ATE335216T1 - Vorrichtung zur halterung und justierung eines bauteils - Google Patents

Vorrichtung zur halterung und justierung eines bauteils

Info

Publication number
ATE335216T1
ATE335216T1 AT02720064T AT02720064T ATE335216T1 AT E335216 T1 ATE335216 T1 AT E335216T1 AT 02720064 T AT02720064 T AT 02720064T AT 02720064 T AT02720064 T AT 02720064T AT E335216 T1 ATE335216 T1 AT E335216T1
Authority
AT
Austria
Prior art keywords
fixing
levers
adjusting
lever
base
Prior art date
Application number
AT02720064T
Other languages
English (en)
Inventor
Jacques Billet
Original Assignee
Sagem Defense Securite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem Defense Securite filed Critical Sagem Defense Securite
Application granted granted Critical
Publication of ATE335216T1 publication Critical patent/ATE335216T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Manipulator (AREA)
  • Telescopes (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
  • Fluid-Damping Devices (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Burglar Alarm Systems (AREA)
AT02720064T 2001-03-21 2002-03-13 Vorrichtung zur halterung und justierung eines bauteils ATE335216T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0103842A FR2822525B1 (fr) 2001-03-21 2001-03-21 Dispositif de fixation et de reglage d'un organe a supporter

Publications (1)

Publication Number Publication Date
ATE335216T1 true ATE335216T1 (de) 2006-08-15

Family

ID=8861403

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02720064T ATE335216T1 (de) 2001-03-21 2002-03-13 Vorrichtung zur halterung und justierung eines bauteils

Country Status (7)

Country Link
US (1) US7063300B2 (de)
EP (1) EP1370895B1 (de)
JP (2) JP2004535556A (de)
AT (1) ATE335216T1 (de)
DE (1) DE60213570T2 (de)
FR (1) FR2822525B1 (de)
WO (1) WO2002075365A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343101A (ja) * 2003-04-25 2004-12-02 Canon Inc 駆動機構、それを有する露光装置、デバイスの製造方法
FR2945638B1 (fr) * 2009-05-14 2012-01-06 Commissariat Energie Atomique Dispositif de maintien avec precision d'un composant, notamment optique, et montage comprenant au moins un tel dispositif
WO2011148386A1 (en) * 2010-05-25 2011-12-01 Systemantics India Pvt. Ltd A hybrid serial-parallel linkage based six degrees of freedom robotic manipulator
FR2967742B1 (fr) * 2010-11-23 2013-11-22 Astrium Sas Dispositif d'isolation vibratoire
CN102878394B (zh) * 2012-09-11 2014-09-10 华南理工大学 一种部分解耦的平面三自由度并联精密定位平台
CN103235385B (zh) * 2013-04-28 2015-03-04 哈尔滨工业大学 一种大口径光学元件的横向在线洁净拆装装置
US10048463B2 (en) 2013-10-28 2018-08-14 Mbda Deutschland Gmbh Adjustable mounting arrangement for an object to be positioned precisely relative to a base
US10161561B2 (en) 2015-07-30 2018-12-25 Nec Corporation Linkage rod including limited-displacement flexible mechanism
US10030695B2 (en) * 2015-07-30 2018-07-24 Nec Corporation Multi-degree-of-freedom adjustment mechanism
US9920874B2 (en) * 2015-07-30 2018-03-20 Nec Corporation Linkage rod including limited-displacement flexible mechanism
USD813918S1 (en) * 2016-01-28 2018-03-27 Autodesk, Inc. Three dimensional (3D) delta printer
DE102017112517B3 (de) 2017-06-07 2018-12-06 Physik Instrumente (Pi) Gmbh & Co. Kg Stellvorrichtung
JP7215292B2 (ja) * 2019-03-28 2023-01-31 日本電気株式会社 反射鏡支持装置および光学式望遠鏡
CN110058404A (zh) * 2019-04-26 2019-07-26 广东工业大学 一种压电驱动型一体式大行程微纳偏摆台
CN113983308B (zh) * 2021-12-27 2022-04-01 中国工程物理研究院应用电子学研究所 多自由度可调的光学减振平台
DE102024209248A1 (de) * 2024-09-25 2026-03-26 Carl Zeiss Smt Gmbh Vorrichtung, Halteeinrichtung, Anordnung, System und Verfahren zur Halterung eines optischen Elements; Lithografiesystem

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4226507A (en) * 1979-07-09 1980-10-07 The Perkin-Elmer Corporation Three actuator deformable specimen
US4655563A (en) * 1985-11-25 1987-04-07 Itek Corporation Variable thickness deformable mirror
US4806068A (en) * 1986-09-30 1989-02-21 Dilip Kohli Rotary linear actuator for use in robotic manipulators
US4763991A (en) * 1987-08-10 1988-08-16 Litton Systems, Inc. Adjustable six degree of freedom mount for optical components
US5473852A (en) * 1988-12-22 1995-12-12 British Technology Group Ltd. Mechanical devices and structures
US4988244A (en) * 1989-09-01 1991-01-29 Kearney & Trecker Six-axis machine tool
FR2724236B1 (fr) * 1994-09-07 1996-12-06 Aerospatiale Mecanisme de montage isostatique d'un element fragile tel qu'un miroir, utilisable notamment sur un engin spatial
US6420329B1 (en) 1995-10-26 2002-07-16 S. C. Johnson & Son, Inc. Cleaning compositions
US6099217A (en) * 1995-12-20 2000-08-08 Wiegand; Alexander Konrad Device for spatially moving a body with three to six degrees of freedom in a controlled manner
US5726815A (en) * 1996-04-12 1998-03-10 Fusion Uv Systems, Inc. Apparatus for aligning the object focus in filament irradiating units
DE29607680U1 (de) * 1996-04-27 1996-06-20 Carl Zeiss Jena Gmbh, 07745 Jena Anordnung zur Verringerung der Crashgefahr bei universellen Positioniersystemen
FR2761486B1 (fr) 1997-03-28 1999-05-21 Centre Nat Etd Spatiales Dispositif de positionnement micrometrique d'un support d'element optique spatial selon six degres de liberte
US6047610A (en) * 1997-04-18 2000-04-11 Stocco; Leo J Hybrid serial/parallel manipulator
FR2773890B1 (fr) * 1998-01-22 2001-11-23 Aerospatiale Ensemble integre et compact de montage isostatique et de correction de position d'un organe, tel qu'un miroir, d'un telescope spatial
US6240799B1 (en) * 1998-05-26 2001-06-05 Hexel Corporation Triangular gimbal

Also Published As

Publication number Publication date
US7063300B2 (en) 2006-06-20
EP1370895B1 (de) 2006-08-02
JP5086309B2 (ja) 2012-11-28
JP2004535556A (ja) 2004-11-25
US20040105138A1 (en) 2004-06-03
JP2009205181A (ja) 2009-09-10
WO2002075365A2 (fr) 2002-09-26
FR2822525B1 (fr) 2003-08-29
WO2002075365A3 (fr) 2003-04-03
FR2822525A1 (fr) 2002-09-27
DE60213570D1 (de) 2006-09-14
DE60213570T2 (de) 2007-07-19
EP1370895A2 (de) 2003-12-17

Similar Documents

Publication Publication Date Title
DE60213570D1 (de) Vorrichtung zur halterung und justierung eines bauteils
WO2007044289A3 (en) Adjustable display mount apparatus and system
WO2006132938A3 (en) Support arm assembly
EP1754927A3 (de) Träger für einen elektrischen Bildschirm
ATE315762T1 (de) Stativ mit einem operationsmikroskop
EP1139003A3 (de) Stativ für Bildschirmgerät
DE69901021D1 (de) Vorrichtung zur montage und lagekorrektur eines elementes, wie eines spiegels von einem weltraumteleskop
ATE448707T1 (de) An einem träger verschwenkbar angeordneter ausleger für einen freiarmschirm
JP2005510683A5 (de)
DE50105696D1 (de) Apparate-haltevorrichtung
ATE402794T1 (de) Hochleistungsvorrichtung zum kraftausgleich
DE60231069D1 (de) Optisches System mit einer federgelenkigen Aufhängungsvorrichtung mit drei Freiheitsgraden und Satellit mit einem solchen optischen System
EP1107068A3 (de) Lithographischer Projektionsapparat mit System zur Positionierung eines Reflektors
DE50210588D1 (de) Justiervorrichtung für einen thermischen auslöser
EP2372408A3 (de) Reflektor, optisches Element, Interferometersystem, Objektivtischvorrichtung, Belichtungsgerät und Vorrichtungsherstellungsverfahren
FR3107682B1 (fr) Dispositif de connexion d’un balai d’essuyage à un bras d’essuie-glace
JP6625120B2 (ja) セラミックコンポーネント間の圧力嵌め接続用の接続機構
DE602004012456D1 (de) Windschutzscheibenwischeranordnung
ATE402365T1 (de) Vorrichtung zur befestigung eines länglichen elements durch axiales festklemmen
DK1136145T3 (da) Indretning til fjernelse af buler
FR3098430B1 (fr) Système de préhension par couplage magnétique
FR3096324B1 (fr) Dispositif de balai d’essuie-glace
KR920019385A (ko) 빠찡꼬대 부착장치
FR3082280B1 (fr) Mecanisme de protection pour source lumineuse
JPH11194188A (ja) 板状部材の保持装置

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties