ATE284091T1 - Integrierter akustischer dünnfilmresonator - Google Patents

Integrierter akustischer dünnfilmresonator

Info

Publication number
ATE284091T1
ATE284091T1 AT99202912T AT99202912T ATE284091T1 AT E284091 T1 ATE284091 T1 AT E284091T1 AT 99202912 T AT99202912 T AT 99202912T AT 99202912 T AT99202912 T AT 99202912T AT E284091 T1 ATE284091 T1 AT E284091T1
Authority
AT
Austria
Prior art keywords
silicon
substrate
resonator
passive device
noise isolator
Prior art date
Application number
AT99202912T
Other languages
English (en)
Inventor
Han-Tzong Yuan
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of ATE284091T1 publication Critical patent/ATE284091T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Semiconductor Integrated Circuits (AREA)
AT99202912T 1998-09-11 1999-09-09 Integrierter akustischer dünnfilmresonator ATE284091T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9986498P 1998-09-11 1998-09-11

Publications (1)

Publication Number Publication Date
ATE284091T1 true ATE284091T1 (de) 2004-12-15

Family

ID=22276990

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99202912T ATE284091T1 (de) 1998-09-11 1999-09-09 Integrierter akustischer dünnfilmresonator

Country Status (5)

Country Link
US (1) US6297515B1 (de)
EP (1) EP0986172B1 (de)
JP (1) JP2000101386A (de)
AT (1) ATE284091T1 (de)
DE (1) DE69922311T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19931297A1 (de) * 1999-07-07 2001-01-11 Philips Corp Intellectual Pty Volumenwellen-Filter
GB0014963D0 (en) * 2000-06-20 2000-08-09 Koninkl Philips Electronics Nv A bulk acoustic wave device
US6496085B2 (en) * 2001-01-02 2002-12-17 Nokia Mobile Phones Ltd Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror
FR2823032B1 (fr) * 2001-04-03 2003-07-11 St Microelectronics Sa Resonateur electromecanique a poutre vibrante
DE20221966U1 (de) * 2002-06-06 2010-02-25 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement mit einem Anpaßnetzwerk
FR2890490A1 (fr) * 2005-09-05 2007-03-09 St Microelectronics Sa Support de resonateur acoustique et circuit integre correspondant
JP2007129391A (ja) * 2005-11-02 2007-05-24 Matsushita Electric Ind Co Ltd 音響共振器及びフィルタ
JP4804961B2 (ja) * 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 超音波振動子及びそれを搭載した体腔内超音波診断装置
US9299914B2 (en) 2011-04-01 2016-03-29 Renesas Electronics Corporation Semiconductor device, manufacturing method of the same, and mobile phone
JP6368298B2 (ja) * 2015-12-14 2018-08-01 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびデュプレクサ
WO2021015816A1 (en) * 2019-07-19 2021-01-28 Iqe Plc Semiconductor material having tunable permittivity and tunable thermal conductivity
US20220140812A1 (en) * 2020-10-30 2022-05-05 RF360 Europe GmbH Multi mirror stack
CN121585125A (zh) * 2022-12-30 2026-02-27 泉州市三安集成电路有限公司 一种滤波器器件

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5367308A (en) * 1992-05-29 1994-11-22 Iowa State University Research Foundation, Inc. Thin film resonating device
US5864261A (en) * 1994-05-23 1999-01-26 Iowa State University Research Foundation Multiple layer acoustical structures for thin-film resonator based circuits and systems
US5821833A (en) * 1995-12-26 1998-10-13 Tfr Technologies, Inc. Stacked crystal filter device and method of making
US5936150A (en) * 1998-04-13 1999-08-10 Rockwell Science Center, Llc Thin film resonant chemical sensor with resonant acoustic isolator
US6114635A (en) * 1998-07-14 2000-09-05 Tfr Technologies, Inc. Chip-scale electronic component package
US6107721A (en) * 1999-07-27 2000-08-22 Tfr Technologies, Inc. Piezoelectric resonators on a differentially offset reflector

Also Published As

Publication number Publication date
DE69922311T2 (de) 2005-12-01
JP2000101386A (ja) 2000-04-07
EP0986172A2 (de) 2000-03-15
DE69922311D1 (de) 2005-01-05
EP0986172B1 (de) 2004-12-01
US6297515B1 (en) 2001-10-02
EP0986172A3 (de) 2000-10-18

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Legal Events

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