ATE29626T1 - Vorrichtung zum automatischen, praezisen transportieren von gegenstaenden, beispielsweise von halbleiterscheiben. - Google Patents
Vorrichtung zum automatischen, praezisen transportieren von gegenstaenden, beispielsweise von halbleiterscheiben.Info
- Publication number
- ATE29626T1 ATE29626T1 AT84303313T AT84303313T ATE29626T1 AT E29626 T1 ATE29626 T1 AT E29626T1 AT 84303313 T AT84303313 T AT 84303313T AT 84303313 T AT84303313 T AT 84303313T AT E29626 T1 ATE29626 T1 AT E29626T1
- Authority
- AT
- Austria
- Prior art keywords
- objects
- automatic
- engagement
- example semiconductor
- engagement element
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3206—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S294/00—Handling: hand and hoist-line implements
- Y10S294/907—Sensor controlled device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
- Y10S414/138—Wafers positioned vertically within cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Position Or Direction (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/496,460 US4603897A (en) | 1983-05-20 | 1983-05-20 | Vacuum pickup apparatus |
| EP84303313A EP0134621B1 (de) | 1983-05-20 | 1984-05-16 | Vorrichtung zum automatischen, präzisen Transportieren von Gegenständen, beispielsweise von Halbleiterscheiben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE29626T1 true ATE29626T1 (de) | 1987-09-15 |
Family
ID=23972722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT84303313T ATE29626T1 (de) | 1983-05-20 | 1984-05-16 | Vorrichtung zum automatischen, praezisen transportieren von gegenstaenden, beispielsweise von halbleiterscheiben. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4603897A (de) |
| EP (1) | EP0134621B1 (de) |
| JP (1) | JPH0630022B2 (de) |
| AT (1) | ATE29626T1 (de) |
| DE (1) | DE3466134D1 (de) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4983093A (en) * | 1982-05-24 | 1991-01-08 | Proconics International, Inc. | Wafer transfer apparatus |
| US4682928A (en) * | 1982-05-24 | 1987-07-28 | Proconics International, Inc. | Wafer transfer apparatus |
| USRE33341E (en) * | 1983-05-23 | 1990-09-18 | ASQ Technology, Inc. | Wafer transfer apparatus |
| JPS60153788U (ja) * | 1984-03-21 | 1985-10-14 | シャープ株式会社 | 位置検知センサ付ロボツトハンド |
| US4765793A (en) * | 1986-02-03 | 1988-08-23 | Proconics International, Inc. | Apparatus for aligning circular objects |
| US4701096A (en) * | 1986-03-05 | 1987-10-20 | Btu Engineering Corporation | Wafer handling station |
| US4722659A (en) * | 1986-05-16 | 1988-02-02 | Thermco Systems, Inc. | Semiconductor wafer carrier transport apparatus |
| US4744713A (en) * | 1986-05-21 | 1988-05-17 | Texas Instruments Incorporated | Misalignment sensor for a wafer feeder assembly |
| JPS636857A (ja) * | 1986-06-26 | 1988-01-12 | Fujitsu Ltd | ウエ−ハ移し替え装置 |
| US4886412A (en) * | 1986-10-28 | 1989-12-12 | Tetron, Inc. | Method and system for loading wafers |
| DE3702775A1 (de) * | 1987-01-30 | 1988-08-11 | Leybold Ag | Vorrichtung zum quasi-kontinuierlichen behandeln von substraten |
| US4778332A (en) * | 1987-02-09 | 1988-10-18 | The Perkin-Elmer Corporation | Wafer flip apparatus |
| JPH01281231A (ja) * | 1987-10-22 | 1989-11-13 | Fujitsu Ltd | 試料保持装置 |
| US4986729A (en) * | 1989-04-24 | 1991-01-22 | Proconics International, Inc. | Wafer transfer apparatus |
| JPH03125453A (ja) * | 1989-10-09 | 1991-05-28 | Toshiba Corp | 半導体ウエハ移送装置 |
| FR2656598B1 (fr) * | 1989-12-29 | 1992-03-27 | Commissariat Energie Atomique | Dispositif de chargement et de dechargement d'objets plats dans une cassette de rangement. |
| JPH03273663A (ja) * | 1990-03-23 | 1991-12-04 | Canon Inc | 基板保持装置 |
| TW201364B (de) * | 1991-04-09 | 1993-03-01 | Ito Co Ltd | |
| JPH0547907A (ja) * | 1991-08-12 | 1993-02-26 | Nec Corp | 半導体装置の製造装置 |
| US5409348A (en) * | 1992-05-15 | 1995-04-25 | Tokyo Electron Limited | Substrate transfer method |
| US5634764A (en) * | 1994-08-12 | 1997-06-03 | Replogle; Charles R. | Workpiece placement system and method having a vacuum holding the workpiece |
| US5988971A (en) * | 1997-07-09 | 1999-11-23 | Ade Optical Systems Corporation | Wafer transfer robot |
| US6450755B1 (en) * | 1998-07-10 | 2002-09-17 | Equipe Technologies | Dual arm substrate handling robot with a batch loader |
| WO2000054941A1 (en) * | 1999-03-16 | 2000-09-21 | Ade Corporation | Wafer gripping fingers |
| US6209293B1 (en) | 1999-06-25 | 2001-04-03 | Box Loader, Llc | Packing apparatus for packing multiple layers of containers into a receptacle |
| US7175214B2 (en) * | 2000-03-16 | 2007-02-13 | Ade Corporation | Wafer gripping fingers to minimize distortion |
| JP4671724B2 (ja) * | 2005-03-16 | 2011-04-20 | 信越半導体株式会社 | 半導体ウェーハの保持用グリッパー及び保持方法並びに形状測定装置 |
| US20070032902A1 (en) * | 2005-08-04 | 2007-02-08 | Dell Products L.P. | Method and apparatus for transporting items |
| US8145349B2 (en) * | 2008-05-14 | 2012-03-27 | Formfactor, Inc. | Pre-aligner search |
| CN101992925A (zh) * | 2010-11-10 | 2011-03-30 | 无锡真木物流设备有限公司 | 可移动货架的自动纠偏结构 |
| KR20180001613U (ko) * | 2016-11-22 | 2018-05-30 | 박민정 | 소방용 스마트 헬멧 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3054036A (en) * | 1958-08-07 | 1962-09-11 | Western Electric Co | Automatic positioning apparatus |
| US3272350A (en) * | 1964-09-25 | 1966-09-13 | Westinghouse Electric Corp | Method and apparatus for semiconductor wafer handling |
| US3581375A (en) * | 1969-03-07 | 1971-06-01 | Ibm | Method and apparatus for manufacturing integrated circuits |
| US3697112A (en) * | 1971-04-15 | 1972-10-10 | Eaton Yale & Towne | Vacuum pick up head |
| US3730595A (en) * | 1971-11-30 | 1973-05-01 | Ibm | Linear carrier sender and receiver |
| US3881605A (en) * | 1973-06-29 | 1975-05-06 | Ibm | Object orienting device to assist robot manipulator |
| JPS5080765A (de) * | 1973-11-14 | 1975-07-01 | ||
| US4156835A (en) * | 1974-05-29 | 1979-05-29 | Massachusetts Institute Of Technology | Servo-controlled mobility device |
| GB1513444A (en) * | 1974-09-06 | 1978-06-07 | Chemical Reactor Equip As | Pick-up devices for lifting and moving semiconductor wafers |
| DD120400A1 (de) * | 1975-02-04 | 1976-06-12 | ||
| US4027246A (en) * | 1976-03-26 | 1977-05-31 | International Business Machines Corporation | Automated integrated circuit manufacturing system |
| SE402540B (sv) * | 1976-08-13 | 1978-07-10 | Asea Ab | Forfarande och anordning for att vid en givarstyrd industrirobot astadkomma en approximativ transformation mellan givarens och robotarmens olika koordinatsystem for styrning av roboten inom ett forutbestemt ... |
| US4178113A (en) * | 1977-12-05 | 1979-12-11 | Macronetics, Inc. | Buffer storage apparatus for semiconductor wafer processing |
| US4266905A (en) * | 1979-04-20 | 1981-05-12 | Board Of Regents For Education Of The State Of Rhode Island | Apparatus for acquiring workpieces from a storage bin or the like |
| SU881668A1 (ru) * | 1979-06-04 | 1981-11-15 | Ленинградский Ордена Ленина Политехнический Институт Им.М.И.Калинина | Устройство дл управлени адаптивным роботом |
| SU830292A1 (ru) * | 1979-07-02 | 1981-05-15 | Предприятие П/Я В-8670 | Устройство дл управлени манипу-л ТОРОМ |
| US4311427A (en) * | 1979-12-21 | 1982-01-19 | Varian Associates, Inc. | Wafer transfer system |
| DE3005139A1 (de) * | 1980-02-12 | 1981-08-20 | Jungheinrich Unternehmensverwaltung Kg, 2000 Hamburg | Verfahren fuer eine optimale positioniergeschwindigkeit von numerisch gesteuerten achsen von handhabungsgeraeten und anordnung zur durchfuehrung des verfahrens |
| JPS56122724A (en) * | 1980-02-25 | 1981-09-26 | Sanyo Electric Co Ltd | Goods conveyor |
| JPS643666Y2 (de) * | 1980-04-28 | 1989-01-31 | ||
| DD151387A1 (de) * | 1980-06-02 | 1981-10-14 | Erich Adler | Verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte |
| US4356554A (en) * | 1980-09-12 | 1982-10-26 | Thermwood Corporation | Method and apparatus for compensating for system error in an industrial robot control |
| JPS57132984A (en) * | 1981-02-05 | 1982-08-17 | Matsushita Electric Industrial Co Ltd | Method of shifting part |
| JPS5815352U (ja) * | 1981-07-22 | 1983-01-31 | 株式会社東芝 | 位置決め修正装置 |
| US4392766A (en) * | 1981-09-21 | 1983-07-12 | General Electric Company | Automatic feeding apparatus |
| NL8201532A (nl) * | 1982-04-13 | 1983-11-01 | Philips Nv | Werkwijze en inrichting voor het controleren van de aanwezigheid respectievelijk afwezigheid van een voorwerp op het uiteinde van een vacuuem-opnemer. |
| US4493606A (en) * | 1982-05-24 | 1985-01-15 | Proconics International, Inc. | Wafer transfer apparatus |
| US4513957A (en) * | 1983-05-03 | 1985-04-30 | Ncr Corporation | Item dispensing system |
-
1983
- 1983-05-20 US US06/496,460 patent/US4603897A/en not_active Expired - Lifetime
-
1984
- 1984-05-16 AT AT84303313T patent/ATE29626T1/de not_active IP Right Cessation
- 1984-05-16 EP EP84303313A patent/EP0134621B1/de not_active Expired
- 1984-05-16 DE DE8484303313T patent/DE3466134D1/de not_active Expired
- 1984-05-21 JP JP59102465A patent/JPH0630022B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59231617A (ja) | 1984-12-26 |
| US4603897A (en) | 1986-08-05 |
| EP0134621A1 (de) | 1985-03-20 |
| JPH0630022B2 (ja) | 1994-04-20 |
| DE3466134D1 (en) | 1987-10-15 |
| EP0134621B1 (de) | 1987-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |