ATE326052T1 - Sensor mit kantilever und optischem resonator - Google Patents

Sensor mit kantilever und optischem resonator

Info

Publication number
ATE326052T1
ATE326052T1 AT02755480T AT02755480T ATE326052T1 AT E326052 T1 ATE326052 T1 AT E326052T1 AT 02755480 T AT02755480 T AT 02755480T AT 02755480 T AT02755480 T AT 02755480T AT E326052 T1 ATE326052 T1 AT E326052T1
Authority
AT
Austria
Prior art keywords
cantilever
resonator
sensor
optical resonator
lens assembly
Prior art date
Application number
AT02755480T
Other languages
English (en)
Inventor
Patrick Louis Theodor Frederix
Hans Josef Hug
Original Assignee
Swissprobe Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swissprobe Ag filed Critical Swissprobe Ag
Application granted granted Critical
Publication of ATE326052T1 publication Critical patent/ATE326052T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Weting (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Glass Compositions (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AT02755480T 2002-08-14 2002-08-14 Sensor mit kantilever und optischem resonator ATE326052T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB2002/003253 WO2004017329A1 (en) 2002-08-14 2002-08-14 Sensor with cantilever and optical resonator

Publications (1)

Publication Number Publication Date
ATE326052T1 true ATE326052T1 (de) 2006-06-15

Family

ID=31726506

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02755480T ATE326052T1 (de) 2002-08-14 2002-08-14 Sensor mit kantilever und optischem resonator

Country Status (9)

Country Link
US (1) US7319527B2 (de)
EP (1) EP1540661B1 (de)
JP (1) JP3874358B2 (de)
CN (1) CN100538913C (de)
AT (1) ATE326052T1 (de)
AU (1) AU2002321721A1 (de)
DE (1) DE60211388T2 (de)
ES (1) ES2265048T3 (de)
WO (1) WO2004017329A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7208724B2 (en) * 2004-11-03 2007-04-24 Omniprobe, Inc. Apparatus and method of detecting probe tip contact with a surface
US7347085B2 (en) * 2005-11-16 2008-03-25 Agilent Technologies, Inc. Nanoscale displacement detector
CN100451728C (zh) * 2007-07-06 2009-01-14 清华大学 带压阻传感器的微型二维扫描镜
US9835591B2 (en) * 2011-02-25 2017-12-05 Panorama Synergy Ltd Optical cantilever based analysis
DE102014201274A1 (de) * 2014-01-24 2015-07-30 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
CN105137127B (zh) * 2015-09-28 2017-08-01 南开大学 介质微螺旋锥和金属粮仓形纳米锥复合探针
TW201719109A (zh) 2015-11-23 2017-06-01 財團法人工業技術研究院 光學共振腔之腔長量測裝置
US9869695B1 (en) 2016-08-26 2018-01-16 International Business Machines Corporation Atomic-force microscope system with integrated fabry-perot resonator

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0440268B1 (de) * 1987-05-12 1994-08-17 International Business Machines Corporation Atomarer Kräftesensor mit interferometrischer Messung der Eigenschaften eines Datenträgers
US5017010A (en) 1989-05-16 1991-05-21 International Business Machines Corporation High sensitivity position sensor and method
JPH04161807A (ja) 1990-10-26 1992-06-05 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US5280341A (en) * 1992-02-27 1994-01-18 International Business Machines Corporation Feedback controlled differential fiber interferometer
DE4310349C2 (de) 1993-03-30 2000-11-16 Inst Mikrotechnik Mainz Gmbh Sensorkopf und Verfahren zu seiner Herstellung
US5463897A (en) 1993-08-17 1995-11-07 Digital Instruments, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
CN1048553C (zh) * 1993-11-26 2000-01-19 清华大学 高精度激光腔变位移/折射率测量方法及其装置
US5565987A (en) 1995-03-23 1996-10-15 Anvik Corporation Fabry-Perot probe profilometer having feedback loop to maintain resonance
US6455838B2 (en) 1998-10-06 2002-09-24 The Regents Of The University Of California High sensitivity deflection sensing device
KR100486937B1 (ko) * 2002-06-11 2005-05-03 한국표준과학연구원 광섬유에 의해 구현된 패브리 페로 공진기와 이를 이용한 원자간력 현미경에서의 외팔보 탐침의 변위 측정 및 보정시스템

Also Published As

Publication number Publication date
US7319527B2 (en) 2008-01-15
CN1682315A (zh) 2005-10-12
EP1540661A1 (de) 2005-06-15
CN100538913C (zh) 2009-09-09
JP3874358B2 (ja) 2007-01-31
EP1540661B1 (de) 2006-05-10
ES2265048T3 (es) 2007-02-01
DE60211388D1 (de) 2006-06-14
AU2002321721A1 (en) 2004-03-03
WO2004017329A1 (en) 2004-02-26
JP2005535896A (ja) 2005-11-24
US20050264825A1 (en) 2005-12-01
DE60211388T2 (de) 2007-02-08

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