ATE394345T1 - Verfahren zum fertigen von vergrabenen mikrokanälen und mikrovorrichtung mit solchen mikrokanälen - Google Patents

Verfahren zum fertigen von vergrabenen mikrokanälen und mikrovorrichtung mit solchen mikrokanälen

Info

Publication number
ATE394345T1
ATE394345T1 AT06354008T AT06354008T ATE394345T1 AT E394345 T1 ATE394345 T1 AT E394345T1 AT 06354008 T AT06354008 T AT 06354008T AT 06354008 T AT06354008 T AT 06354008T AT E394345 T1 ATE394345 T1 AT E394345T1
Authority
AT
Austria
Prior art keywords
microchannels
layer
micro device
stack
microchannel
Prior art date
Application number
AT06354008T
Other languages
English (en)
Inventor
Marc Plissonnier
Yves Fouillet
Ludovic Poupinet
Jean-Yves Laurent
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE394345T1 publication Critical patent/ATE394345T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502723—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by venting arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0258—Collectors; Separators, e.g. bipolar separators; Interconnectors characterised by the configuration of channels, e.g. by the flow field of the reactant or coolant
    • H01M8/026—Collectors; Separators, e.g. bipolar separators; Interconnectors characterised by the configuration of channels, e.g. by the flow field of the reactant or coolant characterised by grooves, e.g. their pitch or depth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1097—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00851—Additional features
    • B01J2219/00853—Employing electrode arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00873—Heat exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00905—Separation
    • B01J2219/00907—Separation using membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0223—Composites
    • H01M8/0228—Composites in the form of layered or coated products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1286—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Sustainable Development (AREA)
  • General Chemical & Material Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hematology (AREA)
  • General Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Sustainable Energy (AREA)
  • Electrochemistry (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Chemical Vapour Deposition (AREA)
  • Fuel Cell (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
AT06354008T 2005-03-29 2006-03-08 Verfahren zum fertigen von vergrabenen mikrokanälen und mikrovorrichtung mit solchen mikrokanälen ATE394345T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0503029A FR2883860B1 (fr) 2005-03-29 2005-03-29 Procede de fabrication de micro-canaux enterres et micro-dispositif comprenant de tels micro-canaux.

Publications (1)

Publication Number Publication Date
ATE394345T1 true ATE394345T1 (de) 2008-05-15

Family

ID=35276565

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06354008T ATE394345T1 (de) 2005-03-29 2006-03-08 Verfahren zum fertigen von vergrabenen mikrokanälen und mikrovorrichtung mit solchen mikrokanälen

Country Status (7)

Country Link
US (1) US20070077771A1 (de)
EP (1) EP1707531B1 (de)
JP (1) JP2007007842A (de)
AT (1) ATE394345T1 (de)
DE (1) DE602006001066D1 (de)
ES (1) ES2307276T3 (de)
FR (1) FR2883860B1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2930457B1 (fr) * 2008-04-24 2010-06-25 Commissariat Energie Atomique Procede de fabrication de microcanaux reconfigurables
CN102905836B (zh) * 2010-03-26 2016-05-04 沃特世科技公司 具有扩散结合且表面改性的构件的层析设备
ES2603785B1 (es) * 2015-09-01 2017-12-12 Bsh Electrodomésticos España, S.A. Componente de aparato doméstico que comprende un elemento base
CN107021449B (zh) * 2016-04-19 2018-12-21 北京航空航天大学 制备有序微观结构和可控化学组成界面的制备方法及其应用
WO2019014240A1 (en) * 2017-07-10 2019-01-17 President And Fellows Of Harvard College RADIATION COOLING DEVICES AND METHODS OF FORMING THE SAME
US11905163B2 (en) * 2019-04-03 2024-02-20 Boe Technology Group Co., Ltd. Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device
CN110191760B (zh) * 2019-04-16 2022-09-27 京东方科技集团股份有限公司 微通道器件及其制造方法、微流控系统
CN111841673B (zh) * 2020-07-20 2024-08-06 厦门大学 一种可直接插入微电极的微小通道结构及其制备方法以及应用
WO2024225477A1 (en) * 2023-04-27 2024-10-31 Okinawa Institute Of Science And Technology School Corporation Channel element, package, drug delivery device, biomolecule testing apparatus, and channel forming method
FR3151848A1 (fr) 2023-08-04 2025-02-07 Commissariat à l'Energie Atomique et aux Energies Alternatives Procédé de micro- ou nano-structuration surfacique d’un matériau

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63285930A (ja) * 1987-05-18 1988-11-22 Sanyo Electric Co Ltd 超微細管の形成方法
JP2833881B2 (ja) * 1991-07-11 1998-12-09 前澤化成工業株式会社 蓋受け装置
JP3233189B2 (ja) * 1995-09-22 2001-11-26 セイコーエプソン株式会社 インクジェット式記録ヘッド、及びその製造方法
CA2272326C (en) * 1996-11-21 2005-03-29 Carole Rossi Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine
US6107380A (en) * 1998-06-25 2000-08-22 General Electric Company Fluorosilicone primer free of volatile organic compounds
FR2785184B1 (fr) * 1998-10-28 2002-05-10 Oreal Composition cosmetique a application topique, contenant au moins une poly(cycloolefine) amorphe ou un melange de poly(cycloolefines) amorphes, et leurs utilisations
JP3820041B2 (ja) * 1998-12-18 2006-09-13 大日本印刷株式会社 透明バリアフィルムとこれを用いた積層材および包装用容器
US6096656A (en) * 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride
US6121131A (en) * 1999-08-31 2000-09-19 Micron Technology, Inc. Method for forming conductive structures
JP2001076599A (ja) * 1999-09-02 2001-03-23 Tokai Rika Co Ltd マイクロリードスイッチ、マイクロリードスイッチ体及びマイクロリードスイッチ部材の製造方法
GB2368809B (en) * 2000-09-15 2004-09-29 Norchip As Microfabricated reaction chamber system
DE10064456B4 (de) * 2000-12-21 2004-05-13 Martin-Luther-Universität Halle-Wittenberg Verfahren zur maskenlosen Formation von Metall-Nanostrukturen in dünnen dielektrischen Schichten mittels Bestrahlung mit ultrakurzen Laserimpulsen
JP3745648B2 (ja) * 2001-06-06 2006-02-15 日本電信電話株式会社 微細構造の製造方法
JP4296717B2 (ja) * 2001-03-28 2009-07-15 パナソニック株式会社 光学的情報記録媒体とその製造方法
JP2003011503A (ja) * 2001-04-27 2003-01-15 Ricoh Co Ltd 光記録媒体
US20030071269A1 (en) * 2001-10-15 2003-04-17 Tseng Ampere A. Apparatus and method for laser selective bonding technique for making sealed or enclosed microchannel structures
JP2004167607A (ja) * 2002-11-15 2004-06-17 Tama Tlo Kk マイクロ流体素子とその製造方法
JP2005025974A (ja) * 2003-06-30 2005-01-27 Nissan Motor Co Ltd 高分子型燃料電池とその製造方法

Also Published As

Publication number Publication date
JP2007007842A (ja) 2007-01-18
EP1707531A1 (de) 2006-10-04
EP1707531B1 (de) 2008-05-07
FR2883860B1 (fr) 2007-06-08
US20070077771A1 (en) 2007-04-05
FR2883860A1 (fr) 2006-10-06
DE602006001066D1 (de) 2008-06-19
ES2307276T3 (es) 2008-11-16

Similar Documents

Publication Publication Date Title
Khan Malek Laser processing for bio-microfluidics applications (part I)
Prakash et al. Fabrication of microchannels: a review
Isiksacan et al. Rapid fabrication of microfluidic PDMS devices from reusable PDMS molds using laser ablation
De Marco et al. Surface properties of femtosecond laser ablated PMMA
Mohammed et al. Rapid laser prototyping of valves for microfluidic autonomous systems
Sayah et al. Development of novel low temperature bonding technologies for microchip chemical analysis applications
ATE394345T1 (de) Verfahren zum fertigen von vergrabenen mikrokanälen und mikrovorrichtung mit solchen mikrokanälen
Chandesris et al. Uphill motion of droplets on tilted and vertical grooved substrates induced by a wettability gradient
CN113649091A (zh) 一种基于pdms表面的液体自驱动方法及其装置
Jiang et al. A laser microwelding method for assembly of polymer based microfluidic devices
US20070039933A1 (en) System and method of laser dynamic forming
JP2015078928A (ja) 流路デバイスおよびその製造方法
CN116833551A (zh) 用于复合材料钻孔的GHz脉冲串激光光源系统与方法
TW200710055A (en) An inorganic materials fabrication method
Yap et al. Stainless steel pinholes for fast fabrication of high-performance microchip electrophoresis devices by CO2 laser ablation
ATE337380T1 (de) Verfahren zum kleben von substraten unter verwendung einer uv-aktivierbaren klebfolie, sowie eine uv- bestrahlungsvorrichtung.
Zhai et al. Gradient-wettable multiwedge patterned surface for effective transport of droplets against the temperature gradient
JP6181572B2 (ja) 静電チャック用の接着シート及びその製造方法
Pfleging et al. Laser patterning and packaging of CCD-CE-Chips made of PMMA
CN108212229B (zh) 一种聚二甲基硅氧烷三维微流道表面疏水结构成型工艺
US6703189B2 (en) Chemical modification of substrates by photo-ablation under different local atmospheres and chemical environments for the fabrication of microstructures
Locascio et al. Fabrication of polymer microfluidic systems by hot embossing and laser ablation
US20160358759A1 (en) Laser induced plasma micromachining (lipmm)
DK1371482T3 (da) Fremgangsmåde til fremstilling af et tubelaminat
Rizvi et al. Laser micromachining: new developments and applications

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties