ATE378617T1 - Elektrisch drehbarer mikrospiegel oder mikrolinse - Google Patents

Elektrisch drehbarer mikrospiegel oder mikrolinse

Info

Publication number
ATE378617T1
ATE378617T1 AT04787320T AT04787320T ATE378617T1 AT E378617 T1 ATE378617 T1 AT E378617T1 AT 04787320 T AT04787320 T AT 04787320T AT 04787320 T AT04787320 T AT 04787320T AT E378617 T1 ATE378617 T1 AT E378617T1
Authority
AT
Austria
Prior art keywords
micro
mirror
electrically rotatable
lens
electrode
Prior art date
Application number
AT04787320T
Other languages
English (en)
Inventor
Fabien Filhol
Claire Divoux
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE378617T1 publication Critical patent/ATE378617T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
AT04787320T 2003-09-08 2004-09-07 Elektrisch drehbarer mikrospiegel oder mikrolinse ATE378617T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0350508A FR2859541B1 (fr) 2003-09-08 2003-09-08 Micro-miroir actionnable electriquement en rotation

Publications (1)

Publication Number Publication Date
ATE378617T1 true ATE378617T1 (de) 2007-11-15

Family

ID=34178989

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04787320T ATE378617T1 (de) 2003-09-08 2004-09-07 Elektrisch drehbarer mikrospiegel oder mikrolinse

Country Status (7)

Country Link
US (1) US7408695B2 (de)
EP (1) EP1664896B1 (de)
JP (1) JP4435164B2 (de)
AT (1) ATE378617T1 (de)
DE (1) DE602004010156T2 (de)
FR (1) FR2859541B1 (de)
WO (1) WO2005026814A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4550653B2 (ja) * 2005-04-15 2010-09-22 富士通株式会社 マイクロ可動素子および光スイッチング装置
FR2887537B1 (fr) * 2005-06-23 2007-09-07 Commissariat Energie Atomique Actionneur electrostatique, dispositif comportant de tels actionneurs, microsysteme comportant un tel dispositif et procede de realisation d'un tel actionneur
JP4895196B2 (ja) * 2007-01-10 2012-03-14 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2009063637A (ja) * 2007-09-04 2009-03-26 Fujifilm Corp 光走査プローブおよび光走査プローブ装置並びに光走査プローブの制御方法
EP2107038B1 (de) * 2008-03-31 2012-05-16 Imec Elektrostatisch betätigbare MEMS-Vorrichtung mit verringerter Substrataufladung
US9025234B2 (en) * 2009-01-22 2015-05-05 E Ink California, Llc Luminance enhancement structure with varying pitches
US9269536B2 (en) * 2012-04-17 2016-02-23 Varian Semiconductor Equipment Associates, Inc. Double ended electrode manipulator
JP2020003629A (ja) * 2018-06-28 2020-01-09 パイオニア株式会社 光走査装置
JP2023182992A (ja) * 2022-06-15 2023-12-27 セイコーエプソン株式会社 デバイス構造、デバイス構造の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
US6496612B1 (en) * 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
US6632374B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a silicon on insulator substrate
US6735004B1 (en) * 2001-03-15 2004-05-11 Nanogear, Inc. Rotatable counterbalanced actuator

Also Published As

Publication number Publication date
JP4435164B2 (ja) 2010-03-17
WO2005026814A1 (fr) 2005-03-24
DE602004010156T2 (de) 2008-09-04
JP2007505335A (ja) 2007-03-08
US20070091406A1 (en) 2007-04-26
EP1664896A1 (de) 2006-06-07
FR2859541B1 (fr) 2005-10-14
DE602004010156D1 (de) 2007-12-27
EP1664896B1 (de) 2007-11-14
FR2859541A1 (fr) 2005-03-11
US7408695B2 (en) 2008-08-05

Similar Documents

Publication Publication Date Title
BR0316409A (pt) Relé miniaturizado e usos correspondentes
ATE533171T1 (de) Mikro-elektromechanischer systemschalter
EP1397722B1 (de) Positionierung einer kameralinse unter verwendung eines elektroaktiven geräts
ATE378617T1 (de) Elektrisch drehbarer mikrospiegel oder mikrolinse
ATE365372T1 (de) Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters
DE60320730D1 (de) 2-D Stellelement und dazugehöriges Herstellungsverfahren
DE60302756D1 (de) HF MEMS Schalter
EP1288918A3 (de) Piezoektrischer Betätiger
MY136196A (en) Push-button switch
DK1192630T3 (da) Elektrisk omskifteranordning
JP5622168B2 (ja) アクチュエーター
JP2004053839A (ja) 光スイッチ装置
JP4626281B2 (ja) 駆動装置および駆動方法
JP2002287045A5 (de)
JP2011223843A (ja) アクチュエーター及びアクチュエーターの駆動方法
JP2964248B1 (ja) 真空可変コンデンサにおける静電容量の制御方法とこれを用いた真空可変コンデンサ
WO2005078752A8 (fr) Dispositif de type microsysteme electromecanique a film mince piezoelectrique
US20080074001A1 (en) Ion conducting actuator apparatus and optical diaphragm apparatus
DE60211462D1 (de) Pyrotechnischer elektrischer Anzünder und Montageverfahren
JP2009231997A (ja) イヤホン
ATE515781T1 (de) Schaltereinheit
JP3262580B2 (ja) 放電加工用電極送り装置
ATE349765T1 (de) Elektrisches schaltermodul
JP2007058107A (ja) マイクロミラー素子及び可動構造
CN1657338B (zh) 可调节的头灯

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties