ATE370505T1 - Betätigungsvorrichtung des mikroelektromechanischen systems - Google Patents

Betätigungsvorrichtung des mikroelektromechanischen systems

Info

Publication number
ATE370505T1
ATE370505T1 AT05105264T AT05105264T ATE370505T1 AT E370505 T1 ATE370505 T1 AT E370505T1 AT 05105264 T AT05105264 T AT 05105264T AT 05105264 T AT05105264 T AT 05105264T AT E370505 T1 ATE370505 T1 AT E370505T1
Authority
AT
Austria
Prior art keywords
comb
actuator
movable comb
substrate
mems
Prior art date
Application number
AT05105264T
Other languages
English (en)
Inventor
Ki Chul Kim
Sang Hyeob Kim
Hye Jin Kim
Doo Hee Cho
Original Assignee
Korea Electronics Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Electronics Telecomm filed Critical Korea Electronics Telecomm
Application granted granted Critical
Publication of ATE370505T1 publication Critical patent/ATE370505T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Optical Recording Or Reproduction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AT05105264T 2004-12-16 2005-06-15 Betätigungsvorrichtung des mikroelektromechanischen systems ATE370505T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040107033A KR100639918B1 (ko) 2004-12-16 2004-12-16 Ｍｅｍｓ 액츄에이터

Publications (1)

Publication Number Publication Date
ATE370505T1 true ATE370505T1 (de) 2007-09-15

Family

ID=35520919

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05105264T ATE370505T1 (de) 2004-12-16 2005-06-15 Betätigungsvorrichtung des mikroelektromechanischen systems

Country Status (8)

Country Link
US (1) US7242129B2 (de)
EP (1) EP1672654B1 (de)
JP (1) JP2006174688A (de)
KR (1) KR100639918B1 (de)
AT (1) ATE370505T1 (de)
DE (1) DE602005002010T2 (de)
SG (1) SG123655A1 (de)
TW (1) TWI286122B (de)

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US7369369B1 (en) 2003-04-03 2008-05-06 Meyer Dallas W Bidirectional micropositioning recording head for a magnetic storage device
US7538983B1 (en) * 2003-07-29 2009-05-26 Meyer Dallas W Micropositioner recording head for a magnetic storage device
KR100639918B1 (ko) * 2004-12-16 2006-11-01 한국전자통신연구원 Ｍｅｍｓ 액츄에이터
KR100726436B1 (ko) * 2005-07-27 2007-06-11 삼성전자주식회사 정전기력 및 압전력에 의해 구동되는 멤스 스위치
FR2897486B1 (fr) * 2006-02-13 2011-07-22 Commissariat Energie Atomique Systeme de conversion d'energie a distance d'entrefer variable et procede de recuperation d'energie
IL183692A0 (en) * 2007-06-05 2007-09-20 Nova Measuring Instr Ltd Apparatus and method for substrates handling
US7586239B1 (en) * 2007-06-06 2009-09-08 Rf Micro Devices, Inc. MEMS vibrating structure using a single-crystal piezoelectric thin film layer
US9385685B2 (en) 2007-08-31 2016-07-05 Rf Micro Devices, Inc. MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
US9391588B2 (en) 2007-08-31 2016-07-12 Rf Micro Devices, Inc. MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
US9369105B1 (en) 2007-08-31 2016-06-14 Rf Micro Devices, Inc. Method for manufacturing a vibrating MEMS circuit
US8847466B2 (en) 2008-06-19 2014-09-30 Nxp B.V. Piezoelectric bimorph switch
JP5707323B2 (ja) * 2008-06-30 2015-04-30 ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・ミシガンＴｈｅ Ｒｅｇｅｎｔｓ Ｏｆ Ｔｈｅ Ｕｎｉｖｅｒｓｉｔｙ Ｏｆ Ｍｉｃｈｉｇａｎ 圧電型ｍｅｍｓマイクロフォン
US10170685B2 (en) * 2008-06-30 2019-01-01 The Regents Of The University Of Michigan Piezoelectric MEMS microphone
US7732975B1 (en) * 2008-12-29 2010-06-08 Formfactor, Inc. Biased gap-closing actuator
US8279559B1 (en) 2009-01-02 2012-10-02 Meyer Dallas W Process for creating discrete track magnetic recording media including an apparatus having a stylus selectively applying stress to a surface of the recording media
US9117593B2 (en) 2012-11-02 2015-08-25 Rf Micro Devices, Inc. Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
CN103594617A (zh) * 2013-11-29 2014-02-19 上海集成电路研发中心有限公司 压电悬臂梁传感器及其制造方法
US9991872B2 (en) 2014-04-04 2018-06-05 Qorvo Us, Inc. MEMS resonator with functional layers
US9998088B2 (en) 2014-05-02 2018-06-12 Qorvo Us, Inc. Enhanced MEMS vibrating device
JP6488657B2 (ja) * 2014-11-12 2019-03-27 株式会社リコー アクチュエータ
TWI621582B (zh) * 2015-08-14 2018-04-21 先進微系統科技股份有限公司 梳形致動器
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
US20210144483A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Single-axis actuator, acoustic wave generator and its array
US11634320B2 (en) * 2021-02-22 2023-04-25 Taiwan Semiconductor Manufacturing Company Limited Micro-electromechanical system device including a precision proof mass element and methods for forming the same
TR2021010193A1 (tr) * 2021-06-22 2023-01-23 Pamukkale Ueniversitesi Bi̇r mems tarak parmak rezonatörü kaplama yöntemi̇

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JPH05147762A (ja) * 1991-11-25 1993-06-15 Mitsubishi Electric Corp シート搬送装置
JP3450349B2 (ja) 1992-03-31 2003-09-22 キヤノン株式会社 カンチレバー型プローブ
US6472794B1 (en) * 1992-07-10 2002-10-29 Matsushita Electric Industrial Co., Ltd. Microactuator
JP2001503552A (ja) * 1996-12-16 2001-03-13 シーゲイト テクノロジー エルエルシー バイモルフ圧電マイクロアクチュエータのヘッドとフレクシャとの組立体
JPH1114634A (ja) 1997-06-24 1999-01-22 Hitachi Ltd 制御装置
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US6359374B1 (en) * 1999-11-23 2002-03-19 Mcnc Miniature electrical relays using a piezoelectric thin film as an actuating element
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WO2002035695A1 (en) * 2000-10-20 2002-05-02 Fujitsu Limited Piezoelectric actuator, drive method, and information storage device
US6483056B2 (en) * 2000-10-27 2002-11-19 Daniel J Hyman Microfabricated relay with multimorph actuator and electrostatic latch mechanism
FR2835981B1 (fr) * 2002-02-13 2005-04-29 Commissariat Energie Atomique Microresonateur mems a ondes acoustiques de volume accordable
JP4432776B2 (ja) 2002-05-15 2010-03-17 セイコーエプソン株式会社 圧電アクチュエータ及び液体噴射ヘッド
KR100468853B1 (ko) 2002-08-30 2005-01-29 삼성전자주식회사 절연 물질에 구현된 ｍｅｍｓ 콤브 액추에이터와 그제조방법
US7098577B2 (en) * 2002-10-21 2006-08-29 Hrl Laboratories, Llc Piezoelectric switch for tunable electronic components
JP3907628B2 (ja) 2003-02-07 2007-04-18 キヤノン株式会社 圧電アクチュエーターおよびその製造方法ならびに液体吐出ヘッド
KR100639918B1 (ko) * 2004-12-16 2006-11-01 한국전자통신연구원 Ｍｅｍｓ 액츄에이터
KR100815362B1 (ko) * 2005-01-05 2008-03-19 삼성전기주식회사 인터디지테이트형의 회절형 광변조기

Also Published As

Publication number Publication date
EP1672654B1 (de) 2007-08-15
KR20060068370A (ko) 2006-06-21
TWI286122B (en) 2007-09-01
US20060131997A1 (en) 2006-06-22
US7242129B2 (en) 2007-07-10
EP1672654A1 (de) 2006-06-21
DE602005002010T2 (de) 2008-05-15
JP2006174688A (ja) 2006-06-29
KR100639918B1 (ko) 2006-11-01
SG123655A1 (en) 2006-07-26
TW200621620A (en) 2006-07-01
DE602005002010D1 (de) 2007-09-27

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