty. Limited Tintenstrahldüse mit elektromagnetischem Verschluss
EP1637330B1 (de) * 1997-07-15 2007-04-18 Silverbrook Research Pty. Ltd Thermisches Betätigungselement mit gezahntem Heizelement
JP4732588B2 (ja) * 1999-02-15 2011-07-27 シルバーブルック リサーチ プロプライエタリイ、リミテッド 熱アクチュエータ及び機械的アクチュエータ

Also Published As

Publication number Publication date
JP4711514B2 (ja) 2011-06-29
EP1171378A1 (de) 2002-01-16
AUPP922399A0 (en) 1999-04-15
JP2002538981A (ja) 2002-11-19
US6426014B1 (en) 2002-07-30
EP1171378A4 (de) 2002-05-02
WO2000055089A1 (en) 2000-09-21
DE60014615D1 (de) 2004-11-11
EP1171378B1 (de) 2004-10-06

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Legal Events

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