ATE362092T1 - Einrichtung zur messung der topographie einer optischen oberfläche - Google Patents
Einrichtung zur messung der topographie einer optischen oberflächeInfo
- Publication number
- ATE362092T1 ATE362092T1 AT05736551T AT05736551T ATE362092T1 AT E362092 T1 ATE362092 T1 AT E362092T1 AT 05736551 T AT05736551 T AT 05736551T AT 05736551 T AT05736551 T AT 05736551T AT E362092 T1 ATE362092 T1 AT E362092T1
- Authority
- AT
- Austria
- Prior art keywords
- topography
- measuring
- support
- optical surface
- cushion
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 2
- 238000012876 topography Methods 0.000 title 1
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
- G01M11/0214—Details of devices holding the object to be tested
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Measurement Of Optical Distance (AREA)
- Buffer Packaging (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0402545A FR2867558B1 (fr) | 2004-03-11 | 2004-03-11 | Dispositif de releve de la topograhie d'une surface optique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE362092T1 true ATE362092T1 (de) | 2007-06-15 |
Family
ID=34896461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT05736551T ATE362092T1 (de) | 2004-03-11 | 2005-03-09 | Einrichtung zur messung der topographie einer optischen oberfläche |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1723385B1 (de) |
| CN (1) | CN100476343C (de) |
| AT (1) | ATE362092T1 (de) |
| CA (1) | CA2558672C (de) |
| DE (1) | DE602005001116T2 (de) |
| FR (1) | FR2867558B1 (de) |
| WO (1) | WO2005098349A1 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2935627B1 (fr) * | 2008-09-10 | 2010-09-03 | Essilor Int | Outil de surfacage a qualite optique |
| CN102744600B (zh) * | 2012-06-27 | 2014-11-26 | 哈尔滨汽轮机厂有限责任公司 | 利用假轴和调整支架使低压汽缸下半的三部分同轴的方法 |
| DE102015105561A1 (de) * | 2015-04-13 | 2016-10-13 | Klaus Winter | Vorrichtung zur Ausrichtung eines zu vermessenden Bauteils |
| CN106568393B (zh) * | 2016-11-02 | 2019-02-22 | 中国科学院长春光学精密机械与物理研究所 | 一种用于反射镜光学加工原位检测的装置及使用方法 |
| CN110132167A (zh) * | 2019-05-06 | 2019-08-16 | 苏州慧利仪器有限责任公司 | 平晶承托装置以及激光干涉检测设备 |
| DE102020209590A1 (de) | 2020-07-30 | 2021-08-05 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zum Polieren eines optischen Elements |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4232966A (en) * | 1979-06-12 | 1980-11-11 | Laco Laboratories, Inc. | Contact lens device |
| US4236824A (en) * | 1979-06-21 | 1980-12-02 | Honeywell Inc. | Method for correction of forged optical elements |
| FR2499314A1 (fr) * | 1981-02-04 | 1982-08-06 | Centre Nat Rech Scient | Ensemble de microscope electronique a balayage a fonctionnement in situ |
| JP2739282B2 (ja) * | 1994-04-28 | 1998-04-15 | 株式会社トプコン | レンズ受及びレンズメータ |
| CN2254182Y (zh) * | 1996-01-12 | 1997-05-14 | 浙江大学 | 塑料透镜检查仪 |
| JP3592021B2 (ja) * | 1996-03-12 | 2004-11-24 | キヤノン株式会社 | レンズ保持方法及びレンズ保持装置 |
-
2004
- 2004-03-11 FR FR0402545A patent/FR2867558B1/fr not_active Expired - Fee Related
-
2005
- 2005-03-09 WO PCT/FR2005/000562 patent/WO2005098349A1/fr not_active Ceased
- 2005-03-09 DE DE602005001116T patent/DE602005001116T2/de not_active Expired - Lifetime
- 2005-03-09 EP EP05736551A patent/EP1723385B1/de not_active Expired - Lifetime
- 2005-03-09 AT AT05736551T patent/ATE362092T1/de not_active IP Right Cessation
- 2005-03-09 CA CA2558672A patent/CA2558672C/fr not_active Expired - Fee Related
- 2005-03-09 CN CNB2005800076137A patent/CN100476343C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE602005001116D1 (de) | 2007-06-21 |
| EP1723385A1 (de) | 2006-11-22 |
| CA2558672C (fr) | 2012-05-01 |
| WO2005098349A1 (fr) | 2005-10-20 |
| EP1723385B1 (de) | 2007-05-09 |
| CN100476343C (zh) | 2009-04-08 |
| DE602005001116T2 (de) | 2008-01-10 |
| CA2558672A1 (fr) | 2005-10-20 |
| CN1977142A (zh) | 2007-06-06 |
| FR2867558A1 (fr) | 2005-09-16 |
| FR2867558B1 (fr) | 2006-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |