ATE510352T1 - Elektromechanischer wandler und elektrische einrichtung - Google Patents

Elektromechanischer wandler und elektrische einrichtung

Info

Publication number
ATE510352T1
ATE510352T1 AT04744810T AT04744810T ATE510352T1 AT E510352 T1 ATE510352 T1 AT E510352T1 AT 04744810 T AT04744810 T AT 04744810T AT 04744810 T AT04744810 T AT 04744810T AT E510352 T1 ATE510352 T1 AT E510352T1
Authority
AT
Austria
Prior art keywords
heating
resonator element
electrical
temperature
sensing
Prior art date
Application number
AT04744810T
Other languages
English (en)
Inventor
Beek Jozef Van
Peter Steeneken
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE510352T1 publication Critical patent/ATE510352T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/04—Constructional details for maintaining temperature constant
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Inverter Devices (AREA)
AT04744810T 2003-09-10 2004-08-23 Elektromechanischer wandler und elektrische einrichtung ATE510352T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP03103341 2003-09-10
EP04100951 2004-03-09
PCT/IB2004/051524 WO2005025057A2 (en) 2003-09-10 2004-08-23 Electromechanical transducer and electrical device

Publications (1)

Publication Number Publication Date
ATE510352T1 true ATE510352T1 (de) 2011-06-15

Family

ID=34276747

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04744810T ATE510352T1 (de) 2003-09-10 2004-08-23 Elektromechanischer wandler und elektrische einrichtung

Country Status (8)

Country Link
US (1) US7554425B2 (de)
EP (1) EP1665527B1 (de)
JP (1) JP2007505543A (de)
KR (1) KR20060119957A (de)
CN (1) CN1849746B (de)
AT (1) ATE510352T1 (de)
TW (1) TW200522515A (de)
WO (1) WO2005025057A2 (de)

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WO2007066037A1 (fr) * 2005-12-06 2007-06-14 Stmicroelectronics Sa Resistance dans un circuit integre
WO2007072409A2 (en) * 2005-12-23 2007-06-28 Nxp B.V. A mems resonator, a method of manufacturing thereof, and a mems oscillator
JP2007322466A (ja) 2006-05-30 2007-12-13 Canon Inc 光偏向器、及びそれを用いた光学機器
US8627726B2 (en) 2007-06-04 2014-01-14 Nxp, B.V. Pressure gauge
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
JP5375251B2 (ja) * 2009-03-26 2013-12-25 セイコーエプソン株式会社 共振回路及びその製造方法並びに電子装置
CN102113213B (zh) * 2008-08-08 2014-01-22 Nxp股份有限公司 机电换能器以及提供机电换能器的方法
EP2324569A2 (de) * 2008-09-09 2011-05-25 Nxp B.V. Mems-resonator
US8629731B2 (en) 2008-11-10 2014-01-14 Nxp, B.V. MEMS resonator
EP2382707A2 (de) 2008-12-23 2011-11-02 Nxp B.V. Schaltung für den ausgleich des temperatureinflusses auf einen resonator
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates
JP5578810B2 (ja) 2009-06-19 2014-08-27 キヤノン株式会社 静電容量型の電気機械変換装置
US8513042B2 (en) * 2009-06-29 2013-08-20 Freescale Semiconductor, Inc. Method of forming an electromechanical transducer device
EP2284629A1 (de) * 2009-08-13 2011-02-16 ETA SA Manufacture Horlogère Suisse Thermokompensierter mechanischer Resonator
JP5473579B2 (ja) 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
US9257993B2 (en) 2010-10-11 2016-02-09 Imec Control of multi-temperature micro-oven for MEMS devices
FI126586B (fi) 2011-02-17 2017-02-28 Teknologian Tutkimuskeskus Vtt Oy Uudet mikromekaaniset laitteet
FI123933B (fi) * 2011-05-13 2013-12-31 Teknologian Tutkimuskeskus Vtt Mikromekaaninen laite ja menetelmä sen suunnittelemiseksi
EP2530836A1 (de) * 2011-05-31 2012-12-05 Imec MEMS-Oszillator in beheizter Kammer mit Temperaturregelung
US9022644B1 (en) 2011-09-09 2015-05-05 Sitime Corporation Micromachined thermistor and temperature measurement circuitry, and method of manufacturing and operating same
US9667218B2 (en) * 2012-01-30 2017-05-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator comprising feedback circuit
US9154103B2 (en) * 2012-01-30 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator
US9695036B1 (en) 2012-02-02 2017-07-04 Sitime Corporation Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same
US9712128B2 (en) 2014-02-09 2017-07-18 Sitime Corporation Microelectromechanical resonator
US9705470B1 (en) 2014-02-09 2017-07-11 Sitime Corporation Temperature-engineered MEMS resonator
US10289508B2 (en) * 2015-02-03 2019-05-14 Infineon Technologies Ag Sensor system and method for identifying faults related to a substrate
US10298271B2 (en) 2015-02-03 2019-05-21 Infineon Technologies Ag Method and apparatus for providing a joint error correction code for a combined data frame comprising first data of a first data channel and second data of a second data channel and sensor system
EP3829060A1 (de) * 2015-06-19 2021-06-02 SiTime Corporation Mikroelektromechanischer resonator
CN106549649B (zh) * 2015-09-17 2019-07-19 中国科学院上海微系统与信息技术研究所 N型重掺杂恒温控制振荡器及其恒温控制方法
US10069500B2 (en) 2016-07-14 2018-09-04 Murata Manufacturing Co., Ltd. Oven controlled MEMS oscillator
US10676349B1 (en) 2016-08-12 2020-06-09 Sitime Corporation MEMS resonator
CN111811426B (zh) * 2020-06-29 2021-07-30 中国人民解放军军事科学院国防科技创新研究院 微机电系统结构的调控方法及装置
US11858807B2 (en) 2021-10-29 2024-01-02 X Development Llc Microelectromechanical systems (MEMS) rectifier and storage element for energy harvesting

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US3431392A (en) * 1967-01-13 1969-03-04 Hughes Aircraft Co Internally heated crystal devices
US4058744A (en) * 1976-06-07 1977-11-15 Motorola, Inc. Thermally stabilized crystal mounting assembly
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
US5587620A (en) * 1993-12-21 1996-12-24 Hewlett-Packard Company Tunable thin film acoustic resonators and method for making the same
US5976994A (en) 1997-06-13 1999-11-02 Regents Of The University Of Michigan Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
US6238946B1 (en) * 1999-08-17 2001-05-29 International Business Machines Corporation Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing
US7068125B2 (en) * 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator

Also Published As

Publication number Publication date
EP1665527B1 (de) 2011-05-18
EP1665527A2 (de) 2006-06-07
JP2007505543A (ja) 2007-03-08
CN1849746A (zh) 2006-10-18
KR20060119957A (ko) 2006-11-24
WO2005025057A3 (en) 2005-05-06
CN1849746B (zh) 2011-01-12
TW200522515A (en) 2005-07-01
WO2005025057A2 (en) 2005-03-17
US20070262831A1 (en) 2007-11-15
US7554425B2 (en) 2009-06-30

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