ATE358330T1 - Verfahren um ein element herzustellen welches einen von magnetischem material umgebenen elektrischen leiter enthält - Google Patents

Verfahren um ein element herzustellen welches einen von magnetischem material umgebenen elektrischen leiter enthält

Info

Publication number
ATE358330T1
ATE358330T1 AT03293095T AT03293095T ATE358330T1 AT E358330 T1 ATE358330 T1 AT E358330T1 AT 03293095 T AT03293095 T AT 03293095T AT 03293095 T AT03293095 T AT 03293095T AT E358330 T1 ATE358330 T1 AT E358330T1
Authority
AT
Austria
Prior art keywords
conductor
magnetic material
producing
electrical conductor
space
Prior art date
Application number
AT03293095T
Other languages
English (en)
Inventor
Philippe Renaud
Frederic Dumestre
Catherine Amiens
Bruno Chaudret
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Application granted granted Critical
Publication of ATE358330T1 publication Critical patent/ATE358330T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/0036Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties showing low dimensional magnetism, i.e. spin rearrangements due to a restriction of dimensions, e.g. showing giant magnetoresistivity
    • H01F1/0045Zero dimensional, e.g. nanoparticles, soft nanoparticles for medical/biological use
    • H01F1/0063Zero dimensional, e.g. nanoparticles, soft nanoparticles for medical/biological use in a non-magnetic matrix, e.g. granular solids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type
    • H01F17/04Fixed inductances of the signal type with magnetic core
    • H01F17/06Fixed inductances of the signal type with magnetic core with core substantially closed in itself, e.g. toroid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type
    • H01F17/0006Printed inductances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041Printed circuit coils
    • H01F41/046Printed circuit coils structurally combined with ferromagnetic material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/497Inductive arrangements or effects of, or between, wiring layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
AT03293095T 2003-12-10 2003-12-10 Verfahren um ein element herzustellen welches einen von magnetischem material umgebenen elektrischen leiter enthält ATE358330T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03293095A EP1542261B1 (de) 2003-12-10 2003-12-10 Verfahren um ein Element herzustellen welches einen von magnetischem Material umgebenen elektrischen Leiter enthält

Publications (1)

Publication Number Publication Date
ATE358330T1 true ATE358330T1 (de) 2007-04-15

Family

ID=34486452

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03293095T ATE358330T1 (de) 2003-12-10 2003-12-10 Verfahren um ein element herzustellen welches einen von magnetischem material umgebenen elektrischen leiter enthält

Country Status (9)

Country Link
US (1) US20070298520A1 (de)
EP (1) EP1542261B1 (de)
JP (1) JP2007514308A (de)
KR (1) KR20070011244A (de)
CN (1) CN100446174C (de)
AT (1) ATE358330T1 (de)
DE (1) DE60312872T2 (de)
TW (1) TW200535912A (de)
WO (1) WO2005093789A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6958572B2 (en) * 2002-02-06 2005-10-25 Ut-Battelle Llc Controlled non-normal alignment of catalytically grown nanostructures in a large-scale synthesis process
WO2007044959A1 (en) * 2005-10-13 2007-04-19 Inframat Corporation Patterned magnetic inductors
US8436707B2 (en) * 2010-01-12 2013-05-07 Infineon Technologies Ag System and method for integrated inductor
US9461355B2 (en) 2013-03-29 2016-10-04 Intel Corporation Method apparatus and material for radio frequency passives and antennas
US20200343037A1 (en) 2019-04-26 2020-10-29 Analog Devices International Unlimited Company Micro-scale planar-coil transformer with shield
US11728090B2 (en) * 2020-02-10 2023-08-15 Analog Devices International Unlimited Company Micro-scale device with floating conductive layer
US12464739B2 (en) 2022-07-01 2025-11-04 Analog Devices International Unlimited Company Micro-scale passive device with particles in insulator layer
US12457758B2 (en) 2022-07-01 2025-10-28 Analog Devices International Unlimited Company Micro-scale passive device with particles in insulator layer

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5869148A (en) * 1991-04-23 1999-02-09 Webcraft Technologies Inc. Process for the in-line, high speed manufacturing of magnetic products
US5276338A (en) * 1992-05-15 1994-01-04 International Business Machines Corporation Bonded wafer structure having a buried insulation layer
JPH07211865A (ja) * 1994-01-19 1995-08-11 Fujitsu Ltd インダクタ
DE19533050A1 (de) * 1995-09-07 1997-03-13 Vacuumschmelze Gmbh Verfahren zur Herstellung eines induktiven Bauelementes mit abgleichbarer Induktivität
US5882985A (en) * 1995-10-10 1999-03-16 Advanced Micro Devices, Inc. Reduction of field oxide step height during semiconductor fabrication
TW308719B (de) * 1995-10-23 1997-06-21 Dow Corning
JP2765547B2 (ja) * 1995-12-27 1998-06-18 日本電気株式会社 半導体装置およびその製造方法
US6492705B1 (en) * 1996-06-04 2002-12-10 Intersil Corporation Integrated circuit air bridge structures and methods of fabricating same
CN1166014C (zh) * 1996-11-15 2004-09-08 凌沛清(音译) 半导体芯片上的电感的结构及其制造方法
US6004830A (en) * 1998-02-09 1999-12-21 Advanced Vision Technologies, Inc. Fabrication process for confined electron field emission device
JPH11345887A (ja) * 1998-03-31 1999-12-14 Seiko Epson Corp 半導体装置およびその製造方法
US6254662B1 (en) * 1999-07-26 2001-07-03 International Business Machines Corporation Chemical synthesis of monodisperse and magnetic alloy nanocrystal containing thin films
US6396122B1 (en) * 2000-09-08 2002-05-28 Newport Fab, Llc Method for fabricating on-chip inductors and related structure
JP2003347123A (ja) * 2002-05-29 2003-12-05 Taiyo Yuden Co Ltd 薄膜インダクタ及びそれを利用した電子機器
US7309658B2 (en) * 2004-11-22 2007-12-18 Intermolecular, Inc. Molecular self-assembly in substrate processing

Also Published As

Publication number Publication date
DE60312872D1 (de) 2007-05-10
WO2005093789A1 (en) 2005-10-06
CN100446174C (zh) 2008-12-24
US20070298520A1 (en) 2007-12-27
EP1542261A1 (de) 2005-06-15
JP2007514308A (ja) 2007-05-31
DE60312872T2 (de) 2007-07-12
CN1898770A (zh) 2007-01-17
KR20070011244A (ko) 2007-01-24
EP1542261B1 (de) 2007-03-28
TW200535912A (en) 2005-11-01

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