DK1426771T3 - Impedansdetektorkredslöb og elektrostatisk kapacitansdetektorkredslöb - Google Patents

Impedansdetektorkredslöb og elektrostatisk kapacitansdetektorkredslöb

Info

Publication number
DK1426771T3
DK1426771T3 DK02767920T DK02767920T DK1426771T3 DK 1426771 T3 DK1426771 T3 DK 1426771T3 DK 02767920 T DK02767920 T DK 02767920T DK 02767920 T DK02767920 T DK 02767920T DK 1426771 T3 DK1426771 T3 DK 1426771T3
Authority
DK
Denmark
Prior art keywords
detector circuits
input terminal
impedance
electrostatic capacitance
operational amplifier
Prior art date
Application number
DK02767920T
Other languages
English (en)
Inventor
Koichi Nakano
M Yakabe
N Ikeuchi
T Matsumoto
Original Assignee
Tokyo Electron Ltd
Hokuto Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Hokuto Electronics Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DK1426771T3 publication Critical patent/DK1426771T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Burglar Alarm Systems (AREA)
  • Networks Using Active Elements (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
DK02767920T 2001-09-06 2002-09-06 Impedansdetektorkredslöb og elektrostatisk kapacitansdetektorkredslöb DK1426771T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001269991 2001-09-06
PCT/JP2002/009136 WO2003023419A1 (fr) 2001-09-06 2002-09-06 Circuit de mesure de l'impedance et circuit de mesure de la capacite

Publications (1)

Publication Number Publication Date
DK1426771T3 true DK1426771T3 (da) 2007-02-19

Family

ID=19095710

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02767920T DK1426771T3 (da) 2001-09-06 2002-09-06 Impedansdetektorkredslöb og elektrostatisk kapacitansdetektorkredslöb

Country Status (10)

Country Link
US (1) US7023223B2 (da)
EP (1) EP1426771B1 (da)
KR (1) KR100637979B1 (da)
CN (1) CN1271417C (da)
AT (1) ATE344462T1 (da)
DE (1) DE60215827T8 (da)
DK (1) DK1426771T3 (da)
NO (1) NO20032014L (da)
TW (1) TW591236B (da)
WO (1) WO2003023419A1 (da)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4720308B2 (ja) 2005-06-15 2011-07-13 ソニー株式会社 インピーダンス変換回路
KR100825888B1 (ko) 2005-10-05 2008-04-28 삼성전자주식회사 전극 동잡음 보상 회로 및 전극 동잡음 보상 방법
US8624845B2 (en) * 2008-09-26 2014-01-07 Cypress Semiconductor Corporation Capacitance touch screen
FR2969868B1 (fr) * 2010-12-23 2013-01-25 Thales Sa Dispositif de neutrodynage actif
JP2013061177A (ja) * 2011-09-12 2013-04-04 Nidec-Read Corp インピーダンス測定装置
US9581628B2 (en) * 2012-05-04 2017-02-28 Apple Inc. Electronic device including device ground coupled finger coupling electrode and array shielding electrode and related methods
US9164136B2 (en) 2013-12-02 2015-10-20 Atmel Corporation Capacitive measurement circuit for a touch sensor device
MY190701A (en) * 2015-07-17 2022-05-11 Closed Up Joint Stock Company Drive Regulator of direct current flowing through the load
GB2550402B (en) 2016-05-19 2022-04-20 Ultra Electronics Ltd Circuit for simulating a capacitance fuel probe
CN107314799B (zh) * 2017-08-18 2019-08-09 西安交通大学 一种用于纳升级液位传感器的微弱电容检测电路
CN107727940A (zh) * 2017-12-01 2018-02-23 北京航天试验技术研究所 一种便携式微小电容测试仪
CN108120859B (zh) * 2017-12-29 2024-04-12 国网江苏省电力有限公司检修分公司 一种主动式电磁屏蔽发生装置
WO2019187515A1 (ja) * 2018-03-30 2019-10-03 パナソニックＩｐマネジメント株式会社 静電容量検出装置
CN115902418B (zh) * 2021-08-18 2025-12-23 京元电子股份有限公司 电容测量系统、测量电路及计算装置
CN115065326B (zh) * 2022-08-16 2022-11-29 基合半导体（宁波）有限公司 模拟前端电路、芯片及电子设备
CN115453205B (zh) * 2022-08-31 2025-06-27 重庆理工大学 可克服分布参数及线路电阻影响的高精度阻抗检测电路
CN115343538B (zh) * 2022-10-18 2023-03-24 基合半导体（宁波）有限公司 一种信号测量电路及电容触控屏
CN120722236B (zh) * 2025-08-22 2025-12-23 青岛艾诺仪器有限公司 一种交流内阻测量电路

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3007426A1 (de) * 1980-02-28 1981-09-03 Ewald Max Christian Dipl.-Phys. 6000 Frankfurt Hennig Schaltungsanordnung mit einem kondensator im rueckkopplungszweig eines operationsverstaerkers
DE3428699A1 (de) * 1984-08-03 1986-02-13 Philips Patentverwaltung Gmbh, 2000 Hamburg Kapazitiver messwertaufnehmer
JPH09280806A (ja) * 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
DE69931104T2 (de) * 1998-01-23 2006-10-12 Tokyo Electron Ltd. Impedanz-spannungswandler
TW418323B (en) * 1998-02-19 2001-01-11 Sumitomo Metal Ind Capacitance detection system and method
US6828806B1 (en) * 1999-07-22 2004-12-07 Sumitomo Metal Industries, Ltd. Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus
TW546480B (en) * 2000-03-07 2003-08-11 Sumitomo Metal Ind Circuit, apparatus and method for inspecting impedance
JP3501401B2 (ja) 2000-03-07 2004-03-02 住友金属工業株式会社 インピーダンス検出回路、インピーダンス検出装置、及びインピーダンス検出方法
JP3501398B2 (ja) 2000-07-10 2004-03-02 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP3454426B2 (ja) * 2000-07-10 2003-10-06 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP2002157671A (ja) 2000-11-16 2002-05-31 Sumitomo Metal Ind Ltd センシングシステム
JP3761470B2 (ja) * 2001-04-04 2006-03-29 北斗電子工業株式会社 非接触電圧計測方法及び装置並びに検出プローブ

Also Published As

Publication number Publication date
CN1271417C (zh) 2006-08-23
US7023223B2 (en) 2006-04-04
KR20040040456A (ko) 2004-05-12
TW591236B (en) 2004-06-11
WO2003023419A1 (fr) 2003-03-20
CN1551989A (zh) 2004-12-01
ATE344462T1 (de) 2006-11-15
NO20032014L (no) 2003-06-17
EP1426771A1 (en) 2004-06-09
DE60215827T8 (de) 2007-12-06
DE60215827D1 (de) 2006-12-14
US20050030046A1 (en) 2005-02-10
NO20032014D0 (no) 2003-05-05
EP1426771B1 (en) 2006-11-02
EP1426771A4 (en) 2005-02-02
KR100637979B1 (ko) 2006-10-23
DE60215827T2 (de) 2007-08-30

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