ATE342579T1 - Feldemissionsanordnung und verfahren zur ihrer herstellung - Google Patents

Feldemissionsanordnung und verfahren zur ihrer herstellung

Info

Publication number
ATE342579T1
ATE342579T1 AT04729480T AT04729480T ATE342579T1 AT E342579 T1 ATE342579 T1 AT E342579T1 AT 04729480 T AT04729480 T AT 04729480T AT 04729480 T AT04729480 T AT 04729480T AT E342579 T1 ATE342579 T1 AT E342579T1
Authority
AT
Austria
Prior art keywords
field emission
electrode
producing
tip
emission tip
Prior art date
Application number
AT04729480T
Other languages
English (en)
Inventor
Hugo M Visser
Marcus A Verschuuren
Teunis J Vink
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE342579T1 publication Critical patent/ATE342579T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • H01J1/3042Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044Point emitters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/021Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30403Field emission cathodes characterised by the emitter shape
    • H01J2201/30407Microengineered point emitters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30403Field emission cathodes characterised by the emitter shape
    • H01J2201/30426Coatings on the emitter surface, e.g. with low work function materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Luminescent Compositions (AREA)
AT04729480T 2003-04-28 2004-04-26 Feldemissionsanordnung und verfahren zur ihrer herstellung ATE342579T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03101158 2003-04-28

Publications (1)

Publication Number Publication Date
ATE342579T1 true ATE342579T1 (de) 2006-11-15

Family

ID=33395939

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04729480T ATE342579T1 (de) 2003-04-28 2004-04-26 Feldemissionsanordnung und verfahren zur ihrer herstellung

Country Status (10)

Country Link
US (1) US20060267475A1 (de)
EP (1) EP1620873B1 (de)
JP (1) JP2006524895A (de)
KR (1) KR20050115949A (de)
CN (1) CN1781173A (de)
AT (1) ATE342579T1 (de)
BR (1) BRPI0409776A (de)
DE (1) DE602004002772D1 (de)
TW (1) TW200423182A (de)
WO (1) WO2004097884A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7575979B2 (en) * 2004-06-22 2009-08-18 Hewlett-Packard Development Company, L.P. Method to form a film
KR100667134B1 (ko) * 2004-11-12 2007-01-12 엘지.필립스 엘시디 주식회사 평판표시소자의 제조방법 및 장치
JP2006156426A (ja) * 2004-11-25 2006-06-15 Seiko Epson Corp 導電性パターンの形成方法
KR100934839B1 (ko) * 2008-04-21 2009-12-31 경희대학교 산학협력단 전자방출 소자의 제조에 사용되는 스탬프 제조방법 및 그스탬프를 이용한 전자방출 소자의 제조방법
DE102008049654B4 (de) * 2008-09-30 2024-08-01 Carl Zeiss Microscopy Gmbh Elektronenstrahlquelle, Elektronenstrahlsystem mit derselben, Verfahren zur Herstellung der Elektronenstrahlquelle sowie deren Verwendung
JP2010157490A (ja) * 2008-12-02 2010-07-15 Canon Inc 電子放出素子および該電子放出素子を用いた表示パネル
US8536773B2 (en) 2011-03-30 2013-09-17 Carl Zeiss Microscopy Gmbh Electron beam source and method of manufacturing the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5869169A (en) * 1996-09-27 1999-02-09 Fed Corporation Multilayer emitter element and display comprising same
US6045425A (en) * 1997-03-18 2000-04-04 Vlsi Technology, Inc. Process for manufacturing arrays of field emission tips
JP2000021287A (ja) * 1998-06-30 2000-01-21 Sharp Corp 電界放出型電子源及びその製造方法
TW498393B (en) * 2001-07-11 2002-08-11 Au Optronics Corp Manufacturing method of the microtip of field emission display
US6936181B2 (en) * 2001-10-11 2005-08-30 Kovio, Inc. Methods for patterning using liquid embossing

Also Published As

Publication number Publication date
BRPI0409776A (pt) 2006-05-30
EP1620873B1 (de) 2006-10-11
US20060267475A1 (en) 2006-11-30
WO2004097884A1 (en) 2004-11-11
EP1620873A1 (de) 2006-02-01
JP2006524895A (ja) 2006-11-02
CN1781173A (zh) 2006-05-31
KR20050115949A (ko) 2005-12-08
DE602004002772D1 (de) 2006-11-23
TW200423182A (en) 2004-11-01

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