ATE332873T1 - Zusammensetzung mit einer oxidierenden und komplexierenden verbindung - Google Patents

Zusammensetzung mit einer oxidierenden und komplexierenden verbindung

Info

Publication number
ATE332873T1
ATE332873T1 AT01271916T AT01271916T ATE332873T1 AT E332873 T1 ATE332873 T1 AT E332873T1 AT 01271916 T AT01271916 T AT 01271916T AT 01271916 T AT01271916 T AT 01271916T AT E332873 T1 ATE332873 T1 AT E332873T1
Authority
AT
Austria
Prior art keywords
oxidizing
compound
complexing
composition containing
complexing compound
Prior art date
Application number
AT01271916T
Other languages
English (en)
Inventor
Rita Vos
Paul Mertens
Albrecht Fester
Oliver Doll
Bernd Kolbesen
Original Assignee
Imec Inter Uni Micro Electr
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr, Air Prod & Chem filed Critical Imec Inter Uni Micro Electr
Application granted granted Critical
Publication of ATE332873T1 publication Critical patent/ATE332873T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K15/00Anti-oxidant compositions; Compositions inhibiting chemical change
    • C09K15/04Anti-oxidant compositions; Compositions inhibiting chemical change containing organic compounds
    • C09K15/30Anti-oxidant compositions; Compositions inhibiting chemical change containing organic compounds containing heterocyclic ring with at least one nitrogen atom as ring member
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B15/00Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
    • C01B15/01Hydrogen peroxide
    • C01B15/037Stabilisation by additives
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16Organic compounds
    • C11D3/26Organic compounds containing nitrogen
    • C11D3/28Heterocyclic compounds containing nitrogen in the ring
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/39Organic or inorganic per-compounds
    • C11D3/3902Organic or inorganic per-compounds combined with specific additives
    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06LDRY-CLEANING, WASHING OR BLEACHING FIBRES, FILAMENTS, THREADS, YARNS, FABRICS, FEATHERS OR MADE-UP FIBROUS GOODS; BLEACHING LEATHER OR FURS
    • D06L4/00Bleaching fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods; Bleaching leather or furs
    • D06L4/10Bleaching fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods; Bleaching leather or furs using agents which develop oxygen
    • D06L4/12Bleaching fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods; Bleaching leather or furs using agents which develop oxygen combined with specific additives
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10Objects to be cleaned
    • C11D2111/14Hard surfaces
    • C11D2111/22Electronic devices, e.g. PCBs or semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Textile Engineering (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Cleaning By Liquid Or Steam (AREA)
AT01271916T 2000-12-22 2001-12-21 Zusammensetzung mit einer oxidierenden und komplexierenden verbindung ATE332873T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25792800P 2000-12-22 2000-12-22

Publications (1)

Publication Number Publication Date
ATE332873T1 true ATE332873T1 (de) 2006-08-15

Family

ID=22978385

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01271916T ATE332873T1 (de) 2000-12-22 2001-12-21 Zusammensetzung mit einer oxidierenden und komplexierenden verbindung

Country Status (11)

Country Link
US (1) US7160482B2 (de)
EP (1) EP1345848B1 (de)
JP (1) JP3958687B2 (de)
KR (1) KR100863159B1 (de)
CN (1) CN100515928C (de)
AT (1) ATE332873T1 (de)
AU (1) AU2002218892A1 (de)
DE (1) DE60121468T2 (de)
IL (1) IL156551A0 (de)
TW (1) TW583310B (de)
WO (1) WO2002051961A2 (de)

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* Cited by examiner, † Cited by third party
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US20090325362A1 (en) * 2003-01-07 2009-12-31 Nabil Chhaimi Method of recycling an epitaxied donor wafer
WO2005001016A1 (en) * 2003-06-27 2005-01-06 Interuniversitair Microelektronica Centrum (Imec) Semiconductor cleaning solution
WO2006081406A1 (en) * 2005-01-27 2006-08-03 Advanced Technology Materials, Inc. Compositions for processing of semiconductor substrates
WO2006125462A1 (en) * 2005-05-25 2006-11-30 Freescale Semiconductor, Inc Cleaning solution for a semiconductor wafer
US8034227B2 (en) * 2005-06-30 2011-10-11 Akzo Nobel N.V. Chemical process
US20070012578A1 (en) * 2005-06-30 2007-01-18 Akzo Nobel N.V. Chemical process
KR101444468B1 (ko) * 2005-10-05 2014-10-30 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 에칭후 잔류물을 제거하기 위한 산화성 수성 세정제
GB0520380D0 (en) 2005-10-07 2005-11-16 Unilever Plc Stain removal
KR100663375B1 (ko) * 2006-01-18 2007-01-02 삼성전자주식회사 금속질화막을 게이트전극으로 채택하는 반도체소자의제조방법
DE602006014551D1 (de) * 2006-10-31 2010-07-08 Soitec Silicon On Insulator Verfahren zur Charakterisierung von Defekten auf Silizium-Oberflächen, Ätzlösung für Silizium-Oberflächen und Verfahren zur Behandlung von Silizium-Oberflächen mit der Ätzlösung
CN101270325A (zh) * 2007-03-23 2008-09-24 安集微电子(上海)有限公司 一种清洗液及其应用
TWI426125B (zh) * 2007-11-20 2014-02-11 Anji Microelectronics Co Ltd 清洗液及其應用
CN102051836A (zh) * 2009-10-29 2011-05-11 海茂株式会社 纸浆制造排水的处理方法
US11110121B2 (en) 2010-07-27 2021-09-07 Clariant International Ltd. Compositions comprising hydrogen peroxide or hydrogen peroxide donor substances
ES2525388T3 (es) 2010-07-27 2014-12-23 Clariant Finance (Bvi) Limited Utilización de hidroxipiridonas o de sus sales para la estabilización del peróxido de hidrógeno o de unas sustancias que ponen en libertad peróxido de hidrógeno
US20120295447A1 (en) * 2010-11-24 2012-11-22 Air Products And Chemicals, Inc. Compositions and Methods for Texturing of Silicon Wafers
DE102010054866A1 (de) * 2010-12-17 2011-08-18 Clariant International Ltd. Zusammensetzungen enthaltend Wasserstoffperoxid oder Wasserstoffperoxid freisetzende Substanzen
WO2012142087A1 (en) * 2011-04-12 2012-10-18 The Procter & Gamble Company Metal bleach catalysts
EP2742103B1 (de) * 2011-08-01 2016-09-21 Basf Se Verfahren zur herstellung von halbleiterbauelementen mit chemisch-mechanischer polierung eines elementaren germanium- und/oder si1-xgex-materials unter verwendung einer cmp-zusammensetzung mit einer spezifischen organischen verbindung
BR112014003518A2 (pt) * 2011-08-15 2017-06-13 Procter & Gamble composições detergentes contendo compostos de piridinol-n-óxido
DE102013217034A1 (de) * 2013-08-27 2015-03-05 Henkel Ag & Co. Kgaa Wasch- und Reinigungsmittel mit verbesserter Leistung
CN107076716A (zh) * 2015-01-14 2017-08-18 栗田工业株式会社 氧化剂浓度的测定方法及测定装置以及电子材料洗净装置
KR20170132813A (ko) * 2015-03-26 2017-12-04 라이프 테크놀로지스 코포레이션 반도체 장치를 처리하는 방법
CN110965086A (zh) * 2019-11-21 2020-04-07 武汉奥邦表面技术有限公司 一种酸性镀锌除杂剂及其应用

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2624655A (en) * 1949-10-13 1953-01-06 Buffalo Electro Chem Co Stable aqueous hydrogen peroxide and method of preparing same
US3903244A (en) * 1973-02-02 1975-09-02 Fmc Corp Stabilized hydrogen peroxide
US4239643A (en) * 1979-01-02 1980-12-16 Monsanto Company Peroxide stabilization
GB8308054D0 (en) * 1983-03-24 1983-05-05 Hider R C Pharmaceutical compositions
EP0496605B1 (de) * 1991-01-24 2001-08-01 Wako Pure Chemical Industries Ltd Lösungen zur Oberflächenbehandlung von Halbleitern
JP3075290B2 (ja) * 1991-02-28 2000-08-14 三菱瓦斯化学株式会社 半導体基板の洗浄液
GB9217099D0 (en) * 1992-08-12 1992-09-23 British Tech Group Pharmaceutical compositions
US5419847A (en) * 1993-05-13 1995-05-30 The Procter & Gamble Company Translucent, isotropic aqueous liquid bleach composition
DE19631363C1 (de) * 1996-08-02 1998-02-12 Siemens Ag Wässrige Reinigungslösung für ein Halbleitersubstrat
EP1006112A1 (de) * 1998-12-01 2000-06-07 Cerebrus Pharmaceuticals Limited 3-Hydroxy-2(1H)-pyridinon- oder 3-hydroxy-4(1H)-pyridinon- Derivate verwendbar als reaktive Sauerstoffspezies-Fänger (ROS)
EP1091395A1 (de) * 1999-09-30 2001-04-11 Interuniversitair Microelektronica Centrum Vzw Reinigungslösung für Behandlung von Halbleitersubstraten

Also Published As

Publication number Publication date
US7160482B2 (en) 2007-01-09
WO2002051961A3 (en) 2002-10-17
WO2002051961A2 (en) 2002-07-04
AU2002218892A1 (en) 2002-07-08
DE60121468T2 (de) 2007-03-29
CN1486279A (zh) 2004-03-31
TW583310B (en) 2004-04-11
EP1345848A2 (de) 2003-09-24
JP2004534862A (ja) 2004-11-18
IL156551A0 (en) 2004-01-04
KR20030091950A (ko) 2003-12-03
JP3958687B2 (ja) 2007-08-15
KR100863159B1 (ko) 2008-10-13
EP1345848B1 (de) 2006-07-12
US20050009207A1 (en) 2005-01-13
CN100515928C (zh) 2009-07-22
DE60121468D1 (de) 2006-08-24

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