ATE363030T1 - Mikroaktuator - Google Patents

Mikroaktuator

Info

Publication number
ATE363030T1
ATE363030T1 AT00103808T AT00103808T ATE363030T1 AT E363030 T1 ATE363030 T1 AT E363030T1 AT 00103808 T AT00103808 T AT 00103808T AT 00103808 T AT00103808 T AT 00103808T AT E363030 T1 ATE363030 T1 AT E363030T1
Authority
AT
Austria
Prior art keywords
area
thermal insulation
thin portion
semiconductor substrate
flexible area
Prior art date
Application number
AT00103808T
Other languages
English (en)
Inventor
Shigeaki Tomonari
Hitoshi Yoshida
Masanao Kamakura
Hiroshi Kawada
Masaaki Saito
Kazuhiro Nobutoki
Jun Ogihara
Shuichi Nagao
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04559299A external-priority patent/JP4042244B2/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Application granted granted Critical
Publication of ATE363030T1 publication Critical patent/ATE363030T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Saccharide Compounds (AREA)
  • Die Bonding (AREA)
  • Details Of Resistors (AREA)
AT00103808T 1999-02-23 2000-02-23 Mikroaktuator ATE363030T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04559299A JP4042244B2 (ja) 1999-02-23 1999-02-23 半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
JP4561599 1999-02-23

Publications (1)

Publication Number Publication Date
ATE363030T1 true ATE363030T1 (de) 2007-06-15

Family

ID=26385605

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00103808T ATE363030T1 (de) 1999-02-23 2000-02-23 Mikroaktuator

Country Status (6)

Country Link
US (1) US6791233B2 (de)
KR (1) KR100414513B1 (de)
CN (1) CN1178272C (de)
AT (1) ATE363030T1 (de)
CA (1) CA2299131C (de)
DE (1) DE60034899T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477448B1 (ko) * 2002-08-30 2005-03-22 재단법인 포항산업과학연구원 형상기억합금 박막을 이용한 나노 유량 제어용 마이크로밸브 및 이를 이용한 페하 센서 기준전극
KR101348553B1 (ko) * 2004-07-13 2014-01-07 더 차레스 스타크 드레이퍼 래보레이토리, 인코포레이티드 칩 스케일 기기를 현수하기 위한 장치, 시스템 및 이에관련된 방법
CN101027741B (zh) * 2004-09-01 2010-11-17 爱德万测试株式会社 双压电晶片元件、双压电晶片开关、密勒元件及其制造方法
DE102005035058B4 (de) * 2005-07-27 2016-01-21 Robert Bosch Gmbh Mikromechanische Vorrichtung, mikromechanischer Sensor und Verfahren
EP1998891B1 (de) 2006-03-20 2016-08-31 Koninklijke Philips N.V. System-in-package-plattform für elektronische mikrofluidische vorrichtungen
DE102006029831A1 (de) * 2006-06-27 2008-01-03 Acandis Gmbh & Co. Kg Verfahren zur Herstellung strukturierter Schichten aus Titan und Nickel
JP4933192B2 (ja) * 2006-08-09 2012-05-16 キヤノン株式会社 可燃性ガス検出器、及び可燃性ガス検出器を搭載した燃料電池システム
JP5549532B2 (ja) * 2010-10-21 2014-07-16 富士電機株式会社 半導体装置の製造方法
NL2014801B1 (en) * 2015-05-13 2017-01-27 Berkin Bv Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
US10190702B2 (en) * 2016-03-15 2019-01-29 Dunan Microstaq, Inc. MEMS based solenoid valve
NL2017227B1 (en) * 2016-07-25 2018-01-31 Univ Delft Tech Versatile 3D Stretchable Micro-Environment for Organ-on-Chip Devices Fabricated with Standard Silicon Technology
CN108305892B (zh) * 2018-04-03 2024-05-24 京东方科技集团股份有限公司 一种柔性衬底基板及其制备方法、显示装置
JP2020160499A (ja) * 2019-03-25 2020-10-01 アズビル株式会社 制御装置
CN113251207B (zh) * 2021-05-13 2022-09-23 哈尔滨工业大学 一种基于pdms材料的气动梭阀及控制方法
CN116906662B (zh) * 2023-09-13 2024-01-09 箭牌家居集团股份有限公司 预排冷水阀门以及出水装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
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US1258368A (en) 1916-09-05 1918-03-05 Westinghouse Electric & Mfg Co Motor.
US4115750A (en) 1973-10-10 1978-09-19 Amp Incorporated Bimetal actuator
DE3750064T2 (de) 1986-09-10 1994-09-22 Furukawa Electric Co Ltd Ein elektronischer Verbinder.
US5069419A (en) 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US5058856A (en) 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5271597A (en) 1992-05-29 1993-12-21 Ic Sensors, Inc. Bimetallic diaphragm with split hinge for microactuator
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
ATE156895T1 (de) 1993-05-27 1997-08-15 Fraunhofer Ges Forschung Mikroventil
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
JP2628019B2 (ja) 1994-04-19 1997-07-09 株式会社日立製作所 静電駆動型マイクロアクチュエータとバルブの製作方法、及び静電駆動型ポンプ
US5529279A (en) 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
JPH0988805A (ja) 1995-09-26 1997-03-31 Olympus Optical Co Ltd 形状記憶合金薄膜アクチュエータ及びその製造方法、並びに光偏向器
ATE294461T1 (de) * 1996-02-10 2005-05-15 Fraunhofer Ges Forschung Bistabiler microantrieb mit gekoppelten membranen
JP3368741B2 (ja) * 1996-02-28 2003-01-20 横河電機株式会社 マイクロバルブ及びその製造方法
JPH10173306A (ja) 1996-12-06 1998-06-26 Olympus Optical Co Ltd 形状記憶合金薄膜アクチュエータの製造方法
US6124663A (en) 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US5994816A (en) 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5870007A (en) 1997-06-16 1999-02-09 Roxburgh Ltd. Multi-dimensional physical actuation of microstructures
AUPO794697A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A device (MEMS10)
US6087638A (en) 1997-07-15 2000-07-11 Silverbrook Research Pty Ltd Corrugated MEMS heater structure
EP1076767B1 (de) * 1998-05-08 2002-02-06 Infineon Technologies AG Mikroventil
JP2000317897A (ja) * 1999-02-23 2000-11-21 Matsushita Electric Works Ltd 熱絶縁構造体及びこれを用いた半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
EP1031735B1 (de) * 1999-02-23 2007-05-23 Matsushita Electric Works, Ltd. Mikroaktuator
JP3705068B2 (ja) * 1999-02-23 2005-10-12 松下電工株式会社 半導体装置及びこれを用いた半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
JP2001153252A (ja) * 1999-11-25 2001-06-08 Matsushita Electric Works Ltd 半導体マイクロバルブ
US6626417B2 (en) * 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
US6557820B2 (en) * 2001-05-22 2003-05-06 Lockheed Martin Corporation Two-stage valve suitable as high-flow high-pressure microvalve
US6644786B1 (en) * 2002-07-08 2003-11-11 Eastman Kodak Company Method of manufacturing a thermally actuated liquid control device

Also Published As

Publication number Publication date
US6791233B2 (en) 2004-09-14
KR20000062607A (ko) 2000-10-25
DE60034899T2 (de) 2008-01-24
US20030160538A1 (en) 2003-08-28
CN1178272C (zh) 2004-12-01
CN1265451A (zh) 2000-09-06
CA2299131C (en) 2003-11-11
KR100414513B1 (ko) 2004-01-13
HK1028439A1 (en) 2001-04-12
DE60034899D1 (de) 2007-07-05
CA2299131A1 (en) 2000-08-23

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Legal Events

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