ATE295533T1 - Temperaturstabiler saw sensor mit elastischen konstanten dritter ordnung - Google Patents

Temperaturstabiler saw sensor mit elastischen konstanten dritter ordnung

Info

Publication number
ATE295533T1
ATE295533T1 AT02801409T AT02801409T ATE295533T1 AT E295533 T1 ATE295533 T1 AT E295533T1 AT 02801409 T AT02801409 T AT 02801409T AT 02801409 T AT02801409 T AT 02801409T AT E295533 T1 ATE295533 T1 AT E295533T1
Authority
AT
Austria
Prior art keywords
substrate
temperature
elastic constants
variation
order elastic
Prior art date
Application number
AT02801409T
Other languages
English (en)
Inventor
Victor Alexandrovich Kalinin
Mark Lee
Original Assignee
Transense Technologies Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0124831A external-priority patent/GB0124831D0/en
Application filed by Transense Technologies Plc filed Critical Transense Technologies Plc
Application granted granted Critical
Publication of ATE295533T1 publication Critical patent/ATE295533T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G01D5/485—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means using magnetostrictive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/106—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Measurement Of Force In General (AREA)
  • Micromachines (AREA)
AT02801409T 2001-10-16 2002-10-16 Temperaturstabiler saw sensor mit elastischen konstanten dritter ordnung ATE295533T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0124831A GB0124831D0 (en) 2001-10-16 2001-10-16 Saw sensor with improved temperature stability
GB0204940A GB2381069A (en) 2001-10-16 2002-03-01 SAW sensor with improved temperature stability
PCT/GB2002/004669 WO2003034013A1 (en) 2001-10-16 2002-10-16 Temperature stable saw sensor with third-order elastic constants

Publications (1)

Publication Number Publication Date
ATE295533T1 true ATE295533T1 (de) 2005-05-15

Family

ID=26246664

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02801409T ATE295533T1 (de) 2001-10-16 2002-10-16 Temperaturstabiler saw sensor mit elastischen konstanten dritter ordnung

Country Status (9)

Country Link
US (1) US7202589B2 (de)
EP (1) EP1438555B1 (de)
JP (1) JP2005505775A (de)
CN (1) CN1267715C (de)
AT (1) ATE295533T1 (de)
BR (1) BR0212721A (de)
DE (1) DE60204161T2 (de)
TW (1) TWI251077B (de)
WO (1) WO2003034013A1 (de)

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FR2864618B1 (fr) * 2003-12-24 2006-03-03 Temex Sa Capteur de temperature ou de temperature et de pression interrogeable a distance
US8015886B2 (en) * 2004-08-16 2011-09-13 Transense Technologies Plc Torque measurement within a powertrain
US7293476B2 (en) * 2004-08-20 2007-11-13 Honeywell International Inc. Power sensor module for engine transmission and driveline applications
GB0421383D0 (en) * 2004-09-27 2004-10-27 Melexis Nv Monitoring device
US7165455B2 (en) 2004-12-18 2007-01-23 Honeywell International Inc. Surface acoustic wave sensor methods and systems
US7347106B2 (en) * 2005-04-26 2008-03-25 Honeywell International Inc. Torque sensor with inverted sensing element and integral shaft housing
GB2426336A (en) * 2005-05-20 2006-11-22 Transense Technologies Plc SAW based torque and temperature sensor
GB0511458D0 (en) * 2005-06-06 2005-07-13 Melexis Nv Monitoring device for a rotatable shaft
US7095198B1 (en) * 2005-06-16 2006-08-22 Honeywell International Inc. Speed sensor for a power sensor module
US20070028692A1 (en) * 2005-08-05 2007-02-08 Honeywell International Inc. Acoustic wave sensor packaging for reduced hysteresis and creep
US20070028700A1 (en) * 2005-08-08 2007-02-08 Liu James Z Acoustic wave torque sensor
US7395724B2 (en) * 2005-08-22 2008-07-08 Honeywell International Inc. Torque sensor packaging systems and methods
US7389682B2 (en) * 2006-03-17 2008-06-24 Gm Global Technology Operations, Inc. Method and apparatus for engine torque sensing
US20080196478A1 (en) * 2007-02-20 2008-08-21 Honeywell International Inc. Transition metals doped zeolites for saw based CO2 gas sensor applications
GB2450168B (en) * 2007-06-15 2012-03-07 Transense Technologies Plc A SAW torque and temperature sensor with improved temperature sensitivity
JP2009109495A (ja) * 2007-10-29 2009-05-21 Schott Ag ひずみセンサ用パッケージ
US8132314B2 (en) 2008-10-29 2012-03-13 Honeywell International Inc. Method and system for packaging and mounting surface acoustic wave sensor elements to a flex plate
US9408537B2 (en) * 2008-11-14 2016-08-09 At&T Intellectual Property I, Lp System and method for performing a diagnostic analysis of physiological information
GB2480628A (en) * 2010-05-25 2011-11-30 Horstman Defence Systems Ltd A suspension unit for use on a tracked vehicle including a load sensor
KR101711204B1 (ko) * 2010-10-29 2017-03-13 삼성전자주식회사 단일입력 다중출력 표면탄성파 디바이스
DE102010056053B4 (de) * 2010-12-23 2014-12-18 Epcos Ag Drehmomentsensor und Anordnung mit einem Gegenstand und einem Drehmomentsensor
US20120165616A1 (en) * 2010-12-27 2012-06-28 Nir Geva Portable monitoring unit and a method for monitoring a monitored person
CN102288339A (zh) * 2011-05-04 2011-12-21 北京理工大学 温度、振动自补偿的无源无线声表面波扭矩传感器
US9673777B2 (en) * 2011-11-17 2017-06-06 Transense Technologies Plc Quartz substrate orientations for compact monolithic differential temperature sensor, and sensors using same
GB2508186B (en) 2012-11-22 2017-09-20 Transense Tech Plc SAW sensor arrangements
JP5833612B2 (ja) * 2013-01-21 2015-12-16 株式会社日本自動車部品総合研究所 トルクセンサ及びその製造方法
DE102013209262A1 (de) 2013-05-17 2014-11-20 Robert Bosch Gmbh Motorisch und mit Muskelkraft betreibbares Fahrzeug mit verbessertem Drehmomentsensor
CN103728070A (zh) * 2014-01-10 2014-04-16 中国船舶重工集团公司第七0四研究所 自动补偿温度和弯矩影响的扭矩测试系统
DE102014218699A1 (de) * 2014-09-17 2016-03-17 Continental Teves Ag & Co. Ohg Batteriesensor basierend auf akustischen Oberflächenwellen
JP6360428B2 (ja) * 2014-11-17 2018-07-18 株式会社Ｓｏｋｅｎ トルクセンサ
US10005551B2 (en) 2015-07-06 2018-06-26 General Electric Company Passive wireless sensors for rotary machines
CN105716759A (zh) * 2016-02-02 2016-06-29 上海交通大学 基于表面横波的转轴扭矩测量装置
US10450863B2 (en) 2016-06-02 2019-10-22 General Electric Company Turbine engine shaft torque sensing
CN106840056A (zh) * 2016-12-28 2017-06-13 电子科技大学 一种双声表面波应变传感器及其设计方法
CN106895803A (zh) * 2017-02-20 2017-06-27 电子科技大学 一种利用两个声表面波谐振器分离温度影响的装置及方法
CN107289883B (zh) * 2017-07-25 2019-09-03 中国科学院声学研究所 一种差分式谐振器型的无线无源声表面波应变传感器
US11621694B2 (en) * 2018-12-06 2023-04-04 Texas Instruments Incorporated Lamb wave resonator-based torque sensor
FR3094484B1 (fr) * 2019-03-29 2021-07-16 Frecnsys Dispositif résonateur
DE102020104135B4 (de) * 2020-02-18 2023-09-14 Thyssenkrupp Ag OFW-Drehmomentsensor für eine Lenkwelle einer elektromechanischen Hilfskraftlenkung eines Kraftfahrzeuges
FR3114875B1 (fr) * 2020-10-01 2023-01-20 Frecnsys Dispositif à résonateurs

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GB1449841A (en) * 1973-04-09 1976-09-15 Mullard Ltd Oscillators
US4323809A (en) * 1979-12-19 1982-04-06 The United States Of America As Represented By The Secretary Of The Air Force Surface acoustic wave substrate having orthogonal temperature compensated propagation directions and device applications
US4325038A (en) * 1980-09-26 1982-04-13 Bell Telephone Laboratories, Incorporated SAW Resonator filters with improved temperature stability
US4434383A (en) * 1981-02-09 1984-02-28 Motorola Inc. Temperature stable surface acoustic wave device
US4609843A (en) * 1983-01-27 1986-09-02 The United States Of America As Represented By The Secretary Of The Air Force Temperature compensated berlinite for surface acoustic wave devices
US4602182A (en) * 1984-05-25 1986-07-22 The United States Of America As Represented By The Secretary Of The Air Force X33 cut quartz for temperature compensated SAW devices
US4661738A (en) * 1985-09-26 1987-04-28 Crystal Technology, Inc. Compensation techniques for temperature effects and non-uniform amplitude distributions in saw devices
GB9004822D0 (en) * 1990-03-03 1990-04-25 Lonsdale Anthony Method and apparatus for measuring torque
WO1996010293A1 (en) * 1994-09-29 1996-04-04 Seiko Epson Corporation Saw device
GB2358927A (en) * 1999-11-01 2001-08-08 Transense Technologies Plc Torque measurement using single Surface Acoustic Wave (SAW) device

Also Published As

Publication number Publication date
DE60204161T2 (de) 2005-11-17
US7202589B2 (en) 2007-04-10
CN1571919A (zh) 2005-01-26
TW200305009A (en) 2003-10-16
US20050001511A1 (en) 2005-01-06
TWI251077B (en) 2006-03-11
BR0212721A (pt) 2004-10-05
CN1267715C (zh) 2006-08-02
EP1438555B1 (de) 2005-05-11
DE60204161D1 (de) 2005-06-16
EP1438555A1 (de) 2004-07-21
JP2005505775A (ja) 2005-02-24
WO2003034013A1 (en) 2003-04-24

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