ATE280849T1 - Vorrichtung zum eintragen von weichelastischen bändern in eine kammer - Google Patents

Vorrichtung zum eintragen von weichelastischen bändern in eine kammer

Info

Publication number
ATE280849T1
ATE280849T1 AT02727687T AT02727687T ATE280849T1 AT E280849 T1 ATE280849 T1 AT E280849T1 AT 02727687 T AT02727687 T AT 02727687T AT 02727687 T AT02727687 T AT 02727687T AT E280849 T1 ATE280849 T1 AT E280849T1
Authority
AT
Austria
Prior art keywords
chamber
elastic bands
soft elastic
dynamic sealing
inserting soft
Prior art date
Application number
AT02727687T
Other languages
English (en)
Inventor
Jean-Marc Poirson
Michel Aulagner
Lionel Labalme
Original Assignee
Tecmachine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tecmachine filed Critical Tecmachine
Application granted granted Critical
Publication of ATE280849T1 publication Critical patent/ATE280849T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Containers And Plastic Fillers For Packaging (AREA)
  • Press Drives And Press Lines (AREA)
  • Shaping By String And By Release Of Stress In Plastics And The Like (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Portable Nailing Machines And Staplers (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Physical Vapour Deposition (AREA)
AT02727687T 2001-04-30 2002-04-24 Vorrichtung zum eintragen von weichelastischen bändern in eine kammer ATE280849T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0105939A FR2824080B1 (fr) 2001-04-30 2001-04-30 Dispositif d'introduction d'un materiau souple en bande dans une enceinte
PCT/FR2002/001406 WO2002088418A1 (fr) 2001-04-30 2002-04-24 Dispositif d'introduction d'un materiau souple en bande dans une enceinte

Publications (1)

Publication Number Publication Date
ATE280849T1 true ATE280849T1 (de) 2004-11-15

Family

ID=8862952

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02727687T ATE280849T1 (de) 2001-04-30 2002-04-24 Vorrichtung zum eintragen von weichelastischen bändern in eine kammer

Country Status (7)

Country Link
EP (1) EP1383937B1 (de)
AT (1) ATE280849T1 (de)
CA (1) CA2444362C (de)
DE (1) DE60201747T2 (de)
ES (1) ES2230489T3 (de)
FR (1) FR2824080B1 (de)
WO (1) WO2002088418A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2336870B1 (es) * 2007-08-20 2011-02-18 Novogenio, S.L. Sistema y procedimiento para el recubrimiento en vacio y en continuo de un material en forma de banda.
DE102023200340A1 (de) * 2023-01-18 2024-07-18 Sms Group Gmbh Schleusenvorrichtung und Verfahren zu deren Betrieb

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6326365A (ja) * 1986-07-17 1988-02-03 Nippon Kokan Kk <Nkk> シ−ル装置
JPH01306562A (ja) * 1988-06-04 1989-12-11 Nippon Steel Corp 真空チャンバー用シール装置
DE19912707B4 (de) * 1999-03-20 2010-01-21 Applied Materials Gmbh & Co. Kg Behandlungsanlage für flache Substrate

Also Published As

Publication number Publication date
CA2444362A1 (fr) 2002-11-07
ES2230489T3 (es) 2005-05-01
DE60201747T2 (de) 2006-03-02
EP1383937A1 (de) 2004-01-28
FR2824080B1 (fr) 2004-03-05
DE60201747D1 (de) 2004-12-02
EP1383937B1 (de) 2004-10-27
FR2824080A1 (fr) 2002-10-31
WO2002088418A1 (fr) 2002-11-07
CA2444362C (fr) 2009-09-22

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