ATE376708T1 - Positioniereinrichtung - Google Patents

Positioniereinrichtung

Info

Publication number
ATE376708T1
ATE376708T1 AT05702067T AT05702067T ATE376708T1 AT E376708 T1 ATE376708 T1 AT E376708T1 AT 05702067 T AT05702067 T AT 05702067T AT 05702067 T AT05702067 T AT 05702067T AT E376708 T1 ATE376708 T1 AT E376708T1
Authority
AT
Austria
Prior art keywords
piezoelectric element
drive axis
output levers
output
base
Prior art date
Application number
AT05702067T
Other languages
English (en)
Inventor
Michael Dixon
Terence Herbert
Original Assignee
Thorlabs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thorlabs Inc filed Critical Thorlabs Inc
Application granted granted Critical
Publication of ATE376708T1 publication Critical patent/ATE376708T1/de

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J25/00Actions or mechanisms not otherwise provided for
    • B41J25/001Mechanisms for bodily moving print heads or carriages parallel to the paper surface
    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/18Mechanical movements
    • Y10T74/18992Reciprocating to reciprocating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/20Control lever and linkage systems
    • Y10T74/20207Multiple controlling elements for single controlled element
    • Y10T74/20341Power elements as controlling elements
    • Y10T74/20348Planar surface with orthogonal movement and rotation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/20Control lever and linkage systems
    • Y10T74/20576Elements
    • Y10T74/20582Levers

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Seal Device For Vehicle (AREA)
  • Wire Bonding (AREA)
  • Eye Examination Apparatus (AREA)
  • Die Bonding (AREA)
AT05702067T 2004-02-20 2005-01-31 Positioniereinrichtung ATE376708T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0403821A GB2411288B (en) 2004-02-20 2004-02-20 Positioner device

Publications (1)

Publication Number Publication Date
ATE376708T1 true ATE376708T1 (de) 2007-11-15

Family

ID=32040099

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05702067T ATE376708T1 (de) 2004-02-20 2005-01-31 Positioniereinrichtung

Country Status (9)

Country Link
US (1) US7652409B2 (de)
EP (1) EP1716603B1 (de)
JP (1) JP4663659B2 (de)
CN (1) CN100533799C (de)
AT (1) ATE376708T1 (de)
CA (1) CA2556678C (de)
DE (1) DE602005003010T2 (de)
GB (1) GB2411288B (de)
WO (1) WO2005081330A2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2411288B (en) 2004-02-20 2006-01-04 Melles Griot Ltd Positioner device
JP5141978B2 (ja) 2005-04-25 2013-02-13 株式会社アルバック プリント装置
CN101198476B (zh) * 2005-04-25 2011-07-06 株式会社爱发科 动态打印头对准组件
US8336179B2 (en) * 2008-05-20 2012-12-25 Seagate Technology Fixture assembly
US20100077877A1 (en) * 2008-09-26 2010-04-01 Ming-Hung Hsieh Rotary micro-adjustment mechanism for a synchronous double-drive positioning platform
JP2012514703A (ja) 2008-12-31 2012-06-28 エフ. ヒメネス、オマール フレキシャ部材を組み入れた可撓性ジョイント構成
US8628577B1 (en) 2009-03-19 2014-01-14 Ex Technology, Llc Stable device for intervertebral distraction and fusion
IN2012DN00952A (de) 2009-07-22 2015-04-10 Spinex Tec Llc
US8636746B2 (en) 2009-12-31 2014-01-28 Spinex Tec, Llc Methods and apparatus for insertion of vertebral body distraction and fusion devices
SE534895C2 (sv) * 2010-05-17 2012-02-07 Mindray Medical Sweden Ab Förfarande för tillverkning av en mekanisk rörelseförstärkare
EP2442069A1 (de) * 2010-10-12 2012-04-18 SP Sveriges Tekniska Forskninginstitut AB Stützanordnung für eine Registrierungsvorrichtung wie zum Beispiel ein Vermessungsinstrument
JP6091434B2 (ja) * 2011-02-17 2017-03-08 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学マウント及びeuv露光装置
KR101221945B1 (ko) 2011-07-05 2013-01-15 한국기계연구원 예압 인가에 따른 미소 변형을 보상 가능한 변위 확대 기구
US8912707B2 (en) * 2011-07-13 2014-12-16 Academia Sinica Friction-driven actuator
EP2682944A1 (de) * 2012-07-06 2014-01-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Abtastmikroskop
DE102013012941A1 (de) * 2013-07-31 2015-02-05 Johannes Kindt Langreichweitiger Mehrachsen-Scanner im Mikroskop-Objektivformat
US10591373B2 (en) * 2013-08-01 2020-03-17 Mts Systems Corporation Load transducer having a biasing assembly
US9778122B2 (en) 2013-08-01 2017-10-03 Mts Systems Corporation Two-axis sensor body for a load transducer
FR3015147A1 (fr) * 2013-12-18 2015-06-19 Thales Sa Actionneur de precision aller-retour
US8940049B1 (en) 2014-04-01 2015-01-27 Ex Technology, Llc Expandable intervertebral cage
US9486328B2 (en) 2014-04-01 2016-11-08 Ex Technology, Llc Expandable intervertebral cage
JP6501388B2 (ja) * 2014-11-20 2019-04-17 株式会社ホロン 移動・傾斜機構
KR102322168B1 (ko) * 2017-10-25 2021-11-03 한국전기연구원 피에조 엑츄에이터식 1축 정밀 제어모듈과 피에조 엑츄에이터식 1축 정밀 제어장치
GB201804951D0 (en) 2018-03-27 2018-05-09 Pxyl Ltd Improved non-linear optical microscope
GB201804952D0 (en) * 2018-03-27 2018-05-09 Pxyl Ltd Improved scanning optical microscope
US11234835B2 (en) 2019-03-05 2022-02-01 Octagon Spine Llc Transversely expandable minimally invasive intervertebral cage
US11497622B2 (en) 2019-03-05 2022-11-15 Ex Technology, Llc Transversely expandable minimally invasive intervertebral cage and insertion and extraction device
RU196011U1 (ru) * 2019-12-13 2020-02-13 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский технологический университет "МИСиС" Трехкоординатное устройство позиционирования
CN111667878B (zh) 2020-07-09 2025-07-04 广东工业大学 一种大行程高速高精度的xy并联解耦微定位平台
US12097126B2 (en) 2021-09-29 2024-09-24 Ex Technology, Llc Expandable intervertebral cage
US12011365B2 (en) 2022-07-18 2024-06-18 Octagon Spine Llc Transversely expandable minimally invasive inter vertebral cage

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902084A (en) 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
US3902085A (en) 1974-11-25 1975-08-26 Burleigh Instr Electromechanical translation apparatus
FR2497995A1 (fr) * 1981-01-12 1982-07-16 Leonard Plate-forme stabilisee pour instrument de mesure
US4675568A (en) 1984-08-13 1987-06-23 Nec Corporation Mechanical amplification mechanism for electromechanical transducer
JPH01161790A (ja) 1987-12-17 1989-06-26 Nec Corp 圧電アクチュエータ用変位拡大機構
JPH0748573B2 (ja) 1988-10-28 1995-05-24 日本電気株式会社 圧電素子変位増幅機構
DE69203140T2 (de) 1991-04-25 1995-11-30 Nippon Electric Co Verschiebungsverstärkungsmechanismus mit piezoelektrisches Element.
US5303035A (en) 1992-05-04 1994-04-12 New Focus, Inc. Precision micropositioner
JP3525313B2 (ja) * 1995-06-30 2004-05-10 太平洋セメント株式会社 レバー変位拡大機構付位置決め装置
JPH1047931A (ja) * 1996-08-01 1998-02-20 Hitachi Denshi Ltd 2次元測定装置
DE19739594C2 (de) * 1997-09-10 2001-09-06 Daimler Chrysler Ag Elektrostriktiver Stellantrieb
GB2334593B (en) 1998-02-20 2002-07-17 Melles Griot Ltd Positioning mechanism
US6346710B1 (en) 1998-08-31 2002-02-12 Olympus Optical Co., Ltd. Stage apparatus including displacement amplifying mechanism
JP3434709B2 (ja) * 1998-08-31 2003-08-11 オリンパス光学工業株式会社 テーブル機構
US6484602B1 (en) * 1999-06-21 2002-11-26 National Institute Of Standards And Technology Six-degree of freedom micro-positioner
US6879087B2 (en) * 2002-02-06 2005-04-12 Viking Technologies, L.C. Apparatus for moving a pair of opposing surfaces in response to an electrical activation
GB2411288B (en) 2004-02-20 2006-01-04 Melles Griot Ltd Positioner device
JP4813260B2 (ja) * 2006-05-30 2011-11-09 株式会社豊田中央研究所 電動機,電動機ステータ及びその製造方法

Also Published As

Publication number Publication date
CA2556678A1 (en) 2005-09-01
GB2411288B (en) 2006-01-04
WO2005081330A2 (en) 2005-09-01
GB2411288A (en) 2005-08-24
JP2007530922A (ja) 2007-11-01
US7652409B2 (en) 2010-01-26
DE602005003010T2 (de) 2008-02-07
GB0403821D0 (en) 2004-03-24
WO2005081330A3 (en) 2006-04-27
JP4663659B2 (ja) 2011-04-06
CN1934723A (zh) 2007-03-21
EP1716603B1 (de) 2007-10-24
DE602005003010D1 (de) 2007-12-06
EP1716603A2 (de) 2006-11-02
CA2556678C (en) 2013-01-15
US20090167113A1 (en) 2009-07-02
CN100533799C (zh) 2009-08-26

Similar Documents

Publication Publication Date Title
ATE376708T1 (de) Positioniereinrichtung
ATE435725T1 (de) Roboter-greifer
CN106251909B (zh) 一种高精度、大行程三自由度并联微定位平台
CN103021472B (zh) 平面并联式三自由度精密定位工作台
ATE534150T1 (de) Schwingungswellenantriebsvorrichtung
DE602005023129D1 (de) Kleiner piezoelektrischer oder elektrostriktiver linearmotor
ATE453120T1 (de) Labor-roboter-anordnung
DE602007004972D1 (de) Getriebemechanismus für ein injektionsgerät
CN101286369A (zh) X-y-z三自由度串联式纳米级微定位工作台
CN107378527A (zh) 一种压电驱动式两自由度解耦微摆动平台
CN104393786B (zh) 一种利用滑杆惯性产生步进的压电马达
DE502008001605D1 (de) Elektromechanischer motor, insbesondere piezoelektrischer mikroschrittantrieb
FI20031014A7 (fi) Siirtolaite
TW200710548A (en) Lens driving device and imaging apparatus
CN103486413A (zh) 三自由度解耦大行程微定位平台
EA200901323A1 (ru) Вибропередающее устройство
DE502006007905D1 (de) Vorrichtung zur herstellung einer reib- und/oder formschlussverbindung zwischen zwei relativ zueinander rotierbar oder linearbeweglich angeordneten komponenten
ATE388106T1 (de) Linearantrieb für ein vibrationsgerät
ATE414027T1 (de) Linear-vibrationsförderer
ATE528847T1 (de) Stellmotor und vorrichtung
CN105598946A (zh) 基于Diamond机构的3自由度混联机械手
CN106849746B (zh) 基于惯性冲击的三自由度压电驱动平台
CN102059693A (zh) 含方形弹性副的两平动微操作台
ATE376258T1 (de) Multidirektionale piezoelektrische motoranordnung
CN105773582A (zh) 一种三支链六自由度机器人

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties