ATE310251T1 - Optische beschichtungen und zugeordnete verfahren - Google Patents

Optische beschichtungen und zugeordnete verfahren

Info

Publication number
ATE310251T1
ATE310251T1 AT02779285T AT02779285T ATE310251T1 AT E310251 T1 ATE310251 T1 AT E310251T1 AT 02779285 T AT02779285 T AT 02779285T AT 02779285 T AT02779285 T AT 02779285T AT E310251 T1 ATE310251 T1 AT E310251T1
Authority
AT
Austria
Prior art keywords
reflection layer
depositing
amorphous material
associated methods
optical coatings
Prior art date
Application number
AT02779285T
Other languages
English (en)
Inventor
Rand David Dannenberg
Original Assignee
Ardenne Anlagentech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardenne Anlagentech Gmbh filed Critical Ardenne Anlagentech Gmbh
Application granted granted Critical
Publication of ATE310251T1 publication Critical patent/ATE310251T1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • G02B1/116Multilayers including electrically conducting layers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/208Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
AT02779285T 2001-08-30 2002-08-30 Optische beschichtungen und zugeordnete verfahren ATE310251T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/944,050 US20030043464A1 (en) 2001-08-30 2001-08-30 Optical coatings and associated methods
PCT/EP2002/009688 WO2003021304A1 (en) 2001-08-30 2002-08-30 Optical coatings and associated methods

Publications (1)

Publication Number Publication Date
ATE310251T1 true ATE310251T1 (de) 2005-12-15

Family

ID=25480702

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02779285T ATE310251T1 (de) 2001-08-30 2002-08-30 Optische beschichtungen und zugeordnete verfahren

Country Status (7)

Country Link
US (1) US20030043464A1 (de)
EP (1) EP1430332B1 (de)
JP (1) JP2005502076A (de)
KR (1) KR20040044524A (de)
CN (1) CN100406917C (de)
AT (1) ATE310251T1 (de)
WO (1) WO2003021304A1 (de)

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JP4174216B2 (ja) * 2002-01-18 2008-10-29 フジノン株式会社 バリア層を有する光学素子、光学系および投映プロジェクタ装置
WO2005063646A1 (en) * 2003-12-22 2005-07-14 Cardinal Cg Company Graded photocatalytic coatings
EP1765740B1 (de) * 2004-07-12 2007-11-07 Cardinal CG Company Wartungsarme beschichtungen
EP1797017B1 (de) * 2004-10-04 2010-11-24 Cardinal CG Company Dünnfilmbeschichtung und technologie zum zeitweiligen schutz, isolierverglasungseinheiten und dazugehörige verfahren
US7923114B2 (en) * 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) * 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7371599B2 (en) * 2006-04-17 2008-05-13 United Microeletronics Corp. Image sensor and method of forming the same
US20070256934A1 (en) * 2006-05-08 2007-11-08 Perata Michael R Apparatus and Method for Coating Substrates With Approximate Process Isolation
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
EP2103965A4 (de) * 2006-12-27 2011-05-25 Asahi Glass Co Ltd Antireflexprodukt und anzeigeanordnung
US7807248B2 (en) * 2007-08-14 2010-10-05 Cardinal Cg Company Solar control low-emissivity coatings
CA2664368A1 (en) 2007-09-14 2009-03-19 Cardinal Cg Company Low-maintenance coating technology
KR100984701B1 (ko) * 2008-08-01 2010-10-01 엘지전자 주식회사 태양 전지의 제조 방법
US20100180939A1 (en) * 2009-01-22 2010-07-22 Sharma Pramod K Heat treatable magnesium fluoride inclusive coatings, coated articles including heat treatable magnesium fluoride inclusive coatings, and methods of making the same
EP2230539B1 (de) * 2009-03-19 2019-12-04 Viavi Solutions Inc. Ausformung einer Abstandsschicht in einem Interferenzfilter
CN101932211B (zh) * 2009-06-25 2013-04-24 深圳富泰宏精密工业有限公司 视窗及应用该视窗的电子装置
US9206078B2 (en) * 2013-03-13 2015-12-08 Intermolecular, Inc. Barrier layers for silver reflective coatings and HPC workflows for rapid screening of materials for such barrier layers
JP6282142B2 (ja) * 2014-03-03 2018-02-21 日東電工株式会社 赤外線反射基板およびその製造方法
WO2018093985A1 (en) 2016-11-17 2018-05-24 Cardinal Cg Company Static-dissipative coating technology
JP7394771B2 (ja) * 2018-01-29 2023-12-08 アプライド マテリアルズ インコーポレイテッド 光学装置改善のための湿潤層
WO2020129456A1 (ja) * 2018-12-19 2020-06-25 富士フイルム株式会社 光触媒複合材、並びに、サイネージ用ディスプレイ保護部材、タッチパネル用保護部材、太陽電池用保護部材、センサカバー用保護部材、サイネージ用ディスプレイ、タッチパネル、太陽電池、及び、センサカバー
WO2022020077A1 (en) * 2020-07-22 2022-01-27 Applied Materials, Inc. Doped amorphous optical device films and deposition via incorporation of dopant atoms
US20220260766A1 (en) * 2021-02-17 2022-08-18 Applied Materials, Inc. Optical device film with tunable refractive index
TW202300959A (zh) 2021-03-11 2023-01-01 美商應用材料股份有限公司 藉由物理氣相沉積所沉積的氧化鈦光學裝置薄膜
CN115347454A (zh) * 2021-05-13 2022-11-15 中芯国际集成电路制造(上海)有限公司 光学器件的结构及光学器件的形成方法

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US5318685A (en) * 1987-08-18 1994-06-07 Cardinal Ig Company Method of making metal oxide films having barrier properties
US5264286A (en) * 1988-03-03 1993-11-23 Asahi Glass Company Ltd. Laminated glass structure
EP0486475B1 (de) * 1988-03-03 1997-12-03 Asahi Glass Company Ltd. Amorpher Oxid-Film und Gegenstand mit einem solchen Film
US5344718A (en) * 1992-04-30 1994-09-06 Guardian Industries Corp. High performance, durable, low-E glass
DE69503896T3 (de) * 1994-05-03 2005-10-27 Cardinal Cg Co., Eden Prairie Transparenter gegenstand mit siliciumnitrid-schutzschicht
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US5821001A (en) * 1996-04-25 1998-10-13 Ppg Industries, Inc. Coated articles
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EP0963960A1 (de) * 1998-06-08 1999-12-15 Glaverbel Durchsichtiges Substrat mit Silberbeschichtung
JP3290629B2 (ja) * 1998-06-22 2002-06-10 アルプス電気株式会社 光学多層膜フィルタ
JP2001025666A (ja) * 1999-07-14 2001-01-30 Nippon Sheet Glass Co Ltd 積層体およびその製造方法
US6475626B1 (en) * 1999-12-06 2002-11-05 Guardian Industries Corp. Low-E matchable coated articles and methods of making same

Also Published As

Publication number Publication date
EP1430332A1 (de) 2004-06-23
CN1549935A (zh) 2004-11-24
CN100406917C (zh) 2008-07-30
JP2005502076A (ja) 2005-01-20
KR20040044524A (ko) 2004-05-28
WO2003021304A1 (en) 2003-03-13
US20030043464A1 (en) 2003-03-06
EP1430332B1 (de) 2005-11-16

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties