ATE309025T1 - Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat - Google Patents

Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat

Info

Publication number
ATE309025T1
ATE309025T1 AT01900817T AT01900817T ATE309025T1 AT E309025 T1 ATE309025 T1 AT E309025T1 AT 01900817 T AT01900817 T AT 01900817T AT 01900817 T AT01900817 T AT 01900817T AT E309025 T1 ATE309025 T1 AT E309025T1
Authority
AT
Austria
Prior art keywords
semiconductor substrate
channel
vertical hollow
hollow needles
axial surface
Prior art date
Application number
AT01900817T
Other languages
English (en)
Inventor
Dorian Liepmann
Boris Stoeber
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Application granted granted Critical
Publication of ATE309025T1 publication Critical patent/ATE309025T1/de

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/32—Needles; Details of needles pertaining to their connection with syringe or hub; Accessories for bringing the needle into, or holding the needle on, the body; Devices for protection of needles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B81B1/006—Microdevices formed as a single homogeneous piece, i.e. wherein the mechanical function is obtained by the use of the device, e.g. cutters

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Hematology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Vascular Medicine (AREA)
  • Anesthesiology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Micromachines (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Photovoltaic Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AT01900817T 2000-01-06 2001-01-02 Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat ATE309025T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/478,913 US6406638B1 (en) 2000-01-06 2000-01-06 Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby
PCT/US2001/000040 WO2001049362A1 (en) 2000-01-06 2001-01-02 Method of forming vertical, hollow needles within a semiconductor substrate

Publications (1)

Publication Number Publication Date
ATE309025T1 true ATE309025T1 (de) 2005-11-15

Family

ID=23901885

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01900817T ATE309025T1 (de) 2000-01-06 2001-01-02 Verfahren zur herstellung vertikaler hohlnadeln aus einem halbleitersubstrat

Country Status (9)

Country Link
US (1) US6406638B1 (de)
EP (1) EP1244495B1 (de)
JP (1) JP2003519014A (de)
AT (1) ATE309025T1 (de)
AU (1) AU2623501A (de)
BR (1) BR0107455A (de)
DE (1) DE60114764T2 (de)
MX (1) MXPA02006661A (de)
WO (1) WO2001049362A1 (de)

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US20090007436A1 (en) * 2003-03-10 2009-01-08 Daskal Vadim M Silicon blades for surgical and non-surgical use
US7415299B2 (en) * 2003-04-18 2008-08-19 The Regents Of The University Of California Monitoring method and/or apparatus
US7785485B2 (en) * 2003-09-17 2010-08-31 Becton, Dickinson And Company System and method for creating linear and non-linear trenches in silicon and other crystalline materials with a router
WO2005060621A2 (en) * 2003-11-21 2005-07-07 The Regents Of The University Of California Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
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US20060030811A1 (en) * 2004-08-03 2006-02-09 Wong Patrick S Method and device for enhancing transdermal agent flux
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US7627938B2 (en) * 2004-10-15 2009-12-08 Board Of Regents, The Univeristy Of Texas System Tapered hollow metallic microneedle array assembly and method of making and using the same
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US20070073212A1 (en) * 2005-09-28 2007-03-29 Takehiko Matsumura Iontophoresis apparatus and method to deliver active agents to biological interfaces
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US20090131778A1 (en) * 2006-03-28 2009-05-21 Jina Arvind N Devices, systems, methods and tools for continuous glucose monitoring
US20100049021A1 (en) * 2006-03-28 2010-02-25 Jina Arvind N Devices, systems, methods and tools for continuous analyte monitoring
US20080154107A1 (en) * 2006-12-20 2008-06-26 Jina Arvind N Device, systems, methods and tools for continuous glucose monitoring
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JP4265696B2 (ja) * 2006-07-04 2009-05-20 凸版印刷株式会社 マイクロニードルの製造方法
US8865288B2 (en) * 2006-07-17 2014-10-21 University Of Utah Research Foundation Micro-needle arrays having non-planar tips and methods of manufacture thereof
US20080138581A1 (en) * 2006-07-17 2008-06-12 Rajmohan Bhandari Masking high-aspect aspect ratio structures
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US8828520B2 (en) * 2008-07-01 2014-09-09 Alcatel Lucent Micro-posts having improved uniformity and a method of manufacture thereof
DE102008052749B4 (de) * 2008-10-22 2012-01-12 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Nadel, Nadelanordnung, Spritzgussform und Verfahren zum Herstellen
US8639312B2 (en) * 2008-12-10 2014-01-28 University Of Utah Research Foundation System and method for electrically shielding a microelectrode array in a physiological pathway from electrical noise
US9526885B1 (en) * 2009-07-29 2016-12-27 University Of South Florida Microneedles with sharpened tips and corresponding method of fabrication
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KR102265808B1 (ko) 2012-12-21 2021-06-16 코리움, 인크. 치료제의 전달을 위한 마이크로어레이 및 그것의 사용방법
CA2903748C (en) 2013-03-12 2021-11-02 Corium International, Inc. Microprojection applicators
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CN105217565B (zh) * 2014-06-09 2017-01-11 中国科学院苏州纳米技术与纳米仿生研究所 一种单晶硅空心微针结构的制作方法
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US10857093B2 (en) 2015-06-29 2020-12-08 Corium, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
FR3046682B1 (fr) * 2016-01-12 2018-02-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de fabrication d'un ecran muni de microstructures retroreflechissantes
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US6312612B1 (en) 1999-06-09 2001-11-06 The Procter & Gamble Company Apparatus and method for manufacturing an intracutaneous microneedle array

Also Published As

Publication number Publication date
DE60114764D1 (de) 2005-12-15
AU2623501A (en) 2001-07-16
JP2003519014A (ja) 2003-06-17
MXPA02006661A (es) 2003-03-10
DE60114764T2 (de) 2006-07-13
WO2001049362A8 (en) 2002-10-24
BR0107455A (pt) 2002-09-03
WO2001049362A1 (en) 2001-07-12
US6406638B1 (en) 2002-06-18
EP1244495B1 (de) 2005-11-09
EP1244495A1 (de) 2002-10-02

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