ATE340278T1 - Verfahren zum reinigen einer materialoberfläche beschichtet mit einer organischen substanz, generator und einrichtung zur durchführung des verfahrens - Google Patents

Verfahren zum reinigen einer materialoberfläche beschichtet mit einer organischen substanz, generator und einrichtung zur durchführung des verfahrens

Info

Publication number
ATE340278T1
ATE340278T1 AT03735758T AT03735758T ATE340278T1 AT E340278 T1 ATE340278 T1 AT E340278T1 AT 03735758 T AT03735758 T AT 03735758T AT 03735758 T AT03735758 T AT 03735758T AT E340278 T1 ATE340278 T1 AT E340278T1
Authority
AT
Austria
Prior art keywords
cleaning
voltage
generator
organic substance
carrying
Prior art date
Application number
AT03735758T
Other languages
English (en)
Inventor
Daniel Chaleix
Patrick Choquet
Gerard Baravian
Bernard Lacour
Vincent Puech
Original Assignee
Arcelor France
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arcelor France filed Critical Arcelor France
Application granted granted Critical
Publication of ATE340278T1 publication Critical patent/ATE340278T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335—Cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning In General (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
AT03735758T 2002-02-19 2003-02-19 Verfahren zum reinigen einer materialoberfläche beschichtet mit einer organischen substanz, generator und einrichtung zur durchführung des verfahrens ATE340278T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0202047A FR2836157B1 (fr) 2002-02-19 2002-02-19 Procede de nettoyage de la surface d'un materiau enduit d'une susbstance organique, generateur et dispositif de mise en oeuvre

Publications (1)

Publication Number Publication Date
ATE340278T1 true ATE340278T1 (de) 2006-10-15

Family

ID=27636284

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03735758T ATE340278T1 (de) 2002-02-19 2003-02-19 Verfahren zum reinigen einer materialoberfläche beschichtet mit einer organischen substanz, generator und einrichtung zur durchführung des verfahrens

Country Status (18)

Country Link
US (2) US7662237B2 (de)
EP (1) EP1476588B1 (de)
JP (2) JP4704686B2 (de)
KR (1) KR100929538B1 (de)
CN (2) CN101014222B (de)
AT (1) ATE340278T1 (de)
AU (1) AU2003238140B2 (de)
BR (2) BRPI0307889B8 (de)
CA (1) CA2476184C (de)
DE (1) DE60308484T2 (de)
ES (1) ES2273007T3 (de)
FR (1) FR2836157B1 (de)
MX (1) MXPA04007930A (de)
PL (1) PL202796B1 (de)
PT (1) PT1476588E (de)
RU (1) RU2308546C2 (de)
WO (1) WO2003078692A1 (de)
ZA (1) ZA200406609B (de)

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FR2865420B1 (fr) * 2004-01-28 2007-09-14 Saint Gobain Procede de nettoyage d'un substrat
EP1570921A1 (de) 2004-03-02 2005-09-07 Siemens Aktiengesellschaft Verfahren zur Plasmareinigung eines Bauteils
US20060246218A1 (en) * 2005-04-29 2006-11-02 Guardian Industries Corp. Hydrophilic DLC on substrate with barrier discharge pyrolysis treatment
AT502351A1 (de) * 2005-09-12 2007-03-15 Ziger Peter Anlage zur plasmaprozessierung von endlosmaterial
SK287455B6 (sk) * 2006-06-08 2010-10-07 Fakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Ho Zariadenie a spôsob čistenia, leptania, aktivácie a následné úpravy povrchu skla, povrchu skla pokrytého kysličníkmi kovov a povrchu iných materiálov pokrytých SiO2
JP2009032651A (ja) * 2007-06-26 2009-02-12 Panasonic Electric Works Co Ltd プラズマ処理装置
DE102007052573B4 (de) * 2007-11-03 2015-04-09 Manroland Web Systems Gmbh Feuchtwerk
US9168988B2 (en) * 2010-12-27 2015-10-27 Loch Stock and Barrel LLC Method of cleaning a rotating object
TWI463922B (zh) * 2011-03-09 2014-12-01 Creating Nano Technologies Inc 電漿產生裝置
WO2012155174A1 (en) * 2011-05-13 2012-11-22 Dbd Innovations Pty Ltd Method of analyzing a material
DK3151981T3 (da) * 2014-06-05 2022-02-07 Illinois Tool Works System og metode til rengøring af en genstand
CN104342714B (zh) * 2014-10-22 2016-08-24 河北大学 一种去除不锈钢表面氧化皮的方法
JP2020535784A (ja) 2017-09-11 2020-12-03 ザ・リサーチ・ファウンデイション・フォー・ザ・ステート・ユニバーシティ・オブ・ニューヨーク 電気力学的シールドを使用してソーラーパネルを自己洗浄するためのシステム及び方法
US10722925B2 (en) * 2017-12-04 2020-07-28 Suss Micro Tec Photomask Equipment Gmbh & Co Kg Treatment head, treatment system and method for treating a local surface area of a substrate
RU2739195C1 (ru) * 2020-04-07 2020-12-21 Общество С Ограниченной Ответственностью "Нтц Тонкопленочных Технологий В Энергетике" Вакуумная напылительная установка с системой лазерной очистки паллет (варианты)

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Also Published As

Publication number Publication date
BRPI0307889B8 (pt) 2017-03-28
AU2003238140A1 (en) 2003-09-29
US20050145174A1 (en) 2005-07-07
KR100929538B1 (ko) 2009-12-03
PT1476588E (pt) 2006-12-29
DE60308484D1 (de) 2006-11-02
FR2836157B1 (fr) 2004-04-09
US7662237B2 (en) 2010-02-16
CA2476184A1 (fr) 2003-09-25
ZA200406609B (en) 2005-08-31
US20090255809A1 (en) 2009-10-15
BR0307889A (pt) 2004-12-28
FR2836157A1 (fr) 2003-08-22
ES2273007T3 (es) 2007-05-01
DE60308484T2 (de) 2007-05-24
BR122012007163B1 (pt) 2015-08-11
BR0307889B1 (pt) 2012-11-27
AU2003238140B2 (en) 2008-05-01
EP1476588A1 (de) 2004-11-17
CN101014222B (zh) 2010-11-03
JP4704686B2 (ja) 2011-06-15
RU2004127920A (ru) 2005-06-10
JP2010031377A (ja) 2010-02-12
US9502214B2 (en) 2016-11-22
JP2005526181A (ja) 2005-09-02
RU2308546C2 (ru) 2007-10-20
WO2003078692A1 (fr) 2003-09-25
CN1311100C (zh) 2007-04-18
MXPA04007930A (es) 2004-11-26
EP1476588B1 (de) 2006-09-20
CA2476184C (fr) 2010-02-09
PL370588A1 (en) 2005-05-30
PL202796B1 (pl) 2009-07-31
CN101014222A (zh) 2007-08-08
KR20040084923A (ko) 2004-10-06
CN1633524A (zh) 2005-06-29

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