ATE362092T1 - Einrichtung zur messung der topographie einer optischen oberfläche - Google Patents

Einrichtung zur messung der topographie einer optischen oberfläche

Info

Publication number
ATE362092T1
ATE362092T1 AT05736551T AT05736551T ATE362092T1 AT E362092 T1 ATE362092 T1 AT E362092T1 AT 05736551 T AT05736551 T AT 05736551T AT 05736551 T AT05736551 T AT 05736551T AT E362092 T1 ATE362092 T1 AT E362092T1
Authority
AT
Austria
Prior art keywords
topography
measuring
support
optical surface
cushion
Prior art date
Application number
AT05736551T
Other languages
English (en)
Inventor
Francois Burrus
Sebastien Julienne
Original Assignee
Sagem Defense Securite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem Defense Securite filed Critical Sagem Defense Securite
Application granted granted Critical
Publication of ATE362092T1 publication Critical patent/ATE362092T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005—Blocking means, chucks or the like; Alignment devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Buffer Packaging (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT05736551T 2004-03-11 2005-03-09 Einrichtung zur messung der topographie einer optischen oberfläche ATE362092T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0402545A FR2867558B1 (fr) 2004-03-11 2004-03-11 Dispositif de releve de la topograhie d'une surface optique

Publications (1)

Publication Number Publication Date
ATE362092T1 true ATE362092T1 (de) 2007-06-15

Family

ID=34896461

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05736551T ATE362092T1 (de) 2004-03-11 2005-03-09 Einrichtung zur messung der topographie einer optischen oberfläche

Country Status (7)

Country Link
EP (1) EP1723385B1 (de)
CN (1) CN100476343C (de)
AT (1) ATE362092T1 (de)
CA (1) CA2558672C (de)
DE (1) DE602005001116T2 (de)
FR (1) FR2867558B1 (de)
WO (1) WO2005098349A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2935627B1 (fr) * 2008-09-10 2010-09-03 Essilor Int Outil de surfacage a qualite optique
CN102744600B (zh) * 2012-06-27 2014-11-26 哈尔滨汽轮机厂有限责任公司 利用假轴和调整支架使低压汽缸下半的三部分同轴的方法
DE102015105561A1 (de) * 2015-04-13 2016-10-13 Klaus Winter Vorrichtung zur Ausrichtung eines zu vermessenden Bauteils
CN106568393B (zh) * 2016-11-02 2019-02-22 中国科学院长春光学精密机械与物理研究所 一种用于反射镜光学加工原位检测的装置及使用方法
CN110132167A (zh) * 2019-05-06 2019-08-16 苏州慧利仪器有限责任公司 平晶承托装置以及激光干涉检测设备
DE102020209590A1 (de) 2020-07-30 2021-08-05 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zum Polieren eines optischen Elements

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4232966A (en) * 1979-06-12 1980-11-11 Laco Laboratories, Inc. Contact lens device
US4236824A (en) * 1979-06-21 1980-12-02 Honeywell Inc. Method for correction of forged optical elements
FR2499314A1 (fr) * 1981-02-04 1982-08-06 Centre Nat Rech Scient Ensemble de microscope electronique a balayage a fonctionnement in situ
JP2739282B2 (ja) * 1994-04-28 1998-04-15 株式会社トプコン レンズ受及びレンズメータ
CN2254182Y (zh) * 1996-01-12 1997-05-14 浙江大学 塑料透镜检查仪
JP3592021B2 (ja) * 1996-03-12 2004-11-24 キヤノン株式会社 レンズ保持方法及びレンズ保持装置

Also Published As

Publication number Publication date
WO2005098349A1 (fr) 2005-10-20
DE602005001116D1 (de) 2007-06-21
DE602005001116T2 (de) 2008-01-10
EP1723385A1 (de) 2006-11-22
CA2558672A1 (fr) 2005-10-20
CN1977142A (zh) 2007-06-06
FR2867558B1 (fr) 2006-06-30
FR2867558A1 (fr) 2005-09-16
CA2558672C (fr) 2012-05-01
EP1723385B1 (de) 2007-05-09
CN100476343C (zh) 2009-04-08

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Legal Events

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