ATE381523T1 - Gegenstand umfassend ein silizium enthaltendes substrat und eine hafniumoxid enthaltende sperrschicht an der oberfläche - Google Patents

Gegenstand umfassend ein silizium enthaltendes substrat und eine hafniumoxid enthaltende sperrschicht an der oberfläche

Info

Publication number: ATE381523T1
Authority: AT; Austria
Prior art keywords: barrier layer; hafnium oxide; item; layer containing; silicon
Prior art date: 2004-05-13

Application number

AT05252382T

Other languages

English (en)

Inventor

Tania Bhatia

Ellen Y Sun

Original Assignee

United Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-05-13

Filing date

2005-04-15

Publication date

2008-01-15

2005-04-15 Application filed by United Technologies Corp filed Critical United Technologies Corp

2008-01-15 Application granted granted Critical

2008-01-15 Publication of ATE381523T1 publication Critical patent/ATE381523T1/de

Links

229910052710 silicon Inorganic materials 0.000 title abstract 3
239000010703 silicon Substances 0.000 title abstract 3
230000004888 barrier function Effects 0.000 title abstract 2
229910000449 hafnium oxide Inorganic materials 0.000 title abstract 2
WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 title abstract 2
239000000758 substrate Substances 0.000 title abstract 2
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
230000015572 biosynthetic process Effects 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5042—Zirconium oxides or zirconates; Hafnium oxides or hafnates
- C04B41/5044—Hafnates
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
- C02F1/002—Processes for the treatment of water whereby the filtration technique is of importance using small portable filters for producing potable water, e.g. personal travel or emergency equipment, survival kits, combat gear
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/70—Treatment of water, waste water, or sewage by reduction
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/46—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with organic materials
- C04B41/48—Macromolecular compounds
- C04B41/4826—Polyesters
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2307/00—Location of water treatment or water treatment device
- C02F2307/02—Location of water treatment or water treatment device as part of a bottle
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/21—Oxide ceramics
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/22—Non-oxide ceramics
- F05D2300/222—Silicon

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Organic Chemistry (AREA)
Materials Engineering (AREA)
Structural Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Chemical Kinetics & Catalysis (AREA)
Inorganic Chemistry (AREA)
Hydrology & Water Resources (AREA)
Water Supply & Treatment (AREA)
Environmental & Geological Engineering (AREA)
Life Sciences & Earth Sciences (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
General Engineering & Computer Science (AREA)
Health & Medical Sciences (AREA)
Medicinal Chemistry (AREA)
Laminated Bodies (AREA)
Turbine Rotor Nozzle Sealing (AREA)
Wrappers (AREA)

AT05252382T 2004-05-13 2005-04-15 Gegenstand umfassend ein silizium enthaltendes substrat und eine hafniumoxid enthaltende sperrschicht an der oberfläche ATE381523T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US10/846,968 US20050255648A1 (en)	2004-05-13	2004-05-13	Silicon based substrate hafnium oxide top environmental/thermal top barrier layer and method for preparing

Publications (1)

Publication Number	Publication Date
ATE381523T1 true ATE381523T1 (de)	2008-01-15

Family

ID=34940868

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT05252382T ATE381523T1 (de)	2004-05-13	2005-04-15	Gegenstand umfassend ein silizium enthaltendes substrat und eine hafniumoxid enthaltende sperrschicht an der oberfläche

Country Status (8)

Country	Link
US (1)	US20050255648A1 (de)
EP (1)	EP1595859B1 (de)
JP (1)	JP2005325014A (de)
KR (1)	KR20060047463A (de)
AT (1)	ATE381523T1 (de)
CA (1)	CA2504264A1 (de)
DE (1)	DE602005003866T2 (de)
TW (1)	TW200539245A (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7429424B2 (en) *	2004-12-06	2008-09-30	General Electric Company	Sintering resistant, low conductivity, high stability thermal barrier coating/environmental barrier coating system for a ceramic-matrix composite (CMC) article to improve high temperature capability
US7476453B2 (en) *	2004-12-06	2009-01-13	General Electric Company	Low thermal conductivity thermal barrier coating system and method therefor
US7364807B2 (en) *	2004-12-06	2008-04-29	General Electric Company	Thermal barrier coating/environmental barrier coating system for a ceramic-matrix composite (CMC) article to improve high temperature capability
US7326468B2 (en) *	2005-01-21	2008-02-05	General Electric Company	Thermal/environmental barrier coating for silicon-comprising materials
US20070292624A1 (en) *	2005-06-28	2007-12-20	General Electric Company	Low conductivity, thermal barrier coating system for ceramic matrix composite (CMC) articles
WO2007098152A2 (en) *	2006-02-20	2007-08-30	Lee Kang N	Article including enviromental barrier coating system
US20070207330A1 (en) *	2006-03-01	2007-09-06	Sonia Tulyani	Adhesive protective coatings, non-line of sight methods for their preparation, and coated articles
US20090186237A1 (en)	2008-01-18	2009-07-23	Rolls-Royce Corp.	CMAS-Resistant Thermal Barrier Coatings
US20090324930A1 (en) *	2008-06-25	2009-12-31	United Technologies Corporation	Protective coatings for silicon based substrates with improved adhesion
WO2010039699A2 (en) *	2008-09-30	2010-04-08	Rolls-Royce Corporation	Coating including a rare earth silicate-based layer including a second phase
JP5620577B2 (ja)	2010-07-23	2014-11-05	ロールス−ロイスコーポレイション	Ｃｍａｓ耐性遮熱コーティング層を含む遮熱コーティング
US20140261080A1 (en)	2010-08-27	2014-09-18	Rolls-Royce Corporation	Rare earth silicate environmental barrier coatings
US20160153288A1 (en) *	2013-03-15	2016-06-02	General Electric Company	Recession resistant ceramic matrix composites and environmental barrier coatings
US20160160664A1 (en) *	2013-03-15	2016-06-09	General Electric Company	Recession resistant ceramic matrix composites and environmental barrier coatings
US10329205B2 (en)	2014-11-24	2019-06-25	Rolls-Royce Corporation	Bond layer for silicon-containing substrates
SG10201702694WA (en) *	2016-06-23	2018-01-30	Rolls Royce Corp	Joint surface coatings for ceramic components
US20190017177A1 (en)	2017-07-17	2019-01-17	Rolls-Royce Corporation	Thermal barrier coatings for components in high-temperature mechanical systems
US11655543B2 (en)	2017-08-08	2023-05-23	Rolls-Royce Corporation	CMAS-resistant barrier coatings
US10319817B2 (en)	2017-09-11	2019-06-11	International Business Machines Corporation	Lattice matched epitaxial oxide layer for a super steep retrograde well
US10851656B2 (en)	2017-09-27	2020-12-01	Rolls-Royce Corporation	Multilayer environmental barrier coating
EP4353702A3 (de)	2018-08-17	2024-11-20	RTX Corporation	Beschichtungsreparatur für substrate aus keramischem matrixverbundstoff (cmc)
CN108950463B (zh) *	2018-08-24	2020-08-04	中国航空制造技术研究院	一种高温环境障碍涂层结构及其制备方法
KR102197552B1 (ko) *	2018-12-18	2020-12-31	한국세라믹기술원	치밀화된 탑 코팅을 포함한 비산화물 기판 및 이의 제조 방법
US11686208B2 (en) *	2020-02-06	2023-06-27	Rolls-Royce Corporation	Abrasive coating for high-temperature mechanical systems
US20230313385A1 (en) *	2022-04-01	2023-10-05	Raytheon Technologies Corporation	Environmental barrier coating

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5562998A (en) *	1994-11-18	1996-10-08	Alliedsignal Inc.	Durable thermal barrier coating
US6924040B2 (en) *	1996-12-12	2005-08-02	United Technologies Corporation	Thermal barrier coating systems and materials
WO2000028109A1 (en) *	1998-11-08	2000-05-18	Nkk Corporation	Surface treated steel sheet having excellent corrosion resistance and method for producing the same
US6607852B2 (en) *	2001-06-27	2003-08-19	General Electric Company	Environmental/thermal barrier coating system with silica diffusion barrier layer
JP2003179049A (ja) *	2001-12-11	2003-06-27	Matsushita Electric Ind Co Ltd	絶縁膜形成方法、半導体装置及びその製造方法
US6759151B1 (en) *	2002-05-22	2004-07-06	The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration	Multilayer article characterized by low coefficient of thermal expansion outer layer
US6733908B1 (en) *	2002-07-08	2004-05-11	The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration	Multilayer article having stabilized zirconia outer layer and chemical barrier layer
US7108925B2 (en) *	2003-09-22	2006-09-19	Siemens Power Generation, Inc.	High temperature insulation utilizing zirconia-hafnia

2004
- 2004-05-13 US US10/846,968 patent/US20050255648A1/en not_active Abandoned
2005
- 2005-04-12 JP JP2005114698A patent/JP2005325014A/ja active Pending
- 2005-04-14 CA CA002504264A patent/CA2504264A1/en not_active Abandoned
- 2005-04-15 DE DE602005003866T patent/DE602005003866T2/de not_active Expired - Lifetime
- 2005-04-15 AT AT05252382T patent/ATE381523T1/de not_active IP Right Cessation
- 2005-04-15 EP EP05252382A patent/EP1595859B1/de not_active Expired - Lifetime
- 2005-04-20 TW TW094112598A patent/TW200539245A/zh unknown
- 2005-04-26 KR KR1020050034503A patent/KR20060047463A/ko not_active Abandoned

Also Published As

Publication number	Publication date
EP1595859A2 (de)	2005-11-16
TW200539245A (en)	2005-12-01
DE602005003866T2 (de)	2008-12-11
US20050255648A1 (en)	2005-11-17
KR20060047463A (ko)	2006-05-18
EP1595859A3 (de)	2006-05-31
JP2005325014A (ja)	2005-11-24
DE602005003866D1 (de)	2008-01-31
CA2504264A1 (en)	2005-11-13
EP1595859B1 (de)	2007-12-19

Legal Events

Date	Code	Title	Description
2008-06-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties

Publication	Publication Date	Title
ATE381523T1 (de)	2008-01-15	Gegenstand umfassend ein silizium enthaltendes substrat und eine hafniumoxid enthaltende sperrschicht an der oberfläche
EP1323690A3 (de)	2004-01-02	Barriereschicht für siliziumhaltiges Substrat
WO2004076704A3 (en)	2004-12-16	Thermal barrier coating having low thermal conductivity
EP2171771A4 (de)	2015-12-02	Ein auf kohlenstoff basierendes substrat enthaltende ingaaln-leuchtanordnung und verfahren zu ihrer herstellung
EP1972598A4 (de)	2011-11-02	Siliciumdioixd-mikrohohlteilchen, zusammensetzung zur bildung einer transparenten beschichtung damit und substrat mit transparenter beschichtung
EP1416069A4 (de)	2007-07-11	Organisches halbleiterelement
GB2500361A (en)	2013-09-25	Organic electronic device structures and fabrication methods
DE602005018303D1 (de)	2010-01-28	Wärmedämmschicht
WO2005022639A3 (en)	2006-01-19	Gallium nitride material devices and methods of forming the same
FR2924274B1 (fr)	2012-11-30	Substrat porteur d'une electrode, dispositif electroluminescent organique l'incorporant, et sa fabrication
ATE545152T1 (de)	2012-02-15	Durchkontaktierung durch einen wafer mit niedrigem widerstand
EP1437395A3 (de)	2005-08-31	Organische elektrolumineszierende Vorrichtung
EP1905103A4 (de)	2011-01-19	Leuchtdiode mit einem thermisch leitfähigen substrat und herstellungsverfahren dafür
DE60220230D1 (de)	2007-07-05	Herstellungsverfahren eines halbleiterbauelements
EP1829122A4 (de)	2010-08-25	Nitrid-halbleiter-lichtemissionsbauelement und herstellungsverfahren dafür
EP1513198A4 (de)	2010-02-24	Halbleitersubstratherstellungsverfahren und halbleiterbauelementeherstellungsverfahren und durch die verfahren hergestelltes halbleitersubstrat und halbleiterbauelement
EP2101365A4 (de)	2011-06-08	Organische elektrolumineszenzvorrichtung, anzeige und beleuchtungsvorrichtung
EP1898473A4 (de)	2013-11-20	Kapselungsstruktur eines halbleiter-leuchtbauelements
DE60201329D1 (de)	2004-10-28	Keramikbauteil und Herstellungsverfahren
EP1829121A4 (de)	2010-12-01	Nitrid-halbleiter-lichtemissionsbauelement und herstellungsverfahren dafür
SE0402162D0 (sv)	2004-09-09	Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same
ATE477568T1 (de)	2010-08-15	Flexible display-einrichtung
EP2360746A4 (de)	2015-12-16	Verfahren zur herstellung eines galliumoxidsubstrats, leuchtbauelement und verfahren zur herstellung des leuchtbauelements
DE60217247D1 (de)	2007-02-15	Gestapelte Schicht, isolierender Film und Substrate für Halbleiter
TW200705582A (en)	2007-02-01	Semiconductor device and manufacturing method therefor