ATE364846T1 - Verfahren zur herstellung eines magnetfelddetektors - Google Patents

Verfahren zur herstellung eines magnetfelddetektors

Info

Publication number
ATE364846T1
ATE364846T1 AT04251015T AT04251015T ATE364846T1 AT E364846 T1 ATE364846 T1 AT E364846T1 AT 04251015 T AT04251015 T AT 04251015T AT 04251015 T AT04251015 T AT 04251015T AT E364846 T1 ATE364846 T1 AT E364846T1
Authority
AT
Austria
Prior art keywords
magnetic field
producing
field detector
coil
intervened
Prior art date
Application number
AT04251015T
Other languages
English (en)
Inventor
Dong-Sik Shim
Sang-On Choi
Kyung-Won Na
Hae-Seok Park
Jun-Sik Hwang
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020030011807A external-priority patent/KR100546880B1/ko
Priority claimed from KR10-2003-0034191A external-priority patent/KR100518796B1/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE364846T1 publication Critical patent/ATE364846T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
    • G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Magnetic Variables (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Hall/Mr Elements (AREA)
  • Geophysics And Detection Of Objects (AREA)
AT04251015T 2003-02-25 2004-02-24 Verfahren zur herstellung eines magnetfelddetektors ATE364846T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020030011807A KR100546880B1 (ko) 2003-02-25 2003-02-25 미세 자계검출소자의 제조방법
KR10-2003-0034191A KR100518796B1 (ko) 2003-05-28 2003-05-28 자계검출소자 및 그 제조방법

Publications (1)

Publication Number Publication Date
ATE364846T1 true ATE364846T1 (de) 2007-07-15

Family

ID=36567864

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04251015T ATE364846T1 (de) 2003-02-25 2004-02-24 Verfahren zur herstellung eines magnetfelddetektors

Country Status (5)

Country Link
US (2) US7041526B2 (de)
EP (2) EP1467216B1 (de)
JP (2) JP2004258038A (de)
AT (1) ATE364846T1 (de)
DE (1) DE602004006905T2 (de)

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KR100662610B1 (ko) * 2005-01-25 2007-01-02 삼성전자주식회사 자계검출소자 및 그 제조방법
EP1783789A1 (de) * 2005-09-30 2007-05-09 TDK Corporation Dünnfilmvorrichtung und Dünnfilmspule
CN101427394B (zh) 2006-04-28 2010-12-15 微门有限公司 薄膜三轴磁通门及其实施方法
US8044755B2 (en) * 2008-04-09 2011-10-25 National Semiconductor Corporation MEMS power inductor
US7705411B2 (en) * 2008-04-09 2010-04-27 National Semiconductor Corporation MEMS-topped integrated circuit with a stress relief layer
JP4725600B2 (ja) * 2008-06-10 2011-07-13 愛知製鋼株式会社 マグネトインピーダンスセンサ素子
RU2421747C1 (ru) * 2010-01-11 2011-06-20 Олег Фёдорович Меньших Прибор для исследования магнитного силового взаимодействия
US8558344B2 (en) * 2011-09-06 2013-10-15 Analog Devices, Inc. Small size and fully integrated power converter with magnetics on chip
US20130106552A1 (en) * 2011-11-02 2013-05-02 International Business Machines Corporation Inductor with multiple polymeric layers
US9064628B2 (en) 2012-05-22 2015-06-23 International Business Machines Corporation Inductor with stacked conductors
RU2539290C2 (ru) * 2013-05-21 2015-01-20 Олег Фёдорович Меньших Устройство для исследования магнитного трения
US20170234942A1 (en) * 2016-02-11 2017-08-17 Texas Instruments Incorporated Layouts for interlevel crack prevention in fluxgate technology manufacturing
KR101952872B1 (ko) * 2017-06-23 2019-05-17 삼성전기주식회사 코일 부품 및 그의 제조방법
WO2019018925A1 (en) * 2017-07-25 2019-01-31 Tsafaridis, Demetrius MULTILAYER THIN FILM SENSOR FOR NON-DESTRUCTIVE TESTING OF FERROMAGNETIC MATERIALS
TWI798287B (zh) * 2017-12-08 2023-04-11 日商日本電產理德股份有限公司 Mi元件的製造方法及mi元件
KR102096760B1 (ko) * 2018-07-04 2020-04-03 스템코 주식회사 코일 장치 및 그 제조 방법
JP7201194B1 (ja) 2022-10-17 2023-01-10 マグネデザイン株式会社 磁界検出素子の製造方法
JP7207676B1 (ja) 2022-10-17 2023-01-18 マグネデザイン株式会社 Ｇｓｒ素子の製造方法
JP7203400B1 (ja) 2022-10-17 2023-01-13 マグネデザイン株式会社 Ｇｓｒ素子の製造方法
WO2024085098A1 (ja) * 2022-10-17 2024-04-25 マグネデザイン株式会社 Ｇｓｒ素子の製造方法

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JPS5246787A (en) * 1975-10-11 1977-04-13 Hitachi Ltd Coil for integrated circuit and process for production of same
DE3420709A1 (de) * 1984-06-02 1985-12-05 Robert Bosch Gmbh, 7000 Stuttgart Magnetfeldsensor zur messung der feldstaerke eines magnetfeldes und verfahren zu seiner herstellung
US5070317A (en) * 1989-01-17 1991-12-03 Bhagat Jayant K Miniature inductor for integrated circuits and devices
JP3093813B2 (ja) * 1991-03-29 2000-10-03 科学技術振興事業団 磁気センサ
DE4220186A1 (de) 1992-06-19 1993-12-23 Schaltbau Ag Meßschaltung für Magnetfelder
JP3545074B2 (ja) * 1994-12-27 2004-07-21 独立行政法人 科学技術振興機構 半導体基板に集積される磁気検出素子及び磁気検出モジュール
KR100250225B1 (ko) * 1996-11-19 2000-04-01 윤종용 집적회로용 인덕터 및 그 제조방법
JP3600415B2 (ja) * 1997-07-15 2004-12-15 株式会社東芝 分布定数素子
US6030877A (en) * 1997-10-06 2000-02-29 Industrial Technology Research Institute Electroless gold plating method for forming inductor structures
US6166422A (en) * 1998-05-13 2000-12-26 Lsi Logic Corporation Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor
KR100480749B1 (ko) * 1998-07-07 2005-09-30 삼성전자주식회사 차동 솔레노이드형 자계검출소자 및 그 제조방법
KR100468833B1 (ko) * 1998-07-28 2005-03-16 삼성전자주식회사 차동스파이어럴형자계검출소자및이를채용한자계검출모듈
ATE283542T1 (de) * 1999-04-14 2004-12-15 Takashi Nishi Mikrosolenoidspule und verfahren zu ihrer herstellung
US6835576B2 (en) * 2000-05-02 2004-12-28 Fuji Electric Co., Ltd. Magnetic thin film, a magnetic component that uses this magnetic thin film, manufacturing methods for the same, and a power conversion device
KR100464097B1 (ko) * 2002-03-14 2005-01-03 삼성전자주식회사 반도체기판에 집적된 자계검출소자 및 그 제조방법
KR100544475B1 (ko) 2003-01-25 2006-01-24 삼성전자주식회사 반도체기판에 집적된 자계검출소자 및 그 제조방법
KR100536837B1 (ko) 2003-02-10 2005-12-16 삼성전자주식회사 반도체기판에 집적된 자계검출소자 및 그 제조방법
US7191639B2 (en) * 2003-04-08 2007-03-20 California Institute Of Technology On-chip magnetic force actuation of microcantilevers by coplanar coils

Also Published As

Publication number Publication date
JP2004258038A (ja) 2004-09-16
JP4633096B2 (ja) 2011-02-16
EP1467216A3 (de) 2005-01-26
US20060115918A1 (en) 2006-06-01
EP1467216A2 (de) 2004-10-13
EP1602936A1 (de) 2005-12-07
EP1602936B1 (de) 2012-06-06
JP2008003105A (ja) 2008-01-10
DE602004006905T2 (de) 2008-02-07
EP1467216B1 (de) 2007-06-13
US7041526B2 (en) 2006-05-09
DE602004006905D1 (de) 2007-07-26
US20050006713A1 (en) 2005-01-13

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