ATE396498T1 - Mikro-strukturierter kühler und verwendung dafür - Google Patents

Mikro-strukturierter kühler und verwendung dafür

Info

Publication number
ATE396498T1
ATE396498T1 AT06776247T AT06776247T ATE396498T1 AT E396498 T1 ATE396498 T1 AT E396498T1 AT 06776247 T AT06776247 T AT 06776247T AT 06776247 T AT06776247 T AT 06776247T AT E396498 T1 ATE396498 T1 AT E396498T1
Authority
AT
Austria
Prior art keywords
ranging
channels
base plate
metal foils
cooler
Prior art date
Application number
AT06776247T
Other languages
English (en)
Inventor
Olaf Kurtz
Ralph Herber
Peter Prechtl
Sven Theisen
Markus Hoehn
Original Assignee
Atotech Deutschland Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland Gmbh filed Critical Atotech Deutschland Gmbh
Application granted granted Critical
Publication of ATE396498T1 publication Critical patent/ATE396498T1/de

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16—Constructional details or arrangements
    • G06F1/20—Cooling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
    • F28F3/048—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of ribs integral with the element or local variations in thickness of the element, e.g. grooves, microchannels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/40—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
    • H10W40/47—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/08—Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
    • F28F3/086—Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning having one or more openings therein forming tubular heat-exchange passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • General Physics & Mathematics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
AT06776247T 2005-07-13 2006-07-12 Mikro-strukturierter kühler und verwendung dafür ATE396498T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005033150A DE102005033150A1 (de) 2005-07-13 2005-07-13 Mikrostrukturierter Kühler und dessen Verwendung

Publications (1)

Publication Number Publication Date
ATE396498T1 true ATE396498T1 (de) 2008-06-15

Family

ID=37575524

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06776247T ATE396498T1 (de) 2005-07-13 2006-07-12 Mikro-strukturierter kühler und verwendung dafür

Country Status (9)

Country Link
US (1) US7987899B2 (de)
EP (1) EP1790007B1 (de)
JP (1) JP2009501439A (de)
KR (1) KR20080039413A (de)
CN (1) CN100565856C (de)
AT (1) ATE396498T1 (de)
DE (2) DE102005033150A1 (de)
ES (1) ES2306434T3 (de)
WO (1) WO2007006590A2 (de)

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US7913719B2 (en) 2006-01-30 2011-03-29 Cooligy Inc. Tape-wrapped multilayer tubing and methods for making the same
US8157001B2 (en) 2006-03-30 2012-04-17 Cooligy Inc. Integrated liquid to air conduction module
US7715194B2 (en) 2006-04-11 2010-05-11 Cooligy Inc. Methodology of cooling multiple heat sources in a personal computer through the use of multiple fluid-based heat exchanging loops coupled via modular bus-type heat exchangers
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US8479806B2 (en) * 2007-11-30 2013-07-09 University Of Hawaii Two-phase cross-connected micro-channel heat sink
US20090225514A1 (en) 2008-03-10 2009-09-10 Adrian Correa Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
US9297571B1 (en) 2008-03-10 2016-03-29 Liebert Corporation Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
JP4992808B2 (ja) * 2008-04-16 2012-08-08 トヨタ自動車株式会社 熱交換器の製造方法
US8254422B2 (en) 2008-08-05 2012-08-28 Cooligy Inc. Microheat exchanger for laser diode cooling
US20100071883A1 (en) * 2008-09-08 2010-03-25 Jan Vetrovec Heat transfer device
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US8218320B2 (en) * 2010-06-29 2012-07-10 General Electric Company Heat sinks with C-shaped manifolds and millichannel cooling
DE102010045905B3 (de) * 2010-09-17 2012-03-29 Karlsruher Institut für Technologie Kreuzstrom-Mikrowärmeübertrager
US9212853B2 (en) * 2010-12-24 2015-12-15 Toyota Jidosha Kabushiki Kaisha Cooler
US9245836B2 (en) 2012-06-28 2016-01-26 Soitec Interposers including fluidic microchannels and related structures and methods
US8912643B2 (en) 2012-12-10 2014-12-16 General Electric Company Electronic device cooling with microjet impingement and method of assembly
US20140251585A1 (en) * 2013-03-05 2014-09-11 The Boeing Company Micro-lattice Cross-flow Heat Exchangers for Aircraft
JP6115959B2 (ja) * 2013-12-11 2017-04-19 株式会社フィルテック 流体熱交換装置
JP6676537B2 (ja) 2014-10-30 2020-04-08 東京エレクトロン株式会社 基板載置台
US10837718B2 (en) * 2015-09-18 2020-11-17 T.Rad Co., Ltd. Laminated core type heat sink
US10371462B2 (en) 2015-09-21 2019-08-06 Lockheed Martin Corporation Integrated multi-chamber heat exchanger
US10527362B2 (en) 2015-09-21 2020-01-07 Lockheed Martin Corporation Integrated multi-chamber heat exchanger
US10352632B2 (en) * 2016-05-26 2019-07-16 Northrop Grumman Systems Corporation Heat transfer utilizing vascular composites and field induced forces
US10139168B2 (en) 2016-09-26 2018-11-27 International Business Machines Corporation Cold plate with radial expanding channels for two-phase cooling
EP3700697B1 (de) 2017-10-26 2022-08-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur herstellung von gussteilen mit mikrokanälen
CN107734840B (zh) * 2017-11-29 2023-08-18 中国电子科技集团公司第二十六研究所 基于印制电路板三维微通道阵列液冷冷却结构
JP7047577B2 (ja) * 2018-04-27 2022-04-05 株式会社デンソー 熱交換器
CN110543069A (zh) * 2018-05-28 2019-12-06 中强光电股份有限公司 液冷式散热器
US10553522B1 (en) 2018-08-13 2020-02-04 International Business Machines Corporation Semiconductor microcooler
US10553516B1 (en) 2018-08-13 2020-02-04 International Business Machines Corporation Semiconductor microcooler
US10490480B1 (en) 2018-08-21 2019-11-26 International Business Machines Corporation Copper microcooler structure and fabrication
US11545410B2 (en) * 2018-12-17 2023-01-03 Intel Corporation Enhanced systems and methods for improved heat transfer from semiconductor packages
CN110300509A (zh) * 2019-06-29 2019-10-01 联想(北京)有限公司 一种散热装置
CN111081655B (zh) * 2019-12-19 2021-10-22 青岛歌尔智能传感器有限公司 电子封装结构及其制作方法
CN111632565B (zh) * 2020-05-24 2021-09-03 西安交通大学 一种用于超临界水热合成技术制备纳米粉体的微通道快速冷却装置
CN112435976B (zh) * 2020-11-06 2024-04-16 西安交通大学 基于仿生分形结构的超低流阻微通道散热器及其制造方法
US12593555B2 (en) 2021-05-27 2026-03-31 Amogreentech Co., Ltd. Ceramic substrate with heat sink and manufacturing method thereof
CN114353562B (zh) * 2021-11-30 2024-06-21 中国船舶重工集团公司第七一九研究所 印刷电路板换热器的换热通道结构及印刷电路板换热器
KR102585892B1 (ko) * 2022-04-14 2023-10-06 창원대학교 산학협력단 평면형 열교환 매니폴드 구조를 갖는 반도체 냉각장치
US12087663B2 (en) * 2022-06-29 2024-09-10 Kambix Innovations, Llc Optimization of the thermal performance of the 3D ICs utilizing the integrated chip-size double-layer or multi-layer microchannels
US20240213111A1 (en) * 2022-12-23 2024-06-27 Intel Corporation Configurable micro heat pipe (mhp) and microchannel for improved cooling of glass core substrate
EP4390291A1 (de) * 2022-12-23 2024-06-26 TechN GmbH Vorrichtung, system und verfahren zum kühlen eines prozessors
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JP2003302176A (ja) * 2001-08-07 2003-10-24 Denso Corp 沸騰冷却器
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US7115987B2 (en) * 2003-12-31 2006-10-03 Intel Corporation Integrated stacked microchannel heat exchanger and heat spreader
JP2007127398A (ja) * 2005-10-05 2007-05-24 Seiko Epson Corp 熱交換器、熱交換器の製造方法、液冷システム、光源装置、プロジェクタ、電子デバイスユニット、電子機器
US7537047B2 (en) * 2006-03-23 2009-05-26 Foxconn Technology Co., Ltd. Liquid-cooling heat sink

Also Published As

Publication number Publication date
ES2306434T3 (es) 2008-11-01
US20080196875A1 (en) 2008-08-21
CN100565856C (zh) 2009-12-02
EP1790007B1 (de) 2008-05-21
WO2007006590A3 (en) 2007-03-29
DE602006001286D1 (de) 2008-07-03
JP2009501439A (ja) 2009-01-15
KR20080039413A (ko) 2008-05-07
EP1790007A2 (de) 2007-05-30
CN101218672A (zh) 2008-07-09
DE102005033150A1 (de) 2007-01-25
WO2007006590A2 (en) 2007-01-18
US7987899B2 (en) 2011-08-02

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Legal Events

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