ATE321008T1 - Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt - Google Patents

Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt

Info

Publication number
ATE321008T1
ATE321008T1 AT02758677T AT02758677T ATE321008T1 AT E321008 T1 ATE321008 T1 AT E321008T1 AT 02758677 T AT02758677 T AT 02758677T AT 02758677 T AT02758677 T AT 02758677T AT E321008 T1 ATE321008 T1 AT E321008T1
Authority
AT
Austria
Prior art keywords
substrate
mut
micro
ultrasonic transducer
machined ultrasonic
Prior art date
Application number
AT02758677T
Other languages
English (en)
Inventor
David G Miller
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE321008T1 publication Critical patent/ATE321008T1/de

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Coils Or Transformers For Communication (AREA)
AT02758677T 2001-07-31 2002-07-26 Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt ATE321008T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/919,250 US6669644B2 (en) 2001-07-31 2001-07-31 Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy

Publications (1)

Publication Number Publication Date
ATE321008T1 true ATE321008T1 (de) 2006-04-15

Family

ID=25441779

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02758677T ATE321008T1 (de) 2001-07-31 2002-07-26 Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt

Country Status (7)

Country Link
US (2) US6669644B2 (de)
EP (1) EP1414738B1 (de)
JP (1) JP4049743B2 (de)
CN (1) CN1283547C (de)
AT (1) ATE321008T1 (de)
DE (1) DE60210106T2 (de)
WO (1) WO2003011748A2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US7901408B2 (en) 2002-12-03 2011-03-08 Arthrosurface, Inc. System and method for retrograde procedure
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US7257051B2 (en) * 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
US7052464B2 (en) * 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7612483B2 (en) 2004-02-27 2009-11-03 Georgia Tech Research Corporation Harmonic cMUT devices and fabrication methods
WO2005084284A2 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cmut devices and fabrication methods
US7375420B2 (en) * 2004-12-03 2008-05-20 General Electric Company Large area transducer array
JP2008541473A (ja) * 2005-05-18 2008-11-20 コロ テクノロジーズ インコーポレイテッド 貫通ウェーハ相互接続
EP1932158A4 (de) 2005-09-30 2008-10-15 Mosaid Technologies Inc Speicher mit ausgangssteuerung
US7652922B2 (en) 2005-09-30 2010-01-26 Mosaid Technologies Incorporated Multiple independent serial link memory
US7764003B2 (en) * 2006-04-04 2010-07-27 Kolo Technologies, Inc. Signal control in micromachined ultrasonic transducer
WO2008038183A1 (en) * 2006-09-25 2008-04-03 Koninklijke Philips Electronics N.V. Flip-chip interconnection through chip vias
US8008842B2 (en) * 2007-10-26 2011-08-30 Trs Technologies, Inc. Micromachined piezoelectric ultrasound transducer arrays
JP5438983B2 (ja) * 2008-02-08 2014-03-12 株式会社東芝 超音波プローブ及び超音波診断装置
JP5961246B2 (ja) * 2011-03-22 2016-08-02 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ
JP6069798B2 (ja) * 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
KR102126033B1 (ko) * 2013-10-23 2020-06-23 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
EP3338113B1 (de) * 2015-11-24 2021-08-25 Halliburton Energy Services, Inc. Ultraschallwandler mit unterdrücktem lateralem modus
US11047979B2 (en) * 2016-07-27 2021-06-29 Sound Technology Inc. Ultrasound transducer array
JP2018019024A (ja) * 2016-07-29 2018-02-01 キヤノン株式会社 振動を発生させる振動部品が実装されるプリント基板
FR3060844B1 (fr) 2016-12-15 2018-12-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif microelectronique acoustique
KR101915255B1 (ko) * 2017-01-11 2018-11-05 삼성메디슨 주식회사 초음파 프로브의 제조 방법 및 그 초음파 프로브

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842662A (en) * 1972-08-14 1974-10-22 Us Navy Pressure release test device
US3903734A (en) * 1974-02-11 1975-09-09 Bruce E Douglas Technique for measuring the complex shear modulus utilizing laser interferometry
US3901074A (en) * 1974-02-11 1975-08-26 Us Navy Technique for measuring the complex elastic (young{3 s) modulus utilizing laser interferometry
NL7908675A (nl) * 1979-11-30 1981-07-01 Bergougnan Benelux Werkwijze en apparaat voor het bepalen van statische en dynamische materiaalkarakteristieken van een visko- -elastisch materiaal.
CH644450A5 (de) * 1980-02-11 1984-07-31 Russenberger Pruefmasch Vorrichtung fuer die schwingfestigkeitspruefung.
JPS57112198A (en) * 1980-12-29 1982-07-13 Fujitsu Ltd Ultrasonic wave probe and ultrasonic wave measuring device
CA1322282C (en) * 1989-09-29 1993-09-21 Wing-Cheong Lau Non-destructive method and apparatus for checking the quality of manufactured wood panels
JP2945978B2 (ja) * 1989-11-30 1999-09-06 日本電波工業株式会社 配列型超音波探触子
US5267221A (en) * 1992-02-13 1993-11-30 Hewlett-Packard Company Backing for acoustic transducer array
US5269181A (en) * 1992-05-20 1993-12-14 Gibson Ronald F Apparatus and process for measuring mechanical properties of fibers
US5855049A (en) * 1996-10-28 1999-01-05 Microsound Systems, Inc. Method of producing an ultrasound transducer
AU6330898A (en) * 1997-02-21 1998-09-09 Southwest Research Institute High-cycle fatigue test machine
US6262946B1 (en) * 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
US6430109B1 (en) * 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6609428B2 (en) * 2001-01-19 2003-08-26 The United States Of America As Represented By The Secretary Of The Navy Nonresonant technique for estimation of the mechanical properties of viscoelastic materials
US6758094B2 (en) * 2001-07-31 2004-07-06 Koninklijke Philips Electronics, N.V. Ultrasonic transducer wafer having variable acoustic impedance
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy

Also Published As

Publication number Publication date
JP4049743B2 (ja) 2008-02-20
CN1551853A (zh) 2004-12-01
DE60210106T2 (de) 2007-03-01
EP1414738A2 (de) 2004-05-06
EP1414738B1 (de) 2006-03-22
WO2003011748A2 (en) 2003-02-13
US6669644B2 (en) 2003-12-30
DE60210106D1 (de) 2006-05-11
JP2005507580A (ja) 2005-03-17
US20030028106A1 (en) 2003-02-06
US6837110B2 (en) 2005-01-04
CN1283547C (zh) 2006-11-08
US20040102708A1 (en) 2004-05-27
WO2003011748A3 (en) 2003-12-24

Similar Documents

Publication Publication Date Title
ATE321008T1 (de) Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt
DE69902670D1 (de) Akustische vorrichtung mit biegewellenmoden
EP1585218A3 (de) Volumenwellenresonator und Herstellungsverfahren dafür
DE60210980D1 (de) Verdrahtungsverfahren und gerät für eine ultraschallsonde
WO2003058813A1 (en) Surface acoustic wave device, electronic component using the device, and composite module
AR018832A1 (es) Dispositivo acustico
WO2003013181A3 (en) System for attaching an acoustic element to an integrated circuit
DE59901093D1 (de) Implantierbarer schallrezeptor für hörhilfen
TR200302018T4 (tr) Transdüktör
FI980649A0 (fi) Foerfarande och anordning foer att behandla riktad ljud i en akustisk virtualmiljoe
WO2009008282A1 (ja) 超音波探触子及び超音波診断装置
WO2004100600A3 (en) Transmission of acoustic vibrations to a surface over the display of a mobile device
WO2001065890A3 (en) Loudspeaker system
ATE552919T1 (de) Megaschallsonde für schallenergieführung
ATE537534T1 (de) Einrichtung mit angepasster akustischer impedanz und verfahren
WO2004010730A3 (en) Ultrasonic transducer for electronic devices
DE102004047649A1 (de) Halbleitervorrichtung, Schneideeinrichtung zum Schneiden der Halbleitervorrichtung und Verfahren zum Schneiden der gleichen
WO2005006272A3 (en) Torsional acoustic wave sensor
AU2002352166A8 (en) Ultrasound transducer for application in extreme climatic conditions
DE60101095D1 (de) Anlage mit einem piezoelektrischen element für eine struktureinrichtung und piezoelektrisches element dafür
WO2001084883A3 (en) Planar speaker wiring layout
WO2008031409A3 (de) Mit oberflächenwellen arbeitendes elektrisches bauelement
WO2002051201A3 (en) Multi-functional vibro-acoustic device
ATE230916T1 (de) Mikrofon
DE60331314D1 (de) Ementes in der struktur einer multischichtschaltplatte und die struktur einer multischichtschaltplatte

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties