ATE389882T1 - Mehrachsiger kapazitiver wandler - Google Patents

Mehrachsiger kapazitiver wandler

Info

Publication number
ATE389882T1
ATE389882T1 AT05746188T AT05746188T ATE389882T1 AT E389882 T1 ATE389882 T1 AT E389882T1 AT 05746188 T AT05746188 T AT 05746188T AT 05746188 T AT05746188 T AT 05746188T AT E389882 T1 ATE389882 T1 AT E389882T1
Authority
AT
Austria
Prior art keywords
capacitive transducer
capacitor plates
capacitors
plane
axis capacitive
Prior art date
Application number
AT05746188T
Other languages
English (en)
Inventor
Felix Beyeler
Bradley Nelson
Yu Sun
Original Assignee
Eth Zuerich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eth Zuerich filed Critical Eth Zuerich
Application granted granted Critical
Publication of ATE389882T1 publication Critical patent/ATE389882T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Static Random-Access Memory (AREA)
  • Amplifiers (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
AT05746188T 2004-06-09 2005-05-27 Mehrachsiger kapazitiver wandler ATE389882T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US57807904P 2004-06-09 2004-06-09

Publications (1)

Publication Number Publication Date
ATE389882T1 true ATE389882T1 (de) 2008-04-15

Family

ID=34969766

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05746188T ATE389882T1 (de) 2004-06-09 2005-05-27 Mehrachsiger kapazitiver wandler

Country Status (5)

Country Link
US (1) US7712366B2 (de)
EP (1) EP1756591B1 (de)
AT (1) ATE389882T1 (de)
DE (1) DE602005005478T2 (de)
WO (1) WO2005121812A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2895801B1 (fr) * 2005-12-29 2008-09-19 Sercel Sa Systeme d'acquisition de donnees sismiques a six composantes
WO2007074168A1 (fr) * 2005-12-29 2007-07-05 Sercel Systeme d'acquisition de donnees sismiques a six composantes
EP2060871A3 (de) * 2007-11-19 2012-12-26 Hitachi Ltd. Trägheitssensor
DE102008001442A1 (de) 2008-04-29 2009-11-05 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements
WO2010003149A1 (en) * 2008-07-03 2010-01-07 Hysitron Incorporated Micromachined comb drive for quantitative nanoindentation
US9335240B2 (en) * 2008-07-03 2016-05-10 Hysitron Incorporated Method of measuring an interaction force
WO2010112242A1 (en) 2009-03-31 2010-10-07 Femtotools Gmbh Micro force sensor package for sub-millinewton electromechanical measurements
US9032777B2 (en) * 2011-09-16 2015-05-19 Robert Bosch Gmbh Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation
ES2546908T3 (es) 2011-10-04 2015-09-29 Femtotools Ag Sensor de fuerza de MEMS capacitivo de orden inferior a milinewton para someter a ensayo mecánico en un microscopio
WO2014110682A1 (en) 2013-01-18 2014-07-24 Robotiq Inc. Force/torque sensor, apparatus and method for robot teaching and operation
RU2541415C1 (ru) * 2013-09-26 2015-02-10 Открытое акционерное общество "Российская корпорация ракетно-космического приборостроения и информационных систем" (ОАО "Российские космические системы") Микросистемный ёмкостной датчик измерения физических величин
US9638654B2 (en) 2013-11-25 2017-05-02 Oil States Industries, Inc. Method and system for health monitoring of composite elastomeric flexible elements
US9535086B2 (en) * 2014-06-24 2017-01-03 Femtotools Ag Interface of a microfabricated scanning force sensor for combined force and position sensing
EP3009822B1 (de) 2014-10-16 2017-06-21 Nokia Technologies OY Verformbare Vorrichtung und Verfahren
EP3010315A1 (de) 2014-10-16 2016-04-20 Nokia Technologies OY Verformbare Vorrichtung und Verfahren
FR3039280B1 (fr) 2015-07-22 2019-05-17 Vmicro S.A.S Sonde pour microscopie a force atomique a faible encombrement et microscope a force atomique comprenant une telle sonde
WO2018112041A1 (en) * 2016-12-13 2018-06-21 The Regents Of The University Of California System and method for robust and low-cost multi-axis force sensor
DE102020126414B3 (de) 2020-10-08 2021-12-09 Bundesrepublik Deutschland, Vertreten Durch Das Bundesministerium Für Wirtschaft Und Energie, Dieses Vertreten Durch Den Präsidenten Der Physikalisch-Technischen Bundesanstalt Rastersondenmikroskop und Rastersondenmikroskopsystem sowie Verfahren zum Untersuchen einer Prüflingsoberfläche
CN113237595B (zh) * 2021-05-08 2022-04-08 杭州电子科技大学 一种二维解耦力触觉传感器及mems制备方法
CN116858403A (zh) * 2023-06-12 2023-10-10 武汉大学 一种微力测量装置和方法
CN119321839B (zh) * 2024-09-25 2025-11-25 电子科技大学 一种光机械式多轴扭矩传感器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1129409B (it) * 1980-03-07 1986-06-04 Fiat Ricerche Trasduttore a sei gradi di liberta per convertire in segnali elettrici le forze ed i momenti applicati ad un organo mobile particolarmente al braccio mobile di un robot
US4719538A (en) * 1986-12-02 1988-01-12 Cox John D Force responsive capacitive transducer
US4860232A (en) * 1987-04-22 1989-08-22 Massachusetts Institute Of Technology Digital technique for precise measurement of variable capacitance
JPH05215627A (ja) * 1992-02-04 1993-08-24 Kazuhiro Okada 多次元方向に関する力・加速度・磁気の検出装置
US5806365A (en) * 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
JP3262013B2 (ja) * 1997-02-24 2002-03-04 三菱電機株式会社 容量型センサインターフェース回路
JP2001174264A (ja) * 1999-12-21 2001-06-29 Murata Mfg Co Ltd 共振素子およびその振動調整方法
US6901801B2 (en) * 2003-07-28 2005-06-07 The Boeing Company Capacitance acceleration derivative detector
US7305883B2 (en) * 2005-10-05 2007-12-11 The Board Of Trustees Of The Leland Stanford Junior University Chemical micromachined microsensors
US7528755B2 (en) * 2007-09-06 2009-05-05 Infineon Technologies Ag Sigma-delta modulator for operating sensors

Also Published As

Publication number Publication date
EP1756591B1 (de) 2008-03-19
US20090007668A1 (en) 2009-01-08
DE602005005478T2 (de) 2009-04-23
EP1756591A1 (de) 2007-02-28
WO2005121812A1 (en) 2005-12-22
US7712366B2 (en) 2010-05-11
DE602005005478D1 (de) 2008-04-30

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Legal Events

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