ATE353763T1 - Monolithischer druckkopf mit selbstjustierter nut und entsprechendes verfahren zur herstellung - Google Patents

Monolithischer druckkopf mit selbstjustierter nut und entsprechendes verfahren zur herstellung

Info

Publication number
ATE353763T1
ATE353763T1 AT01963389T AT01963389T ATE353763T1 AT E353763 T1 ATE353763 T1 AT E353763T1 AT 01963389 T AT01963389 T AT 01963389T AT 01963389 T AT01963389 T AT 01963389T AT E353763 T1 ATE353763 T1 AT E353763T1
Authority
AT
Austria
Prior art keywords
self
manufacturing
print head
corresponding method
adjusting groove
Prior art date
Application number
AT01963389T
Other languages
English (en)
Inventor
Renato Conta
Anna Merialdo
Original Assignee
Telecom Italia Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telecom Italia Spa filed Critical Telecom Italia Spa
Application granted granted Critical
Publication of ATE353763T1 publication Critical patent/ATE353763T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT01963389T 2000-08-23 2001-08-22 Monolithischer druckkopf mit selbstjustierter nut und entsprechendes verfahren zur herstellung ATE353763T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2000TO000813A IT1320599B1 (it) 2000-08-23 2000-08-23 Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione.

Publications (1)

Publication Number Publication Date
ATE353763T1 true ATE353763T1 (de) 2007-03-15

Family

ID=11458007

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01963389T ATE353763T1 (de) 2000-08-23 2001-08-22 Monolithischer druckkopf mit selbstjustierter nut und entsprechendes verfahren zur herstellung

Country Status (7)

Country Link
US (2) US6887393B2 (de)
EP (1) EP1311395B1 (de)
AT (1) ATE353763T1 (de)
AU (1) AU2001284408A1 (de)
DE (1) DE60126621T2 (de)
IT (1) IT1320599B1 (de)
WO (1) WO2002016140A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6902255B1 (en) 1998-10-16 2005-06-07 Silverbrook Research Pty Ltd Inkjet printers
US7419250B2 (en) * 1999-10-15 2008-09-02 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
US7144100B2 (en) * 2004-01-07 2006-12-05 Xerox Corporation Purgeable print head reservoir
US7214324B2 (en) * 2005-04-15 2007-05-08 Delphi Technologies, Inc. Technique for manufacturing micro-electro mechanical structures
JP5171002B2 (ja) * 2006-09-25 2013-03-27 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US7855151B2 (en) * 2007-08-21 2010-12-21 Hewlett-Packard Development Company, L.P. Formation of a slot in a silicon substrate
JP5031492B2 (ja) * 2007-09-06 2012-09-19 キヤノン株式会社 インクジェットヘッド基板の製造方法
JP2009137173A (ja) * 2007-12-06 2009-06-25 Canon Inc 液体吐出ヘッド及び記録装置
US20110181664A1 (en) * 2010-01-27 2011-07-28 Fujifilm Corporation Forming Self-Aligned Nozzles
US9707586B2 (en) * 2012-03-16 2017-07-18 Hewlett-Packard Development Company, L.P. Printhead with recessed slot ends
KR101968636B1 (ko) 2012-12-06 2019-04-12 삼성전자주식회사 잉크젯 프린팅 장치 및 노즐 형성 방법
KR102005466B1 (ko) 2013-02-28 2019-07-30 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 프린트 바
US10821729B2 (en) 2013-02-28 2020-11-03 Hewlett-Packard Development Company, L.P. Transfer molded fluid flow structure
JP6068684B2 (ja) 2013-02-28 2017-01-25 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 流体流れ構造の成形
US9724920B2 (en) 2013-03-20 2017-08-08 Hewlett-Packard Development Company, L.P. Molded die slivers with exposed front and back surfaces
JP7020543B2 (ja) * 2018-04-20 2022-02-16 コニカミノルタ株式会社 ノズルプレートの製造方法及びインクジェットヘッド

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317346A (en) * 1992-03-04 1994-05-31 Hewlett-Packard Company Compound ink feed slot
US5278584A (en) 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
JP2960608B2 (ja) 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3222593B2 (ja) 1992-12-28 2001-10-29 キヤノン株式会社 インクジェット記録ヘッドおよびインクジェット記録ヘッド用モノリシック集積回路
US5308442A (en) * 1993-01-25 1994-05-03 Hewlett-Packard Company Anisotropically etched ink fill slots in silicon
US5378137A (en) 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
US5635966A (en) 1994-01-11 1997-06-03 Hewlett-Packard Company Edge feed ink delivery thermal inkjet printhead structure and method of fabrication
US5635968A (en) * 1994-04-29 1997-06-03 Hewlett-Packard Company Thermal inkjet printer printhead with offset heater resistors
JPH08142323A (ja) * 1994-11-24 1996-06-04 Sharp Corp インクジェットヘッドおよびその製造方法
JP3343875B2 (ja) 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
US5658471A (en) 1995-09-22 1997-08-19 Lexmark International, Inc. Fabrication of thermal ink-jet feed slots in a silicon substrate
US6113221A (en) 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
KR100311880B1 (ko) * 1996-11-11 2001-12-20 미다라이 후지오 관통구멍의제작방법,관통구멍을갖는실리콘기판,이기판을이용한디바이스,잉크제트헤드의제조방법및잉크제트헤드
DK0841167T3 (da) 1996-11-11 2005-01-24 Canon Kk Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling.....
US6019907A (en) 1997-08-08 2000-02-01 Hewlett-Packard Company Forming refill for monolithic inkjet printhead
US6391527B2 (en) * 1998-04-16 2002-05-21 Canon Kabushiki Kaisha Method of producing micro structure, method of production liquid discharge head
IT1310099B1 (it) * 1999-07-12 2002-02-11 Olivetti Lexikon Spa Testina di stampa monolitica e relativo processo di fabbricazione.
IT1311361B1 (it) 1999-11-15 2002-03-12 Olivetti Lexikon Spa Testina di stampa monilitica con rete equipotenziale integrata erelativo metodo di fabbricazione.
US6805432B1 (en) 2001-07-31 2004-10-19 Hewlett-Packard Development Company, L.P. Fluid ejecting device with fluid feed slot
DE102004007143B4 (de) 2004-02-12 2012-04-05 Rieter Ingolstadt Gmbh Verfahren und Vorrichtung zum Verstrecken von mindestens einem Faserband

Also Published As

Publication number Publication date
AU2001284408A1 (en) 2002-03-04
US20030156161A1 (en) 2003-08-21
US6887393B2 (en) 2005-05-03
ITTO20000813A0 (it) 2000-08-23
WO2002016140A1 (en) 2002-02-28
ITTO20000813A1 (it) 2002-02-23
DE60126621D1 (de) 2007-03-29
EP1311395B1 (de) 2007-02-14
IT1320599B1 (it) 2003-12-10
EP1311395A1 (de) 2003-05-21
US20040119774A1 (en) 2004-06-24
DE60126621T2 (de) 2007-12-06
US7066581B2 (en) 2006-06-27

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties