ATE333590T1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
ATE333590T1
ATE333590T1 AT00124676T AT00124676T ATE333590T1 AT E333590 T1 ATE333590 T1 AT E333590T1 AT 00124676 T AT00124676 T AT 00124676T AT 00124676 T AT00124676 T AT 00124676T AT E333590 T1 ATE333590 T1 AT E333590T1
Authority
AT
Austria
Prior art keywords
turbomolecular pump
disk
pump
stator disk
behind
Prior art date
Application number
AT00124676T
Other languages
English (en)
Inventor
Heinrich Lotz
Joerg Stanzel
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE333590T1 publication Critical patent/ATE333590T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)
AT00124676T 1999-11-22 2000-11-11 Turbomolekularpumpe ATE333590T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19956015A DE19956015A1 (de) 1999-11-22 1999-11-22 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
ATE333590T1 true ATE333590T1 (de) 2006-08-15

Family

ID=7929835

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00124676T ATE333590T1 (de) 1999-11-22 2000-11-11 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US6561755B1 (de)
EP (1) EP1101944B1 (de)
JP (1) JP2001153088A (de)
AT (1) ATE333590T1 (de)
DE (2) DE19956015A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10351451A1 (de) * 2003-11-04 2005-06-16 Friesen, Waldemar NDM - Neue Dimension für Motoren
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
CN110043485B (zh) * 2019-05-16 2024-07-19 江苏博联硕焊接技术有限公司 一种涡轮分子泵转子及其扩散焊接方法
CN114673671B (zh) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 风机和吸尘装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH0242195A (ja) * 1988-07-31 1990-02-13 Shimadzu Corp ターボ分子ポンプ
US5063661A (en) * 1990-07-05 1991-11-12 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating a split compressor case
US5104288A (en) * 1990-12-10 1992-04-14 Westinghouse Electric Corp. Dual plane bolted joint for separately-supported segmental stationary turbine blade assemblies
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire

Also Published As

Publication number Publication date
EP1101944A3 (de) 2001-10-17
DE19956015A1 (de) 2001-05-23
US6561755B1 (en) 2003-05-13
DE50013185D1 (de) 2006-08-31
JP2001153088A (ja) 2001-06-05
EP1101944A2 (de) 2001-05-23
EP1101944B1 (de) 2006-07-19

Similar Documents

Publication Publication Date Title
DE69911013D1 (de) Impellerpumpe mit flexiblen flügeln
ATE259112T1 (de) Rotoreinrichtung
DE60014126D1 (de) Aussenläuferbürstenloser gleichstrommotor
ATE280328T1 (de) Turboradialgebläse
EP1039137A3 (de) Turbomolekularpumpe
NO981472L (no) Rotasjonslager med tetning
DE602004016188D1 (de) Drehpumpe mit elektromagnetischem lcr-lager
DK0980599T3 (da) Motor
ATE347746T1 (de) Aussenläufermotor mit stehender lagerachse
RU95106507A (ru) Корпус для гидравлического устройства, сдвоенный гидравлический насос и способ преобразования многопоршневого гидравлического устройства и сдвоенного устройства, вращающихся в одном направлении, для вращения в противоположном направлении
YU52198A (sh) Pumpa
ATE389116T1 (de) Doppel-gebläseanordnung
IT8985635A0 (it) Cassa statorica in lamiera metallica, particolarmente per pompe radiali centrifughe.
DE50014066D1 (de) Hydraulischer turbinen-generator
ATE368588T1 (de) Traktionsmotor
DE59806955D1 (de) Schraubenverdichter
ATE369495T1 (de) Vakuumpumpen
DE50015120D1 (de) Turbomolekularpumpe
DE60313493D1 (de) Vakuumpumpe
ATE333590T1 (de) Turbomolekularpumpe
IT1296155B1 (it) Rotore di pompa turbomolecolare
DE50114317D1 (de) Turbomolekularvakuumpumpe mit rotor- und statorschaufeln
DE50015596D1 (de) Vakuumpumpe
BR0201283A (pt) Motor magnético
NO923295L (no) Montasje med integrert turbin og pumpe

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee