ATE280406T1 - Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit - Google Patents

Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit

Info

Publication number
ATE280406T1
ATE280406T1 AT00400956T AT00400956T ATE280406T1 AT E280406 T1 ATE280406 T1 AT E280406T1 AT 00400956 T AT00400956 T AT 00400956T AT 00400956 T AT00400956 T AT 00400956T AT E280406 T1 ATE280406 T1 AT E280406T1
Authority
AT
Austria
Prior art keywords
pressure regulator
pump unit
unit provided
vacuum pump
vacuum chamber
Prior art date
Application number
AT00400956T
Other languages
English (en)
Inventor
Claude Rousseau
Patrick Pilotti
Philippe Maquin
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR9904539A external-priority patent/FR2792083B1/fr
Application filed by Cit Alcatel filed Critical Cit Alcatel
Application granted granted Critical
Publication of ATE280406T1 publication Critical patent/ATE280406T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2066—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source
    • G05D16/2073—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source with a plurality of pressure sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Fluid Pressure (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Drying Of Semiconductors (AREA)
AT00400956T 1999-04-07 2000-04-07 Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit ATE280406T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9904347 1999-04-07
FR9904539A FR2792083B1 (fr) 1999-04-12 1999-04-12 Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme

Publications (1)

Publication Number Publication Date
ATE280406T1 true ATE280406T1 (de) 2004-11-15

Family

ID=26234904

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00400956T ATE280406T1 (de) 1999-04-07 2000-04-07 Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit

Country Status (6)

Country Link
US (1) US6419455B1 (de)
EP (1) EP1043645B1 (de)
JP (2) JP2002541541A (de)
AT (1) ATE280406T1 (de)
DE (1) DE60015003T2 (de)
WO (1) WO2000060428A1 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2807951B1 (fr) * 2000-04-20 2003-05-16 Cit Alcatel Procede et systeme de pompage des chambres de transfert d'equipement de semi-conducteur
WO2001096972A2 (en) * 2000-06-14 2001-12-20 Applied Materials, Inc. Methods and apparatus for maintaining a pressure within an environmentally controlled chamber
JP2002168192A (ja) * 2000-12-01 2002-06-14 Seiko Instruments Inc 真空ポンプ
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
WO2003100259A1 (en) * 2002-05-22 2003-12-04 Applied Materials, Inc. Variable speed vacuum pump control method and apparatus
JP2004263635A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi 真空装置および真空ポンプ
FR2854667B1 (fr) * 2003-05-09 2006-07-28 Cit Alcatel Controle de pression dans la chambre de procedes par variation de vitesse de pompes, vanne de regulation et injection de gaz neutre
JP4533614B2 (ja) * 2003-10-10 2010-09-01 株式会社イーアールシー 真空制御システム
DE10354205A1 (de) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe
US7278831B2 (en) * 2003-12-31 2007-10-09 The Boc Group, Inc. Apparatus and method for control, pumping and abatement for vacuum process chambers
US7021903B2 (en) * 2003-12-31 2006-04-04 The Boc Group, Inc. Fore-line preconditioning for vacuum pumps
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
RU2360405C2 (ru) * 2004-07-13 2009-07-10 Делавал Холдинг Аб Регулируемый источник вакуума
US7682574B2 (en) * 2004-11-18 2010-03-23 Applied Materials, Inc. Safety, monitoring and control features for thermal abatement reactor
US8095240B2 (en) * 2004-11-18 2012-01-10 Applied Materials, Inc. Methods for starting and operating a thermal abatement system
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
DE102005040661B3 (de) * 2005-08-26 2006-12-28 Leica Microsystems Semiconductor Gmbh Koordinatenmessvorrichtung
US20090175771A1 (en) * 2006-03-16 2009-07-09 Applied Materials, Inc. Abatement of effluent gas
KR20080104372A (ko) * 2006-03-16 2008-12-02 어플라이드 머티어리얼스, 인코포레이티드 전자 장치 제조 시스템의 압력 제어 방법 및 장치
SE531046C2 (sv) * 2007-04-03 2008-12-02 Delaval Holding Ab En metod i ett mjölkningssystem för att skapa en erfordrad vakumnivå och datorprogramprodukter
CN101678407A (zh) * 2007-05-25 2010-03-24 应用材料股份有限公司 用于减量系统的有效操作的方法与装置
JP2010528475A (ja) * 2007-05-25 2010-08-19 アプライド マテリアルズ インコーポレイテッド 電子デバイス製造システムを組み立てる及び運転する方法及び装置
US20090018688A1 (en) * 2007-06-15 2009-01-15 Applied Materials, Inc. Methods and systems for designing and validating operation of abatement systems
US8003067B2 (en) * 2007-09-20 2011-08-23 Applied Materials, Inc. Apparatus and methods for ambient air abatement of electronic manufacturing effluent
JP2011501102A (ja) * 2007-10-26 2011-01-06 アプライド マテリアルズ インコーポレイテッド 改良された燃料回路を使用した高性能な除害の方法及び装置
KR100832696B1 (ko) * 2008-01-18 2008-05-28 임권현 진공척
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
DE102012010522A1 (de) * 2012-05-25 2013-11-28 Hydac Fluidtechnik Gmbh Ventil für Ventilanordnung
US9096934B1 (en) 2012-10-31 2015-08-04 WD Media, LLC Load lock with variable conductance valve
JP6258656B2 (ja) * 2013-10-17 2018-01-10 東京エレクトロン株式会社 基板処理方法および基板処理装置
JP6615663B2 (ja) * 2016-03-22 2019-12-04 住友重機械工業株式会社 クライオポンプ、クライオポンプ吸蔵ガス量推測装置及びクライオポンプ吸蔵ガス量推測方法
US20200141396A1 (en) * 2017-05-03 2020-05-07 Basf Coatings Gmbh Pump assembly for pumping viscous media, device comprising same, method for producing surface coating agents, and use of a pump assembly
TW202035873A (zh) * 2019-03-29 2020-10-01 亞台富士精機股份有限公司 控制方法及真空系統
JP7218706B2 (ja) * 2019-10-18 2023-02-07 株式会社島津製作所 真空排気装置および真空排気装置の起動方法
GB2603892A (en) * 2021-02-03 2022-08-24 Edwards Ltd Pump apparatus and system
EP4206468A1 (de) * 2022-01-04 2023-07-05 Pfeiffer Vacuum Vakuumpumpe und vakuumsystem

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE262065C (de)
JPS59142621A (ja) * 1983-02-02 1984-08-15 Canon Inc 真空装置の圧力調整方法
JPS61116081A (ja) * 1984-11-12 1986-06-03 Toshiba Corp ポンプ制御装置
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
JPS63134186U (de) * 1987-02-24 1988-09-02
DD262065A1 (de) * 1987-07-07 1988-11-16 Univ Dresden Tech Vorrichtung zur druckregelung im feinvakuumbereich
JPS6429700A (en) * 1987-07-23 1989-01-31 Hitachi Ltd Multistage fluidic machine
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
JP2663549B2 (ja) * 1988-09-02 1997-10-15 株式会社日本自動車部品総合研究所 真空装置の圧力制御方法
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
FR2640697B1 (fr) * 1988-12-16 1993-01-08 Cit Alcatel Ensemble de pompage pour l'obtention de vides eleves
JPH0321579U (de) * 1989-07-10 1991-03-04
JPH0325873U (de) * 1989-07-24 1991-03-18
FR2652390B1 (fr) * 1989-09-27 1991-11-29 Cit Alcatel Groupe de pompage a vide.
JPH05240181A (ja) * 1991-07-09 1993-09-17 Ebara Corp 多段真空ポンプ装置
JPH07217537A (ja) * 1994-02-01 1995-08-15 Fujitsu Ltd 排気装置及び排気方法
JP3208000B2 (ja) * 1994-03-28 2001-09-10 キヤノン株式会社 基板保持システム
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
JPH0842487A (ja) * 1994-08-02 1996-02-13 Hitachi Ltd 真空ポンプ
US5849135A (en) * 1996-03-12 1998-12-15 The Regents Of The University Of California Particulate contamination removal from wafers using plasmas and mechanical agitation
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
JP3550879B2 (ja) * 1996-05-30 2004-08-04 ダイキン工業株式会社 真空排気装置
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
JP3171807B2 (ja) * 1997-01-24 2001-06-04 東京エレクトロン株式会社 洗浄装置及び洗浄方法
US5944049A (en) 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US6045332A (en) * 1998-05-08 2000-04-04 Celanese International Corporation Control system for multi-pump operation

Also Published As

Publication number Publication date
DE60015003T2 (de) 2005-06-02
EP1043645B1 (de) 2004-10-20
US6419455B1 (en) 2002-07-16
JP2011008804A (ja) 2011-01-13
JP2002541541A (ja) 2002-12-03
EP1043645A1 (de) 2000-10-11
WO2000060428A1 (fr) 2000-10-12
DE60015003D1 (de) 2004-11-25

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