ATE356980T1 - Druckwandler mit gespannter metallmembran durch angepasste ausdehnungskoeffizienten, ausscheidungsgehärtete legierungen, magnetische abschirmung - Google Patents

Druckwandler mit gespannter metallmembran durch angepasste ausdehnungskoeffizienten, ausscheidungsgehärtete legierungen, magnetische abschirmung

Info

Publication number
ATE356980T1
ATE356980T1 AT03250120T AT03250120T ATE356980T1 AT E356980 T1 ATE356980 T1 AT E356980T1 AT 03250120 T AT03250120 T AT 03250120T AT 03250120 T AT03250120 T AT 03250120T AT E356980 T1 ATE356980 T1 AT E356980T1
Authority
AT
Austria
Prior art keywords
inch
diaphragm
pressure transducer
expansion coefficients
body member
Prior art date
Application number
AT03250120T
Other languages
English (en)
Inventor
Terrence J Troyer
Original Assignee
Dwyer Instr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dwyer Instr filed Critical Dwyer Instr
Application granted granted Critical
Publication of ATE356980T1 publication Critical patent/ATE356980T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
AT03250120T 2002-02-04 2003-01-09 Druckwandler mit gespannter metallmembran durch angepasste ausdehnungskoeffizienten, ausscheidungsgehärtete legierungen, magnetische abschirmung ATE356980T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/067,033 US6807865B2 (en) 2002-02-04 2002-02-04 Pressure sensor with a radially tensioned metal diaphragm

Publications (1)

Publication Number Publication Date
ATE356980T1 true ATE356980T1 (de) 2007-04-15

Family

ID=22073293

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03250120T ATE356980T1 (de) 2002-02-04 2003-01-09 Druckwandler mit gespannter metallmembran durch angepasste ausdehnungskoeffizienten, ausscheidungsgehärtete legierungen, magnetische abschirmung

Country Status (8)

Country Link
US (2) US6807865B2 (de)
EP (2) EP1637858B1 (de)
JP (1) JP4679800B2 (de)
KR (1) KR100800035B1 (de)
CN (2) CN100381801C (de)
AT (1) ATE356980T1 (de)
CA (4) CA2724095C (de)
DE (2) DE60334858D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10234754A1 (de) * 2002-07-30 2004-02-19 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor mit symmetrischem Trennkörperfehler
US7128061B2 (en) * 2003-10-31 2006-10-31 Vortech Engineering, Inc. Supercharger
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement
KR101406053B1 (ko) * 2009-03-06 2014-06-11 드와이어 인스투르먼쓰 인코포레이티드 자기적으로 결합된 격막을 구비하는 압력 게이지
EP2330408B1 (de) * 2009-11-20 2013-01-02 Future Technology (Sensors) Ltd Sensoranordnungen
JP5714395B2 (ja) * 2010-05-25 2015-05-07 株式会社堀場エステック 静電容量型圧力センサ
US8727752B2 (en) * 2010-10-06 2014-05-20 Stanadyne Corporation Three element diaphragm damper for fuel pump
DE102011006517A1 (de) 2011-03-31 2012-10-04 Endress + Hauser Gmbh + Co. Kg Druckfest gekapselter Differenzdrucksensor
US9194760B2 (en) 2013-03-14 2015-11-24 Dwyer Instruments, Inc. Capacitive pressure sensor with reduced parasitic capacitance
CN104458098A (zh) * 2013-09-12 2015-03-25 重庆四联测控技术有限公司 解决差压膜盒高压侧压力响应不足的方法
DE102014119108A1 (de) * 2014-04-23 2015-10-29 Endress + Hauser Gmbh + Co. Kg Drucksensor mit einem keramischen Grundkörper
CN109313096B (zh) 2016-04-11 2020-12-25 艾尔弗雷德·伊·曼科学研究基金会 具有张紧膜的压力传感器
FR3101416B1 (fr) * 2019-09-26 2021-12-24 Ateq Capteur de pression différentielle et dispositif de détection comprenant un tel capteur
CN114858326B (zh) * 2021-02-04 2024-11-26 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机
CN114216607A (zh) * 2021-11-27 2022-03-22 阿尔法仪器技术(深圳)有限公司 一种新型差压传感器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3800413A (en) * 1969-10-27 1974-04-02 Rosemount Inc Differential pressure transducer
US3793885A (en) 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
JPS542783A (en) * 1977-06-09 1979-01-10 Fuji Electric Co Ltd Production of pressure or differential pressure measuring apparatus
US4265389A (en) 1978-10-30 1981-05-05 Michael Mastromatteo Method of welding a diaphragm assembly
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US5038459A (en) 1987-03-04 1991-08-13 Hosiden Electronics Co., Ltd. Method of fabricating the diaphragm unit of a condenser microphone by electron beam welding
US4823603A (en) 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
JPH03113339A (ja) * 1989-09-28 1991-05-14 Yokogawa Electric Corp 差圧伝送器の過大圧保護機構
DE4206675C2 (de) 1992-02-28 1995-04-27 Siemens Ag Verfahren zum Herstellen von Druckdifferenz-Sensoren
DE4233691C2 (de) 1992-10-04 1995-06-29 Soeren Richter Magnetoelastischer Kraftaufnehmer
US5442962A (en) 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
JPH0854304A (ja) * 1994-08-10 1996-02-27 Matsushita Electric Ind Co Ltd 圧力センサ
US6019002A (en) 1997-12-02 2000-02-01 Setra Systems, Inc. Pressure transducer having a tensioned diaphragm
JPH11218456A (ja) * 1998-02-02 1999-08-10 Omron Corp 静電容量型圧力センサ
US6205861B1 (en) * 1999-01-22 2001-03-27 Setra Systems, Inc. Transducer having temperature compensation

Also Published As

Publication number Publication date
KR20030066310A (ko) 2003-08-09
JP4679800B2 (ja) 2011-04-27
CA2724095C (en) 2013-06-18
DE60334858D1 (de) 2010-12-16
JP2003240658A (ja) 2003-08-27
EP1333264B1 (de) 2007-03-14
EP1637858A3 (de) 2006-04-19
CA2724092A1 (en) 2003-08-04
KR100800035B1 (ko) 2008-01-31
CN101241031A (zh) 2008-08-13
US20040159156A1 (en) 2004-08-19
CN101241031B (zh) 2011-12-21
CA2724095A1 (en) 2003-08-04
DE60312414T2 (de) 2007-08-23
CN100381801C (zh) 2008-04-16
DE60312414D1 (de) 2007-04-26
US20030145656A1 (en) 2003-08-07
CA2724097C (en) 2013-04-09
CN1437008A (zh) 2003-08-20
US6807865B2 (en) 2004-10-26
CA2724092C (en) 2013-04-23
US7073385B2 (en) 2006-07-11
EP1637858A2 (de) 2006-03-22
EP1333264A1 (de) 2003-08-06
CA2724097A1 (en) 2003-08-04
CA2412268A1 (en) 2003-08-04
EP1637858B1 (de) 2010-11-03
CA2412268C (en) 2012-01-24

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties