ATE287459T1 - Kohlenstoffbeschichtungen, verfahren und vorrichtung für ihre aufbringung und damit beschichtete gegenstände - Google Patents

Kohlenstoffbeschichtungen, verfahren und vorrichtung für ihre aufbringung und damit beschichtete gegenstände

Info

Publication number
ATE287459T1
ATE287459T1 AT98957013T AT98957013T ATE287459T1 AT E287459 T1 ATE287459 T1 AT E287459T1 AT 98957013 T AT98957013 T AT 98957013T AT 98957013 T AT98957013 T AT 98957013T AT E287459 T1 ATE287459 T1 AT E287459T1
Authority
AT
Austria
Prior art keywords
carbon
coating
target
coating layer
metal
Prior art date
Application number
AT98957013T
Other languages
English (en)
Inventor
Dennis Gerald Teer
Didier Camino
Andrew Harry Spencer Jones
Original Assignee
Teer Coatings Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32178919&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE287459(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GBGB9725413.0A external-priority patent/GB9725413D0/en
Priority claimed from GBGB9805743.3A external-priority patent/GB9805743D0/en
Application filed by Teer Coatings Ltd filed Critical Teer Coatings Ltd
Application granted granted Critical
Publication of ATE287459T1 publication Critical patent/ATE287459T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Carbon And Carbon Compounds (AREA)
AT98957013T 1997-12-02 1998-12-02 Kohlenstoffbeschichtungen, verfahren und vorrichtung für ihre aufbringung und damit beschichtete gegenstände ATE287459T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9725413.0A GB9725413D0 (en) 1997-12-02 1997-12-02 Carbon coating
GBGB9805743.3A GB9805743D0 (en) 1998-03-19 1998-03-19 Medical prosthesis and methods of making them
PCT/GB1998/003596 WO1999027893A2 (en) 1997-12-02 1998-12-02 Carbon coatings, method and apparatus for applying them, and articles bearing such coatings

Publications (1)

Publication Number Publication Date
ATE287459T1 true ATE287459T1 (de) 2005-02-15

Family

ID=32178919

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98957013T ATE287459T1 (de) 1997-12-02 1998-12-02 Kohlenstoffbeschichtungen, verfahren und vorrichtung für ihre aufbringung und damit beschichtete gegenstände

Country Status (8)

Country Link
US (1) US6726993B2 (de)
EP (1) EP1036208B1 (de)
AT (1) ATE287459T1 (de)
AU (1) AU1344399A (de)
DE (1) DE69828704T2 (de)
GB (1) GB2331998B (de)
IL (1) IL137319A (de)
WO (1) WO1999027893A2 (de)

Families Citing this family (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2348158A (en) * 1999-03-16 2000-09-27 Teer Coatings Ltd Lubricated cutting
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
DE10005614A1 (de) 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung von Beschichtungen sowie Gegenstand
DE10005612A1 (de) 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung eines Gegenstandes und Gegenstand
DE10018143C5 (de) † 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
JP4615697B2 (ja) * 2000-11-07 2011-01-19 ティーア、コーティングズ、リミテッド 炭素含有被覆を施した物品
US6962751B2 (en) * 2001-06-13 2005-11-08 Sumitomo Electric Industries, Ltd. Amorphous carbon coated tools and method of producing the same
US6881475B2 (en) * 2001-06-13 2005-04-19 Sumitomo Electric Industries, Ltd Amorphous carbon coated tool and fabrication method thereof
DE10203730B4 (de) * 2002-01-30 2010-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten
GB0205959D0 (en) * 2002-03-14 2002-04-24 Teer Coatings Ltd Apparatus and method for applying diamond-like carbon coatings
US6858333B2 (en) 2002-10-09 2005-02-22 Kennametal Inc. Tool with wear resistant low friction coating and method of making the same
JP2004138128A (ja) * 2002-10-16 2004-05-13 Nissan Motor Co Ltd 自動車エンジン用摺動部材
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP3891433B2 (ja) 2003-04-15 2007-03-14 日産自動車株式会社 燃料噴射弁
EP1479946B1 (de) 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Kolben für eine Brennkraftmaschine
EP1482190B1 (de) 2003-05-27 2012-12-05 Nissan Motor Company Limited Wälzkörper
JP2004360649A (ja) 2003-06-06 2004-12-24 Nissan Motor Co Ltd エンジン用ピストンピン
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
KR101003865B1 (ko) 2003-08-06 2010-12-30 닛산 지도우샤 가부시키가이샤 저마찰 접동 기구, 저마찰제 조성물 및 마찰 감소 방법
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005054617A (ja) 2003-08-08 2005-03-03 Nissan Motor Co Ltd 動弁機構
DE602004008547T2 (de) 2003-08-13 2008-05-21 Nissan Motor Co., Ltd., Yokohama Struktur zur Verbindung von einem Kolben mit einer Kurbelwelle
JP4117553B2 (ja) 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
JP4539205B2 (ja) 2003-08-21 2010-09-08 日産自動車株式会社 冷媒圧縮機
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
US7771822B2 (en) * 2004-07-09 2010-08-10 Oerlikon Trading Ag, Trubbach Conductive material comprising an Me-DLC hard material coating
DE102004041234A1 (de) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
CN101014434A (zh) * 2004-09-05 2007-08-08 摩擦控制解决方案有限公司 工作面、系统及其生产方法
KR101131241B1 (ko) * 2004-09-08 2012-03-30 빅-비올렉스 에스아 면도날 에지와 면도날 상에 층을 증착하는 방법
FR2876918B1 (fr) 2004-10-25 2007-02-16 Ela Medical Sa Systeme de connexion electrique d'une fiche de sonde a une tete de connecteur pour dispositif medical implantable
JP2006138404A (ja) 2004-11-12 2006-06-01 Kobe Steel Ltd 水系環境下での耐摩耗性に優れた摺動部材
GB0503401D0 (en) * 2005-02-18 2005-03-30 Applied Multilayers Ltd Apparatus and method for the application of material layer to display devices
JP4607687B2 (ja) * 2005-07-04 2011-01-05 株式会社神戸製鋼所 非晶質炭素膜の成膜方法
US7771858B2 (en) 2005-07-12 2010-08-10 Gm Global Technology Operations, Inc. Coated steel bipolar plates
DE502006005651D1 (de) * 2005-09-10 2010-01-28 Ixetic Hueckeswagen Gmbh Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
US7867176B2 (en) * 2005-12-27 2011-01-11 Cordis Corporation Variable stiffness guidewire
JP4735309B2 (ja) * 2006-02-10 2011-07-27 トヨタ自動車株式会社 耐キャビテーションエロージョン用部材及びその製造方法
US7785317B2 (en) 2006-03-29 2010-08-31 Codman & Shurtleff, Inc. Joined metal tubing and method of manufacture
US8690938B2 (en) * 2006-05-26 2014-04-08 DePuy Synthes Products, LLC Occlusion device combination of stent and mesh with diamond-shaped porosity
US8118859B2 (en) * 2006-05-26 2012-02-21 Codman & Shurtleff, Inc. Occlusion device combination of stent and mesh having offset parallelogram porosity
US7766935B2 (en) * 2006-06-12 2010-08-03 Codman & Shurtleff, Inc. Modified headpiece for hydraulic coil deployment system
US7670353B2 (en) * 2006-06-12 2010-03-02 Codman & Shurtleff, Inc. Modified headpiece for hydraulic coil deployment system
US8585732B2 (en) * 2006-06-14 2013-11-19 DePuy Synthes Products, LLC Retrieval device with sidewall grippers
WO2008007095A1 (en) 2006-07-13 2008-01-17 Teer Coatings Limited Coating apparatus and method
GB0613877D0 (en) * 2006-07-13 2006-08-23 Teer Coatings Ltd Coating apparatus and coating for an article
US8900771B2 (en) * 2006-08-17 2014-12-02 GM Global Technology Operations LLC Non-noble metal inexpensive conductive coatings for fuel cell bipolar plates
US7397897B2 (en) * 2006-10-23 2008-07-08 General Electric Company Composite coating for improved wear resistance for x-ray tube bearings
US7492869B1 (en) 2006-10-23 2009-02-17 General Electric Company Titanium carbide plus silver coated balls for x-ray tube bearings
US7505564B2 (en) * 2006-10-23 2009-03-17 General Electric Company Composite coating for improved wear resistance for x-ray tube bearings
US8298999B2 (en) * 2006-12-25 2012-10-30 Hitachi Metals, Ltd. Hard coating film excellent in lubrication characteristics, process for formation thereof, and tool for the plastic working of metal
GB2446593B (en) 2007-02-16 2009-07-22 Diamond Hard Surfaces Ltd Methods and apparatus for forming diamond-like coatings
US7620153B2 (en) * 2007-05-11 2009-11-17 General Electric Company Cage for x-ray tube bearings
US7492870B2 (en) * 2007-05-11 2009-02-17 General Electric Company Method for coating a carbon-carbon composite x-ray tube bearing cage
US8758957B2 (en) 2008-07-29 2014-06-24 GM Global Technology Operations LLC Graphene coated SS bipolar plates
US8497050B2 (en) 2008-07-29 2013-07-30 GM Global Technology Operations LLC Amorphous carbon coatings for fuel cell bipolar plates
CN201614406U (zh) * 2008-08-27 2010-10-27 梯尔涂层有限公司 沉积材料形成镀层的设备
EP2362000B1 (de) * 2008-10-29 2017-11-22 NTN Corporation Körper aus einem harten mehrschichtigen film und verfahren zu seiner herstellung
GB2465597A (en) * 2008-11-24 2010-05-26 Merck Patent Gmbh Magnetron sputter ion plating
US20100288631A1 (en) * 2009-05-12 2010-11-18 Solar Applied Materials Technology Corp. Ceramic sputtering target assembly and a method for producing the same
US8221934B2 (en) * 2009-05-27 2012-07-17 GM Global Technology Operations LLC Method to enhance the durability of conductive carbon coating of PEM fuel cell bipolar plates
US8685593B2 (en) 2009-09-22 2014-04-01 GM Global Technology Operations LLC Carbon based bipolar plate coatings for effective water management
US9520600B2 (en) * 2009-09-22 2016-12-13 GM Global Technology Operations LLC Conductive and hydrophilic bipolar plate coatings and method of making the same
DE102010002687C5 (de) * 2010-03-09 2015-09-10 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung zumindest der Innenfläche eines Kolbenrings sowie Kolbenring
CN102306804B (zh) * 2011-08-16 2014-11-05 上海交通大学 用于质子交换膜燃料电池双极板的高sp2杂化致密碳镀层及其制备方法
US10224189B2 (en) * 2011-09-30 2019-03-05 Teer Coatings Limited Apparatus and a method for deposition of material to form a coating
AT511605B1 (de) * 2011-12-12 2013-01-15 High Tech Coatings Gmbh Kohlenstoffbasierende beschichtung
GB201203219D0 (en) * 2012-02-24 2012-04-11 Teer Coatings Ltd Coating with conductive and corrosion resistance characteristics
RU2490032C1 (ru) * 2012-07-03 2013-08-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Саратовский государственный технический университет имени Гагарина Ю.А." (СГТУ имени Гагарина Ю.А.) Способ изготовления внутрикостного стоматологического имплантата с углеродным нанопокрытием
CA2886976C (en) * 2012-10-01 2020-01-21 Nissan Motor Co., Ltd. In-line coating device, in-line coating method, and separator
US9263224B2 (en) 2013-05-31 2016-02-16 General Electric Company Liquid bearing assembly and method of constructing same
RU2532749C9 (ru) * 2013-07-01 2015-01-10 Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук Способ получения наноразмерных слоев углерода со свойствами алмаза
RU2571559C1 (ru) * 2014-11-05 2015-12-20 Федеральное государственное бюджетное учреждение науки Институт физики металлов им. М.Н. Михеева Уральского отделения Российской академии наук (ИФМ УрО РАН) Способ изготовления внутрикостного стоматологического имплантата с углеродным нанопокрытием
FR3030492B1 (fr) * 2014-12-23 2021-09-03 Saint Gobain Vitrage comprenant une couche de protection superieure a base de carbone
FR3030490B1 (fr) * 2014-12-23 2019-12-20 Saint-Gobain Glass France Vitrage comprenant une couche de protection superieure a base de carbone hydrogene
CN104726822A (zh) * 2015-02-09 2015-06-24 洛阳理工学院 一种基于CrC镀层的高速精密球轴承及其制作方法
US10427380B2 (en) 2015-05-19 2019-10-01 Apple Inc. Methods of manufacturing corrosion resistant bimetal parts and bimetal parts formed therefrom
US20160365585A1 (en) * 2015-06-10 2016-12-15 GM Global Technology Operations LLC Low Temperature Atmospheric Pressure Atomic Layer Deposition (ALD) of Graphene on Stainless Steel Substrates as BPP Coating
WO2017009359A1 (de) 2015-07-14 2017-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Verfahren zum abscheiden einer graphenbasierten schicht auf einem substrat mittels pecvd
US10844493B2 (en) * 2016-03-01 2020-11-24 Oerlikon Surface Solutions Ag, Pfäffikon Hydrogen-free carbon coating having zirconium adhesive layer
DE102016107874A1 (de) 2016-04-28 2017-11-16 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring
RU2659537C1 (ru) * 2017-09-26 2018-07-02 Татьяна Сергеевна Картапова Способ нанесения смешанного углеродно-азотного защитного покрытия для повышения коррозионной стойкости железа
DE102018213534A1 (de) * 2018-08-10 2020-02-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Herstellung von Schichten mit verbesserter Uniformität bei Beschichtungsanlagen mit horizontal rotierender Substratführung
RU2713210C1 (ru) * 2019-01-10 2020-02-04 Федеральное государственное бюджетное образовательное учреждение высшего образования Ставропольский государственный медицинский университет Министерства здравоохранения Российской Федерации (ФГБОУ ВО СтГМУ Минздрава России) Способ изготовления имплантатов различной конфигурации из сплава марки вт-6 с алмазоподобным диэлектрическим защитным нанопокрытием
GB201914136D0 (en) 2019-10-01 2019-11-13 Teer Coatings Ltd Improvements to carbon coatings, method and apparatus for applying them, and articles bearing such coatings
CN111006006B (zh) * 2019-12-26 2023-11-03 兰州空间技术物理研究所 一种镀覆超润滑固体薄膜的齿轮传动装置
DE102020102645A1 (de) * 2020-02-03 2021-08-05 Klüber Lubrication München Se & Co. Kg Tribologisches System
KR102647411B1 (ko) * 2021-11-29 2024-03-14 한국생산기술연구원 열간등방가압 탄소 표면처리 용기 및 이를 이용한 열간등방가압 탄소 표면처리 방법

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4524106A (en) 1983-06-23 1985-06-18 Energy Conversion Devices, Inc. Decorative carbon coating and method
CA1232228A (en) 1984-03-13 1988-02-02 Tatsuro Miyasato Coating film and method and apparatus for producing the same
US4725345A (en) * 1985-04-22 1988-02-16 Kabushiki Kaisha Kenwood Method for forming a hard carbon thin film on article and applications thereof
US4647494A (en) * 1985-10-31 1987-03-03 International Business Machines Corporation Silicon/carbon protection of metallic magnetic structures
EP0244874A3 (de) 1986-05-08 1988-10-12 Kabushiki Kaisha Meidensha Lumineszentes Material, Verfahren zu seiner Herstellung und lumineszentes Halbleiterelement
US4795656A (en) 1986-08-26 1989-01-03 Kozo Iizuka, Director-General, Agency Of Industrial Science And Technology Cluster ion plating method for producing electrically conductive carbon film
DE3630418C1 (de) * 1986-09-06 1987-12-17 Kernforschungsanlage Juelich Verfahren zur Beschichtung von Werkstuecken mit amorphem,wasserstoffhaltigem Kohlenstoff
IT1196836B (it) 1986-12-12 1988-11-25 Sorin Biomedica Spa Protesi in materiale polimerico con rivestimento di carbonio biocompatibile
US4932331A (en) * 1987-10-16 1990-06-12 Canon Kabushiki Kaisha Novel single-bond carbon film and process for the production thereof
JP2548233B2 (ja) 1987-10-16 1996-10-30 松下電器産業株式会社 磁気記録媒体の製造方法
US5202156A (en) 1988-08-16 1993-04-13 Canon Kabushiki Kaisha Method of making an optical element mold with a hard carbon film
JP2734556B2 (ja) 1988-09-17 1998-03-30 日本板硝子株式会社 アモルファスカーボン膜の製造方法
US5266409A (en) * 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
GB9006073D0 (en) * 1990-03-17 1990-05-16 D G Teer Coating Services Limi Magnetron sputter ion plating
JPH0489212A (ja) 1990-08-02 1992-03-23 Canon Inc 光学素子成形用型部材
JPH06145975A (ja) 1992-03-20 1994-05-27 Komag Inc 炭素フィルムをスパタリングする方法及びその製造物
JP3336682B2 (ja) 1992-07-02 2002-10-21 住友電気工業株式会社 硬質炭素膜
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
US5237967A (en) * 1993-01-08 1993-08-24 Ford Motor Company Powertrain component with amorphous hydrogenated carbon film
US5474816A (en) * 1993-04-16 1995-12-12 The Regents Of The University Of California Fabrication of amorphous diamond films
US5830331A (en) * 1994-09-23 1998-11-03 Seagate Technology, Inc. Apparatus and method for sputtering carbon
IT1278167B1 (it) * 1995-01-25 1997-11-17 Matec Srl Gruppo di taglio e aspirazione del filo per macchina per la lavorazione di calze e calzini a piu' cadute
TW366367B (en) 1995-01-26 1999-08-11 Ibm Sputter deposition of hydrogenated amorphous carbon film
DE19502568C1 (de) 1995-01-27 1996-07-25 Fraunhofer Ges Forschung Harte, amorphe, wasserstofffreie C-Schichten und Verfahren zu ihrer Herstellung
GB9514773D0 (en) 1995-07-19 1995-09-20 Teer Coatings Ltd Methods for improving the sputter deposition of metal-sulphur coatings e.g.molybdenum disulphide(MoS2) coatings
US5837331A (en) * 1996-03-13 1998-11-17 Motorola, Inc. Amorphous multi-layered structure and method of making the same
US6063246A (en) 1997-05-23 2000-05-16 University Of Houston Method for depositing a carbon film on a membrane

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GB9826346D0 (en) 1999-01-27
GB2331998A (en) 1999-06-09
US6726993B2 (en) 2004-04-27
HK1031901A1 (en) 2001-06-29
WO1999027893B1 (en) 1999-10-07
WO1999027893A2 (en) 1999-06-10
WO1999027893A3 (en) 1999-09-02
US20030129407A1 (en) 2003-07-10
IL137319A (en) 2004-01-04
EP1036208B1 (de) 2005-01-19
EP1036208A2 (de) 2000-09-20
DE69828704T2 (de) 2006-04-06
GB2331998B (en) 2003-01-15
AU1344399A (en) 1999-06-16
DE69828704D1 (de) 2005-02-24
GB2331998A9 (en) 1900-01-01

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