ATE300060T1 - Verfahren und vorrichtung für selbsterzeugende herstellungsstationen - Google Patents

Verfahren und vorrichtung für selbsterzeugende herstellungsstationen

Info

Publication number
ATE300060T1
ATE300060T1 AT01935776T AT01935776T ATE300060T1 AT E300060 T1 ATE300060 T1 AT E300060T1 AT 01935776 T AT01935776 T AT 01935776T AT 01935776 T AT01935776 T AT 01935776T AT E300060 T1 ATE300060 T1 AT E300060T1
Authority
AT
Austria
Prior art keywords
assembly
preferred
stations
scale
srms
Prior art date
Application number
AT01935776T
Other languages
English (en)
Inventor
Ralph C Merkle
Eric G Parker
George D Skidmore
Original Assignee
Zyvex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zyvex Corp filed Critical Zyvex Corp
Application granted granted Critical
Publication of ATE300060T1 publication Critical patent/ATE300060T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4188—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by CIM planning or realisation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41805—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by assembly
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40261—Self reproducing, replicating fabrication machine, tools, structure, info for this
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/882—Assembling of separate components, e.g. by attaching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Micromachines (AREA)
  • Peptides Or Proteins (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
  • Aerials With Secondary Devices (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Road Signs Or Road Markings (AREA)
  • Prostheses (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Small-Scale Networks (AREA)
  • Lift-Guide Devices, And Elevator Ropes And Cables (AREA)
AT01935776T 2000-05-11 2001-05-10 Verfahren und vorrichtung für selbsterzeugende herstellungsstationen ATE300060T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/569,330 US6510359B1 (en) 2000-05-11 2000-05-11 Method and system for self-replicating manufacturing stations
PCT/US2001/040719 WO2001086361A2 (en) 2000-05-11 2001-05-10 Method and system for self-replicating manufacturing stations

Publications (1)

Publication Number Publication Date
ATE300060T1 true ATE300060T1 (de) 2005-08-15

Family

ID=24274975

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01935776T ATE300060T1 (de) 2000-05-11 2001-05-10 Verfahren und vorrichtung für selbsterzeugende herstellungsstationen

Country Status (9)

Country Link
US (1) US6510359B1 (de)
EP (1) EP1281108B1 (de)
JP (1) JP2003533059A (de)
KR (1) KR100550817B1 (de)
CN (1) CN1636169A (de)
AT (1) ATE300060T1 (de)
AU (1) AU2001261838A1 (de)
DE (1) DE60112074T2 (de)
WO (1) WO2001086361A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6679055B1 (en) * 2002-01-31 2004-01-20 Zyvex Corporation Electrothermal quadmorph microactuator
US7309476B2 (en) * 2002-07-18 2007-12-18 Chevron U.S.A. Inc. Diamondoid-based components in nanoscale construction
EP1587594B1 (de) * 2003-01-15 2012-01-18 Andrzej Pietrzyk System von dreidimensionalen mehrzweckelementen
JP2007148749A (ja) * 2005-11-28 2007-06-14 Fujifilm Corp 仕様修正装置および仕様修正プログラム
WO2016179435A1 (en) * 2015-05-07 2016-11-10 Massachusetts Institute Of Technology Self-assembling assemblers
CN116009503B (zh) * 2023-03-22 2023-06-20 智昌科技集团股份有限公司 基于超循环网络的自组织三元智能制造控制系统
CN119165817B (zh) * 2024-09-05 2025-05-27 深圳市海铭德科技有限公司 一种可快速复制的数字化工厂和复制方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4740410A (en) 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US5660680A (en) 1994-03-07 1997-08-26 The Regents Of The University Of California Method for fabrication of high vertical aspect ratio thin film structures
US5645684A (en) 1994-03-07 1997-07-08 The Regents Of The University Of California Multilayer high vertical aspect ratio thin film structures
US5659477A (en) * 1994-12-28 1997-08-19 Collins; Charles Michael Self reproducing fundamental fabricating machines (F-Units)
JP2826635B2 (ja) * 1996-10-08 1998-11-18 工業技術院長 三次元構造物の自動組立体
DE19708472C2 (de) 1997-02-20 1999-02-18 Atotech Deutschland Gmbh Herstellverfahren für chemische Mikroreaktoren
US5994159A (en) * 1997-12-22 1999-11-30 Lucent Technologies, Inc. Self-assemblying micro-mechanical device
US6233502B1 (en) * 1998-10-16 2001-05-15 Xerox Corporation Fault tolerant connection system for transiently connectable modular elements
US6185107B1 (en) * 1998-12-23 2001-02-06 Raytheon Company MEMS based tile assemblies and methods of fabrication

Also Published As

Publication number Publication date
EP1281108B1 (de) 2005-07-20
WO2001086361A2 (en) 2001-11-15
DE60112074D1 (de) 2005-08-25
KR100550817B1 (ko) 2006-02-10
CN1636169A (zh) 2005-07-06
JP2003533059A (ja) 2003-11-05
WO2001086361A3 (en) 2002-06-20
KR20030007592A (ko) 2003-01-23
EP1281108A2 (de) 2003-02-05
US6510359B1 (en) 2003-01-21
DE60112074T2 (de) 2006-04-20
AU2001261838A1 (en) 2001-11-20

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Legal Events

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