ATE303656T1 - Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma - Google Patents

Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma

Info

Publication number
ATE303656T1
ATE303656T1 AT00971478T AT00971478T ATE303656T1 AT E303656 T1 ATE303656 T1 AT E303656T1 AT 00971478 T AT00971478 T AT 00971478T AT 00971478 T AT00971478 T AT 00971478T AT E303656 T1 ATE303656 T1 AT E303656T1
Authority
AT
Austria
Prior art keywords
container
cavity
low pressure
cover
pressure plasma
Prior art date
Application number
AT00971478T
Other languages
English (en)
Inventor
Jean-Michel Rius
Original Assignee
Sidel Actis Services
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sidel Actis Services filed Critical Sidel Actis Services
Application granted granted Critical
Publication of ATE303656T1 publication Critical patent/ATE303656T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Discharge Heating (AREA)
  • Plasma Technology (AREA)
  • Closures For Containers (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Furnace Details (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
AT00971478T 1999-10-25 2000-10-23 Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma ATE303656T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9913638A FR2799994B1 (fr) 1999-10-25 1999-10-25 Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne
PCT/FR2000/002941 WO2001031680A1 (fr) 1999-10-25 2000-10-23 Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression

Publications (1)

Publication Number Publication Date
ATE303656T1 true ATE303656T1 (de) 2005-09-15

Family

ID=9551574

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00971478T ATE303656T1 (de) 1999-10-25 2000-10-23 Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma

Country Status (14)

Country Link
US (1) US6328805B1 (de)
EP (1) EP1228522B1 (de)
JP (1) JP3663174B2 (de)
KR (1) KR100472217B1 (de)
CN (1) CN1253917C (de)
AT (1) ATE303656T1 (de)
AU (1) AU1032801A (de)
BR (1) BR0014986A (de)
CA (1) CA2388335A1 (de)
DE (1) DE60022377T2 (de)
ES (1) ES2248135T3 (de)
FR (1) FR2799994B1 (de)
MX (1) MXPA02004041A (de)
WO (1) WO2001031680A1 (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10054653A1 (de) * 2000-11-03 2002-05-08 Ver Foerderung Inst Kunststoff Verfahren und Vorrichtung zum Beschichten von Hohlkörper
EP1229068B1 (de) * 2001-02-06 2005-09-14 Shibuya Kogyo Co., Ltd. Verfahren und Vorrichtung zum Modifizieren der inneren Oberfläche von Behältern aus Kunststoff
DE10202311B4 (de) * 2002-01-23 2007-01-04 Schott Ag Vorrichtung und Verfahren zur Plasmabehandlung von dielektrischen Körpern
DE10253513B4 (de) * 2002-11-16 2005-12-15 Schott Ag Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
AU2003233771A1 (en) * 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treating workpieces
DE10224547B4 (de) 2002-05-24 2020-06-25 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
AU2003229287A1 (en) * 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treatment of work pieces
CN100412230C (zh) * 2002-05-24 2008-08-20 肖特股份公司 用于等离子涂层的多位涂层装置和方法
EP1507889B1 (de) 2002-05-24 2014-08-06 KHS Corpoplast GmbH Verfahren und vorrichtung zur plasmabehandlung von werkstücken
DE10228898B4 (de) * 2002-06-27 2005-01-27 Schott Ag Vorrichtung und Verfahren für CVD-Behandlungen
AU2003229285A1 (en) 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treating workpieces
CN1572901A (zh) * 2002-05-24 2005-02-02 肖特·格拉斯公司 化学气相沉积处理装置
JP4977316B2 (ja) 2002-05-24 2012-07-18 カーハーエス コーポプラスト ゲーエムベーハー 工作物のプラズマ処理方法および装置
JP2005531688A (ja) * 2002-05-24 2005-10-20 ショット アーゲー ワークピースの処理装置および処理方法
AU2003229286A1 (en) * 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for the plasma treatment of workpieces
AU2003233770A1 (en) 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treating workpieces
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Ｄｌｃ膜コーティングプラスチック容器の製造装置
DE10236683B4 (de) * 2002-08-09 2016-05-12 Krones Aktiengesellschaft Vorrichtung zur Plasmabehandlung von Hohlkörpern, insbesondere Flaschen
DE10242086A1 (de) 2002-09-11 2004-04-15 Sig Technology Ltd. Behälter zur Verpackung von Produkten, Vorrichtung zur Verarbeitung von Kunstoff sowie Verfahren zur Behälterherstellung
FR2847912B1 (fr) * 2002-11-28 2005-02-18 Sidel Sa Procede et dispositif pour deposer par plasma micro-ondes un revetement sur une face d'un recipient en materiau thermoplastique
DE10300734A1 (de) * 2003-01-11 2004-07-22 Sig Technology Ltd. Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
US7513953B1 (en) * 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
FR2871091B1 (fr) * 2004-06-03 2008-01-18 Commissariat Energie Atomique Procede de fabrication d'une vitesse d'etancheite d'un reservoir de type iv et reservoir de type iv
FR2872148B1 (fr) * 2004-06-24 2006-09-22 Sidel Sas Machine de traitement de bouteilles equipee d'une cartouche de raccordement interchangeable
FR2872555B1 (fr) * 2004-06-30 2006-10-06 Sidel Sas Circuit de pompage a vide et machine de traitement de recipients equipee de ce circuit
FR2889204B1 (fr) * 2005-07-26 2007-11-30 Sidel Sas Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant une ligne de gaz isolee par electrovanne
FR2892425B1 (fr) * 2005-10-24 2008-01-04 Sidel Sas Appareil refroidi pour le depot par plasma d'une couche barriere sur un recipient.
FR2892652B1 (fr) * 2005-10-28 2009-06-05 Sidel Sas Machine rotative de traitement de recipients
FR2893622B1 (fr) 2005-11-24 2007-12-21 Commissariat Energie Atomique Composition a base de caprolactame,procede de fabrication d'un element d'etancheite,et reservoir
EP1884249A1 (de) * 2006-08-01 2008-02-06 L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Verfahren und Vorrichtung zur Plasmabehandlung von Kunststoffflaschen
FR2907036B1 (fr) * 2006-10-11 2008-12-26 Sidel Participations Installation de depot, au moyen d'un plasma micro-ondes, d'un revetement barriere interne dans des recipients thermoplastiques
FR2907037B1 (fr) * 2006-10-13 2009-01-09 Sidel Participations Installation de depot,au moyen d'un plasma micro-ondes,d'un revetement barriere interne dans des recipients thermoplastiques
DE102007017938C5 (de) 2007-04-13 2017-09-21 Khs Gmbh Behälterherstellungsvorrichtung und Herstellverfahren für Formkörper
CN101778719B (zh) * 2007-08-14 2013-05-01 东洋制罐株式会社 具有真空蒸镀膜的生物降解性树脂容器和真空蒸镀膜的形成方法
DE102007045141A1 (de) 2007-09-20 2009-04-02 Krones Ag Plasmabehandlungsanlage
DE102007045216A1 (de) 2007-09-21 2009-04-02 Khs Corpoplast Gmbh & Co. Kg Vorrichtung zur Plasmabehandlung von Werkstücken
DE102008016923A1 (de) 2008-03-31 2009-10-01 Khs Corpoplast Gmbh & Co. Kg Vorrichtung zur Plasmabehandlung von Werkstücken
FR2932395B1 (fr) * 2008-06-13 2011-06-10 Sidel Participations Procede de protection d'appareil(s) de mesure ou autre(s)
DE102010012501A1 (de) 2010-03-12 2011-09-15 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010023119A1 (de) 2010-06-07 2011-12-22 Khs Corpoplast Gmbh Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010048960A1 (de) 2010-10-18 2012-04-19 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010055155A1 (de) 2010-12-15 2012-06-21 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
US10081864B2 (en) 2011-03-10 2018-09-25 Kaiatech, Inc Method and apparatus for treating containers
DE102011104730A1 (de) 2011-06-16 2012-12-20 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
DE102015121773B4 (de) 2015-12-14 2019-10-24 Khs Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
DE102016105548A1 (de) 2016-03-24 2017-09-28 Khs Plasmax Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
KR101965317B1 (ko) * 2017-07-14 2019-08-07 손부경 진공 밀폐 케이스
CN108131274B (zh) * 2017-11-15 2019-10-15 中国科学院合肥物质科学研究院 一种真空抽气系统
DE102018132609A1 (de) * 2018-12-18 2020-06-18 Krones Ag Vorrichtung und Verfahren zum Beschichten von Behältnissen
FR3151606A1 (fr) 2023-07-28 2025-01-31 Sidel Participations Installation pour le traitement de récipients par plasma à haute cadence

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3632748A1 (de) 1986-09-26 1988-04-07 Ver Foerderung Inst Kunststoff Verfahren zur beschichtung von hohlkoerpern
DE4316349C2 (de) 1993-05-15 1996-09-05 Ver Foerderung Inst Kunststoff Verfahren zur Innenbeschichtung von Hohlkörpern mit organischen Deckschichten durch Plasmapolymerisation, sowie Vorrichtung zur Durchführung des Verfahrens
US5677010A (en) 1993-06-01 1997-10-14 Kautex Werke Reinold Hagen Aktiengesellschaft Method for producing a polymer coating inside hollow plastic articles
ATE179914T1 (de) * 1994-02-16 1999-05-15 Coca Cola Co Hohler behälter mit inerter oder undurchlässiger innerer oberfläche durch plasmaunterstütze oberflächereaktion oder in situ polymerisation
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
AU2648297A (en) 1996-05-22 1997-12-09 Tetra Laval Holdings & Finance Sa Method and apparatus for treating inside surfaces of containers
US6112695A (en) * 1996-10-08 2000-09-05 Nano Scale Surface Systems, Inc. Apparatus for plasma deposition of a thin film onto the interior surface of a container
AU747272B2 (en) 1997-09-30 2002-05-09 Tetra Laval Holdings & Finance Sa Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
DE19802333A1 (de) * 1998-01-23 1999-07-29 Leybold Systems Gmbh Barriereschicht für Verpackungsmaterial und Verfahren zur Herstellung einer Barriereschicht für Verpackungsmaterial
DE19806519A1 (de) * 1998-02-17 1999-08-19 Ruediger Haaga Gmbh Vorrichtung zum Sterilisieren von Behältern mittels eines Niederdruckplasmas
FR2776540B1 (fr) * 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication

Also Published As

Publication number Publication date
FR2799994A1 (fr) 2001-04-27
JP3663174B2 (ja) 2005-06-22
DE60022377T2 (de) 2006-06-08
ES2248135T3 (es) 2006-03-16
US6328805B1 (en) 2001-12-11
FR2799994B1 (fr) 2002-06-07
CA2388335A1 (fr) 2001-05-03
EP1228522A1 (de) 2002-08-07
WO2001031680A1 (fr) 2001-05-03
JP2003512977A (ja) 2003-04-08
KR100472217B1 (ko) 2005-03-10
CN1253917C (zh) 2006-04-26
MXPA02004041A (es) 2003-12-11
AU1032801A (en) 2001-05-08
BR0014986A (pt) 2002-06-18
CN1382303A (zh) 2002-11-27
DE60022377D1 (de) 2005-10-06
EP1228522B1 (de) 2005-08-31
KR20020053826A (ko) 2002-07-05

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