ATE310251T1 - Optische beschichtungen und zugeordnete verfahren - Google Patents
Optische beschichtungen und zugeordnete verfahrenInfo
- Publication number
- ATE310251T1 ATE310251T1 AT02779285T AT02779285T ATE310251T1 AT E310251 T1 ATE310251 T1 AT E310251T1 AT 02779285 T AT02779285 T AT 02779285T AT 02779285 T AT02779285 T AT 02779285T AT E310251 T1 ATE310251 T1 AT E310251T1
- Authority
- AT
- Austria
- Prior art keywords
- reflection layer
- depositing
- amorphous material
- associated methods
- optical coatings
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 title abstract 2
- 238000000576 coating method Methods 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000654 additive Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract 2
- 230000000996 additive effect Effects 0.000 abstract 1
- 239000006104 solid solution Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
- G02B1/116—Multilayers including electrically conducting layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Surface Treatment Of Glass (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/944,050 US20030043464A1 (en) | 2001-08-30 | 2001-08-30 | Optical coatings and associated methods |
| PCT/EP2002/009688 WO2003021304A1 (en) | 2001-08-30 | 2002-08-30 | Optical coatings and associated methods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE310251T1 true ATE310251T1 (de) | 2005-12-15 |
Family
ID=25480702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT02779285T ATE310251T1 (de) | 2001-08-30 | 2002-08-30 | Optische beschichtungen und zugeordnete verfahren |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20030043464A1 (de) |
| EP (1) | EP1430332B1 (de) |
| JP (1) | JP2005502076A (de) |
| KR (1) | KR20040044524A (de) |
| CN (1) | CN100406917C (de) |
| AT (1) | ATE310251T1 (de) |
| WO (1) | WO2003021304A1 (de) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4174216B2 (ja) * | 2002-01-18 | 2008-10-29 | フジノン株式会社 | バリア層を有する光学素子、光学系および投映プロジェクタ装置 |
| WO2005063646A1 (en) * | 2003-12-22 | 2005-07-14 | Cardinal Cg Company | Graded photocatalytic coatings |
| EP1765740B1 (de) * | 2004-07-12 | 2007-11-07 | Cardinal CG Company | Wartungsarme beschichtungen |
| EP1797017B1 (de) * | 2004-10-04 | 2010-11-24 | Cardinal CG Company | Dünnfilmbeschichtung und technologie zum zeitweiligen schutz, isolierverglasungseinheiten und dazugehörige verfahren |
| US7923114B2 (en) * | 2004-12-03 | 2011-04-12 | Cardinal Cg Company | Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films |
| US8092660B2 (en) * | 2004-12-03 | 2012-01-10 | Cardinal Cg Company | Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films |
| US7371599B2 (en) * | 2006-04-17 | 2008-05-13 | United Microeletronics Corp. | Image sensor and method of forming the same |
| US20070256934A1 (en) * | 2006-05-08 | 2007-11-08 | Perata Michael R | Apparatus and Method for Coating Substrates With Approximate Process Isolation |
| US20080011599A1 (en) | 2006-07-12 | 2008-01-17 | Brabender Dennis M | Sputtering apparatus including novel target mounting and/or control |
| EP2103965A4 (de) * | 2006-12-27 | 2011-05-25 | Asahi Glass Co Ltd | Antireflexprodukt und anzeigeanordnung |
| US7807248B2 (en) * | 2007-08-14 | 2010-10-05 | Cardinal Cg Company | Solar control low-emissivity coatings |
| CA2664368A1 (en) | 2007-09-14 | 2009-03-19 | Cardinal Cg Company | Low-maintenance coating technology |
| KR100984701B1 (ko) * | 2008-08-01 | 2010-10-01 | 엘지전자 주식회사 | 태양 전지의 제조 방법 |
| US20100180939A1 (en) * | 2009-01-22 | 2010-07-22 | Sharma Pramod K | Heat treatable magnesium fluoride inclusive coatings, coated articles including heat treatable magnesium fluoride inclusive coatings, and methods of making the same |
| EP2230539B1 (de) * | 2009-03-19 | 2019-12-04 | Viavi Solutions Inc. | Ausformung einer Abstandsschicht in einem Interferenzfilter |
| CN101932211B (zh) * | 2009-06-25 | 2013-04-24 | 深圳富泰宏精密工业有限公司 | 视窗及应用该视窗的电子装置 |
| US9206078B2 (en) * | 2013-03-13 | 2015-12-08 | Intermolecular, Inc. | Barrier layers for silver reflective coatings and HPC workflows for rapid screening of materials for such barrier layers |
| JP6282142B2 (ja) * | 2014-03-03 | 2018-02-21 | 日東電工株式会社 | 赤外線反射基板およびその製造方法 |
| WO2018093985A1 (en) | 2016-11-17 | 2018-05-24 | Cardinal Cg Company | Static-dissipative coating technology |
| JP7394771B2 (ja) * | 2018-01-29 | 2023-12-08 | アプライド マテリアルズ インコーポレイテッド | 光学装置改善のための湿潤層 |
| WO2020129456A1 (ja) * | 2018-12-19 | 2020-06-25 | 富士フイルム株式会社 | 光触媒複合材、並びに、サイネージ用ディスプレイ保護部材、タッチパネル用保護部材、太陽電池用保護部材、センサカバー用保護部材、サイネージ用ディスプレイ、タッチパネル、太陽電池、及び、センサカバー |
| WO2022020077A1 (en) * | 2020-07-22 | 2022-01-27 | Applied Materials, Inc. | Doped amorphous optical device films and deposition via incorporation of dopant atoms |
| US20220260766A1 (en) * | 2021-02-17 | 2022-08-18 | Applied Materials, Inc. | Optical device film with tunable refractive index |
| TW202300959A (zh) | 2021-03-11 | 2023-01-01 | 美商應用材料股份有限公司 | 藉由物理氣相沉積所沉積的氧化鈦光學裝置薄膜 |
| CN115347454A (zh) * | 2021-05-13 | 2022-11-15 | 中芯国际集成电路制造(上海)有限公司 | 光学器件的结构及光学器件的形成方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58202408A (ja) * | 1982-05-20 | 1983-11-25 | Nippon Soken Inc | 熱線反射膜 |
| US5318685A (en) * | 1987-08-18 | 1994-06-07 | Cardinal Ig Company | Method of making metal oxide films having barrier properties |
| US5264286A (en) * | 1988-03-03 | 1993-11-23 | Asahi Glass Company Ltd. | Laminated glass structure |
| EP0486475B1 (de) * | 1988-03-03 | 1997-12-03 | Asahi Glass Company Ltd. | Amorpher Oxid-Film und Gegenstand mit einem solchen Film |
| US5344718A (en) * | 1992-04-30 | 1994-09-06 | Guardian Industries Corp. | High performance, durable, low-E glass |
| DE69503896T3 (de) * | 1994-05-03 | 2005-10-27 | Cardinal Cg Co., Eden Prairie | Transparenter gegenstand mit siliciumnitrid-schutzschicht |
| US5830252A (en) * | 1994-10-04 | 1998-11-03 | Ppg Industries, Inc. | Alkali metal diffusion barrier layer |
| US5821001A (en) * | 1996-04-25 | 1998-10-13 | Ppg Industries, Inc. | Coated articles |
| JPH10237352A (ja) * | 1997-02-24 | 1998-09-08 | Tao:Kk | 多機能コーティング剤 |
| EP0963960A1 (de) * | 1998-06-08 | 1999-12-15 | Glaverbel | Durchsichtiges Substrat mit Silberbeschichtung |
| JP3290629B2 (ja) * | 1998-06-22 | 2002-06-10 | アルプス電気株式会社 | 光学多層膜フィルタ |
| JP2001025666A (ja) * | 1999-07-14 | 2001-01-30 | Nippon Sheet Glass Co Ltd | 積層体およびその製造方法 |
| US6475626B1 (en) * | 1999-12-06 | 2002-11-05 | Guardian Industries Corp. | Low-E matchable coated articles and methods of making same |
-
2001
- 2001-08-30 US US09/944,050 patent/US20030043464A1/en not_active Abandoned
-
2002
- 2002-08-30 WO PCT/EP2002/009688 patent/WO2003021304A1/en not_active Ceased
- 2002-08-30 CN CN028170245A patent/CN100406917C/zh not_active Expired - Fee Related
- 2002-08-30 JP JP2003525333A patent/JP2005502076A/ja not_active Withdrawn
- 2002-08-30 KR KR10-2004-7003117A patent/KR20040044524A/ko not_active Withdrawn
- 2002-08-30 EP EP02779285A patent/EP1430332B1/de not_active Expired - Lifetime
- 2002-08-30 AT AT02779285T patent/ATE310251T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1430332A1 (de) | 2004-06-23 |
| CN1549935A (zh) | 2004-11-24 |
| CN100406917C (zh) | 2008-07-30 |
| JP2005502076A (ja) | 2005-01-20 |
| KR20040044524A (ko) | 2004-05-28 |
| WO2003021304A1 (en) | 2003-03-13 |
| US20030043464A1 (en) | 2003-03-06 |
| EP1430332B1 (de) | 2005-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |