ATE343119T1 - Resonierender sensor - Google Patents
Resonierender sensorInfo
- Publication number
- ATE343119T1 ATE343119T1 AT99967043T AT99967043T ATE343119T1 AT E343119 T1 ATE343119 T1 AT E343119T1 AT 99967043 T AT99967043 T AT 99967043T AT 99967043 T AT99967043 T AT 99967043T AT E343119 T1 ATE343119 T1 AT E343119T1
- Authority
- AT
- Austria
- Prior art keywords
- resonant sensor
- diaphragm
- shift
- pressure
- microbeam
- Prior art date
Links
- 238000005459 micromachining Methods 0.000 abstract 1
- 239000000725 suspension Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
- G01L9/0017—Optical excitation or measuring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Glass Compositions (AREA)
- Valve Device For Special Equipments (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/219,794 US6182513B1 (en) | 1998-12-23 | 1998-12-23 | Resonant sensor and method of making a pressure sensor comprising a resonant beam structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE343119T1 true ATE343119T1 (de) | 2006-11-15 |
Family
ID=22820814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99967043T ATE343119T1 (de) | 1998-12-23 | 1999-12-22 | Resonierender sensor |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US6182513B1 (de) |
| EP (1) | EP1155297B1 (de) |
| AT (1) | ATE343119T1 (de) |
| DE (1) | DE69933703T2 (de) |
| WO (1) | WO2000039550A1 (de) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7514917B2 (en) * | 2003-09-19 | 2009-04-07 | Automotive Systems Laboratory, Inc. | Magnetic crash sensor |
| EP1136036B1 (de) * | 2000-03-21 | 2003-02-19 | Radi Medical Systems Ab | Auf Resonanz basierendes Druckwandlersystem |
| US6714102B2 (en) * | 2001-03-01 | 2004-03-30 | Agilent Technologies, Inc. | Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method |
| FR2824636B1 (fr) * | 2001-05-10 | 2003-09-05 | Schlumberger Services Petrol | Capteur de pression microelectronique a resonateur supportant des pressions elevees |
| US6585660B2 (en) | 2001-05-18 | 2003-07-01 | Jomed Inc. | Signal conditioning device for interfacing intravascular sensors having varying operational characteristics to a physiology monitor |
| WO2002101347A1 (en) * | 2001-06-08 | 2002-12-19 | Radi Medical Systems Ab | Miniaturized pressure sensor |
| JP2003083829A (ja) * | 2001-09-12 | 2003-03-19 | Toyo Commun Equip Co Ltd | 圧力センサ |
| TW520341B (en) * | 2001-11-20 | 2003-02-11 | Ind Tech Res Inst | A method for manufacturing a chamber of the thin film bulk acoustic wave resonator (FBAR) |
| US6894787B2 (en) * | 2001-12-21 | 2005-05-17 | Honeywell International Inc. | Optical pressure sensor |
| US6710355B2 (en) * | 2002-02-07 | 2004-03-23 | Honeywell International Inc. | Optically powered resonant integrated microstructure pressure sensor |
| US6663570B2 (en) | 2002-02-27 | 2003-12-16 | Volcano Therapeutics, Inc. | Connector for interfacing intravascular sensors to a physiology monitor |
| US7134994B2 (en) * | 2002-05-20 | 2006-11-14 | Volcano Corporation | Multipurpose host system for invasive cardiovascular diagnostic measurement acquisition and display |
| DE10241066A1 (de) * | 2002-09-05 | 2004-03-18 | Robert Bosch Gmbh | Halbleiterbauelement und Verfahren |
| US7495302B2 (en) * | 2004-03-03 | 2009-02-24 | Robert Bosch Gmbh | Micromechanical component having a diaphragm |
| US7263894B2 (en) * | 2004-06-07 | 2007-09-04 | Radi Medical Systems Ab | Sensor and guide wire assembly |
| JP2006029984A (ja) * | 2004-07-16 | 2006-02-02 | Yokogawa Electric Corp | 振動式圧力センサ |
| US20060116602A1 (en) * | 2004-12-01 | 2006-06-01 | Alden Dana A | Medical sensing device and system |
| US7499604B1 (en) * | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
| US20070236213A1 (en) * | 2006-03-30 | 2007-10-11 | Paden Bradley E | Telemetry method and apparatus using magnetically-driven mems resonant structure |
| US7967761B2 (en) * | 2006-12-01 | 2011-06-28 | Radi Medical Systems Ab | Sensor and guide wire assembly |
| WO2010039307A2 (en) * | 2008-06-26 | 2010-04-08 | Cornell University | Cmos integrated micromechanical resonators and methods for fabricating the same |
| GB2470399B (en) * | 2009-05-21 | 2013-11-27 | Ge Infrastructure Sensing Inc | A sensor arranged to measure more than one characteristic of a fluid |
| US8478384B2 (en) | 2010-01-19 | 2013-07-02 | Lightlab Imaging, Inc. | Intravascular optical coherence tomography system with pressure monitoring interface and accessories |
| US8696600B2 (en) * | 2010-01-29 | 2014-04-15 | St. Jude Medical Systems Ab | Medical guide wire assembly |
| WO2011092190A1 (en) | 2010-01-29 | 2011-08-04 | St Jude Medical Systems Ab | Medical guide wire assembly |
| JP5158160B2 (ja) * | 2010-09-10 | 2013-03-06 | 横河電機株式会社 | 振動式トランスデューサ |
| JP5814860B2 (ja) | 2011-05-31 | 2015-11-17 | ライトラボ・イメージング・インコーポレーテッド | 多モード撮像システム、装置、および方法 |
| WO2013019840A1 (en) | 2011-08-03 | 2013-02-07 | Lightlab Imaging, Inc. | Systems, methods and apparatus for determining a fractional flow reserve |
| US9339348B2 (en) | 2011-08-20 | 2016-05-17 | Imperial Colege of Science, Technology and Medicine | Devices, systems, and methods for assessing a vessel |
| US10888232B2 (en) | 2011-08-20 | 2021-01-12 | Philips Image Guided Therapy Corporation | Devices, systems, and methods for assessing a vessel |
| KR101253334B1 (ko) * | 2011-10-07 | 2013-04-11 | 숭실대학교산학협력단 | 안압 센서 및 그 제조 방법 |
| EP3628989B1 (de) | 2012-05-25 | 2021-08-25 | Phyzhon Health Inc. | Faseroptischer drucksensor |
| RU2556288C2 (ru) * | 2013-03-29 | 2015-07-10 | Валерий Владимирович Коваленко | Анализатор общего давления, плотности и парцианального давления паров воды в низком вакууме |
| US9335203B2 (en) * | 2013-08-28 | 2016-05-10 | Robert Bosch Gmbh | MEMS component |
| WO2015051003A1 (en) | 2013-10-04 | 2015-04-09 | Vascular Imaging Corporation | Imaging techniques using an imaging guidewire |
| US9877660B2 (en) | 2013-11-14 | 2018-01-30 | Medtronic Vascular Galway | Systems and methods for determining fractional flow reserve without adenosine or other pharmalogical agent |
| US10130269B2 (en) | 2013-11-14 | 2018-11-20 | Medtronic Vascular, Inc | Dual lumen catheter for providing a vascular pressure measurement |
| US10537255B2 (en) | 2013-11-21 | 2020-01-21 | Phyzhon Health Inc. | Optical fiber pressure sensor |
| US9913585B2 (en) | 2014-01-15 | 2018-03-13 | Medtronic Vascular, Inc. | Catheter for providing vascular pressure measurements |
| ES2980485T3 (es) | 2014-04-04 | 2024-10-01 | St Jude Medical Systems Ab | Sistema de diagnóstico de datos de flujo y presión intravascular |
| US11330989B2 (en) | 2014-06-16 | 2022-05-17 | Medtronic Vascular, Inc. | Microcatheter sensor design for mounting sensor to minimize induced strain |
| US10973418B2 (en) | 2014-06-16 | 2021-04-13 | Medtronic Vascular, Inc. | Microcatheter sensor design for minimizing profile and impact of wire strain on sensor |
| US10201284B2 (en) | 2014-06-16 | 2019-02-12 | Medtronic Vascular Inc. | Pressure measuring catheter having reduced error from bending stresses |
| US10258240B1 (en) | 2014-11-24 | 2019-04-16 | Vascular Imaging Corporation | Optical fiber pressure sensor |
| US10194812B2 (en) | 2014-12-12 | 2019-02-05 | Medtronic Vascular, Inc. | System and method of integrating a fractional flow reserve device with a conventional hemodynamic monitoring system |
| US11272850B2 (en) | 2016-08-09 | 2022-03-15 | Medtronic Vascular, Inc. | Catheter and method for calculating fractional flow reserve |
| US11330994B2 (en) | 2017-03-08 | 2022-05-17 | Medtronic Vascular, Inc. | Reduced profile FFR catheter |
| US10646122B2 (en) | 2017-04-28 | 2020-05-12 | Medtronic Vascular, Inc. | FFR catheter with covered distal pressure sensor and method of manufacture |
| US11235124B2 (en) | 2017-08-09 | 2022-02-01 | Medtronic Vascular, Inc. | Collapsible catheter and method for calculating fractional flow reserve |
| US11219741B2 (en) | 2017-08-09 | 2022-01-11 | Medtronic Vascular, Inc. | Collapsible catheter and method for calculating fractional flow reserve |
| US10605682B1 (en) | 2017-12-29 | 2020-03-31 | The United States Of America As Represented By The Secretary Of The Navy | MEMS unpowered pressure sensor |
| US11185244B2 (en) | 2018-08-13 | 2021-11-30 | Medtronic Vascular, Inc. | FFR catheter with suspended pressure sensor |
| US12383246B2 (en) | 2020-10-12 | 2025-08-12 | Abbott Cardiovascular Systems, Inc. | Vessel closure device with improved safety and tract hemostasis |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1078217A (en) * | 1976-03-31 | 1980-05-27 | Robert C. Whitehead (Jr.) | Force transducing cantilever beam and pressure transducer incorporating it |
| GB8610253D0 (en) | 1986-04-26 | 1986-05-29 | Stc Plc | Resonator device |
| GB2197069B (en) | 1986-11-03 | 1990-10-24 | Stc Plc | Sensor device |
| US4897360A (en) | 1987-12-09 | 1990-01-30 | Wisconsin Alumni Research Foundation | Polysilicon thin film process |
| US5013693A (en) | 1989-02-16 | 1991-05-07 | Wisconsin Alumni Research Foundation | Formation of microstructures with removal of liquid by freezing and sublimation |
| US5188983A (en) | 1990-04-11 | 1993-02-23 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers and method of producing the same |
| US5090254A (en) | 1990-04-11 | 1992-02-25 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers |
| SE506135C2 (sv) | 1990-07-11 | 1997-11-17 | Radi Medical Systems | Sensor- och ledarkonstruktion |
| DE4039846A1 (de) | 1990-12-13 | 1992-06-17 | Siemens Ag | Mikromechanischer resonanter sensor und verfahren zu seiner herstellung |
| FR2674627B1 (fr) | 1991-03-27 | 1994-04-29 | Commissariat Energie Atomique | Capteur de pression resonant. |
| FR2687783B1 (fr) | 1992-02-20 | 1994-05-20 | Sextant Avionique | Micro-capteur de pression. |
| GB9321398D0 (en) | 1993-10-16 | 1993-12-08 | Lucas Ind Plc | Differential pressure transducer |
| GB9405355D0 (en) | 1994-03-18 | 1994-05-04 | Lucas Ind Plc | Vibrating element transducer |
| US5772322A (en) * | 1996-05-31 | 1998-06-30 | Honeywell Inc. | Resonant microbeam temperature sensor |
| US5808210A (en) * | 1996-12-31 | 1998-09-15 | Honeywell Inc. | Thin film resonant microbeam absolute pressure sensor |
| US5747705A (en) | 1996-12-31 | 1998-05-05 | Honeywell Inc. | Method for making a thin film resonant microbeam absolute |
-
1998
- 1998-12-23 US US09/219,794 patent/US6182513B1/en not_active Expired - Lifetime
-
1999
- 1999-12-22 DE DE69933703T patent/DE69933703T2/de not_active Expired - Lifetime
- 1999-12-22 EP EP99967043A patent/EP1155297B1/de not_active Expired - Lifetime
- 1999-12-22 WO PCT/SE1999/002468 patent/WO2000039550A1/en not_active Ceased
- 1999-12-22 AT AT99967043T patent/ATE343119T1/de not_active IP Right Cessation
-
2000
- 2000-12-12 US US09/733,944 patent/US6546804B2/en not_active Expired - Lifetime
-
2001
- 2001-01-12 US US09/733,944 patent/US20020157473A1/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE69933703T2 (de) | 2007-08-23 |
| US6182513B1 (en) | 2001-02-06 |
| DE69933703D1 (de) | 2006-11-30 |
| US6546804B2 (en) | 2003-04-15 |
| WO2000039550A1 (en) | 2000-07-06 |
| EP1155297A1 (de) | 2001-11-21 |
| EP1155297B1 (de) | 2006-10-18 |
| US20020157473A1 (en) | 2002-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |