ATE371947T1 - Elektrostatischer betätiger, und elektrostatisches relais und andere vorrichtungen unter benutzung derselben - Google Patents

Elektrostatischer betätiger, und elektrostatisches relais und andere vorrichtungen unter benutzung derselben

Info

Publication number
ATE371947T1
ATE371947T1 AT02102543T AT02102543T ATE371947T1 AT E371947 T1 ATE371947 T1 AT E371947T1 AT 02102543 T AT02102543 T AT 02102543T AT 02102543 T AT02102543 T AT 02102543T AT E371947 T1 ATE371947 T1 AT E371947T1
Authority
AT
Austria
Prior art keywords
voltage
electrostatic actuator
film
insulating film
electrostatic
Prior art date
Application number
AT02102543T
Other languages
English (en)
Inventor
Akira Akiba
Keisuke Uno
Masao Jojima
Tomonori Seki
Koji Sano
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Application granted granted Critical
Publication of ATE371947T1 publication Critical patent/ATE371947T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Micromachines (AREA)
  • Waveguide Connection Structure (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Seal Device For Vehicle (AREA)
  • Vehicle Body Suspensions (AREA)
AT02102543T 2001-11-06 2002-11-06 Elektrostatischer betätiger, und elektrostatisches relais und andere vorrichtungen unter benutzung derselben ATE371947T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001340293A JP4045090B2 (ja) 2001-11-06 2001-11-06 静電アクチュエータの調整方法

Publications (1)

Publication Number Publication Date
ATE371947T1 true ATE371947T1 (de) 2007-09-15

Family

ID=19154516

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02102543T ATE371947T1 (de) 2001-11-06 2002-11-06 Elektrostatischer betätiger, und elektrostatisches relais und andere vorrichtungen unter benutzung derselben

Country Status (7)

Country Link
US (1) US7161273B2 (de)
EP (1) EP1308977B1 (de)
JP (1) JP4045090B2 (de)
KR (1) KR100499823B1 (de)
CN (1) CN1258795C (de)
AT (1) ATE371947T1 (de)
DE (1) DE60222075T2 (de)

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US20070040637A1 (en) * 2005-08-19 2007-02-22 Yee Ian Y K Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals
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US7751173B2 (en) * 2006-02-09 2010-07-06 Kabushiki Kaisha Toshiba Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
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US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
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US8115577B2 (en) * 2007-06-14 2012-02-14 Panasonic Corporation Electromechanical switch, filter using the same, and communication apparatus
US7570415B2 (en) 2007-08-07 2009-08-04 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
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US8723061B2 (en) 2009-09-17 2014-05-13 Panasonic Corporation MEMS switch and communication device using the same
WO2011033729A1 (ja) * 2009-09-17 2011-03-24 パナソニック株式会社 Ｍｅｍｓスイッチおよびそれを用いた通信装置
JP5338615B2 (ja) 2009-10-27 2013-11-13 富士通株式会社 可変容量デバイスおよび可変容量素子の駆動方法
JP5402823B2 (ja) * 2010-05-13 2014-01-29 オムロン株式会社 音響センサ
JP5609271B2 (ja) * 2010-05-28 2014-10-22 大日本印刷株式会社 静電アクチュエータ
CN102044380A (zh) * 2010-12-31 2011-05-04 航天时代电子技术股份有限公司 一种金属mems电磁继电器
US9708177B2 (en) * 2011-09-02 2017-07-18 Cavendish Kinetics, Inc. MEMS device anchoring
JP2013090442A (ja) * 2011-10-18 2013-05-13 Murata Mfg Co Ltd 静電駆動型アクチュエータ、可変容量素子、および、それらの製造方法
US8629360B2 (en) * 2012-04-30 2014-01-14 Raytheon Company RF micro-electro-mechanical system (MEMS) capacitive switch
JP5921477B2 (ja) * 2013-03-25 2016-05-24 株式会社東芝 Ｍｅｍｓ素子
CN103626115B (zh) * 2013-03-29 2016-09-28 南京邮电大学 超薄氮化物微纳静电驱动器及其制备方法
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Also Published As

Publication number Publication date
KR20030038387A (ko) 2003-05-16
JP4045090B2 (ja) 2008-02-13
US20030102771A1 (en) 2003-06-05
US7161273B2 (en) 2007-01-09
CN1417826A (zh) 2003-05-14
KR100499823B1 (ko) 2005-07-08
JP2003136496A (ja) 2003-05-14
DE60222075D1 (de) 2007-10-11
CN1258795C (zh) 2006-06-07
EP1308977A2 (de) 2003-05-07
EP1308977B1 (de) 2007-08-29
DE60222075T2 (de) 2008-06-12
EP1308977A3 (de) 2005-01-19

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