ATE322033T1 - Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür - Google Patents

Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür

Info

Publication number
ATE322033T1
ATE322033T1 AT03772361T AT03772361T ATE322033T1 AT E322033 T1 ATE322033 T1 AT E322033T1 AT 03772361 T AT03772361 T AT 03772361T AT 03772361 T AT03772361 T AT 03772361T AT E322033 T1 ATE322033 T1 AT E322033T1
Authority
AT
Austria
Prior art keywords
optical device
corresponding uses
miniature electro
conductor
miniature
Prior art date
Application number
AT03772361T
Other languages
English (en)
Inventor
Silvestre Josep Montanya
Original Assignee
Baolab Microsystems Sl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baolab Microsystems Sl filed Critical Baolab Microsystems Sl
Application granted granted Critical
Publication of ATE322033T1 publication Critical patent/ATE322033T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/02—Switches operated by change of position, inclination or orientation of the switch itself in relation to gravitational field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/24—Switches operated by change of fluid pressure, by fluid pressure waves, or by change of fluid flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Relay Circuits (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
  • Breakers (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Mechanical Pencils And Projecting And Retracting Systems Therefor, And Multi-System Writing Instruments (AREA)
  • Interface Circuits In Exchanges (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Electrically Operated Instructional Devices (AREA)
  • Electrotherapy Devices (AREA)
  • Air Bags (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Pinball Game Machines (AREA)
AT03772361T 2002-11-19 2003-11-18 Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür ATE322033T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES200202792 2002-11-19

Publications (1)

Publication Number Publication Date
ATE322033T1 true ATE322033T1 (de) 2006-04-15

Family

ID=32695801

Family Applications (2)

Application Number Title Priority Date Filing Date
AT03772360T ATE394344T1 (de) 2002-11-19 2003-11-18 Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais
AT03772361T ATE322033T1 (de) 2002-11-19 2003-11-18 Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT03772360T ATE394344T1 (de) 2002-11-19 2003-11-18 Miniaturrelais und entsprechende verwendungen davon und verfahren zum schalten des relais

Country Status (13)

Country Link
US (2) US7876182B2 (de)
EP (2) EP1564182B1 (de)
JP (2) JP4351634B2 (de)
KR (2) KR20050083929A (de)
CN (2) CN100375921C (de)
AT (2) ATE394344T1 (de)
AU (2) AU2003279415A1 (de)
BR (1) BR0316409A (de)
CA (2) CA2506710A1 (de)
DE (2) DE60304355T2 (de)
ES (3) ES2258735T3 (de)
RU (1) RU2325722C2 (de)
WO (2) WO2004046019A1 (de)

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US9104273B1 (en) 2008-02-29 2015-08-11 Cypress Semiconductor Corporation Multi-touch sensing method
US8321174B1 (en) 2008-09-26 2012-11-27 Cypress Semiconductor Corporation System and method to measure capacitance of capacitive sensor array
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TW201234527A (en) * 2010-11-19 2012-08-16 Baolab Microsystems Sl Methods and systems for fabrication of MEMS CMOS devices
JP5950336B2 (ja) * 2012-03-22 2016-07-13 矢崎総業株式会社 電子部品モジュール
TW202438433A (zh) 2020-01-08 2024-10-01 西班牙商奈努勝公司 使用一固態半導體製程之後段製程金屬層建立之微機電裝置
CN113782356B (zh) * 2021-07-23 2023-06-16 宁波金宸科技有限公司 一种基于液压传动的继电器
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Also Published As

Publication number Publication date
KR20050083929A (ko) 2005-08-26
CN1729425A (zh) 2006-02-01
JP4351634B2 (ja) 2009-10-28
DE60320832D1 (de) 2008-06-19
EP1564182B1 (de) 2008-05-07
JP4372689B2 (ja) 2009-11-25
US20060021864A1 (en) 2006-02-02
RU2325722C2 (ru) 2008-05-27
BR0316409A (pt) 2005-10-11
CN1729136A (zh) 2006-02-01
KR20050085065A (ko) 2005-08-29
ES2258735T3 (es) 2006-09-01
JP2006506674A (ja) 2006-02-23
ATE394344T1 (de) 2008-05-15
ES2305527T3 (es) 2008-11-01
AU2003279414A1 (en) 2004-06-15
US7446300B2 (en) 2008-11-04
EP1564584A1 (de) 2005-08-17
US20060152739A1 (en) 2006-07-13
DE60304355D1 (de) 2006-05-18
US7876182B2 (en) 2011-01-25
CA2506710A1 (en) 2004-06-03
WO2004046807A1 (es) 2004-06-03
WO2004046019A1 (es) 2004-06-03
CN100410165C (zh) 2008-08-13
EP1564182A1 (de) 2005-08-17
JP2006506785A (ja) 2006-02-23
ES2239549A1 (es) 2005-09-16
EP1564584B1 (de) 2006-03-29
CA2506775A1 (en) 2004-06-03
AU2003279415A1 (en) 2004-06-15
CN100375921C (zh) 2008-03-19
DE60304355T2 (de) 2006-10-19
ES2239549B1 (es) 2006-06-16
RU2005119166A (ru) 2006-01-20

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