ATE344462T1 - Impedanzmessschaltung und kapazitätsmessschaltung - Google Patents

Impedanzmessschaltung und kapazitätsmessschaltung

Info

Publication number
ATE344462T1
ATE344462T1 AT02767920T AT02767920T ATE344462T1 AT E344462 T1 ATE344462 T1 AT E344462T1 AT 02767920 T AT02767920 T AT 02767920T AT 02767920 T AT02767920 T AT 02767920T AT E344462 T1 ATE344462 T1 AT E344462T1
Authority
AT
Austria
Prior art keywords
measurement circuit
input terminal
operational amplifier
impedance
impedance converter
Prior art date
Application number
AT02767920T
Other languages
English (en)
Inventor
M Yakabe
N Ikeuchi
T Matsumoto
Koichi Nakano
Najio Higashikubo
Original Assignee
Tokyo Electron Ltd
Hokuto Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Hokuto Electronics Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of ATE344462T1 publication Critical patent/ATE344462T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Burglar Alarm Systems (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Networks Using Active Elements (AREA)
AT02767920T 2001-09-06 2002-09-06 Impedanzmessschaltung und kapazitätsmessschaltung ATE344462T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001269991 2001-09-06

Publications (1)

Publication Number Publication Date
ATE344462T1 true ATE344462T1 (de) 2006-11-15

Family

ID=19095710

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02767920T ATE344462T1 (de) 2001-09-06 2002-09-06 Impedanzmessschaltung und kapazitätsmessschaltung

Country Status (10)

Country Link
US (1) US7023223B2 (de)
EP (1) EP1426771B1 (de)
KR (1) KR100637979B1 (de)
CN (1) CN1271417C (de)
AT (1) ATE344462T1 (de)
DE (1) DE60215827T8 (de)
DK (1) DK1426771T3 (de)
NO (1) NO20032014L (de)
TW (1) TW591236B (de)
WO (1) WO2003023419A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4720308B2 (ja) 2005-06-15 2011-07-13 ソニー株式会社 インピーダンス変換回路
KR100825888B1 (ko) 2005-10-05 2008-04-28 삼성전자주식회사 전극 동잡음 보상 회로 및 전극 동잡음 보상 방법
US8624845B2 (en) * 2008-09-26 2014-01-07 Cypress Semiconductor Corporation Capacitance touch screen
FR2969868B1 (fr) * 2010-12-23 2013-01-25 Thales Sa Dispositif de neutrodynage actif
JP2013061177A (ja) * 2011-09-12 2013-04-04 Nidec-Read Corp インピーダンス測定装置
US9581628B2 (en) * 2012-05-04 2017-02-28 Apple Inc. Electronic device including device ground coupled finger coupling electrode and array shielding electrode and related methods
US9164136B2 (en) * 2013-12-02 2015-10-20 Atmel Corporation Capacitive measurement circuit for a touch sensor device
RU2675626C1 (ru) * 2015-07-17 2018-12-21 Закрытое Акционерное Общество "Драйв" Устройство управления преобразователем постоянного напряжения в постоянный ток
GB2550402B (en) 2016-05-19 2022-04-20 Ultra Electronics Ltd Circuit for simulating a capacitance fuel probe
CN107314799B (zh) * 2017-08-18 2019-08-09 西安交通大学 一种用于纳升级液位传感器的微弱电容检测电路
CN107727940A (zh) * 2017-12-01 2018-02-23 北京航天试验技术研究所 一种便携式微小电容测试仪
CN108120859B (zh) * 2017-12-29 2024-04-12 国网江苏省电力有限公司检修分公司 一种主动式电磁屏蔽发生装置
WO2019187515A1 (ja) * 2018-03-30 2019-10-03 パナソニックＩｐマネジメント株式会社 静電容量検出装置
CN115902418B (zh) * 2021-08-18 2025-12-23 京元电子股份有限公司 电容测量系统、测量电路及计算装置
CN115065326B (zh) * 2022-08-16 2022-11-29 基合半导体（宁波）有限公司 模拟前端电路、芯片及电子设备
CN115453205B (zh) * 2022-08-31 2025-06-27 重庆理工大学 可克服分布参数及线路电阻影响的高精度阻抗检测电路
CN115343538B (zh) * 2022-10-18 2023-03-24 基合半导体（宁波）有限公司 一种信号测量电路及电容触控屏
CN120722236B (zh) * 2025-08-22 2025-12-23 青岛艾诺仪器有限公司 一种交流内阻测量电路

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3007426A1 (de) * 1980-02-28 1981-09-03 Ewald Max Christian Dipl.-Phys. 6000 Frankfurt Hennig Schaltungsanordnung mit einem kondensator im rueckkopplungszweig eines operationsverstaerkers
DE3428699A1 (de) * 1984-08-03 1986-02-13 Philips Patentverwaltung Gmbh, 2000 Hamburg Kapazitiver messwertaufnehmer
JPH09280806A (ja) * 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
CN1255975A (zh) * 1998-01-23 2000-06-07 住友金属工业株式会社 阻抗－电压转换器
TW418323B (en) * 1998-02-19 2001-01-11 Sumitomo Metal Ind Capacitance detection system and method
US6828806B1 (en) * 1999-07-22 2004-12-07 Sumitomo Metal Industries, Ltd. Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus
JP3501401B2 (ja) * 2000-03-07 2004-03-02 住友金属工業株式会社 インピーダンス検出回路、インピーダンス検出装置、及びインピーダンス検出方法
TW546480B (en) * 2000-03-07 2003-08-11 Sumitomo Metal Ind Circuit, apparatus and method for inspecting impedance
JP3501398B2 (ja) * 2000-07-10 2004-03-02 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP3454426B2 (ja) * 2000-07-10 2003-10-06 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP2002157671A (ja) * 2000-11-16 2002-05-31 Sumitomo Metal Ind Ltd センシングシステム
JP3761470B2 (ja) * 2001-04-04 2006-03-29 北斗電子工業株式会社 非接触電圧計測方法及び装置並びに検出プローブ

Also Published As

Publication number Publication date
CN1551989A (zh) 2004-12-01
US20050030046A1 (en) 2005-02-10
WO2003023419A1 (fr) 2003-03-20
DE60215827D1 (de) 2006-12-14
DE60215827T2 (de) 2007-08-30
EP1426771A4 (de) 2005-02-02
EP1426771B1 (de) 2006-11-02
EP1426771A1 (de) 2004-06-09
NO20032014D0 (no) 2003-05-05
US7023223B2 (en) 2006-04-04
KR100637979B1 (ko) 2006-10-23
TW591236B (en) 2004-06-11
NO20032014L (no) 2003-06-17
DK1426771T3 (da) 2007-02-19
CN1271417C (zh) 2006-08-23
KR20040040456A (ko) 2004-05-12
DE60215827T8 (de) 2007-12-06

Similar Documents

Publication Publication Date Title
DE60215827D1 (de) Impedanzmessschaltung und kapazitätsmessschaltung
DE60225570D1 (de) Impedanzmess-schaltung und ihr verfahren und kapazitätsmess-schaltung
ATE475102T1 (de) Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung
DE60129529D1 (de) Impedanzmessungsschaltkreis, -detektor und verfahren zur impedanzmessung
KR19990028179A (ko) 초전형적외선검출장치
EP1467178A3 (de) Kapazitätssensitiver Vibrationskreisel und Verfahren zur Erfassung von Kapazitätsänderung
NO20032015D0 (no) Anordning og fremgangsmåte for sensorkapasitansdeteksjon
DE60201751D1 (de) Kapazitätsmess-schaltung
EP0687903A1 (de) Feuchtigkeitsmessgerät
JP4581629B2 (ja) 赤外線検知装置
TWI226522B (en) Potential fixing apparatus, potential fixing method and capacity measuring apparatus
KR890005975A (ko) 푸시풀증폭기 출력단에서 폐로전류를 자동으로 조절하는 회로
JP4090829B2 (ja) 周波数変調形磁界センサー
SU1201686A1 (ru) Емкостной измеритель уровн
KR100368068B1 (ko) 초전형 적외선 센서의 주변회로 장치
SU1647310A1 (ru) Емкостный измеритель механических величин
SU1401262A1 (ru) Диодно-емкостный измерительный преобразователь
JPH0329820A (ja) 容量式電磁流量計
JP2010204114A (ja) 赤外線検知装置
UA33403A (uk) Пристрій для виміру тиску
JPH06140874A (ja) インピーダンス変換回路
KR19980068013U (ko) 인덕터

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1426771

Country of ref document: EP