ATE384885T1 - Gaslagersystem - Google Patents

Gaslagersystem

Info

Publication number
ATE384885T1
ATE384885T1 AT03813215T AT03813215T ATE384885T1 AT E384885 T1 ATE384885 T1 AT E384885T1 AT 03813215 T AT03813215 T AT 03813215T AT 03813215 T AT03813215 T AT 03813215T AT E384885 T1 ATE384885 T1 AT E384885T1
Authority
AT
Austria
Prior art keywords
sup
cavity
gas
bearing
storage system
Prior art date
Application number
AT03813215T
Other languages
English (en)
Inventor
Theo Ruijl
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE384885T1 publication Critical patent/ATE384885T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Sampling And Sample Adjustment (AREA)
AT03813215T 2002-12-18 2003-11-18 Gaslagersystem ATE384885T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02080366 2002-12-18

Publications (1)

Publication Number Publication Date
ATE384885T1 true ATE384885T1 (de) 2008-02-15

Family

ID=32524051

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03813215T ATE384885T1 (de) 2002-12-18 2003-11-18 Gaslagersystem

Country Status (7)

Country Link
US (1) US7284907B2 (de)
EP (1) EP1576299B1 (de)
JP (1) JP2006510856A (de)
AT (1) ATE384885T1 (de)
AU (1) AU2003277491A1 (de)
DE (1) DE60318898T2 (de)
WO (1) WO2004055400A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0612979D0 (en) 2006-06-30 2006-08-09 Renishaw Plc Gas bearing fabrication method
DE102007054334A1 (de) * 2007-11-14 2009-05-20 BSH Bosch und Siemens Hausgeräte GmbH Aerostatisches Lager und Verfahren zu dessen Herstellung
GB2467168B (en) * 2009-01-26 2011-03-16 Air Bearings Ltd Gas bearing and method of manufacturing the same
JP5961952B2 (ja) 2011-09-16 2016-08-03 オイレス工業株式会社 静圧気体軸受及びその製造方法
BR102013003056A2 (pt) * 2013-02-07 2014-09-16 Whirlpool Sa Restritor de fluxo e compressor de gás
US9151369B2 (en) * 2013-06-17 2015-10-06 Korea Institute Of Machinery & Materials Aerostatic air bearing, assembling method thereof, and aerostatic lead screw actuator using the same
KR102278769B1 (ko) * 2014-06-24 2021-07-20 엘지전자 주식회사 리니어 압축기
TWI571571B (zh) * 2015-05-22 2017-02-21 大銀微系統股份有限公司 空氣軸承改良構造
WO2021112759A1 (en) * 2019-12-07 2021-06-10 Akribis Systems Pte. Ltd. Ultra-low profile aerostatic bearing and the method of manufacturing the same
KR102389036B1 (ko) * 2020-09-18 2022-04-21 엘지전자 주식회사 리니어 압축기

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3981546A (en) * 1969-09-29 1976-09-21 Sperman Jacob H Air bearing construction
JPS4833296B1 (de) * 1970-01-21 1973-10-13
JPS566919A (en) * 1979-06-26 1981-01-24 Canon Inc Fluid bearing
DE3725854C2 (de) 1986-08-06 1996-12-05 Dea Spa Luftkissen-Lagerschuh
US5518360A (en) * 1990-11-16 1996-05-21 Kabushiki-Kaisha Watanabe Shoko Wafer carrying device and wafer carrying method
US5106204A (en) * 1991-03-25 1992-04-21 Dunham James L High unit load gas bearing
JP3860253B2 (ja) * 1996-04-30 2006-12-20 黒田精工株式会社 静圧気体軸受
US5989444A (en) * 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same
US6164827A (en) * 1998-04-29 2000-12-26 Eitzenberger; Hans Aerostatic airbearing
JP2002054634A (ja) * 2000-08-07 2002-02-20 Nippon Steel Corp 静圧気体軸受

Also Published As

Publication number Publication date
US20060147130A1 (en) 2006-07-06
EP1576299B1 (de) 2008-01-23
DE60318898T2 (de) 2009-01-22
EP1576299A1 (de) 2005-09-21
DE60318898D1 (de) 2008-03-13
WO2004055400A1 (en) 2004-07-01
AU2003277491A1 (en) 2004-07-09
JP2006510856A (ja) 2006-03-30
US7284907B2 (en) 2007-10-23

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Legal Events

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