ATE358330T1 - METHOD FOR PRODUCING AN ELEMENT CONTAINING AN ELECTRICAL CONDUCTOR SURROUNDED BY MAGNETIC MATERIAL - Google Patents

METHOD FOR PRODUCING AN ELEMENT CONTAINING AN ELECTRICAL CONDUCTOR SURROUNDED BY MAGNETIC MATERIAL

Info

Publication number
ATE358330T1
ATE358330T1 AT03293095T AT03293095T ATE358330T1 AT E358330 T1 ATE358330 T1 AT E358330T1 AT 03293095 T AT03293095 T AT 03293095T AT 03293095 T AT03293095 T AT 03293095T AT E358330 T1 ATE358330 T1 AT E358330T1
Authority
AT
Austria
Prior art keywords
conductor
magnetic material
producing
electrical conductor
space
Prior art date
Application number
AT03293095T
Other languages
German (de)
Inventor
Philippe Renaud
Frederic Dumestre
Catherine Amiens
Bruno Chaudret
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Application granted granted Critical
Publication of ATE358330T1 publication Critical patent/ATE358330T1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/0036—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties showing low dimensional magnetism, i.e. spin rearrangements due to a restriction of dimensions, e.g. showing giant magnetoresistivity
    • H01F1/0045—Zero dimensional, e.g. nanoparticles, soft nanoparticles for medical/biological use
    • H01F1/0063—Zero dimensional, e.g. nanoparticles, soft nanoparticles for medical/biological use in a non-magnetic matrix, e.g. granular solids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/04—Fixed inductances of the signal type with magnetic core
    • H01F17/06—Fixed inductances of the signal type with magnetic core with core substantially closed in itself, e.g. toroid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/497—Inductive arrangements or effects of, or between, wiring layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

A method of producing an electrical inductor circuit element comprising an elongate electrical conductor (1) encircled by magnetic material (2) extending along at least a part of the conductor. First (10) and second (7) sacrificial layers are formed across the conductor (1) respectively above and below the conductor, at least parts of the sacrificial layers (7, 10) are removed to leave a space (12) encircling the conductor, a fluid (16) comprising magnetic nanoparticles dispersed in a liquid dispersant is introduced into the space (12), and the dispersant is removed leaving the magnetic nanoparticles densely packed in the space (12) as at least part of the magnetic material (2). <IMAGE>
AT03293095T 2003-12-10 2003-12-10 METHOD FOR PRODUCING AN ELEMENT CONTAINING AN ELECTRICAL CONDUCTOR SURROUNDED BY MAGNETIC MATERIAL ATE358330T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03293095A EP1542261B1 (en) 2003-12-10 2003-12-10 Method of producing an element comprising an electrical conductor encircled by magnetic material

Publications (1)

Publication Number Publication Date
ATE358330T1 true ATE358330T1 (en) 2007-04-15

Family

ID=34486452

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03293095T ATE358330T1 (en) 2003-12-10 2003-12-10 METHOD FOR PRODUCING AN ELEMENT CONTAINING AN ELECTRICAL CONDUCTOR SURROUNDED BY MAGNETIC MATERIAL

Country Status (9)

Country Link
US (1) US20070298520A1 (en)
EP (1) EP1542261B1 (en)
JP (1) JP2007514308A (en)
KR (1) KR20070011244A (en)
CN (1) CN100446174C (en)
AT (1) ATE358330T1 (en)
DE (1) DE60312872T2 (en)
TW (1) TW200535912A (en)
WO (1) WO2005093789A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6958572B2 (en) * 2002-02-06 2005-10-25 Ut-Battelle Llc Controlled non-normal alignment of catalytically grown nanostructures in a large-scale synthesis process
WO2007044959A1 (en) * 2005-10-13 2007-04-19 Inframat Corporation Patterned magnetic inductors
US8436707B2 (en) * 2010-01-12 2013-05-07 Infineon Technologies Ag System and method for integrated inductor
US9461355B2 (en) 2013-03-29 2016-10-04 Intel Corporation Method apparatus and material for radio frequency passives and antennas
US20200343037A1 (en) 2019-04-26 2020-10-29 Analog Devices International Unlimited Company Micro-scale planar-coil transformer with shield
US11728090B2 (en) * 2020-02-10 2023-08-15 Analog Devices International Unlimited Company Micro-scale device with floating conductive layer
US12464739B2 (en) 2022-07-01 2025-11-04 Analog Devices International Unlimited Company Micro-scale passive device with particles in insulator layer
US12457758B2 (en) 2022-07-01 2025-10-28 Analog Devices International Unlimited Company Micro-scale passive device with particles in insulator layer

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5869148A (en) * 1991-04-23 1999-02-09 Webcraft Technologies Inc. Process for the in-line, high speed manufacturing of magnetic products
US5276338A (en) * 1992-05-15 1994-01-04 International Business Machines Corporation Bonded wafer structure having a buried insulation layer
JPH07211865A (en) * 1994-01-19 1995-08-11 Fujitsu Ltd Inductor
DE19533050A1 (en) * 1995-09-07 1997-03-13 Vacuumschmelze Gmbh Mfg. an inductive component having at least one coil e.g. for filters or oscillatory circuits
US5882985A (en) * 1995-10-10 1999-03-16 Advanced Micro Devices, Inc. Reduction of field oxide step height during semiconductor fabrication
TW308719B (en) * 1995-10-23 1997-06-21 Dow Corning
JP2765547B2 (en) * 1995-12-27 1998-06-18 日本電気株式会社 Semiconductor device and manufacturing method thereof
US6492705B1 (en) * 1996-06-04 2002-12-10 Intersil Corporation Integrated circuit air bridge structures and methods of fabricating same
CN1166014C (en) * 1996-11-15 2004-09-08 凌沛清(音译) Structure of inductor on semiconductor chip and manufacturing method thereof
US6004830A (en) * 1998-02-09 1999-12-21 Advanced Vision Technologies, Inc. Fabrication process for confined electron field emission device
JPH11345887A (en) * 1998-03-31 1999-12-14 Seiko Epson Corp Semiconductor device and manufacturing method thereof
US6254662B1 (en) * 1999-07-26 2001-07-03 International Business Machines Corporation Chemical synthesis of monodisperse and magnetic alloy nanocrystal containing thin films
US6396122B1 (en) * 2000-09-08 2002-05-28 Newport Fab, Llc Method for fabricating on-chip inductors and related structure
JP2003347123A (en) * 2002-05-29 2003-12-05 Taiyo Yuden Co Ltd Thin-film inductor and electronic device using the same
US7309658B2 (en) * 2004-11-22 2007-12-18 Intermolecular, Inc. Molecular self-assembly in substrate processing

Also Published As

Publication number Publication date
DE60312872T2 (en) 2007-07-12
DE60312872D1 (en) 2007-05-10
KR20070011244A (en) 2007-01-24
CN100446174C (en) 2008-12-24
CN1898770A (en) 2007-01-17
US20070298520A1 (en) 2007-12-27
TW200535912A (en) 2005-11-01
EP1542261B1 (en) 2007-03-28
WO2005093789A1 (en) 2005-10-06
EP1542261A1 (en) 2005-06-15
JP2007514308A (en) 2007-05-31

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