ATE376708T1 - Positioniereinrichtung - Google Patents

Positioniereinrichtung

Info

Publication number
ATE376708T1
ATE376708T1 AT05702067T AT05702067T ATE376708T1 AT E376708 T1 ATE376708 T1 AT E376708T1 AT 05702067 T AT05702067 T AT 05702067T AT 05702067 T AT05702067 T AT 05702067T AT E376708 T1 ATE376708 T1 AT E376708T1
Authority
AT
Austria
Prior art keywords
piezoelectric element
drive axis
output levers
output
base
Prior art date
Application number
AT05702067T
Other languages
English (en)
Inventor
Michael Dixon
Terence Herbert
Original Assignee
Thorlabs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thorlabs Inc filed Critical Thorlabs Inc
Application granted granted Critical
Publication of ATE376708T1 publication Critical patent/ATE376708T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J25/00—Actions or mechanisms not otherwise provided for
    • B41J25/001—Mechanisms for bodily moving print heads or carriages parallel to the paper surface
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18992—Reciprocating to reciprocating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20348—Planar surface with orthogonal movement and rotation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20576—Elements
    • Y10T74/20582—Levers

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
  • Seal Device For Vehicle (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Wire Bonding (AREA)
  • Eye Examination Apparatus (AREA)
  • Die Bonding (AREA)
AT05702067T 2004-02-20 2005-01-31 Positioniereinrichtung ATE376708T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0403821A GB2411288B (en) 2004-02-20 2004-02-20 Positioner device

Publications (1)

Publication Number Publication Date
ATE376708T1 true ATE376708T1 (de) 2007-11-15

Family

ID=32040099

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05702067T ATE376708T1 (de) 2004-02-20 2005-01-31 Positioniereinrichtung

Country Status (9)

Country Link
US (1) US7652409B2 (de)
EP (1) EP1716603B1 (de)
JP (1) JP4663659B2 (de)
CN (1) CN100533799C (de)
AT (1) ATE376708T1 (de)
CA (1) CA2556678C (de)
DE (1) DE602005003010T2 (de)
GB (1) GB2411288B (de)
WO (1) WO2005081330A2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2411288B (en) 2004-02-20 2006-01-04 Melles Griot Ltd Positioner device
EP1874550B1 (de) * 2005-04-25 2017-03-01 Ulvac, Inc. Dynamische druckkopfausrichtungsanordnung
KR101066585B1 (ko) 2005-04-25 2011-09-22 가부시키가이샤 아루박 회전 가능한 프린트헤드 어레이
US8336179B2 (en) * 2008-05-20 2012-12-25 Seagate Technology Fixture assembly
US20100077877A1 (en) * 2008-09-26 2010-04-01 Ming-Hung Hsieh Rotary micro-adjustment mechanism for a synchronous double-drive positioning platform
WO2010078520A2 (en) 2008-12-31 2010-07-08 Jimenez, Omar, F. Flexible joint arrangement incorporating flexure members
US8628577B1 (en) 2009-03-19 2014-01-14 Ex Technology, Llc Stable device for intervertebral distraction and fusion
ES2653567T3 (es) 2009-07-22 2018-02-07 Spinex Tec, Llc Mecanismo de manguito de engranaje de tornillo coaxial
US8636746B2 (en) 2009-12-31 2014-01-28 Spinex Tec, Llc Methods and apparatus for insertion of vertebral body distraction and fusion devices
SE534895C2 (sv) * 2010-05-17 2012-02-07 Mindray Medical Sweden Ab Förfarande för tillverkning av en mekanisk rörelseförstärkare
EP2442069A1 (de) * 2010-10-12 2012-04-18 SP Sveriges Tekniska Forskninginstitut AB Stützanordnung für eine Registrierungsvorrichtung wie zum Beispiel ein Vermessungsinstrument
JP6091434B2 (ja) * 2011-02-17 2017-03-08 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学マウント及びｅｕｖ露光装置
KR101221945B1 (ko) 2011-07-05 2013-01-15 한국기계연구원 예압 인가에 따른 미소 변형을 보상 가능한 변위 확대 기구
US8912707B2 (en) * 2011-07-13 2014-12-16 Academia Sinica Friction-driven actuator
EP2682944A1 (de) * 2012-07-06 2014-01-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Abtastmikroskop
DE102013012941A1 (de) * 2013-07-31 2015-02-05 Johannes Kindt Langreichweitiger Mehrachsen-Scanner im Mikroskop-Objektivformat
US10591373B2 (en) * 2013-08-01 2020-03-17 Mts Systems Corporation Load transducer having a biasing assembly
US9778122B2 (en) 2013-08-01 2017-10-03 Mts Systems Corporation Two-axis sensor body for a load transducer
FR3015147A1 (fr) * 2013-12-18 2015-06-19 Thales Sa Actionneur de precision aller-retour
US9486328B2 (en) 2014-04-01 2016-11-08 Ex Technology, Llc Expandable intervertebral cage
US8940049B1 (en) 2014-04-01 2015-01-27 Ex Technology, Llc Expandable intervertebral cage
JP6501388B2 (ja) * 2014-11-20 2019-04-17 株式会社ホロン 移動・傾斜機構
KR102322168B1 (ko) * 2017-10-25 2021-11-03 한국전기연구원 피에조 엑츄에이터식 1축 정밀 제어모듈과 피에조 엑츄에이터식 1축 정밀 제어장치
GB201804951D0 (en) 2018-03-27 2018-05-09 Pxyl Ltd Improved non-linear optical microscope
GB201804952D0 (en) * 2018-03-27 2018-05-09 Pxyl Ltd Improved scanning optical microscope
US11497622B2 (en) 2019-03-05 2022-11-15 Ex Technology, Llc Transversely expandable minimally invasive intervertebral cage and insertion and extraction device
US11234835B2 (en) 2019-03-05 2022-02-01 Octagon Spine Llc Transversely expandable minimally invasive intervertebral cage
RU196011U1 (ru) * 2019-12-13 2020-02-13 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский технологический университет "МИСиС" Трехкоординатное устройство позиционирования
CN111564987A (zh) * 2020-06-05 2020-08-21 上海隐冠半导体技术有限公司 调平装置
CN111667878B (zh) 2020-07-09 2025-07-04 广东工业大学 一种大行程高速高精度的xy并联解耦微定位平台
US12097126B2 (en) 2021-09-29 2024-09-24 Ex Technology, Llc Expandable intervertebral cage
US12011365B2 (en) 2022-07-18 2024-06-18 Octagon Spine Llc Transversely expandable minimally invasive inter vertebral cage

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902084A (en) 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
US3902085A (en) 1974-11-25 1975-08-26 Burleigh Instr Electromechanical translation apparatus
FR2497995A1 (fr) * 1981-01-12 1982-07-16 Leonard Plate-forme stabilisee pour instrument de mesure
US4675568A (en) 1984-08-13 1987-06-23 Nec Corporation Mechanical amplification mechanism for electromechanical transducer
JPH01161790A (ja) 1987-12-17 1989-06-26 Nec Corp 圧電アクチュエータ用変位拡大機構
JPH0748573B2 (ja) 1988-10-28 1995-05-24 日本電気株式会社 圧電素子変位増幅機構
DE69203140T2 (de) 1991-04-25 1995-11-30 Nippon Electric Co Verschiebungsverstärkungsmechanismus mit piezoelektrisches Element.
US5303035A (en) 1992-05-04 1994-04-12 New Focus, Inc. Precision micropositioner
JP3525313B2 (ja) * 1995-06-30 2004-05-10 太平洋セメント株式会社 レバー変位拡大機構付位置決め装置
JPH1047931A (ja) * 1996-08-01 1998-02-20 Hitachi Denshi Ltd ２次元測定装置
DE19739594C2 (de) * 1997-09-10 2001-09-06 Daimler Chrysler Ag Elektrostriktiver Stellantrieb
GB2334593B (en) 1998-02-20 2002-07-17 Melles Griot Ltd Positioning mechanism
JP3434709B2 (ja) * 1998-08-31 2003-08-11 オリンパス光学工業株式会社 テーブル機構
DE19940124C2 (de) 1998-08-31 2003-04-10 Olympus Optical Co Plattform mit einem Verschiebungsverstärkungsmechanismus
US6484602B1 (en) * 1999-06-21 2002-11-26 National Institute Of Standards And Technology Six-degree of freedom micro-positioner
US6879087B2 (en) * 2002-02-06 2005-04-12 Viking Technologies, L.C. Apparatus for moving a pair of opposing surfaces in response to an electrical activation
GB2411288B (en) 2004-02-20 2006-01-04 Melles Griot Ltd Positioner device
JP4813260B2 (ja) * 2006-05-30 2011-11-09 株式会社豊田中央研究所 電動機，電動機ステータ及びその製造方法

Also Published As

Publication number Publication date
DE602005003010D1 (de) 2007-12-06
WO2005081330A3 (en) 2006-04-27
JP2007530922A (ja) 2007-11-01
DE602005003010T2 (de) 2008-02-07
CN100533799C (zh) 2009-08-26
EP1716603A2 (de) 2006-11-02
EP1716603B1 (de) 2007-10-24
CN1934723A (zh) 2007-03-21
CA2556678C (en) 2013-01-15
GB2411288A (en) 2005-08-24
JP4663659B2 (ja) 2011-04-06
US7652409B2 (en) 2010-01-26
GB2411288B (en) 2006-01-04
CA2556678A1 (en) 2005-09-01
WO2005081330A2 (en) 2005-09-01
GB0403821D0 (en) 2004-03-24
US20090167113A1 (en) 2009-07-02

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