ATE360200T1 - Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlage - Google Patents

Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlage

Info

Publication number
ATE360200T1
ATE360200T1 AT01122756T AT01122756T ATE360200T1 AT E360200 T1 ATE360200 T1 AT E360200T1 AT 01122756 T AT01122756 T AT 01122756T AT 01122756 T AT01122756 T AT 01122756T AT E360200 T1 ATE360200 T1 AT E360200T1
Authority
AT
Austria
Prior art keywords
component
temperature
liquid mixture
concentration
mixture
Prior art date
Application number
AT01122756T
Other languages
English (en)
Inventor
Ronald Dr Hoyer
Stefan Dr Ottow
Hans Ulrich Dr Stiehl
Original Assignee
Infineon Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag filed Critical Infineon Technologies Ag
Application granted granted Critical
Publication of ATE360200T1 publication Critical patent/ATE360200T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/02—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
    • G01N25/08—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering of boiling point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/02—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
    • G01N25/08—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering of boiling point
    • G01N25/10—Analysis by measuring change of boiling point

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Weting (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT01122756T 2001-09-21 2001-09-21 Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlage ATE360200T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01122756A EP1296132B1 (de) 2001-09-21 2001-09-21 Zelle zur Messung der Konzentration einer Komponente einer zwei-komponenten Flüssigkeitsmischung, eine Vorrichtung und eine Ätzanlage

Publications (1)

Publication Number Publication Date
ATE360200T1 true ATE360200T1 (de) 2007-05-15

Family

ID=8178692

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01122756T ATE360200T1 (de) 2001-09-21 2001-09-21 Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlage

Country Status (4)

Country Link
US (1) US20030056577A1 (de)
EP (1) EP1296132B1 (de)
AT (1) ATE360200T1 (de)
DE (1) DE60127957T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004051972B3 (de) * 2004-10-25 2006-08-03 Brandenburgische Technische Universität Cottbus Verfahren zur kontinuierlichen Bestimmung des temperaturabhängigen Verlaufs von Dampf-Flüssig-Gleichgewichten von Mehr-Stoff-Gemischen
BRPI1015785B1 (pt) 2010-09-23 2017-12-12 Robert Bosch Limitada System and method of identification of the composition of a fuel and method of identification of the composition of a fluid
WO2014151778A1 (en) * 2013-03-15 2014-09-25 Tel Fsi, Inc Processing system and method for providing a heated etching solution

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2900816A (en) * 1958-03-20 1959-08-25 Foxboro Co Boiling point temperature measuring system
US4092211A (en) * 1976-11-18 1978-05-30 Northern Telecom Limited Control of etch rate of silicon dioxide in boiling phosphoric acid
FR2636430B1 (fr) * 1988-09-09 1990-12-07 Agronomique Inst Nat Rech Ebulliometre universel permettant de mesurer les parametres numeriques d'une solution alcoolique
JPH0296334A (ja) * 1988-10-01 1990-04-09 Nisso Eng Kk 高温エッチング液の循環方法
DE4031008C1 (en) * 1990-10-01 1992-04-30 Pierburg Gmbh, 4040 Neuss, De Utilising alcohol-contg. fuel in I.C. engine - with fuel mix compsn. correction using fuel sensor signals
JPH04188728A (ja) * 1990-11-22 1992-07-07 Hitachi Ltd 湿式エッチング装置
US5443695A (en) * 1993-02-26 1995-08-22 Athens Corporation Distillation apparatus for concentrating less volatile liquids
JPH08152207A (ja) * 1994-11-29 1996-06-11 Sanyo Electric Co Ltd 空気調和機
JPH09275091A (ja) * 1996-04-03 1997-10-21 Mitsubishi Electric Corp 半導体窒化膜エッチング装置
US5830375A (en) * 1996-06-10 1998-11-03 Taiwan Semiconductor Manufacturing Company Ltd. Automated method for monitoring and controlling the orthophosphoric acid etch rate of silicon nitride insulator layers
US5779927A (en) * 1997-01-27 1998-07-14 Taiwan Semiconductor Manufacturing Company, Ltd. Modified reflux etcher controlled by pH or conductivity sensing loop
DE19945928C1 (de) * 1999-09-24 2001-06-21 Siemens Ag Bestimmung der Alkoholkonzentration im Elektrolyt von Brennstoffzellen

Also Published As

Publication number Publication date
EP1296132A1 (de) 2003-03-26
US20030056577A1 (en) 2003-03-27
DE60127957D1 (de) 2007-05-31
DE60127957T2 (de) 2008-01-17
EP1296132B1 (de) 2007-04-18

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