ATE310251T1 - Optische beschichtungen und zugeordnete verfahren - Google Patents

Optische beschichtungen und zugeordnete verfahren

Info

Publication number
ATE310251T1
ATE310251T1 AT02779285T AT02779285T ATE310251T1 AT E310251 T1 ATE310251 T1 AT E310251T1 AT 02779285 T AT02779285 T AT 02779285T AT 02779285 T AT02779285 T AT 02779285T AT E310251 T1 ATE310251 T1 AT E310251T1
Authority
AT
Austria
Prior art keywords
reflection layer
depositing
amorphous material
associated methods
optical coatings
Prior art date
Application number
AT02779285T
Other languages
English (en)
Inventor
Rand David Dannenberg
Original Assignee
Ardenne Anlagentech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardenne Anlagentech Gmbh filed Critical Ardenne Anlagentech Gmbh
Application granted granted Critical
Publication of ATE310251T1 publication Critical patent/ATE310251T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
AT02779285T 2001-08-30 2002-08-30 Optische beschichtungen und zugeordnete verfahren ATE310251T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/944,050 US20030043464A1 (en) 2001-08-30 2001-08-30 Optical coatings and associated methods
PCT/EP2002/009688 WO2003021304A1 (en) 2001-08-30 2002-08-30 Optical coatings and associated methods

Publications (1)

Publication Number Publication Date
ATE310251T1 true ATE310251T1 (de) 2005-12-15

Family

ID=25480702

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02779285T ATE310251T1 (de) 2001-08-30 2002-08-30 Optische beschichtungen und zugeordnete verfahren

Country Status (7)

Country Link
US (1) US20030043464A1 (de)
EP (1) EP1430332B1 (de)
JP (1) JP2005502076A (de)
KR (1) KR20040044524A (de)
CN (1) CN100406917C (de)
AT (1) ATE310251T1 (de)
WO (1) WO2003021304A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4174216B2 (ja) * 2002-01-18 2008-10-29 フジノン株式会社 バリア層を有する光学素子、光学系および投映プロジェクタ装置
US7294404B2 (en) * 2003-12-22 2007-11-13 Cardinal Cg Company Graded photocatalytic coatings
EP1765740B1 (de) * 2004-07-12 2007-11-07 Cardinal CG Company Wartungsarme beschichtungen
CA2583174A1 (en) * 2004-10-04 2006-04-20 Cardinal Cg Company Thin film coating and temporary protection technology, insulating glazing units, and associated methods
US7923114B2 (en) * 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) * 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7371599B2 (en) * 2006-04-17 2008-05-13 United Microeletronics Corp. Image sensor and method of forming the same
US20070256934A1 (en) * 2006-05-08 2007-11-08 Perata Michael R Apparatus and Method for Coating Substrates With Approximate Process Isolation
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
WO2008081837A1 (ja) * 2006-12-27 2008-07-10 Asahi Glass Company, Limited 反射防止体およびディスプレイ装置
US7807248B2 (en) * 2007-08-14 2010-10-05 Cardinal Cg Company Solar control low-emissivity coatings
CA2664369A1 (en) * 2007-09-14 2009-03-19 Cardinal Cg Company Low-maintenance coatings, and methods for producing low-maintenance coatings
KR100984701B1 (ko) * 2008-08-01 2010-10-01 엘지전자 주식회사 태양 전지의 제조 방법
US20100180939A1 (en) * 2009-01-22 2010-07-22 Sharma Pramod K Heat treatable magnesium fluoride inclusive coatings, coated articles including heat treatable magnesium fluoride inclusive coatings, and methods of making the same
EP3644100A1 (de) * 2009-03-19 2020-04-29 Viavi Solutions Inc. Musterung einer abstandsschicht in einem interferenzfilter
CN101932211B (zh) * 2009-06-25 2013-04-24 深圳富泰宏精密工业有限公司 视窗及应用该视窗的电子装置
US9206078B2 (en) * 2013-03-13 2015-12-08 Intermolecular, Inc. Barrier layers for silver reflective coatings and HPC workflows for rapid screening of materials for such barrier layers
JP6282142B2 (ja) * 2014-03-03 2018-02-21 日東電工株式会社 赤外線反射基板およびその製造方法
WO2018093985A1 (en) 2016-11-17 2018-05-24 Cardinal Cg Company Static-dissipative coating technology
KR102629160B1 (ko) * 2018-01-29 2024-01-29 어플라이드 머티어리얼스, 인코포레이티드 광학 디바이스 향상을 위한 습윤 층들
WO2020129456A1 (ja) * 2018-12-19 2020-06-25 富士フイルム株式会社 光触媒複合材、並びに、サイネージ用ディスプレイ保護部材、タッチパネル用保護部材、太陽電池用保護部材、センサカバー用保護部材、サイネージ用ディスプレイ、タッチパネル、太陽電池、及び、センサカバー
EP4185731A4 (de) * 2020-07-22 2025-09-03 Applied Materials Inc Dotierte amorphe optische vorrichtungsfilme und abscheidung durch einbau von dotierungsatomen
US20220260766A1 (en) * 2021-02-17 2022-08-18 Applied Materials, Inc. Optical device film with tunable refractive index
TW202300959A (zh) * 2021-03-11 2023-01-01 美商應用材料股份有限公司 藉由物理氣相沉積所沉積的氧化鈦光學裝置薄膜
CN115347454A (zh) * 2021-05-13 2022-11-15 中芯国际集成电路制造(上海)有限公司 光学器件的结构及光学器件的形成方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202408A (ja) * 1982-05-20 1983-11-25 Nippon Soken Inc 熱線反射膜
US5318685A (en) * 1987-08-18 1994-06-07 Cardinal Ig Company Method of making metal oxide films having barrier properties
EP0486475B1 (de) * 1988-03-03 1997-12-03 Asahi Glass Company Ltd. Amorpher Oxid-Film und Gegenstand mit einem solchen Film
US5264286A (en) * 1988-03-03 1993-11-23 Asahi Glass Company Ltd. Laminated glass structure
US5344718A (en) * 1992-04-30 1994-09-06 Guardian Industries Corp. High performance, durable, low-E glass
DK0758306T3 (da) * 1994-05-03 1999-05-10 Cardinal Ig Co Transparent genstand med beskyttelsesfilm af siliciumnitrid
US5830252A (en) * 1994-10-04 1998-11-03 Ppg Industries, Inc. Alkali metal diffusion barrier layer
US5821001A (en) * 1996-04-25 1998-10-13 Ppg Industries, Inc. Coated articles
JPH10237352A (ja) * 1997-02-24 1998-09-08 Tao:Kk 多機能コーティング剤
EP0963960A1 (de) * 1998-06-08 1999-12-15 Glaverbel Durchsichtiges Substrat mit Silberbeschichtung
JP3290629B2 (ja) * 1998-06-22 2002-06-10 アルプス電気株式会社 光学多層膜フィルタ
JP2001025666A (ja) * 1999-07-14 2001-01-30 Nippon Sheet Glass Co Ltd 積層体およびその製造方法
US6475626B1 (en) * 1999-12-06 2002-11-05 Guardian Industries Corp. Low-E matchable coated articles and methods of making same

Also Published As

Publication number Publication date
JP2005502076A (ja) 2005-01-20
WO2003021304A1 (en) 2003-03-13
KR20040044524A (ko) 2004-05-28
US20030043464A1 (en) 2003-03-06
CN1549935A (zh) 2004-11-24
EP1430332A1 (de) 2004-06-23
EP1430332B1 (de) 2005-11-16
CN100406917C (zh) 2008-07-30

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties