ATE294362T1 - Schleuse für reinraum-anlagen - Google Patents
Schleuse für reinraum-anlagenInfo
- Publication number
- ATE294362T1 ATE294362T1 AT00110416T AT00110416T ATE294362T1 AT E294362 T1 ATE294362 T1 AT E294362T1 AT 00110416 T AT00110416 T AT 00110416T AT 00110416 T AT00110416 T AT 00110416T AT E294362 T1 ATE294362 T1 AT E294362T1
- Authority
- AT
- Austria
- Prior art keywords
- airlock
- lock
- wall
- double skinned
- excess
- Prior art date
Links
- 239000000428 dust Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F9/00—Use of air currents for screening, e.g. air curtains
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE29909803U DE29909803U1 (de) | 1999-06-04 | 1999-06-04 | Schleuse für Reinraum-Anlagen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE294362T1 true ATE294362T1 (de) | 2005-05-15 |
Family
ID=8074389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT00110416T ATE294362T1 (de) | 1999-06-04 | 2000-05-16 | Schleuse für reinraum-anlagen |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1058065B1 (de) |
| AT (1) | ATE294362T1 (de) |
| DE (2) | DE29909803U1 (de) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3285693A (en) * | 1966-11-15 | Apparatus for decontaminating personnel | ||
| JPS6071837A (ja) * | 1983-09-29 | 1985-04-23 | Hitachi Plant Eng & Constr Co Ltd | エアシヤワ−装置 |
| JPS62106247A (ja) * | 1985-11-05 | 1987-05-16 | Hitachi Ltd | エアジエツトノズルおよびそれを用いたエアシヤワ−装置 |
| DE3604422A1 (de) * | 1986-02-13 | 1987-08-20 | Kessler & Luch Gmbh | Vorrichtung zum saeubern kontaminierter oberflaechen mittels stroemender luft |
| JPS62225838A (ja) * | 1986-03-26 | 1987-10-03 | Nippon Air Curtain Kk | エア−シヤワ−装置 |
| JP3246182B2 (ja) * | 1994-04-28 | 2002-01-15 | 日立プラント建設株式会社 | エアシャワー装置 |
-
1999
- 1999-06-04 DE DE29909803U patent/DE29909803U1/de not_active Expired - Lifetime
-
2000
- 2000-05-16 AT AT00110416T patent/ATE294362T1/de not_active IP Right Cessation
- 2000-05-16 EP EP00110416A patent/EP1058065B1/de not_active Expired - Lifetime
- 2000-05-16 DE DE50010142T patent/DE50010142D1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1058065B1 (de) | 2005-04-27 |
| EP1058065A2 (de) | 2000-12-06 |
| EP1058065A3 (de) | 2002-12-18 |
| DE50010142D1 (de) | 2005-06-02 |
| DE29909803U1 (de) | 2000-08-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| REN | Ceased due to non-payment of the annual fee |